Adsorption platform

Abstract

The utility model discloses an adsorption platform. The adsorption platform comprises a bottom plate; the end plates are arranged at the two ends of the bottom plate respectively, and dust collection holes penetrating through the end plates are formed in one or two of the end plates; the pair of adsorption side plates are arranged between the pair of end plates, one or two of the pair of adsorption side plates are configured to be arranged in a sliding mode in the extending direction of the end plates, vacuum channels are formed in the adsorption side plates, and vacuum holes communicating the vacuum channels with the outside are formed in the adsorption side plates; the pair of supporting plates are arranged on the pair of adsorption side plates correspondingly, and each supporting plate comprises a workpiece supporting face located on the top face; and the suction nozzle is arranged on the adsorption side plate, the suction nozzle is communicated with the vacuum channel, and the suction head end of the suction nozzle at least extends to the workpiece supporting surface. The adsorption platform can meet the requirements of photovoltaic products of different sizes while guaranteeing the machining precision.

Description

Technical Field

[0001] This application relates to the technical field of photovoltaic equipment, and particularly to an adsorption platform. Background Art

[0002] Laser scribing of photovoltaic cells is a key process that uses lasers to create fine lines on photovoltaic cell panels, for creating independent cell units and optimizing current collection. The laser scribing technology of photovoltaic cells is an indispensable part of solar cell manufacturing. It divides the cell panel into independent units through precise laser scribing to enhance cell efficiency and reduce ohmic losses. This technology plays an important role in improving the performance of solar cells and reducing costs, and is a key factor in optimizing the power conversion efficiency by reducing the size of the dead zone.

[0003] During laser scribing operations, photovoltaic products need to be fixed on an adsorption platform. In the existing photovoltaic industry, the product sizes are numerous and vary in size. To ensure processing accuracy, adsorption platforms with adapted sizes need to be developed, resulting in higher processing costs. In addition, to ensure processing accuracy, only the edges of the photovoltaic products contact the platform during processing, and vacuum adsorption is required, and the surface flatness of the adsorption platform is required to be relatively high. The adsorption platform needs to have an internal bottom dust collection function. How to develop an adsorption platform that can adapt to different sizes of photovoltaic products while realizing the above functions is an urgent problem to be solved. Summary of the Utility Model

[0004] The purpose of this application is to provide an adsorption platform to solve the technical problems in the prior art that it is necessary to develop adapted adsorption platforms for different sizes of photovoltaic products, resulting in higher processing costs, and it is difficult for the adsorption platform to adapt to different sizes of photovoltaic products while ensuring processing accuracy.

[0005] To achieve the above purpose, this application provides an adsorption platform, including:

[0006] A bottom plate;

[0007] A pair of end plates, respectively arranged at both ends of the bottom plate, and one or both of the pair of end plates are provided with dust suction holes penetrating the end plates;

[0008] A pair of adsorption side plates, arranged between the pair of end plates, and one or both of the pair of adsorption side plates are configured to be slidably arranged along the extending direction of the end plates. A vacuum channel is formed inside the adsorption side plates, and vacuum holes communicating the vacuum channel with the outside are provided on the adsorption side plates;

[0009] A pair of support plates, respectively arranged on the pair of adsorption side plates, and the support plates include a workpiece support surface located on the top surface;

[0010] The suction nozzle is arranged on the adsorption side plate, the suction nozzle is communicated with the vacuum channel, and the suction head end of the suction nozzle extends at least to the workpiece support surface.

[0011] In one or more embodiments, a chute is arranged on the inner side surface of one end plate of the pair of end plates, and a strip-shaped sliding hole is provided on the other end plate, and the chute and the strip-shaped sliding hole extend along the extending direction of the end plate;

[0012] One or both of the pair of adsorption side plates further include a slider arranged on one end surface and an operating rod arranged on the other end surface. The slider is matched with the chute and is embedded in the chute, and one end of the operating rod is connected to the adsorption side plate, and the other end penetrates through the strip-shaped sliding hole and extends to the outside.

[0013] In one or more embodiments, the support plate is installed on the top surface of the adsorption side plate through leveling bolts.

[0014] In one or more embodiments, the suction nozzle is a bellows suction nozzle, and the suction head end of the suction nozzle extends above the workpiece support surface.

[0015] In one or more embodiments, it further includes a sliding guide rail. The sliding guide rail extends along the extending direction of the end plate and is arranged on the surface of the bottom plate. One or both of the pair of adsorption side plates are slidably installed on the sliding guide rail.

[0016] In one or more embodiments, the vacuum channel includes:

[0017] The main channel extends from one end of the adsorption side plate to the other end;

[0018] A plurality of adsorption channels are arranged in sequence along the extending direction of the adsorption side plate, and one end of each adsorption channel is communicated with the main channel, and the other end extends to the surface of the adsorption side plate and is communicated with one of the suction nozzles;

[0019] At least one joint channel has one end communicated with the main channel and the other end extending to the surface of the adsorption side plate to form the vacuum hole.

[0020] In one or more embodiments, the main channel includes several independent segments, and the vacuum channel includes several joint channels arranged at intervals in sequence along the extending direction of the adsorption side plate. Each joint channel is communicated with one segment of the main channel to divide the workpiece support surface into several independent adsorption areas.

[0021] In one or more embodiments, the vacuum channel of the adsorption side plate further includes a plurality of transfer channels, one end of each transfer channel is communicated with the main channel, and the other end extends to the surface of the adsorption side plate to form a transfer hole;

[0022] The adsorption platform further includes a telescopic pipe connecting the transfer hole of one adsorption side plate and the vacuum hole of the other adsorption side plate.

[0023] In one or more embodiments, a strip groove is provided on the surface of the bottom plate and extends along the extending direction of the end plate. The adsorption platform further includes a transfer joint located at the transfer hole and a vacuum joint located at the vacuum hole. The connected transfer joint and vacuum joint are embedded in a strip groove. The telescopic pipe is arranged in the strip groove, and pipe protection plates are further arranged on both sides of the strip groove on the surface of the bottom plate and extend above the strip groove.

[0024] In one or more embodiments, the main channel includes a plurality of independent segments, and a plurality of strip grooves corresponding to the plurality of segments of the main channel are arranged on the bottom plate.

[0025] Different from the prior art, the beneficial effects of this application are:

[0026] The adsorption platform of this application can adapt to photovoltaic products of different widths by adjusting the position of the adsorption side plate, can adapt to photovoltaic products of different lengths by switching the vacuum joint connected to the vacuum generating device, can realize the bottom dust suction operation of photovoltaic products of different widths by switching the dust suction joint connected to the dust suction device, and can realize the independent leveling of the supporting surfaces of two workpieces through leveling bolts, meeting the requirements of photovoltaic products of different sizes while ensuring the processing accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments recorded in the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0028] Figure 1 is a schematic structural view of an embodiment of the adsorption platform of the present application;

[0029] Figure 2 is a schematic structural view of another perspective of an embodiment of the adsorption platform of the present application;

[0030] Figure 3 is a schematic structural view of an embodiment of the adsorption side plate and the support plate of the present application;

[0031] Figure 4 is a perspective structural schematic diagram of an embodiment of the adsorption side plate of the present application;

[0032] Figure 5 is a top - view structural schematic diagram of an embodiment of the adsorption platform of the present application.

[0033] As shown in the figure:

[0034] Base plate 10; Strip - shaped groove 101; Pipe protection plate 102;

[0035] End plates 20a / b; Slide groove 201; Strip - shaped slide hole 202; Dust suction port 203;

[0036] Adsorption side plates 30a / b; Slide block 301; Operating rod 302; Vacuum channel 303; Main channel 3031; Adsorption channel 3032; Connector channel 3033; Transfer channel 3034; Vacuum hole 304;

[0037] Support plate 40; Notch 401;

[0038] Nozzle 50;

[0039] Working space 60;

[0040] Sliding guide rail 70;

[0041] Fixed side plate 80;

[0042] Dust suction connector 90;

[0043] Vacuum connector 100;

[0044] Plug 110;

[0045] Transfer connector 120. Specific embodiments

[0046] In order to enable those skilled in the art to better understand the technical solutions in the present application, the following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present application.

[0047] In order to solve the problems that current photovoltaic products have various sizes and different dimensions, when processing photovoltaic products, only the edges contact the platform, vacuum adsorption is required, the surface flatness of the adsorption platform is required to be relatively high, and the adsorption platform needs to have a built-in bottom dust collection function. The applicant has developed an adjustable adsorption platform, which can adapt to photovoltaic products of different sizes, ensure surface flatness and the adsorption and fixation stability of the products at the same time, and integrate a bottom dust collection function, thereby effectively reducing the processing cost while ensuring processing accuracy.

[0048] Specifically, please refer to Figure 1 and Figure 2 , Figure 1 Figure Figure 1 is a schematic structural diagram of an embodiment of the adsorption platform of the present application, Figure 2 Figure Figure 2 is a schematic structural diagram of another perspective of an embodiment of the adsorption platform of the present application.

[0049] As shown in Figure 1 and Figure 2 , the adsorption platform includes a bottom plate 10, a pair of end plates 20, a pair of adsorption side plates 30, and a pair of support plates 40.

[0050] Among them, a pair of end plates 20 are respectively arranged at both ends of the bottom plate 10, a pair of adsorption side plates 30 are arranged between the pair of end plates 20, a pair of support plates 40 are respectively arranged on the pair of adsorption side plates 30, and the support plate 40 includes a workpiece support surface 402 on the top surface. A suction nozzle 50 is also arranged on the adsorption side plate 30, and the suction head end of the suction nozzle 50 extends to the workpiece support surface 402.

[0051] A pair of end plates 20 and a pair of adsorption side plates 30 enclose an operation space 60 for adsorbing and fixing photovoltaic products; when operating, the photovoltaic products can be supported by the workpiece support surfaces 402 of the pair of support plates 40 and adsorbed by the suction nozzles 50, and only the edges of the photovoltaic products contact the workpiece support surfaces 402.

[0052] Specifically, in this embodiment, a pair of end plates 20 are arranged in parallel at intervals, a pair of adsorption side plates 30 are arranged in parallel at intervals, and at the same time, the extending direction of the end plates 20 and the extending direction of the adsorption side plates 30 are perpendicularly distributed. For the convenience of the following description, the extending direction of the end plates 20 is defined as the X-axis direction, and the extending direction of the adsorption side plates 30 is defined as the Y-axis direction.

[0053] One of the pair of adsorption side plates 30, the adsorption side plate 30a, is fixedly connected to the bottom plate 10 and the pair of end plates 20, and the other adsorption side plate 30b is configured to be slidably arranged along the X-axis direction, so as to be able to adjust the distance between the pair of adsorption side plates 30, that is, adjust the X-axis width of the operation space 60 to adapt to photovoltaic products of different widths.

[0054] Specifically, a chute 201 is arranged on the inner side surface of one end plate 20a of a pair of end plates 20, and a strip-shaped sliding hole 202 is provided on the other end plate 20b. The chute 201 and the strip-shaped sliding hole 202 extend along the X-axis direction. The slidable adsorption side plate 30b further includes a slider 301 arranged on one end face and an operating rod 302 arranged on the other end face. The slider 301 is matched with the chute 201 and is embedded in the chute 201. One end of the operating rod 302 is connected to the adsorption side plate 30, and the other end penetrates through the strip-shaped sliding hole 202 and extends to the outside, so that the adsorption side plate 30b can be operably slid along the X-axis direction.

[0055] In order to ensure the position accuracy and stability when the adsorption side plate 30b slides, in this embodiment, a plurality of sliding guide rails 70 are further arranged on the surface of the bottom plate 10. The plurality of sliding guide rails 70 are evenly spaced along the Y-axis direction, and each sliding guide rail 70 extends along the X-axis direction. The bottom surface of the adsorption side plate 30b is slidably mounted on the sliding guide rail 70, so as to ensure the position accuracy of the adsorption side plate 30b.

[0056] It can be understood that this embodiment only shows one sliding installation method of the adsorption side plate 30b. In other embodiments, other sliding installation methods of the adsorption side plate 30b can also achieve the effects of this embodiment. For example, guide rails can be arranged on the inner side surface of the end plate 20, and the adsorption side plate 30b can be directly mounted on the guide rails, etc., which will not be elaborated here.

[0057] In order to ensure the overall structural stability of the adsorption platform, the adsorption side plate 30a is fixedly arranged between one ends of a pair of end plates 20, and a fixed side plate 80 is further arranged between the other ends of the pair of end plates 20.

[0058] It should be noted that in this embodiment, one adsorption side plate 30a is fixedly arranged, and the other adsorption side plate 30b is slidable, so as to realize the adjustment of the distance between a pair of adsorption side plates 30; in other embodiments, both adsorption side plates 30 can also be slidable, and the adjustment of the distance between a pair of adsorption side plates 30 can also be realized. Among them, the sliding installation methods of the two adsorption side plates 30 can be the same or different, and both can achieve the effects of this embodiment.

[0059] Based on the adsorption platforms of the above embodiments, when performing processing operations, the photovoltaic products are placed on a pair of support plates 40, and a hollow space is formed below the photovoltaic products. In order to ensure the processing accuracy, a dust suction port 203 penetrating the end plate 20 is further arranged on the end plate 20a at one end, and a dust suction joint 90 communicated with the dust suction port 203 is arranged on the outer surface of the end plate 20a, so that dust suction operations can be performed from the bottom of the photovoltaic products through the dust suction joint 90.

[0060] Specifically, in this embodiment, a plurality of dust suction ports 203 arranged in sequence in the X-axis direction are disposed on the end plate 20a at one end. During specific operation, based on the size of the actual photovoltaic product, the dust suction ports 203 at corresponding positions can be controlled to connect to a dust suction device, thereby realizing an adaptive dust suction operation and ensuring the dust suction effect.

[0061] It can be understood that in other embodiments, dust suction ports 203 can also be provided on both end plates 20. The number and positions of the dust suction ports 203 can also be arbitrarily selected, as long as it can ensure that photovoltaic products of different sizes can correspond to the corresponding dust suction ports 203, and the effects of this embodiment can also be achieved.

[0062] The structures of the adsorption side plate 30 and the support plate 40 in the present application will be introduced in detail below. Please refer to Figure 3 and Figure 4 , Figure 3 which is a schematic structural diagram of an embodiment of the adsorption side plate 30 and the support plate 40 of the present application, Figure 4 and

[0063] As Figure 3 and Figure 4 shown, a vacuum channel 303 is formed inside the adsorption side plate 30. Vacuum holes 304 communicating the vacuum channel 303 with the outside are provided on the adsorption side plate 30. At the same time, the suction nozzle 50 is connected and arranged with the vacuum channel 303. Thus, an external vacuum generating device can be connected through the vacuum holes 304 to realize the adsorption control of the workpiece by the suction nozzle 50.

[0064] Specifically, in this embodiment, the vacuum channel 303 includes a main channel 3031, a plurality of adsorption channels 3032, and a plurality of joint channels 3033.

[0065] Among them, the main channel 3031 extends from one end of the adsorption side plate 30 to the other end; the plurality of adsorption channels 3032 are arranged in sequence along the extending direction of the adsorption side plate 30, and one end of each adsorption channel 3032 is communicated with the main channel 3031, and the other end extends to the surface of the adsorption side plate 30 and is communicated with a suction nozzle 50; one end of the joint channel 3033 is communicated with the main channel 3031, and the other end extends to the surface of the adsorption side plate 30 to form a vacuum hole 304.

[0066] Among them, in order to facilitate the connection of the vacuum generating device, a vacuum joint 100 is also arranged at the vacuum hole 304.

[0067] Based on the above vacuum channel 303 structure, by connecting the vacuum joint 100 to the vacuum generating device, the adsorption control of each suction nozzle 50 can be realized.

[0068] Further, in order to achieve partitioning in the Y-axis direction to adapt to photovoltaic products of different sizes, in this embodiment, the main channel 3031 further includes several independent segments, and each segment corresponds to several adsorption channels 3032, that is, each segment is connected to several suction nozzles 50.

[0069] Each segment of the main channel 3031 also corresponds to a joint channel 3033, so as to achieve adsorption partition control in the Y-axis direction. For photovoltaic products of different sizes, the vacuum joint 100 in the corresponding area is controlled to connect to the vacuum generating device.

[0070] Specifically, in this embodiment, the main channel 3031 can be segmented by inserting a plug 110 into the main channel 3031. In other embodiments, the main channel 3031 can also be segmented based on other structures.

[0071] In order to simplify the gas path structure of the present application and at the same time ensure the suction balance and synchronous control of the suction nozzles 50 on both sides, in this embodiment, the vacuum channels 303 inside the two adsorption side plates 30 can be connected, so that a single vacuum generating device can synchronously control the suction nozzles 50 on the two adsorption side plates 30 to work.

[0072] Specifically, in this embodiment, the vacuum channel 303 inside the adsorption side plate 30a further includes several transfer channels 3034. One end of the transfer channel 3034 is communicated with the main channel 3031, and the other end extends to the surface of the adsorption side plate 30 to form a transfer hole 305, and a transfer joint 120 is provided at the transfer hole 305.

[0073] Among them, each segment of the main channel 3031 can be connected to a transfer channel 3034. The adsorption platform can also include a telescopic pipe (not shown in the figure) for connecting the transfer joint 120 of the adsorption side plate 30a to the corresponding vacuum joint 100 of the adsorption side plate 30b, so as to realize the synchronous operation of the two adsorption side plates 30.

[0074] For the convenience of layout, please refer to Figure 5 , Figure 5 is a top view structural schematic diagram of an embodiment of the adsorption platform of the present application. As Figure 5 shown, in this embodiment, a strip-shaped groove 101 extending in the X-axis direction is provided on the surface of the bottom plate 10. The connected transfer joint 120 and vacuum joint 100 can be embedded in the same strip-shaped groove 101, and the telescopic pipe can also be arranged in the strip-shaped groove 101.

[0075] In order to prevent the telescopic pipe from affecting the sliding of the adsorption side plate 30b, pipe protection plates 102 are also arranged on the surface of the bottom plate 10 on both sides of the strip-shaped groove 101 and extending above the strip-shaped groove 101.

[0076] Specifically, in this embodiment, each section of the main channel 3031 of the adsorption side plate 30a can be arranged in one-to-one correspondence with each section of the main channel 3031 of the adsorption side plate 30b. A plurality of strip-shaped grooves 101 corresponding to each section of the main channel 3031 can be arranged on the bottom plate 10, so as to realize the intercommunication of each partition in the Y-axis direction of the two adsorption side plates.

[0077] Please continue to refer to Figure 3 , for the convenience of arranging the support plate 40 and the suction nozzle 50, in this embodiment, notches 401 corresponding to the suction nozzles 50 can be provided on the support plate 40, and the suction nozzles 50 can be embedded inside the notches 401.

[0078] For the convenience of leveling the support plate 40, each support plate 40 can be fixed on the top surface of the adsorption side plate 30 through a plurality of leveling bolts, and the levelness and height of each workpiece support surface 402 can be independently adjusted through the leveling bolts to ensure the surface flatness.

[0079] In order to further improve the contact stability between the suction head end of the suction nozzle 50 and the photovoltaic product, in this embodiment, the suction nozzle 50 can be a flexible bellows suction nozzle 50, and its suction head end can extend above the workpiece support surface 402, so as to ensure the stable contact between the suction head end and the photovoltaic product, meet the adsorption effect and ensure better flatness at the same time.

[0080] Based on the adsorption platforms of the above embodiments, by adjusting the position of the adsorption side plate 30b, photovoltaic products with different widths can be adapted. By switching the vacuum joint 100 connected to the vacuum generating device, photovoltaic products with different lengths can be adapted. By switching the dust suction joint 90 connected to the dust suction device, the bottom dust suction operation of photovoltaic products with different widths can be realized. By the leveling bolts, the independent leveling of the two workpiece support surfaces 402 can be realized, meeting the requirements of photovoltaic products with different sizes while ensuring the processing accuracy.

[0081] It should be noted that in the above embodiments, it is defined that the extending directions of the end plates 20 and the adsorption side plates 30 are perpendicular to each other. In other embodiments, based on the actual working conditions, the extending directions of the end plates 20 and the adsorption side plates 30 may not be perpendicular to each other. For example, they may also be distributed at an acute angle, etc. As long as the adsorption side plate 30 can be slidably arranged along the extending direction of the end plate 20, the effects of this embodiment can be achieved.

[0082] In addition, the above embodiments only show the application of the adsorption platform of the present application in the laser scribing process of photovoltaic products, but the application scenarios of the adsorption platform of the present application are not limited to this. It can be widely applied to many similar working condition platforms, and the corresponding effects can be achieved, which will not be elaborated here.

[0083] Those skilled in the art should understand that although this specification is described according to embodiments, not every embodiment contains only an independent technical solution. This narrative way of the specification is only for clarity. Those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments understandable by those skilled in the art.

[0084] The foregoing description of specific exemplary embodiments of the present application is for purposes of illustration and exemplification. These descriptions are not intended to limit the present application to the precise forms disclosed, and obviously, many changes and variations are possible in light of the above teachings. The purpose of selecting and describing the exemplary embodiments is to explain the specific principles of the present application and its practical applications, so that those skilled in the art can implement and utilize various different exemplary embodiments of the present application, as well as various different selections and changes. The scope of the present application is intended to be defined by the claims and their equivalents.

Claims

1. An adsorption platform, characterized in that Comprising: Base plate; A pair of end plates, respectively arranged at two ends of the base plate, and one or both of the pair of end plates are provided with dust suction holes penetrating the end plates; A pair of adsorption side plates, arranged between the pair of end plates, and one or both of the pair of adsorption side plates are configured to be slidably arranged along the extending direction of the end plates. A vacuum channel is formed inside the adsorption side plates, and vacuum holes communicating the vacuum channel with the outside are provided on the adsorption side plates; A pair of support plates, respectively arranged on the pair of adsorption side plates, and the support plates include workpiece support surfaces located on the top surfaces; Suction nozzles, arranged on the adsorption side plates, the suction nozzles are communicated with the vacuum channels, and the suction head ends of the suction nozzles at least extend to the workpiece support surfaces; 2. The adsorption platform according to claim 1, wherein On the inner side surface of one of the pair of end plates, a sliding groove is arranged, and on the other end plate, a strip-shaped sliding hole is provided. The sliding groove and the strip-shaped sliding hole extend along the extending direction of the end plates; One or both of the pair of adsorption side plates further include sliders arranged on one end surface and operating rods arranged on the other end surface. The sliders are matched with the sliding grooves and are embedded in the sliding grooves. One end of the operating rod is connected to the adsorption side plate, and the other end penetrates through the strip-shaped sliding hole and extends to the outside; 3. The adsorption platform according to claim 1, wherein The support plates are installed on the top surfaces of the adsorption side plates through leveling bolts; 4. The adsorption platform according to claim 1, wherein The suction nozzles are bellows suction nozzles, and the suction head ends of the suction nozzles extend above the workpiece support surfaces; 5. The adsorption platform according to claim 1, wherein It further includes a sliding guide rail, the sliding guide rail extends along the extending direction of the end plates and is arranged on the surface of the base plate, and one or both of the pair of adsorption side plates are slidably installed on the sliding guide rail; 6. The adsorption platform according to claim 1, wherein The vacuum channel includes: Main channel, extending from one end of the adsorption side plate to the other end; Multiple adsorption channels, arranged in sequence along the extending direction of the adsorption side plate, and one end of each adsorption channel is communicated with the main channel, and the other end extends to the surface of the adsorption side plate and is communicated with one of the suction nozzles; At least one joint channel, one end of which is communicated with the main channel, and the other end extends to the surface of the adsorption side plate to form the vacuum hole; 7. The adsorption platform according to claim 6, wherein The main channel includes several independent segments, and the vacuum channel includes several joint channels arranged at intervals in sequence along the extending direction of the adsorption side plate. Each joint channel is communicated with one segment of the main channel to divide the workpiece support surface into several independent adsorption areas; 8. The adsorption platform according to claim 6, characterized in that, The vacuum channel of one of the adsorption side plates further includes several transfer channels, one end of the transfer channels is communicated with the main channel, and the other end extends to the surface of the adsorption side plate to form transfer holes; The adsorption platform further includes a telescopic pipe connecting the transfer holes of one of the adsorption side plates with the vacuum holes of the other adsorption side plate.

9. The adsorption platform according to claim 8, characterized in that, The surface of the bottom plate is provided with a strip-shaped groove extending along the extending direction of the end plate. The adsorption platform further includes a transfer joint located at the transfer hole and a vacuum joint located at the vacuum hole. The interconnected transfer joint and the vacuum joint are embedded in one of the strip-shaped grooves. The telescopic pipeline is arranged in the strip-shaped groove. Pipeline protection plates are also arranged on the surface of the bottom plate, which are respectively arranged on both sides of the strip-shaped groove and extend above the strip-shaped groove.

10. The adsorption platform according to claim 9, characterized in that, The main channel includes several independent segments, and several strip-shaped grooves corresponding to the several segments of the main channel are arranged on the bottom plate.

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