Clamping jaw unit of automatic PIN changing robot for mask plate

Abstract

The utility model relates to the technical field of mask plate processing, and discloses a clamping jaw unit of a mask plate automatic PIN changing robot, which comprises a PIN changing support, a chuck cover clamping jaw and a PIN column clamping jaw, the chuck cover clamping jaw and the PIN column clamping jaw are arranged on the PIN changing support, and a photographing unit is arranged between the chuck cover clamping jaw and the PIN column clamping jaw. The photographing unit is used for photographing and positioning a to-be-clamped chuck cover and a to-be-clamped PIN column, and the chuck cover clamping jaw and the PIN column clamping jaw are independently arranged on the clamping jaw mounting platform; a lifting assembly and a rotating assembly are arranged on the clamping jaw mounting platform and used for driving the chuck cover clamping jaw and the PIN column clamping jaw to integrally ascend and descend or rotate in a fixed-axis mode. And the chuck cover clamping jaw fixes the chuck cover through vacuum adsorption. According to the utility model, by automatically replacing the PIN column, the processing environment in the equipment can be well maintained, the PIN column can be efficiently and accurately replaced, the risk caused by manually replacing the PIN column by personnel is reduced, and the overall manufacturing cost and maintenance cost can be effectively reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of mask plate processing, in particular to a clamping claw unit of a mask plate automatic PIN changing robot. Background Art

[0002] In the daily production and processing of mask plates, the support platform is usually used in conjunction with PIN columns to support and limit the position of the mask plates. Since the processing of mask plates with different size parameters is involved, multiple groups of PIN column mounting holes matching the mask plates with different size parameters are set on the support platform. When idle, the idle PIN column mounting holes are sealed and blocked by threaded chuck caps. When another size of mask plates needs to be processed, only PIN columns need to be installed in the mounting holes at different positions to make the entire support platform suitable for mask plates of another size.

[0003] In mask production, each size of mask has a corresponding parameter number. Currently, to change the parameters, personnel have to enter the equipment to manually replace the PIN column. Personnel entering the equipment may bring foreign matter such as particles on their bodies into the equipment, affecting the cleanliness. Manual replacement of the PIN column by personnel has the risk of making a mistake, resulting in product scrapping. Utility Model Content

[0004] 1. Technical issues to be solved

[0005] In view of the deficiencies in the prior art, the utility model provides a gripper unit of a mask automatic PIN changing robot, which solves the problem that in the existing mask production and processing process, manually changing PIN columns easily contaminates the inside of the equipment and affects the cleanliness, and there is also the problem of incorrect PIN column installation position causing product scrapping.

[0006] (II) Technical solution

[0007] In order to achieve the above objectives, the present invention is implemented through the following technical solutions:

[0008] A clamping unit of a mask automatic PIN changing robot comprises a PIN changing bracket and a chuck cover clamping jaw and a PIN column clamping jaw arranged on the PIN changing bracket, a photographing unit is arranged between the chuck cover clamping jaw and the PIN column clamping jaw, the photographing unit is used for photographing and positioning the chuck cover and the PIN column to be clamped, the chuck cover clamping jaw and the PIN column clamping jaw are respectively and independently arranged on a clamping jaw mounting platform; a lifting component and a rotating component are arranged on the clamping jaw mounting platform, which are used for driving the chuck cover clamping jaw and the PIN column clamping jaw to lift or rotate on a fixed axis as a whole; the chuck cover clamping jaw fixes the chuck cover by vacuum adsorption.

[0009] Preferably, the PIN changing bracket is detachably connected to the movable end of the robotic arm through the PIN changing unit bracket, and the photographing unit is mounted on the PIN changing bracket through the photographing unit bracket.

[0010] Preferably, a guiding assembly is arranged between the jaw mounting platform and the PIN changing bracket. The guiding assembly includes a guiding column fixed on the PIN changing bracket and passing through the jaw mounting platform. A connecting sleeve is sleeved on the guiding column, and the connecting sleeve is fixedly connected to the jaw mounting platform through a guiding spring.

[0011] Preferably, both the chuck cover jaw and the PIN column jaw are fixedly arranged at the rotating end of the rotating assembly.

[0012] Preferably, the chuck cover jaw includes an adsorption column fixedly connected to the rotating end of the rotating assembly. A vacuum channel is arranged in the inner cavity of the adsorption column. One end of the vacuum channel away from the rotating assembly is communicated with a vacuum chuck, and one end of the vacuum channel away from the vacuum chuck is communicated with a negative pressure interface.

[0013] Preferably, a limiting seat is fixedly connected to one end of the adsorption column close to the vacuum chuck. A notch matching the chuck cover is arranged on the limiting seat, and the vacuum chuck is located in the middle of the limiting seat.

[0014] Preferably, an ultrasonic sensor is detachably mounted on the PIN changing bracket through a mounting bracket. The ultrasonic sensor is used to detect the flatness of the mask carrier platform.

[0015] (III) Beneficial effects

[0016] The present utility model has the following beneficial effects:

[0017] For the jaw unit of the mask automatic PIN changing robot, through the arranged photographing unit, the positions of the PIN column to be replaced and the chuck cover can be quickly and accurately located, so that the robotic arm can drive the entire fixture unit to drive the corresponding jaws to accurately move to the positions of the PIN column and the chuck cover for lifting and rotating replacement; through the arranged chuck cover jaw with vacuum adsorption, the chuck cover can be quickly adsorbed and fixed, and at the same time, the vacuum adsorption is adopted, which effectively reduces the composition of the jaw mechanical components. Compared with the clamping method that generates displacement by mechanical drive, the manufacturing cost and the later maintenance cost of the entire chuck cover jaw can be reduced. Description of the drawings

[0018] Figure 1 It is a layout schematic diagram of the PIN column and the chuck cover on the mask carrier platform;

[0019] Figure 2 It is a schematic diagram of the overall structure of the present utility model;

[0020] Figure 3 This is the schematic structural diagram of the A-A section of the present utility model.

[0021] In the figure: 1. PIN changing bracket; 2. PIN changing fixture unit bracket; 3. Photographing unit bracket; 4. Photographing unit; 5. Jaw mounting platform; 6. Lifting assembly; 7. Guiding assembly; 71. Guide post; 72. Guide spring; 73. Connecting sleeve; 8. Rotating assembly; 9. PIN post jaw; 10. Chuck cover jaw; 101. Adsorption column; 102. Vacuum channel; 103. Negative pressure interface; 104. Vacuum chuck; 105. Limit seat; 11. Mounting bracket; 12. Ultrasonic sensor. Specific embodiments

[0022] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0023] Please refer to Figure 1 , the present utility model provides a technical solution: a jaw unit of a mask plate automatic PIN changing robot, including a PIN changing bracket 1 and a chuck cover jaw 10 and a PIN post jaw 9 arranged on the PIN changing bracket 1. A photographing unit is arranged between the chuck cover jaw 10 and the PIN post jaw 9. The photographing unit 4 is used for photographing and positioning the chuck cover and the PIN post to be clamped. The chuck cover jaw 10 and the PIN post jaw 9 are respectively and independently arranged on the jaw mounting platform 5; a lifting assembly 6 and a rotating assembly 8 are arranged on the jaw mounting platform 5 for driving the chuck cover jaw 10 and the PIN post jaw 9 to lift or rotate around a fixed axis as a whole; the chuck cover jaw 10 fixes the chuck cover by vacuum adsorption.

[0024] In the present utility model, through the arranged photographing unit, the positions of the PIN post and the chuck cover to be replaced can be quickly and accurately positioned, so that the manipulator can drive the entire fixture unit to drive the corresponding jaws to accurately move to the positions of the PIN post and the chuck cover for lifting and rotating replacement; through the arranged chuck cover jaw 10 with vacuum adsorption, the chuck cover can be quickly adsorbed and fixed. At the same time, the vacuum adsorption is adopted, which effectively reduces the composition of the mechanical components of the jaw. Compared with the clamping method that generates displacement by mechanical drive, the manufacturing cost and the later maintenance cost of the entire chuck cover jaw 10 can be reduced.

[0025] In this embodiment, the PIN changing bracket 1 is detachably connected to the movable end of the manipulator through the PIN changing unit bracket, and the photographing unit 4 is installed on the PIN changing bracket 1 through the photographing unit bracket 3.

[0026] Refer to Figure 2 As shown, in this embodiment, a guiding component 7 is arranged between the jaw mounting platform 5 and the PIN changing bracket 1. The guiding component 7 includes a guiding column 71 fixed on the PIN changing bracket 1 and passing through the jaw mounting platform 5. A connecting sleeve 73 is sleeved on the guiding column 71, and the connecting sleeve 73 is fixedly connected with the jaw mounting platform 5 through a guiding spring 72. By providing the guiding column 71, when the lifting component 6 drives the jaw mounting platform 5 to move up and down, the guiding column 71 can ensure the stability of the up and down movement of the jaw mounting platform 5, thus facilitating the subsequent precise clamping of the chuck cover jaw 10 and the PIN column jaw 9. By providing the guiding spring 72, during the up and down movement of the jaw mounting platform 5, it can effectively avoid the situation of over-travel due to inertia during the movement.

[0027] In this embodiment, both the chuck cover jaw 10 and the PIN column jaw 9 are fixedly arranged at the rotating end of the rotating component 8.

[0028] Refer to Figure 3 As shown, in this embodiment, the chuck cover jaw 10 includes an adsorption column 101 fixedly connected to the rotating end of the rotating component 8. A vacuum channel 102 is arranged in the inner cavity of the adsorption column 101. One end of the vacuum channel far from the rotating component 8 is communicated with a vacuum suction cup 104, and one end of the vacuum channel 102 far from the vacuum suction cup 104 is communicated with a negative pressure interface 103. By providing the vacuum suction cup 104 and the vacuum channel 102, the vacuum suction cup 104 can generate negative pressure adsorption to fix the chuck cover through the negative pressure interface 103, so as to cooperate with the rotating component 8 to realize the rotation of the chuck cover. The overall operation of clamping and fixing the chuck cover is simple, the designed number of structures is small, and it can quickly respond to the clamping and fixing requirements.

[0029] Refer to Figure 3 As shown, in this embodiment, a limiting seat 105 is fixedly connected to one end of the adsorption column 101 close to the vacuum suction cup 104. A notch matching the chuck cover is arranged on the limiting seat 105, and the vacuum suction cup 104 is located in the middle of the limiting seat 105. By providing the limiting seat 105, before the vacuum suction cup 104 performs vacuum adsorption on the chuck cover, the chuck cover can be pre-positioned, so as to ensure higher positioning accuracy of the subsequently adsorbed and fixed chuck cover, so as to facilitate the subsequent screwing and installing of the chuck cover.

[0030] Refer to Figure 1As shown, in this embodiment, an ultrasonic sensor 12 is detachably mounted on the PIN replacement bracket 1 through a mounting bracket 11. The ultrasonic sensor 12 is used to detect the flatness of the mask carrier platform. When the robotic arm drives the entire gripper unit to replace the PIN posts and chuck covers at different positions on the mask carrier platform, due to the limited movement space of the robotic arm, at this time, it is necessary to cooperate with the rotation of the mask platform to achieve the position transformation of the PIN posts and chuck covers under the gripper unit. At this time, in addition to using the photographing unit to take pictures and position the positions of the PIN posts and chuck covers to be replaced, it is also necessary to ensure that the flatness between the front and rear positions of the mask carrier platform during rotation is within the error range, so as to ensure that the PIN posts and chuck covers clamped by the gripper unit can be smoothly screwed into the corresponding threaded holes on the mask carrier platform. At this time, the flatness of the mask can be judged whether it meets the screwing requirements by detecting the height difference between the front and rear positions of the mask carrier platform after rotation by the ultrasonic sensor 12.

[0031] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variation thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not expressly listed, or also includes elements inherent to such process, method, article or device. Without further limitation. An element defined by the statement "including a..." does not exclude the presence of additional identical elements in the process, method, article or device including the said element.

[0032] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A gripper unit of a mask automatic PIN-changing robot, comprising a PIN-changing bracket and a chuck cover gripper and a PIN column gripper arranged on the PIN-changing bracket, characterized in that: A photographing unit is arranged between the chuck cover jaw and the PIN column jaw. The photographing unit is used for photographing and positioning the chuck cover and the PIN column to be clamped. The chuck cover jaw and the PIN column jaw are respectively and independently arranged on the jaw mounting platform; A lifting component and a rotating component are arranged on the jaw mounting platform for driving the chuck cover jaw and the PIN column jaw to lift integrally or rotate around a fixed axis; the chuck cover jaw fixes the chuck cover by vacuum adsorption.

2. The jaw unit of an automatic PIN-changing robot for a mask plate according to claim 1, characterized in that: The PIN changing bracket is detachably connected to the movable end of the robotic arm through the PIN changing unit bracket, and the photographing unit is mounted on the PIN changing bracket through the photographing unit bracket.

3. The jaw unit of a mask automatic PIN-changing robot according to claim 1, characterized in that: A guiding component is arranged between the jaw mounting platform and the PIN changing bracket. The guiding component includes a guiding column fixed on the PIN changing bracket and passing through the jaw mounting platform. A connecting sleeve is sleeved on the guiding column, and the connecting sleeve is fixedly connected to the jaw mounting platform through a guiding spring.

4. The gripper unit of an automatic PIN-changing robot for a photomask according to claim 1 or 3, characterized in that: Both the chuck cover jaw and the PIN column jaw are fixedly arranged at the rotating end of the rotating component.

5. The jaw unit of an automatic PIN-changing robot for a photomask according to claim 4, characterized in that: The chuck cover jaw includes an adsorption column fixedly connected to the rotating end of the rotating component. A vacuum channel is arranged in the inner cavity of the adsorption column. One end of the vacuum channel far away from the rotating component is communicated with a vacuum chuck, and one end of the vacuum channel far away from the vacuum chuck is communicated with a negative pressure interface.

6. The jaw unit of an automatic PIN-changing robot for a reticle according to claim 5, characterized in that: A limiting seat is fixedly connected to one end of the adsorption column close to the vacuum chuck. A notch matching the chuck cover is arranged on the limiting seat, and the vacuum chuck is located in the middle of the limiting seat.

7. The jaw unit of a mask automatic PIN-changing robot according to claim 4, characterized in that: An ultrasonic sensor is detachably mounted on the PIN changing bracket through a mounting bracket. The ultrasonic sensor is used for detecting the flatness of the mask carrier platform.

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