Auxiliary fixture for clamping source furnace

Abstract

The utility model relates to the technical field of semiconductor equipment, in particular to an auxiliary fixture for clamping a source furnace. The source furnace clamping auxiliary jig comprises a mounting part, a transfer assembly, an angle adjusting assembly and a locking assembly, a source furnace can be mounted and fixed by the mounting part by inclining a preset angle relative to the horizontal plane, the transfer assembly is used for driving the mounting part to move along the ground, and the angle adjusting assembly is arranged on the transfer assembly; the angle adjusting assembly can drive the mounting piece to rotate by any angle relative to the horizontal plane, the locking assembly can lock and fix the mounting piece and the transferring assembly, and inclined fixing of the source furnace and transferring of the source furnace along the ground are achieved. The requirement that the included angle between the source furnace and the horizontal plane is smaller than that between the source furnace and the horizontal plane when the source furnace and the main machine system are installed and fixed can be met, the source furnace fixing device can be suitable for source furnaces of different specifications, and the applicability is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, in particular to a source furnace clamping auxiliary fixture. Background Art

[0002] During the operation of a semiconductor molecular beam epitaxy equipment, it is usually necessary to first remove the source furnace, then load the source ingot into the source furnace, and then reinstall the source furnace onto the host system. When installing the source furnace, it is necessary to align the source furnace with the corresponding interfaces on the host system, place a sealing ring between the two side interfaces, and then fix it with screws. The successfully installed source furnace should achieve strict sealing at the interfaces.

[0003] In the related art, it is necessary for workers to manually support the source furnace to tilt the source furnace at a certain angle relative to the horizontal plane to improve the source loading efficiency and effect of the source furnace and the installation efficiency of the source furnace and the host system. However, due to the large mass of the source furnace and the source ingot, the labor intensity of supporting the source furnace for a long time is relatively large, and it is easy to get tired. Moreover, it is difficult to ensure that the tilt angle of the source furnace remains unchanged when manually supporting the source furnace, thereby reducing the source loading efficiency and effect of the source furnace and the installation efficiency of the source furnace and the host system.

[0004] Therefore, it is urgent to invent a source furnace clamping auxiliary fixture to solve the above problems. Content of the Utility Model

[0005] The purpose of the utility model is to provide a source furnace clamping auxiliary fixture to achieve stable clamping and fixing of the source furnace, improve the source loading efficiency and effect of the source furnace, and improve the installation efficiency of the source furnace and the host system.

[0006] To achieve the above object, the utility model adopts the following technical solutions:

[0007] The source furnace clamping auxiliary fixture includes:

[0008] A mounting member, which can mount and fix the source furnace at a preset angle relative to the horizontal plane;

[0009] A transfer assembly, which is used to drive the mounting member to move along the ground;

[0010] An angle adjustment assembly and a locking assembly. The angle adjustment assembly is arranged on the transfer assembly. The angle adjustment assembly can drive the mounting member to rotate at any angle relative to the horizontal plane, and the locking assembly can lock and fix the mounting member and the transfer assembly.

[0011] As an optional solution, the mounting member includes:

[0012] A first platform, the platform end face of which is parallel to the horizontal plane; and

[0013] The second platform is fixed to the first platform, and there is an included angle between the platform end face of the second platform and the platform end face of the first platform. The source furnace is vertically arranged at the platform end face of the second platform that is away from the first platform among the two platform end faces of the second platform, and the included angle between the source furnace and the horizontal plane is complementary to the included angle between the platform end face of the second platform and the platform end face of the first platform.

[0014] As an alternative, there are fixed through holes perpendicular to the platform end face on the second platform. The source furnace clamping auxiliary jig further includes a first bolt and a nut. The first bolt sequentially passes through the flange through hole on the flange of the source furnace and the fixed through hole and is threadedly fixed to the nut.

[0015] As an alternative, the angle adjustment assembly includes:

[0016] Four second bolts are located below the mounting member. The lower end face of the mounting member is rectangular, and the four second bolts are respectively arranged at the four corners of the rectangle. The second bolts extend in the up and down direction, and the second bolts threadedly pass through the transfer assembly from bottom to top and abut against the lower end face of the mounting member.

[0017] As an alternative, an extension portion is provided on the upper end face of the transfer assembly. The extension portion extends outward along the upper end face, and the thickness of the extension portion in the up and down direction is less than the thickness of the transfer assembly in the up and down direction. The second bolts threadedly pass through the extension portion from bottom to top and abut against the lower end face of the mounting member.

[0018] As an alternative, the locking assembly includes:

[0019] A locking frame is provided with a through slot; and

[0020] A locking member passes through the through slot and is locked and fixed to the mounting member, and the locking member passes through the through slot and is locked and fixed to the transfer assembly. The locking frame is clamped and fixed between the locking member and the side wall of the mounting member and clamped and fixed between the locking member and the side wall of the transfer assembly.

[0021] As an alternative, the locking member is a third bolt, and threaded holes are provided on the side walls of both the mounting member and the transfer assembly. The third bolt is threadedly fixed to the threaded hole after passing through the through slot.

[0022] As an alternative, at least two groups of the locking assemblies are arranged inside the source furnace clamping auxiliary jig, and at least two groups of the locking assemblies are arranged at intervals along the outer peripheral wall of the mounting member.

[0023] As an alternative, the transfer assembly includes:

[0024] A base, at which an angle adjustment component and a locking component are provided; and

[0025] A universal wheel, which is arranged below the base and connected to the base, and is used to drive the base to move along the ground.

[0026] As an optional solution, at least three universal wheels are arranged in the transfer component, at least three universal wheels jointly support the base, and at least three universal wheels synchronously drive the base to move along the ground.

[0027] Advantages of the present utility model:

[0028] The source furnace clamping auxiliary fixture provided by the present utility model realizes the inclined fixation of the source furnace by fixing the source furnace on the mounting member at a preset angle relative to the horizontal plane, which is convenient for loading the source furnace and the installation of the source furnace and the host system. By setting a transfer component to drive the mounting member to move along the ground, the source furnace on the mounting member can be driven to move along the ground, improving the transfer efficiency of the source furnace. By setting an angle adjustment component on the transfer component to drive the mounting member to rotate at any angle in the horizontal direction, the inclined angle of the source furnace relative to the horizontal plane can be further adjusted, and the mounting member and the transfer component are locked and fixed by a locking component, which can not only meet the requirement that the angle between the source furnace and the horizontal plane during source loading of the source furnace is smaller than the angle between the source furnace and the horizontal plane during the installation and fixation of the source furnace and the host system, but also be applicable to source furnaces of different specifications, improving the applicability. Description of the drawings

[0029] Figure 1 is a side view of the source furnace clamping auxiliary fixture provided by an embodiment of the present utility model;

[0030] Figure 2 is a bottom view of the source furnace clamping auxiliary fixture provided by an embodiment of the present utility model;

[0031] Figure 3 is a structural schematic diagram of the mounting member provided by an embodiment of the present utility model;

[0032] Figure 4 is a schematic diagram of the mechanism of the mounting member provided by an embodiment of the present utility model.

[0033] In the figure:

[0034] 100, mounting member; 110, first platform; 120, second platform;

[0035] 200, angle adjustment component;

[0036] 300, locking component; 310, locking frame; 311, through slot; 320, locking member;

[0037] 400, Transfer Component; 410, Base; 411, Extension Portion; 420, Universal Wheel. Detailed Implementation Manner

[0038] To make the technical problems solved by the present utility model, the technical solutions adopted, and the achieved technical effects clearer, the technical solutions of the present utility model will be further described below with reference to the accompanying drawings and through specific implementation manners.

[0039] In the description of the present utility model, unless otherwise clearly defined and limited, the terms "connected", "connected to", and "fixed" shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0040] In the present utility model, unless otherwise clearly defined and limited, the first feature being "above" or "below" the second feature may include the direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through other features between them. Moreover, the first feature being "above", "above the top", and "on the top" of the second feature includes the first feature being directly above and obliquely above the second feature, or merely indicating that the horizontal height of the first feature is higher than that of the second feature. The first feature being "below", "below the bottom", and "under the bottom" of the second feature includes the first feature being directly below and obliquely below the second feature, or merely indicating that the horizontal height of the first feature is lower than that of the second feature.

[0041] In the description of this embodiment, the orientation or positional relationship terms such as "above", "below", "left", and "right" are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of description and simplifying the operation, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present utility model. In addition, the terms "first" and "second" are only used for differentiation in description and have no special meaning.

[0042] During the operation of a semiconductor molecular beam epitaxy device, usually the source furnace needs to be removed first, then the source ingot is loaded into the source furnace, and then the source furnace is reinstalled onto the host system. When installing the source furnace, it is necessary to align the source furnace with the corresponding interfaces on the host system, place a sealing ring between the two side interfaces, and then fix it with screws. The successfully installed source furnace should achieve strict sealing at the interfaces.

[0043] In the related art, it is necessary for workers to manually support the source furnace to tilt the source furnace at a certain angle relative to the horizontal plane, so as to improve the source loading efficiency and effect of the source furnace and the installation efficiency between the source furnace and the host system. However, due to the large mass of the source furnace and the source ingot, the labor intensity of supporting the source furnace for a long time is relatively large, which is easy to cause fatigue. Moreover, it is difficult to ensure that the tilting angle of the source furnace remains unchanged when manually supporting the source furnace, thereby reducing the source loading efficiency and effect of the source furnace and the installation efficiency between the source furnace and the host system.

[0044] To solve the above problems, as Figure 1 and Figure 2 shown, the present utility model provides an auxiliary fixture for clamping a source furnace. The auxiliary fixture for clamping a source furnace includes a mounting member 100, an angle adjusting assembly 200, a locking assembly 300 and a transfer assembly 400. Among them, the mounting member 100 can mount and fix the source furnace at a preset angle relative to the horizontal plane, and the transfer assembly 400 is used to drive the mounting member 100 to move along the ground. The angle adjusting assembly 200 is arranged on the transfer assembly 400, and the angle adjusting assembly 200 can drive the mounting member 100 to rotate at any angle relative to the horizontal plane. The locking assembly 300 can lock and fix the mounting member 100 and the transfer assembly 400.

[0045] The auxiliary fixture for clamping a source furnace realizes the tilting and fixing of the source furnace by mounting and fixing the source furnace at a preset angle relative to the horizontal plane on the mounting member 100, which is convenient for source loading of the source furnace and the installation between the source furnace and the host system. By setting the transfer assembly 400 to drive the mounting member 100 to move along the ground, the source furnace on the mounting member 100 can be driven to move along the ground, improving the transfer efficiency of the source furnace. By setting the angle adjusting assembly 200 on the transfer assembly 400 to drive the mounting member 100 to rotate at any angle in the horizontal direction, the tilting angle of the source furnace relative to the horizontal plane can be further adjusted, and the mounting member 100 and the transfer assembly 400 are locked and fixed by the locking assembly 300, which can not only meet the requirement that the included angle between the source furnace and the horizontal plane during source loading of the source furnace is smaller than the included angle between the source furnace and the horizontal plane when the source furnace is installed and fixed to the host system, but also be applicable to source furnaces of different specifications, improving the applicability.

[0046] Specifically, as Figure 3 and Figure 4As shown, the mounting member 100 includes a first platform 110 and a second platform 120, wherein the platform end face of the first platform 110 is parallel to the horizontal plane, the second platform 120 is fixed to the first platform 110, there is an angle between the platform end face of the second platform 120 and the platform end face of the first platform 110, the source furnace is vertically arranged at the platform end face of the second platform 120 that is away from the first platform 110 among the two platform end faces, and the angle between the source furnace and the horizontal plane and the angle between the platform end face of the second platform 120 and the platform end face of the first platform 110 are complementary angles. By setting the mounting member 100 to be a first platform 110 and a second platform 120 fixed together, so that the platform end face of the first platform 110 is parallel to the horizontal plane, there is an angle between the platform end face of the second platform 120 and the platform end face of the first platform 110, and the source furnace is vertically set at the platform end face of the two platform end faces of the second platform 120 away from the first platform 110, so that the angle between the source furnace and the horizontal plane and the angle between the platform end face of the second platform 120 and the platform end face of the first platform 110 can be complementary angles. It should be noted that in this embodiment, the specific value of the preset angle of the angle between the source furnace and the horizontal plane is 45°, and accordingly, the angle between the platform end face of the second platform 120 and the platform end face of the first platform 110 is 45°. In other embodiments, the size of the preset angle can also be arbitrarily adjusted within the range of greater than 0° and less than 90° according to actual needs, and this embodiment does not make specific limitations.

[0047] In this embodiment, a fixing through hole perpendicular to the end face of the platform is provided on the second platform 120, and the source furnace clamping auxiliary fixture further includes a first bolt and a nut, and the first bolt is sequentially passed through the flange through hole and the fixing through hole on the flange of the source furnace and is threadedly fixed with the nut. By providing a fixing through hole perpendicular to the end face of the platform on the second platform 120, the first bolt is sequentially passed through the flange through hole and the fixing through hole on the flange of the source furnace and is threadedly fixed with the nut, so that the first bolt and the nut can detachably fix the source furnace and the second platform 120 together, which not only has a good fixing effect, but also facilitates the disassembly of the source furnace and the second platform 120.

[0048] It should be noted that, in this embodiment, 12 flange through holes are arranged at intervals along the flange shape on the flange of the source furnace. Accordingly, twelve first bolts and twelve nuts need to be arranged in a matching manner, and twelve fixing through holes are provided on the second platform 120 to ensure that each flange through hole is arranged correspondingly to a fixing through hole, a first bolt and a nut. In other embodiments, the number of first bolts, nuts and fixing through holes can also be adaptively adjusted according to the specific number of flange through holes on the flange of the source furnace, and this embodiment does not make specific limitations.

[0049] As an alternative, the angle adjustment assembly 200 includes four second bolts. The second bolts are located below the first platform 110. The lower end surface of the first platform 110 is rectangular. The four second bolts are respectively arranged at the four corners of the rectangle. The second bolts extend in the up and down direction. The second bolts are threaded through the transfer assembly 400 from bottom to top and abut against the lower end surface of the first platform 110. By respectively arranging the second bolts extending in the up and down direction at the four corners of the lower end surface of the rectangular first platform 110, threading the second bolts through the transfer assembly 400 from bottom to top in sequence and abutting against the lower end surface of the first platform 110, the first platform 110 and the source furnace installed on the second platform 120 can be jacked up by screwing the second bolts. By combining the individual adjustment of the second bolts at the four corners, the effect of driving the source furnace to rotate arbitrarily in the horizontal plane can be achieved. Moreover, by screwing the second bolts to adjust the rotation angle of the source furnace relative to the horizontal plane, the adjustment accuracy is high.

[0050] Specifically, as Figure 2 shown, when it is necessary to adjust the rotation angle of the source furnace in the front-back direction in the horizontal plane, synchronously adjust the two second bolts at the front end or the two second bolts at the rear end. When it is necessary to adjust the rotation angle of the source furnace in the left-right direction in the horizontal plane, synchronously adjust the two second bolts at the left end or the two second bolts at the right end. When it is necessary to adjust the rotation angle of the source furnace in the left-front direction in the horizontal plane, adjust the second bolt at the left front end. When it is necessary to adjust the rotation angle of the source furnace in the left-rear direction in the horizontal plane, adjust the second bolt at the left rear end. When it is necessary to adjust the rotation angle of the source furnace in the right-front direction in the horizontal plane, adjust the second bolt at the right front end. When it is necessary to adjust the rotation angle of the source furnace in the right-rear direction in the horizontal plane, adjust the second bolt at the right rear end.

[0051] To improve the operation convenience of adjusting the second bolts, as Figure 1 shown, an extension portion 411 is provided on the upper end surface of the transfer assembly 400. The extension portion 411 extends outward along the upper end surface. The thickness of the extension portion 411 in the up and down direction is less than the thickness of the transfer assembly 400 in the up and down direction. The second bolts are threaded through the extension portion 411 from bottom to top and abut against the lower end surface of the first platform 110. By providing the extension portion 411 extending outward along the upper end surface on the upper end surface of the transfer assembly 400, so that the second bolts are threaded through the extension portion 411 and then abut against the lower end surface of the first platform 110, an operation space can be provided at the lower end of the extension portion 411, so that the staff can screw the second bolts in the operation space, achieving the effect of providing the operation convenience for adjusting the second bolts.

[0052] In an alternative solution, the locking assembly 300 includes a locking frame 310 and a locking member 320. Among them, a through slot 311 is provided on the locking frame 310. The locking member 320 passes through the through slot 311 and is locked and fixed to the first platform 110, and the locking member 320 passes through the through slot 311 and is locked and fixed to the transfer assembly 400. The locking frame 310 is clamped and fixed between the locking member 320 and the side wall of the first platform 110 and between the locking member 320 and the side wall of the transfer assembly 400. By using the locking member 320 to pass through the through slot 311 respectively and then lock and fix it to the first platform 110 and the transfer assembly 400, and clamping the locking frame 310 between the side wall of the first platform 110 and the locking member 320 and between the side wall of the transfer assembly 400 and the locking member 320 respectively, the locking and fixing between the first platform 110 and the transfer assembly 400 is realized, and the fixing effect is good. It should be noted that in this embodiment, the through slot 311 is an oblong hole, so that the locking member 320 can adjust the locking position between the locking member 320 and the locking frame 310 along the oblong hole according to the rotation angle of the first platform 110.

[0053] Specifically, the locking member 320 is a third bolt. Threaded holes are provided on the side walls of both the first platform 110 and the transfer assembly 400. After the third bolt passes through the through slot 311, it is threadedly fixed to the threaded hole. When it is necessary to lock and fix the first platform 110 and the transfer assembly 400, any one of the two third bolts passes through the through slot 311 and is threadedly fixed to the threaded hole on the side wall of the first platform 110, and the other of the two third bolts passes through the through slot 311 and is threadedly fixed to the threaded hole on the side wall of the transfer assembly 400, so that the locking frame 310 is simultaneously clamped and fixed by the third bolt and the first platform 110 and by the third bolt and the transfer assembly 400 to complete the locking and fixing of the first platform 110 and the transfer assembly 400. When it is necessary to adjust the rotation angle of the first platform 110 relative to the horizontal plane, the two third bolts are loosened or removed, and then the second bolt in the angle adjustment assembly 200 is adjusted. Subsequently, the locking frame 310 is adaptively rotated so that the through slot 311 in the locking frame 310 is respectively aligned with the threaded hole on the side wall of the first platform 110 and the threaded hole on the transfer assembly 400. Finally, any one of the third bolts is passed through the through slot 311 again and threadedly fixed to the threaded hole on the side wall of the first platform 110, and the other is passed through the through slot 311 and threadedly fixed to the threaded hole on the side wall of the transfer assembly 400.

[0054] To improve the fixing effect between the first platform 110 and the transfer assembly 400, at least two groups of locking assemblies 300 are provided in the source furnace clamping auxiliary jig, and the at least two groups of locking assemblies 300 are arranged at intervals along the outer peripheral wall of the mounting member 100. It should be noted that in this embodiment, as Figure 2As shown in the figure, four sets of locking components 300 are provided inside the source furnace clamping auxiliary jig. The four sets of locking components 300 are grouped in pairs and arranged at the left and right ends of the first platform 110 to fix the first platform 110 and the transfer component 400 together in the left-right direction. In other embodiments, the number and setting positions of the locking components 300 can also be adjusted within the range of two sets and more than two sets according to actual needs, and no specific limitation is made in this embodiment.

[0055] In an alternative solution, as Figure 1 shown, the transfer component 400 includes a base 410 and universal wheels 420. Among them, an angle adjustment component 200 and a locking component 300 are provided at the base 410. The universal wheels 420 are arranged below the base 410 and connected to the base 410. The universal wheels 420 are used to drive the base 410 to move along the ground. By respectively arranging the angle adjustment component 200 and the locking component 300 at the base 410 and arranging the universal wheels 420 below the base 410, and driving the base 410 to move along the ground by the universal wheels 420, the effect of driving the source furnace to move along the ground is achieved. It should be noted that in this embodiment, an outwardly extending extension portion 411 is provided on the base 410.

[0056] To further improve the driving effect of the universal wheels 420 on the base 410, at least three universal wheels 420 are provided inside the transfer component 400. The at least three universal wheels 420 jointly support the base 410, and the at least three universal wheels 420 synchronously drive the base 410 to move along the ground. It should be noted that in this embodiment, as Figure 2 shown, four universal wheels 420 are provided inside the transfer component 400. The four universal wheels 420 are respectively arranged at the left front end, left rear end, right front end, and right rear end of the base 410. The four universal wheels 420 jointly support and drive the base 410 to move along the ground. In other embodiments, the specific number of the universal wheels 420 can also be arbitrarily adjusted within the range of three and more than three according to actual needs, and no specific limitation is made in this embodiment.

[0057] Obviously, the above embodiments of the present invention are only examples for clearly explaining the present invention, and are not limitations on the implementation manners of the present invention. For those of ordinary skill in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to enumerate all the implementation manners here. Any modifications, equivalent replacements, and improvements made within the spirit and principle of the present invention shall be included in the protection scope of the claims of the present invention.

Claims

1. Source furnace clamping auxiliary jig, characterized in that, Comprising: A mounting member (100) capable of mounting and fixing the source furnace at a preset angle relative to the horizontal plane; A transfer assembly (400) for driving the mounting member (100) to move along the ground; An angle adjustment assembly (200) and a locking assembly (300), the angle adjustment assembly (200) is disposed on the transfer assembly (400), the angle adjustment assembly (200) can drive the mounting member (100) to rotate at any angle relative to the horizontal plane, and the locking assembly (300) can lock and fix the mounting member (100) and the transfer assembly (400).

2. The source furnace clamping auxiliary jig according to claim 1, wherein The mounting member (100) includes: A first platform (110) whose platform end face is parallel to the horizontal plane; and A second platform (120) fixed to the first platform (110), there is an included angle between the platform end face of the second platform (120) and the platform end face of the first platform (110), the source furnace is vertically disposed at the platform end face of the second platform (120) that is away from the first platform (110) among the two platform end faces, and the included angle between the source furnace and the horizontal plane and the included angle between the platform end face of the second platform (120) and the platform end face of the first platform (110) are complementary angles.

3. The source furnace clamping auxiliary fixture according to claim 2, wherein A fixing through hole perpendicular to the platform end face is provided on the second platform (120), and the source furnace clamping auxiliary jig further includes a first bolt and a nut, the first bolt sequentially passes through the flange through hole on the flange of the source furnace and the fixing through hole and is threadedly fixed to the nut.

4. The source furnace clamping auxiliary jig according to any one of claims 1 to 3, characterized in that, The angle adjustment assembly (200) includes: Four second bolts, the second bolts are located below the mounting member (100), the lower end face of the mounting member (100) is rectangular, the four second bolts are respectively arranged at the four corners of the rectangle, the second bolts extend in the up and down direction, and the second bolts threadedly pass through the transfer assembly (400) from bottom to top and abut against the lower end face of the mounting member (100).

5. The source furnace clamping auxiliary jig according to claim 4, characterized in that, An extension portion (411) is provided on the upper end face of the transfer assembly (400), the extension portion (411) extends outward along the upper end face, the thickness of the extension portion (411) in the up and down direction is less than the thickness of the transfer assembly (400) in the up and down direction, and the second bolts threadedly pass through the extension portion (411) from bottom to top and abut against the lower end face of the mounting member (100).

6. The source furnace clamping auxiliary jig according to any one of claims 1 to 3, characterized in that The locking assembly (300) includes: A locking frame (310) provided with a through slot (311); and A locking member (320) passes through the through slot (311) to be locked and fixed to the mounting member (100), and the locking member (320) passes through the through slot (311) to be locked and fixed to the transfer assembly (400). The locking frame (310) is clamped and fixed between the locking member (320) and the side wall of the mounting member (100) and between the locking member (320) and the side wall of the transfer assembly (400).

7. The source furnace clamping auxiliary jig according to claim 6, characterized in that, The locking member (320) is a third bolt, and threaded holes are provided on the side walls of both the mounting member (100) and the transfer assembly (400). After passing through the through slot (311), the third bolt is threadedly fixed to the threaded hole.

8. The source furnace clamping auxiliary jig according to claim 6, characterized in that, At least two sets of the locking assemblies (300) are provided inside the source furnace clamping auxiliary jig, and the at least two sets of the locking assemblies (300) are arranged at intervals along the outer peripheral wall of the mounting member (100).

9. The source furnace clamping auxiliary jig according to any one of claims 1 to 3, characterized in that The transfer assembly (400) includes: A base (410) where the angle adjustment assembly (200) and the locking assembly (300) are provided; and A universal wheel (420) is provided below the base (410) and connected to the base (410). The universal wheel (420) is used to drive the base (410) to move along the ground.

10. The source furnace clamping auxiliary jig according to claim 9, wherein At least three universal wheels (420) are provided inside the transfer assembly (400). The at least three universal wheels (420) jointly support the base (410), and the at least three universal wheels (420) synchronously drive the base (410) to move along the ground.

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