A side arc starting mechanism for vacuum coating

Abstract

The utility model belongs to the technical field of vacuum coating arc ignition, and particularly relates to a side arc ignition mechanism for vacuum coating, which includes a base and a target. A rotating disk is sleeved outside the base, and an end cover is fixedly installed at the right end of the rotating disk; a rotating disk is fixedly installed on the left side of the rotating disk, and the rotating disk is sleeved outside the base. A rotating cylinder is fixedly installed on one side of the base, the output end of the rotating cylinder is fixedly connected with a rotating rod, a pulling needle is fixed at one end of the rotating rod, a notch is formed inside the rotating disk, the pulling needle is located in the notch, a through hole is arranged inside the rotating disk, and the rotating rod penetrates through the through hole. Two arc ignition rods are fixedly installed on the left side of the rotating disk. This device solves the problem that the current side arc ignition mechanism for vacuum coating cannot arc the side of the target, but arcs the front of the target, resulting in small convex points on the surface of the target during the arc ignition process and affecting the surface quality.

Description

Technical Field

[0001] The utility model belongs to the technical field of vacuum coating arc ignition, and particularly relates to a side arc ignition mechanism for vacuum coating. Background Technique

[0002] Vacuum coating technology is generally divided into physical vapor deposition (PVD) technology and chemical vapor deposition (CVD) technology. Among them, physical vapor deposition technology refers to a technology that vaporizes the surface of a material source (solid or liquid) into gaseous atoms or molecules, or partially ionizes them into ions under vacuum conditions, and deposits a thin film with a certain special function on the surface of a substrate through low-pressure gas (or plasma). Physical vapor deposition technology can utilize phenomena such as sputtering of surface atoms of a substance during ion bombardment to achieve a controllable transfer process of surface atoms of a substance from the source material to the thin film. The ion source provides stable high-energy plasma during the physical vapor deposition process. The arc ignition device is an essential component when the ion source starts to work. However, there will be a large current at the moment when the ion source starts. Existing arc ignition devices directly ignite the front surface of the target, resulting in small bumps on the surface of the target, which greatly affects the surface quality of the target and also causes damage to the arc ignition needle. Summary of the Invention

[0003] The purpose of the utility model is to provide a side arc ignition mechanism for vacuum coating to solve the problems mentioned in the above background technique.

[0004] To solve the above technical problems, the utility model provides the following technical solution: A side arc ignition mechanism for vacuum coating, including a base and a target. A rotating disk is sleeved outside the base, and an end cover is fixedly installed at the right end of the rotating disk; a rotating disk is fixedly installed on the left side of the rotating disk and is sleeved outside the base. A rotating cylinder is fixedly installed on one side of the base, the output end of the rotating cylinder is fixedly connected with a rotating rod, a pulling needle is fixed at one end of the rotating rod, a notch is opened inside the rotating disk, and the pulling needle is located in the notch.

[0005] The utility model further explains that a through hole is arranged inside the rotating disk, and the rotating rod penetrates through the through hole.

[0006] The utility model further explains that two arc ignition rods are fixedly installed on the left side of the rotating disk, and both arc ignition rods are connected to an external power supply wire.

[0007] The utility model further explains that arc ignition needles are screwed to one end of the two arc ignition rods. The outer ends of the two arc ignition needles are in a relative position and both are attached to the side surface of the target.

[0008] The utility model further explains that the rotating disk is connected to an external water cooling pipeline.

[0009] Compared with the prior art, the beneficial effects achieved by the utility model are as follows: The side arc ignition mechanism adopted by the utility model, when the rotary cylinder operates, drives the arc ignition needle to fit on the target. Then, the external current enters the arc ignition needle through the arc ignition rod to perform vacuum coating on the side of the target; when the rotary cylinder resets, the arc ignition needle is driven away from the side of the target through the arc ignition rod, so as to separate from the contact with the target;

[0010] Through two arc ignition rods, vacuum coating can be carried out on the targets on both the left and right sides, thereby improving the coating efficiency. At the same time, coating the target on the side can avoid the generation of small bumps caused by the original front coating, thereby improving the surface quality of the target. The structure is simple, the operation is automated, convenient and fast, improving the overall efficiency of vacuum coating, and relatively reducing the damage to the arc ignition needle during arc ignition;

[0011] By connecting external water cooling, it can avoid damage to the rotary cylinder caused by excessive temperature when the current passes through the arc ignition rod and the arc ignition needle, playing a role in protecting the structure and improving the service life of the overall side arc ignition mechanism. Description of the Drawings

[0012] The drawings are used to provide a further understanding of the utility model and constitute a part of the specification. Together with the embodiments of the utility model, they are used to explain the utility model and do not constitute a limitation to the utility model. In the drawings:

[0013] Figure 1 is the overall structural schematic diagram of the utility model;

[0014] Figure 2 is the disassembled schematic diagram of the end cover and the rotating disk of the utility model;

[0015] Figure 3 is the overall exploded view of the utility model;

[0016] Figure 4 is the schematic diagram of the position change of the arc ignition needle acting on the target of the utility model;

[0017] In the figure: 1, base; 2, rotating disk; 3, end cover; 4, rotating disk; 5, rotary cylinder; 6, rotating rod; 7, pulling needle; 8, notch; 9, arc ignition rod; 91, arc ignition needle. Detailed Description of the Specific Embodiment

[0018] The following further non-limiting detailed description of the technical solution of the utility model is made in conjunction with the preferred embodiments and their accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the utility model.

[0019] Please refer to Figures 1-4 The present utility model provides a technical solution: a side arc starting mechanism for vacuum coating, including a base 1 and a target. A rotating disk 2 is sleeved outside the base 1, and an end cover 3 is fixedly installed at the right end of the rotating disk 2;

[0020] A rotating disk 4 is fixedly installed on the left side of the rotating disk 2, and the rotating disk 4 is sleeved outside the base 1. A rotating cylinder 5 is fixedly installed on one side of the base 1, the output end of the rotating cylinder 5 is fixedly connected with a rotating rod 6, a pulling needle 7 is fixed at one end of the rotating rod 6, a notch 8 is formed inside the rotating disk 2, and the pulling needle 7 is located inside the notch 8.

[0021] A through hole is provided inside the rotating disk 2, and the rotating rod 6 passes through the through hole.

[0022] Two arc starting rods 9 are fixedly installed on the left side of the rotating disk 4, and both of the two arc starting rods 9 are connected to an external power supply by wires.

[0023] One end of each of the two arc starting rods 9 is connected with an arc starting needle 91 by screws. The outer ends of the two arc starting needles 91 are in a relative position and both are attached to the side surface of the target.

[0024] The rotating disk 4 is connected to an external water cooling pipeline;

[0025] When the rotating cylinder 5 operates, the pulling needle 7 is driven to rotate by the rotating rod 6. The pulling needle 7 rotates inside the notch 8, thereby driving the rotating disk 2 to rotate by a limiting method. The rotating disk 2 drives the rotating disk 4 to rotate, thereby driving the two arc starting needles 91 to rotate around their centers by the two arc starting rods 9;

[0026] When the rotating cylinder 5 operates, the arc starting needle 91 is driven to be attached to the target. Then, an external current enters the arc starting needle 91 through the arc starting rod 9, and vacuum coating work is carried out on the side surface of the target;

[0027] When the rotating cylinder 5 resets, the arc starting needle 91 is driven to move away from the side surface of the target by the arc starting rod 9, thereby disengaging from the contact with the target;

[0028] Through the two arc starting rods 9, vacuum coating work can be carried out on the targets on both the left and right sides, thereby improving the coating efficiency. At the same time, coating the target on the side can avoid the generation of small bumps caused by coating on the front surface originally, thereby improving the surface quality of the target. The structure is simple, the operation is automated, convenient and fast, improving the overall efficiency of vacuum coating, and relatively reducing the damage to the arc starting needle 91 during arc starting;

[0029] By connecting external water cooling, it can avoid damage to the rotating cylinder 5 caused by excessive temperature when the current passes through the arc starting rod 9 and the arc starting needle 91, playing a role in protecting the structure and improving the service life of the overall side arc starting mechanism.

[0030] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", "front", "rear", "left", "right", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present utility model, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present utility model.

[0031] Finally, it should be pointed out that the above embodiments are only used to illustrate the technical solutions of the present utility model, rather than to limit them. Although the present utility model has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements for some of the technical features. These modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present utility model.

Claims

1. A side arc - starting mechanism for vacuum coating, comprising a base (1) and a target, characterized in that: A rotating disk (2) is sleeved outside the base (1), and an end cover (3) is fixedly installed at the right end of the rotating disk (2); A rotating plate (4) is fixedly installed on the left side of the rotating disk (2), and the rotating plate (4) is sleeved outside the base (1). A rotating cylinder (5) is fixedly installed on one side of the base (1). The output end of the rotating cylinder (5) is fixedly connected to a rotating rod (6). One end of the rotating rod (6) is fixed with a needle pulling (7). A notch (8) is formed inside the rotating disk (2), and the needle pulling (7) is located in the notch (8).

2. The side arc starting mechanism for vacuum coating according to claim 1, wherein: A through hole is provided inside the rotating disk (2), and the rotating rod (6) is inserted through the through hole.

3. The side arc starting mechanism for vacuum coating according to claim 2, characterized in that: Two arc leading rods (9) are fixedly installed on the left side of the rotating plate (4), and both of the two arc leading rods (9) are electrically connected to an external power supply.

4. The side arc starting mechanism for vacuum coating according to claim 3, wherein: One end of each of the two arc leading rods (9) is screwed with an arc leading needle (91). The outer ends of the two arc leading needles (91) are in a relative position and are both attached to the side surface of the target.

5. The side arc starting mechanism for vacuum coating according to claim 4, characterized in that: The rotating plate (4) is connected to an external water cooling pipeline.

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