Barrier device for effectively isolating dust pollution and crystal pulling system
By designing the telescopic structure of the adsorption assembly and the driving assembly in the crystal pulling system, forming an isolation barrier and adsorbing dust, the cross-contamination problem between adjacent furnaces is solved and the production quality of single crystal silicon rods is improved.
Patent Information
- Application Number
- CN202422044880.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-22
- Publication Date
- 2025-07-08
- Estimated Expiration
- 2034-08-22
AI Technical Summary
In the RCZ crystal drawing process, there is a lack of effective isolation and protection measures between adjacent furnaces, which leads to the risk of cross-contamination of graphite dust and volatiles generated during the furnace removal process to the working environment of the feed furnace, affecting the quality of single crystal silicon rods.
A barrier device that effectively isolates dust pollution is designed, including an adsorption assembly, a driving assembly and a support frame. Using a telescopic structure and an electrostatic adsorption membrane, the expansion and contraction of the adsorption part are controlled through the driving assembly, forming an isolation barrier and adsorbing dust to prevent the spread of dust.
Effectively isolate dust pollution, ensure the normal operation of adjacent furnaces, improve the quality of single crystal silicon rods, and reduce the impact of volatiles on the feeding furnace during the furnace removal process.
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Figure CN223074311U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of crystal pulling technology, and particularly to a barrier device for effectively isolating dust pollution and a crystal pulling system. Background Art
[0002] In a production workshop based on the RCZ (Czochralski) crystal pulling process, to ensure the rigor of the production process and the stability of product quality, there is an operation link of secondary feeding. When the furnace platform is in the feeding stage, this process needs to be precisely executed, involving steps such as unscrewing the secondary chamber above the main chamber furnace body, lifting the material, and inserting it for feeding. These operations have strict requirements for the cleanliness of the operating environment and the components involved, and a pollution-free state must be ensured.
[0003] However, due to the differences in processes between different furnace platforms in the workshop, there may be a situation where one furnace platform is performing a feeding operation while another furnace platform is performing a furnace dismantling operation among adjacent furnace platforms; in this way, the furnace platform for furnace dismantling will inevitably generate a large amount of volatile substances such as graphite sealing dust and sediment dust; these volatile substances may have an adverse impact on the working environment of the feeding furnace platform. Currently, there is a lack of effective isolation and protection measures between the feeding furnace platform and the furnace dismantling furnace platform, which increases the risk of cross-contamination to a certain extent.
[0004] Therefore, there is an urgent need for a barrier device for effectively isolating dust pollution and a crystal pulling system to solve the technical problems existing in the prior art to a certain extent. Summary of the Utility Model
[0005] The purpose of this application is to provide a barrier device for effectively isolating dust pollution and a crystal pulling system, which can reduce the impact of volatile substances generated during the furnace dismantling process on the feeding furnace platform to a certain extent, thereby improving the control of the quality of single crystal rods.
[0006] This application provides a barrier device for effectively isolating dust pollution, including an adsorption component, a driving component, and a support frame;
[0007] The support frame is a telescopic structure and can extend or retract along a first direction;
[0008] The adsorption component includes a roller part and an adsorption part. One end of the adsorption part is wound around the roller part, and the other end is fixed to the top of the support frame;
[0009] The output shaft of the driving component is connected to the roller part and can drive the roller part to rotate so that the roller part winds or releases the adsorption part;
[0010] When the support frame extends along the first direction and the driving component drives the roller portion to release the adsorption portion, the adsorption portion extends along the first direction; when the support frame retracts along the first direction and the driving component drives the roller portion to wrap around the adsorption portion, the adsorption portion retracts along the first direction and wraps around the roller portion.
[0011] In the above technical solution, further, the support frame includes a base, a vertical telescopic rod and a frame beam;
[0012] The frame beam is supported on the base through the vertical telescopic rod;
[0013] The vertical telescopic rod can extend or retract along the first direction to drive the frame to extend or retract along the first direction.
[0014] In the above technical solution, further, the adsorption component includes a roller that can serve as the roller part and an electrostatic adsorption film that can serve as the adsorption part;
[0015] The roller is arranged in an installation space surrounded by the base, the vertical telescopic rod and the frame beam;
[0016] One end of the electrostatic adsorption film is wound around the roller and the other end is hung on the frame beam.
[0017] In the above technical solution, further, the adsorption assembly also includes a support shaft;
[0018] The two ends of the support shaft are overlapped with the two ends of the frame beam;
[0019] One end of the electrostatic adsorption film away from the roller is hung on the support shaft.
[0020] In the above technical solution, further, the adsorption component also includes a hook;
[0021] Both ends of the support shaft are hung on the frame beam through the hooks.
[0022] In the above technical solution, further, the driving assembly includes a driving motor; a rotating shaft runs through the interior of the roller along its axial direction;
[0023] The output shaft of the driving motor is connected to the rotating shaft, and the output shaft can drive the rotating shaft to rotate, so as to drive the roller to rotate.
[0024] In the above technical solution, further, the barrier device that effectively isolates dust pollution also includes a protective component;
[0025] The guard assembly seals the roller and the drive assembly.
[0026] In the above technical solution, further, the protection component includes a first protection shell and a second protection shell;
[0027] The first protection shell seals the roller;
[0028] The second protection shell seals the driving motor, and a through hole for the output shaft to pass through is provided at a preset position on the end face of the second protection shell in contact with the first protection shell.
[0029] In the above technical solution, further, the driving component further includes a connecting piece;
[0030] The driving motor is hung on the first protection shell through the connecting piece.
[0031] This application also provides a crystal pulling system, which is characterized by including the above-mentioned barrier device that effectively isolates dust pollution.
[0032] Compared with the prior art, this application has the following beneficial effects:
[0033] This application provides a barrier device that effectively isolates dust pollution, including an adsorption component, a driving component, and a support frame;
[0034] The support frame is a telescopic structure and can extend or retract along a first direction;
[0035] The adsorption component includes a roller part and an adsorption part. One end of the adsorption part is wound around the roller part, and the other end is fixed to the top of the support frame;
[0036] The output shaft of the driving component is connected to the roller part and can drive the roller part to rotate so as to wind or release the adsorption part;
[0037] When the support frame extends along the first direction and the driving component drives the roller part to release the adsorption part, the adsorption part extends along the first direction; when the support frame retracts along the first direction and the driving component drives the roller part to wind the adsorption part, the adsorption part retracts along the first direction and is wound around the roller part.
[0038] In summary, according to the working states of two adjacent furnace platforms, a barrier device for effectively isolating dust pollution can be activated. On one hand, the barrier device for effectively isolating dust pollution can prevent the dust generated by one furnace platform from spreading to the other furnace platform, that is, it cuts off the dust propagation path, thereby ensuring the normal operation of the two furnace platforms. In addition, this adsorption part can also adsorb the dust generated by the furnace platform, that is, the dust will be adsorbed on the adsorption part, that is, the propagated dust is eliminated, and the dust is fundamentally eliminated, that is, there is no dust propagation problem. Therefore, it also ensures the normal operation of the two furnace platforms to a certain extent, and thus improves the control of the quality of single crystal rods.
[0039] The present application also provides a crystal pulling system, which is characterized in that it includes the above-mentioned barrier device for effectively isolating dust pollution. Therefore, it has all the effective effects of the barrier device for effectively isolating dust pollution, and will not be elaborated here too much. BRIEF DESCRIPTION OF THE DRAWINGS
[0040] In order to more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the following will briefly introduce the drawings required to be used in the description of the specific embodiments or the prior art. Obviously, the following drawings are some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.
[0041] Figure 1 It is a schematic structural diagram of the support frame and the adsorption assembly in the barrier device for effectively isolating dust pollution provided by the present application in an extended state;
[0042] Figure 2 For Figure 1 the enlarged view at A in
[0043] Figure 3 It is a schematic structural diagram of the support frame and the adsorption assembly in the barrier device for effectively isolating dust pollution provided by the present application in a retracted state and from a first perspective;
[0044] Figure 4 It is a schematic structural diagram of the support frame and the adsorption assembly in the barrier device for effectively isolating dust pollution provided by the present application in a retracted state and from a second perspective;
[0045] Figure 5 It is a schematic structural diagram of the barrier device for effectively isolating dust pollution provided by the present application with the hidden protection component and the base removed and from a first perspective;
[0046] Figure 6 For Figure 5 the enlarged view at B in
[0047] Figure 7Schematic diagram of the hidden protection component and the base in the barrier device for effectively isolating dust pollution provided by this application and viewed from the second perspective;
[0048] Figure 8 For Figure 7 Enlarged view at C in
[0049] Reference numerals: 1 - adsorption component; 2 - driving component; 3 - support frame; 4 - first direction; 7 - base; 8 - vertical telescopic rod; 9 - frame beam; 10 - first beam; 11 - second beam; 12 - third beam; 13 - fourth beam; 14 - roller; 15 - electrostatic adsorption film; 16 - installation space; 17 - support shaft; 18 - hook; 19 - driving motor; 20 - rotating shaft; 21 - protection component; 22 - first protective shell; 23 - second protective shell; 24 - connecting piece; 25 - second direction. Detailed implementation manners
[0050] The following detailed implementation manners are provided to help readers obtain a comprehensive understanding of the methods, devices, and / or systems described herein. However, after understanding the disclosure of this application, various changes, modifications, and equivalents of the methods, devices, and / or systems described herein will be apparent. For example, the order of operations described herein is merely an example and is not limited to the order set forth herein. Rather, changes that will be apparent after understanding the disclosure of this application can be made, except for operations that must occur in a specific order. In addition, descriptions of features known in the art may be omitted for the sake of clarity and conciseness.
[0051] The features described herein can be implemented in different forms and should not be construed as limited to the examples described herein. Rather, the examples described herein are provided only to illustrate some of the many possible ways of implementing the methods, devices, and / or systems described herein that will be apparent after understanding the disclosure of this application.
[0052] Throughout the specification, when an element (such as a layer, region, or substrate) is described as "on" another element, "connected to" another element, "bonded to" another element, "above" another element, or "covering" another element, it can be directly "on" another element, "connected to" another element, "bonded to" another element, "above" another element, or "covering" another element, or there can be one or more other elements between them. In contrast, when an element is described as "directly on" another element, "directly connected to" another element, "directly bonded to" another element, "directly above" another element, or "directly covering" another element, there can be no other elements between them.
[0053] As used herein, the term "and / or" includes any one of the listed related items and any combination of any two or more of them.
[0054] Although terms such as "first", "second", and "third" may be used herein to describe various components, elements, regions, layers, or parts, these components, elements, regions, layers, or parts are not limited by these terms. Rather, these terms are only used to distinguish one component, element, region, layer, or part from another. Thus, a first component, element, region, layer, or part as referred to in the examples described herein may also be referred to as a second component, element, region, layer, or part without departing from the teachings of the examples.
[0055] For ease of description, spatial relationship terms such as "above", "upper", "below", and "lower" may be used herein to describe the relationship of one element to another as shown in the figures. Such spatial relationship terms are intended to include different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is flipped, an element described as "above" or "upper" relative to another element will then be "below" or "lower" relative to the other element. Thus, the term "above" includes both the orientation of "above" and "below" depending on the spatial orientation of the device. The device may also be positioned in other ways (e.g., rotated 90 degrees or in other orientations), and the spatial relationship terms used herein will be interpreted accordingly.
[0056] The terms used herein are only for describing various examples and are not intended to limit the disclosure. Unless the context clearly indicates otherwise, the singular forms are also intended to include the plural forms. The terms "comprises", "comprising", and "having" list the stated features, quantities, operations, components, elements, and / or combinations thereof that exist, but do not preclude the existence or addition of one or more other features, quantities, operations, components, elements, and / or combinations thereof.
[0057] Due to manufacturing techniques and / or tolerances, variations in the shapes shown in the figures may occur. Thus, the examples described herein are not limited to the specific shapes shown in the figures, but include changes in shape that occur during manufacturing.
[0058] The features of the examples described herein can be combined in various ways that will be apparent after understanding the disclosure of the present application. Additionally, although the examples described herein have various configurations, other configurations are possible as will be apparent after understanding the disclosure of the present application.
[0059] Example 1
[0060] The following will Figures 1 - 8 elaborate in detail on a barrier device provided by the present application that can effectively isolate dust pollution.
[0061] The present application provides a barrier device for effectively isolating dust pollution. By using this barrier device, the effective isolation of two working devices can be achieved, preventing the dust and the like generated by one working device from spreading and polluting the other working device, thereby ensuring the normal operation of the two working devices to a certain extent.
[0062] Taking the application of the present application in the crystal pulling process as an example, the following will elaborate in detail; in the crystal pulling system, there are differences in the processes between different furnace platforms in the workshop, that is, in adjacent furnace platforms, one furnace platform may be performing a feeding operation while the other furnace platform is performing a furnace dismantling operation; however, the furnace platform undergoing furnace dismantling will inevitably generate a large amount of volatile substances such as graphite sealing dust and sediment dust; these volatile substances may have an adverse impact on the working environment of the feeding furnace platform. A barrier device for effectively isolating dust pollution developed by the present application can exactly solve the above problems, ensuring that the furnace platforms with different adjacent processes can all operate normally, and to a certain extent, reducing the impact of the volatile substances generated during the furnace dismantling process on the feeding furnace platform, thereby improving the control of the quality of single crystal rods.
[0063] Specifically, the barrier device for effectively isolating dust pollution is arranged between two adjacent furnace platforms. The barrier device for effectively isolating dust pollution includes an adsorption component 1, a driving component 2, and a support frame 3.
[0064] Among them, as Figure 1 shown, the support frame 3 is a telescopic structure that can extend or retract along the first direction 4; according to Figure 1 the placement method in, the first direction 4 refers to the vertical direction.
[0065] Among them, the adsorption component 1 includes a roller 14 part and an adsorption part. One end of the adsorption part is wound around the roller 14 part, and the other end is fixed to the top of the support frame 3. Since the other end of the adsorption part is fixed to the top of the support frame, when the support frame 3 extends or retracts along the first direction 4, it can drive the adsorption part to extend or retract along with the extension or retraction of the support frame 3. When the adsorption part extends, an isolation barrier can be formed between two adjacent furnace platforms. This isolation barrier can prevent the dust generated by one furnace platform from spreading to the other furnace platform, thereby ensuring the normal operation of the two furnace platforms; in addition, this adsorption part can also adsorb the dust generated by the furnace platform, that is, the dust will be adsorbed on the adsorption part, eliminating the spread dust, fundamentally eliminating the dust, that is, there is no dust spread problem, so it also ensures the normal operation of the two furnace platforms to a certain extent.
[0066] Among them, the output shaft of the driving component 2 is connected to the 14th part of the roller, and can drive the 14th part of the roller to rotate, so that the 14th part of the roller winds or releases the adsorption part; further, in the initial state, that is, when the barrier device for effectively isolating dust pollution is not working, the support frame 3 is in the retracted state, and at the same time the adsorption part is also in the retracted state and wound around the 14th part of the roller; when the barrier device for effectively isolating dust pollution is needed, first make the support frame 3 extend along the first direction 4, and at the same time the driving component 2 rotates forward, the output shaft of the driving component 2 drives the 14th part of the roller to rotate forward, slowly releases the adsorption part, so that the adsorption part extends together with the support frame 3, and finally forms an effective isolation barrier; when the barrier device for effectively isolating dust pollution is used up, first manually identify whether there is too much dust on the adsorption part. If there is too much dust, then cut off the extended part of the adsorption part, and pull out the unexposed adsorption part on the 14th part of the roller and fix it on the top of the support frame 3; if there is little dust, then start the driving component 2 to flip, so that the extended adsorption part winds back around the 14th part of the roller, and at the same time, the support frame 3 also retracts along the first direction 4.
[0067] To sum up, the barrier device for effectively isolating dust pollution can be turned on according to the working states of two adjacent furnace platforms. On the one hand, the barrier device for effectively isolating dust pollution can prevent the dust generated by one furnace platform from spreading to another furnace platform, that is, cut off the dust transmission path, thereby ensuring the normal operation of the two furnace platforms; in addition, this adsorption part can also adsorb the dust generated by the furnace platform, that is, the dust will be adsorbed on the adsorption part, that is, the spreading dust is eliminated, and the dust is eliminated fundamentally, that is, there is no dust transmission problem. Therefore, it also ensures the normal operation of the two furnace platforms to a certain extent, and thus improves the control of the quality of single crystal silicon rods.
[0068] In this embodiment, in combination with Figure 3 as shown, the support frame 3 includes a base 7, a vertical telescopic rod 8 and a frame beam 9.
[0069] Among them, in combination with Figure 4 as shown, the frame beam 9 includes a first beam 10, a second beam 11, a third beam 12 and a fourth beam 13 that are sequentially connected in a rectangular frame shape. Among them, the frame beam 9 is supported on the base 7 by four vertical telescopic rods 8.
[0070] It should be noted that: the frame beam 9 is not limited to the above-mentioned rectangular frame structure composed of the first beam 10, the second beam 11, the third beam 12 and the fourth beam 13, and may also include three beams, a triangular frame structure composed of three beams. When the frame beam 9 forms a triangular frame structure, the base 7 is also triangular, and only three vertical telescopic rods 8 are provided.
[0071] Among them, the vertical telescopic rod 8 can extend or retract along the first direction 4 to drive the frame to extend or retract along the first direction 4.
[0072] Furthermore, taking the vertical telescopic rod 8 as an example including the first telescopic section and the second telescopic section, its telescopic structure is described in detail, the first telescopic section is sleeved with the second telescopic section, a plurality of spaced limiting holes are provided on the side wall of the first telescopic section along the first direction 4, and a plurality of spaced protrusions are provided on the side wall of the second telescopic section along the first direction 4, which are adapted to the limiting holes, and the protrusions are clamped in different limiting holes, so that the second telescopic section can be extended longer than the first telescopic section; the structure of this vertical telescopic rod 8 is understandable to those skilled in the art, and no drawings are provided here. It should also be noted that the above can be adjusted manually; the above is described by taking the vertical telescopic rod 8 having two telescopic sections as an example, and more telescopic sections can be used in actual use. It should also be noted that the vertical telescopic rod 8 can also adopt other achievable structures, all of which are within the protection scope of this application, such as a telescopic rod structure disclosed in patent No. 201821131664.1.
[0073] In this embodiment, combined Figure 6 As shown, the adsorption assembly 1 includes a roller 14 that can serve as a roller 14 portion and an electrostatic adsorption film 15 that can serve as an adsorption portion.
[0074] Specifically, combined Figure 1 As shown, the roller 14 is arranged in the installation space 16 surrounded by the base 7, the vertical telescopic rod 8 and the frame beam 9, and the roller 14 is located at the bottom of the installation space 16, and the axis extension direction of the roller 14 is parallel to the second direction 25. Figure 1 There is a mark in it, which can be understood as the width direction of the device.
[0075] Specifically, one end of the electrostatic adsorption film 15 is wound around the roller 14 and the other end is hung on the frame beam 9 .
[0076] Furthermore, combined with Figure 5 , Figure 6 As shown, the adsorption assembly 1 further includes a support shaft 17 ; both ends of the support shaft 17 are respectively fixed to the first beam 10 and the third beam 12 , so that the axial direction of the support shaft 17 is parallel to the axial direction of the roller 14 .
[0077] Furthermore, combined with Figure 2 and Figure 6 As shown, the adsorption assembly 1 further includes a hook 18; both ends of the support shaft 17 are respectively hung on the first beam 10 and the second beam 11 through the hook 18. In summary, one end of the electrostatic adsorption film 15 is wound around the roller 14 located at the bottom of the installation space 16, and one end of the electrostatic adsorption film 15, that is, the end away from the roller 14, is fixed to the support shaft 17.
[0078] In this embodiment, combined Figure 7 andFigure 8 As shown, the driving assembly 2 includes a driving motor 19; a rotating shaft 20 penetrates through the inside of the roller 14 along its axial direction. The output shaft of the driving motor 19 is connected to the rotating shaft 20. When the driving motor 19 is started, the rotating shaft 20 can be driven to rotate through the output shaft, and the rotating rotating shaft 20 can further drive the roller 14 to rotate.
[0079] In the actual use process, it can be specified that when the driving motor 19 rotates forward, the roller 14 also rotates forward. At this time, the roller 14 can release the electrostatic adsorption film 15; when the driving motor 19 rotates in reverse, the roller 14 rotates in reverse. At this time, the roller 14 can wind the electrostatic adsorption film 15.
[0080] In this embodiment, in combination with Figure 1 As shown, the barrier device for effectively isolating dust pollution further includes a protection assembly 21. The protection assembly 21 seals the roller 14 and the driving assembly 2, so that the roller 14 and the driving assembly 2 are in a pollution-free environment, and the service life of the roller 14 and the driving assembly 2 is improved.
[0081] Specifically, in combination with Figure 1 As shown, the protection assembly 21 includes a first protection shell 22 and a second protection shell 23; the first protection shell 22 seals the roller 14; the second protection shell 23 seals the driving motor 19, and a through hole for the output shaft to pass through is provided at the end surface where the second protection shell 23 contacts the first protection shell 22 at a preset position.
[0082] It should be noted that: in combination with Figure 1 As shown, the first protection shell 22 is an arched structure, and the second protection shell 23 is a cylindrical structure. However, the present application is not limited to Figure 1 the structures shown, and can also be other shapes. In addition, there is a large gap between the first protection shell 22 and the roller 14, so that the roller 14 can be used to wind the electrostatic adsorption film 15.
[0083] Specifically, in combination with Figure 8 As shown, the driving assembly 2 further includes a connecting member 24; the driving motor 19 is hung on the first protection shell 22 through the connecting member 24, and the driving motor 19 is fixed by using the first connecting member 24. Preferably, the connecting member 24 is a bolt.
[0084] It should also be noted that: the present application can be embedded in the ground for use, that is, the whole device is embedded in the ground, and the frame beam 9 is kept horizontal with the ground (in this case, the vertical telescopic rod 8 can be set in an electric manner); or the base 7 is fixed on the ground for use (in this case, the vertical telescopic rod 8 can be set in a manual adjustment manner); in addition, universal wheels can also be installed under the base 7 to facilitate movement and improve the flexibility of the device.
[0085] Embodiment 2
[0086] The present application also provides a crystal pulling system, which is characterized by including the above-mentioned barrier device for effectively isolating dust pollution. Therefore, it has all the effective effects of the barrier device for effectively isolating dust pollution, and will not be elaborated here too much.
[0087] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.
Claims
1. A barrier device for effectively isolating dust pollution, characterized in that, It includes an adsorption component, a driving component and a supporting frame; The support frame is a telescopic structure, which can be extended or retracted along a first direction; The adsorption assembly includes a roller part and an adsorption part, one end of the adsorption part is wound around the roller part, and the other end is fixed to the top of the support frame; The output shaft of the driving assembly is connected to the roller part and can drive the roller part to rotate so that the roller part wraps around or releases the adsorption part; When the support frame extends along the first direction and the driving component drives the roller portion to release the adsorption portion, the adsorption portion extends along the first direction; when the support frame retracts along the first direction and the driving component drives the roller portion to wrap around the adsorption portion, the adsorption portion retracts along the first direction and wraps around the roller portion.
2. The barrier device for effectively isolating dust pollution according to claim 1, characterized in that The support frame includes a base, a vertical telescopic rod and a frame beam; The frame beam is supported on the base through the vertical telescopic rod; The vertical telescopic rod can extend or retract along the first direction to drive the frame to extend or retract along the first direction.
3. The barrier device for effectively isolating dust pollution according to claim 2, wherein, The adsorption component includes a roller that can serve as the roller part and an electrostatic adsorption film that can serve as the adsorption part; The roller is arranged in an installation space surrounded by the base, the vertical telescopic rod and the frame beam; One end of the electrostatic adsorption film is wound around the roller and the other end is hung on the frame beam.
4. The barrier device for effectively isolating dust pollution according to claim 3, wherein The adsorption assembly also includes a support shaft; The two ends of the support shaft are overlapped with the two ends of the frame beam; One end of the electrostatic adsorption film away from the roller is hung on the support shaft.
5. The barrier device for effectively isolating dust pollution according to claim 4, wherein, The adsorption assembly also includes a hook; Both ends of the support shaft are hung on the frame beam through the hooks.
6. The barrier device for effectively isolating dust pollution according to claim 3, characterized in that, The driving assembly includes a driving motor; a rotating shaft runs through the interior of the roller along its axial direction; The output shaft of the driving motor is connected to the rotating shaft, and the output shaft can drive the rotating shaft to rotate, so as to drive the roller to rotate.
7. The barrier device for effectively isolating dust pollution according to claim 6, characterized in that, The barrier device for effectively isolating dust pollution also includes a protective component; The guard assembly seals the roller and the drive assembly.
8. The barrier device for effectively isolating dust pollution according to claim 7, characterized in that The protective assembly includes a first protective shell and a second protective shell; The first protective shell seals the roller; The second protective shell seals the driving motor, and a through hole for the output shaft to pass through is formed at a preset position on the end surface of the second protective shell that contacts the first protective shell.
9. The barrier device for effectively isolating dust pollution according to claim 8, characterized in that, The drive assembly also includes a connecting member; The driving motor is hung on the first protective shell through the connecting member.
10. A crystal pulling system, characterized in that, A barrier device for effectively isolating dust pollution comprising the barrier device described in any one of claims 1-9.
Citation Information
Patent Citations
Telescopic rod structure
CN208442128U