Vacuum pump

Abstract

The embodiment of the utility model provides a vacuum pump, and relates to the technical field of vacuum pumps. The vacuum pump comprises a pump body and a cooling plate, the pump body is provided with an air cavity and a cooling cavity, and the cooling cavity wraps the air cavity; the cooling plate is connected with the vacuum pump and is provided with a water cavity which is communicated with the cooling chamber; a water inlet hole and a water outlet hole are formed in the face, away from the pump body, of the cooling plate and communicate with the water cavity. The water inlet hole and the water outlet hole are formed in the same surface of the cooling plate, so that the connecting structure of water inlet and outlet paths is simplified, the manufacturing cost is reduced, and cost reduction and efficiency improvement are facilitated. In addition, a large amount of water can be stored by arranging the water cavity in the cooling plate, the cooling plate is in direct contact with the pump body, the cooling plate can directly exchange heat with the pump body, and large-area cooling of the pump body part connected with the cooling plate can be achieved. According to the vacuum pump, the circulating water amount can be increased, the contact area of cooling water and the pump body is increased, and the pump body can be cooled more easily.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum pumps, and more specifically, to a vacuum pump. Background Art

[0002] With the development of the economy, the progress of society, and the rise of the photovoltaic semiconductor industry, newer and higher requirements have been put forward for the functions of equipment. At present, Roots pumps, claw pumps, and horizontal screw vacuum pumps are mostly used in the domestic semiconductor, photovoltaic, and chemical industries. Most of the existing vacuum pumps adopt a cooling method in which a cooling plate is installed on the pump body. The cooling plate has grooves, and cooling pipes are embedded in the grooves. Water pipes are connected to introduce cooling water, so as to reduce the temperature of the cylinder block.

[0003] However, the circulating water volume of this cooling method is small, the temperature reduction of the pump body is small, and thermal deformation may still occur, which may further lead to the situation of pump jamming. Summary of the Utility Model

[0004] The utility model provides a vacuum pump, which can increase the circulating water volume, and increase the contact area between the cooling water and the pump body, making it easier to cool the pump body.

[0005] The embodiments of the utility model can be implemented as follows:

[0006] The embodiments of the utility model provide a vacuum pump, which includes:

[0007] A pump body, which has an air cavity and a cooling chamber, and the cooling chamber wraps the air cavity;

[0008] A cooling plate, which is connected to the pump body, and the cooling plate has a water cavity, and the water cavity is communicated with the cooling chamber;

[0009] One side of the cooling plate away from the pump body is provided with a water inlet hole and a water outlet hole, and both the water inlet hole and the water outlet hole are communicated with the water cavity.

[0010] In an optional embodiment, a communication hole is provided on the end face of the pump body close to the cooling plate, and the water cavity and the cooling chamber are communicated through the communication hole.

[0011] In an optional embodiment, a drain hole is provided on the pump body, and the drain hole is communicated with the cooling chamber. The drain hole is used to drain the cooling water in the cooling plate out of the water cavity and the cooling chamber.

[0012] In an optional embodiment, the vacuum pump further includes a plug. One side of the cooling plate provided with the water inlet hole and the water outlet hole is further provided with an air hole, and the plug is used to seal the air hole when the vacuum pump is working normally.

[0013] In an alternative embodiment, the cooling plate is a hollow cuboid.

[0014] In an alternative embodiment, a sealing groove is provided on the surface of the cooling plate connected to the pump body, and the sealing groove is used for installing a sealing ring.

[0015] In an alternative embodiment, the sealing ring is an O-ring.

[0016] In an alternative embodiment, the water inlet hole is a straight pipe thread hole, and / or the water outlet hole is a straight pipe thread hole.

[0017] In an alternative embodiment, the cooling plate is detachably connected to the pump body.

[0018] In an alternative embodiment, a first mounting hole is provided on the cooling plate, and a second mounting hole is provided on the pump body. The cooling plate and the pump body are detachably connected through the first mounting hole and the second mounting hole.

[0019] The beneficial effects of the vacuum pump according to the embodiments of the present invention include:

[0020] The vacuum pump includes a pump body and a cooling plate. The pump body has an air chamber and a cooling chamber, and the cooling chamber wraps the air chamber. The pump body extracts and discharges gas through the air chamber. A large amount of heat is generated during the operation of the pump body. Wrapping the air chamber with the cooling chamber facilitates cooling of the pump body. The cooling plate is connected to the vacuum pump. The cooling plate has a water chamber, and the water chamber is communicated with the cooling chamber; an inlet hole and an outlet hole are provided on the surface of the cooling plate away from the pump body, and both the inlet hole and the outlet hole are communicated with the water chamber. External cooling water is introduced into the cooling plate through the inlet hole, flows through the water chamber of the cooling plate, and reaches the cooling chamber in the pump body to cool the pump body. The cooling water in the cooling plate directly flows out through the outlet hole to realize the circulation of the cooling water. By arranging the inlet hole and the outlet hole on the same surface of the cooling plate, the connection structure of the inlet and outlet water paths is simplified, the manufacturing cost is reduced, and cost reduction and efficiency improvement are facilitated. In addition, by arranging a water chamber in the cooling plate, a large amount of water can be stored, the circulating cooling water volume is increased, and the cooling plate is in direct contact with the pump body, so that the cooling plate can directly exchange heat with the pump body, and large-area cooling of the pump body part connected with the cooling plate can also be realized. Description of the Drawings

[0021] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention, and therefore should not be regarded as limiting the scope. For those of ordinary skill in the art, other related drawings can be obtained based on these drawings without creative efforts.

[0022] Figure 1Schematic diagram of a vacuum pump provided in an embodiment of the present utility model;

[0023] Figure 2 Partial structural schematic diagram of a vacuum pump provided in an embodiment of the present utility model;

[0024] Figure 3 Explosion schematic diagram of a vacuum pump provided in an embodiment of the present utility model;

[0025] Figure 4 Schematic diagram of a first perspective of a cooling plate provided in an embodiment of the present utility model;

[0026] Figure 5 Schematic diagram of a second perspective of a cooling plate provided in an embodiment of the present utility model.

[0027] Reference numerals: 1000 - vacuum pump; 100 - pump body; 110 - air cavity; 120 - cooling chamber; 130 - communication hole; 140 - drain hole; 150 - second mounting hole; 200 - cooling plate; 210 - water cavity; 220 - water inlet hole; 230 - water outlet hole; 240 - air hole; 250 - sealing groove; 260 - first mounting hole; 300 - plug; 400 - sealing ring. Detailed implementation manners

[0028] To make the objectives, technical solutions and advantages of the embodiments of the present utility model clearer, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Apparently, the described embodiments are some, but not all, of the embodiments of the present utility model. Usually, the components of the embodiments of the present utility model described and illustrated herein can be arranged and designed in various different configurations.

[0029] Therefore, the following detailed description of the embodiments of the present utility model provided in the drawings is not intended to limit the scope of the present utility model claimed, but merely represents selected embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts fall within the protection scope of the present utility model.

[0030] It should be noted that: Similar reference numerals and letters denote similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0031] In the description of the present utility model, it should be noted that if terms such as "upper", "lower", "inner", "outer", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the utility model product is usually placed during use, it is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the indicated device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be construed as a limitation to the present utility model.

[0032] In addition, terms such as "first", "second", etc. are only used for distinguishing descriptions and cannot be understood as indicating or implying relative importance.

[0033] It should be noted that, without conflict, the features in the embodiments of the present utility model can be combined with each other.

[0034] With the development of the economy, the progress of society, and the rise of the photovoltaic semiconductor industry, newer and higher requirements are put forward for the functions of equipment. In the existing domestic semiconductor, photovoltaic, and chemical industries, Roots, claw, and horizontal screw vacuum pumps are mostly used. Most of the existing vacuum pumps adopt a cooling method where a cooling plate is installed on the vacuum pump body. The cooling plate has grooves, and cooling pipes are embedded in the grooves, and water pipes are connected to introduce cooling water, so as to reduce the temperature of the cylinder block. However, the circulating water volume of this cooling method is small, the temperature reduction of the pump body is small, and thermal deformation may still occur, which may further lead to the situation of pump jamming.

[0035] Based on this, please refer to Figure 1 、 Figure 2 and Figure 3 , the vacuum pump 1000 provided in the embodiments of the present utility model can effectively improve the above-mentioned technical problems. The vacuum pump 1000 can increase the circulating water volume and increase the contact area between the cooling water and the pump body 100, making it easier to cool the pump body 100.

[0036] Figure 1 is a schematic diagram of the vacuum pump 1000 provided in the embodiments of the present utility model; Figure 2 is a partial structural schematic diagram of the vacuum pump 1000 provided in the embodiments of the present utility model; Figure 3 is an exploded schematic diagram of the vacuum pump 1000 provided in the embodiments of the present utility model, as shown in Figure 1 、 Figure 2 and Figure 3As shown in the figure, the vacuum pump 1000 includes a pump body 100 and a cooling plate 200. The pump body 100 has an air cavity 110 and a cooling chamber 120, and the cooling chamber 120 wraps the air cavity 110. The cooling plate 200 is connected to the pump body 100. The cooling plate 200 has a water cavity 210, and the water cavity 210 communicates with the cooling chamber 120. An inlet hole 220 and an outlet hole 230 are formed on one side of the cooling plate 200 away from the pump body 100, and both the inlet hole 220 and the outlet hole 230 communicate with the water cavity 210. Cooling water enters the water cavity 210 of the cooling plate 200 through the inlet hole 220, then comes out from the outlet, and then connects to the peripheral pipeline to form a closed loop for circulating the cooling water, thereby reducing the working temperature of the cylinder block.

[0037] The cooling plate 200 is connected to the end face of the pump body 100. Specifically, in this embodiment, the cooling plate 200 is connected to the upper end face of the pump body 100. Of course, the cooling plate 200 can also be arranged on the side end face or the bottom end face of the pump body 100, and the installation position of the cooling plate 200 is not limited herein.

[0038] During the working process of the pump body 100, a large amount of heat is generated. Wrapping the cooling chamber 120 outside the air cavity 110 facilitates the cooling of the pump body 100. External cooling water is introduced into the cooling plate 200 through the inlet hole 220, flows through the water cavity 210 of the cooling plate 200, and then flows into the cooling chamber 120 in the pump body 100 to cool the pump body 100. By arranging the inlet hole 220 and the outlet hole 230 on the same surface of the cooling plate 200, the connection structure of the inlet and outlet waterways is simplified, the manufacturing cost is reduced, and cost reduction and efficiency improvement are facilitated. In addition, by arranging the water cavity 210 in the cooling plate 200, a large amount of water can be stored, the circulating cooling water volume is increased, and since the cooling plate 200 is in direct contact with the pump body 100, the cooling plate 200 can directly exchange heat with the pump body 100, and large-area cooling of the part of the pump body 100 connected with the cooling plate 200 can also be achieved.

[0039] To simplify the cooling structure and make the cooling waterway simpler, and at the same time to reduce costs, please refer to Figure 3 In this embodiment, a communication hole 130 is formed on the end face of the pump body 100 close to the cooling plate 200, and the water cavity 210 and the cooling chamber 120 communicate through the communication hole 130. Of course, the communication between the water cavity 210 and the cooling chamber 120 can also be realized by arranging a communication pipeline, which is not limited herein.

[0040] Please continue to refer to Figure 3, in order to drain the cooling water out of the pump body 100 and the cooling plate 200 after the vacuum pump 1000 stops working or when the vacuum pump 1000 is under inspection or repair, a drain hole 140 is provided in the pump body 100 in this embodiment. The drain hole 140 communicates with the cooling chamber 120 and is used to drain the cooling water in the cooling plate 200 out of the water chamber 210 and the cooling chamber 120. The drain hole 140 can also be connected to a drain pipe joint to connect the cooling water to other equipment and use the cooling water elsewhere, so as to realize the recycling of the cooling water and achieve energy conservation and efficiency improvement.

[0041] To accelerate the drainage speed of the cooling water, the vacuum pump 1000 in this embodiment further includes a plug 300. An air hole 240 is also provided on the side of the cooling plate 200 where the water inlet hole 220 and the water outlet hole 230 are provided. The plug 300 is used to seal the air hole 240 when the vacuum pump 1000 is working normally. When the vacuum pump 1000 stops working or needs to be inspected and repaired, first cut off the water and power, and then remove the plug 300. The pressure in the water chamber 210 decreases, and the water in the water chamber 210 of the cooling plate 200 can quickly flow out of the drain hole 140 of the pump body 100 under the action of gravity, so as to empty the cooling water in the pump body 100 and the water chamber 210.

[0042] Specifically, the cooling plate 200 in this embodiment is a hollow cuboid. That is, the cooling plate 200 includes an upper plate, side plates and a bottom plate. One end of the side plate is connected to the upper plate, and the other end of the side plate is connected to the bottom plate. The upper plate, side plates and bottom plate together enclose a cuboid with a cavity. This cavity is the water chamber 210. The water inlet hole 220 and the water outlet hole 230 are provided on the upper plate, and the water inlet hole 220 and the water outlet hole 230 are used to connect to an external cooling water joint to realize the circulating flow of the cooling water into the cooling plate 200. Of course, the cooling plate 200 can also be designed into other structural properties such as a cylindrical shape. As long as the cooling plate 200 has a water chamber 210 and can contact the end face of the pump body 100 over a large area, the specific shape and structure of the cooling plate 200 are not limited here.

[0043] Figure 4 It is a schematic diagram of the first perspective of the cooling plate 200 provided in the embodiment of the present invention; Figure 5 It is a schematic diagram of the second perspective of the cooling plate 200 provided in the embodiment of the present invention. Please refer to Figure 4 and Figure 5 and in combination with Figure 1 and Figure 3, in order to simplify the structure of the cooling plate 200 and reduce the manufacturing cost, the cooling plate 200 in this embodiment may only include an upper plate and a side plate, and the upper plate and the side plate are connected to enclose a bottomless cuboid shape with a hollow lower part. The cooling plate 200 is connected to the end face of the pump body 100, and the upper plate, the side plate of the cooling plate 200 and the end face of the pump body 100 jointly enclose to form a water chamber 210.

[0044] For the convenience of installation and maintenance of the pump body 100 and the cooling plate 200, the cooling plate 200 and the pump body 100 in this embodiment are detachably connected. Specifically, please refer to Figure 4 and Figure 5 , and in combination with Figure 1 and Figure 3 , in this embodiment, a first mounting hole 260 is provided on the cooling plate 200, and a second mounting hole 150 is provided on the pump body 100. The cooling plate 200 and the pump body 100 are detachably connected through the first mounting hole 260 and the second mounting hole 150. Specifically, a threaded fastener is passed through the first mounting hole 260 and the second mounting hole 150 to realize the connection between the cooling plate 200 and the pump body 100. The threaded fastener can be a component such as a screw or a bolt, which is not limited herein. To ensure the stability of the connection between the cooling plate 200 and the pump body 100, the number of the first mounting holes 260 and the second mounting holes 150 in this embodiment is multiple, and one first mounting hole 260 corresponds to one second mounting hole 150. Specifically, the number of the first mounting holes 260 and the second mounting holes 150 in this embodiment is 8, and of course, it can also be 4, 6, etc., which is not limited herein and is determined according to the specific installation situation.

[0045] Of course, the cooling plate 200 and the pump body 100 can also be detachably connected by means of snap connection or the like. In addition, the cooling plate 200 and the pump body 100 can also be connected by welding, which is not limited herein.

[0046] To ensure the sealing performance at the connection between the cooling plate 200 and the pump body 100, please refer to Figure 4 and Figure 5 , and in combination with Figure 1 and Figure 3, on one side of the cooling plate 200 connected to the pump body 100, a sealing groove 250 is provided, and the sealing groove 250 is used to install the sealing ring 400. Providing the sealing groove 250 on one side of the cooling plate 200 connected to the pump body 100 is convenient for processing and can fully save space. Of course, the sealing groove 250 can also be provided on the pump body 100 to install the sealing ring 400, which is determined according to the actual situation, and the setting position of the sealing groove 250 is not limited here. The sealing ring 400 in this embodiment is an O-ring 400. The cross-sectional structure of the O-ring 400 is extremely simple and has a self-sealing function, ensuring reliable sealing performance. Due to its simple structure and standardization, it is very easy to replace and install. The installation space required for the O-ring 400 is small, which helps to miniaturize and lighten the machine. And the O-ring 400 has stable sealing performance and is suitable for water, oil, gas and various gases and chemical products.

[0047] Please refer to Figure 4 and Figure 5 , in order to facilitate the connection of the water inlet hole 220 and the water outlet hole 230 to external water supply equipment, the water inlet hole 220 in this embodiment is a straight pipe threaded hole, and / or the water outlet hole 230 is a straight pipe threaded hole. Designing the water inlet hole 220 and the water outlet hole 230 as straight pipe threaded holes can facilitate the connection of the water inlet and outlet joints to the cooling plate 200 through the straight pipe threaded holes. Of course, the water inlet hole 220 and the water outlet hole 230 can also be general through holes, and the external water supply equipment is connected to the cooling plate 200 through flange connectors. Of course, the external water supply equipment can also adopt other ways to communicate with the water inlet hole 220 and the water outlet hole 230, which is not limited here.

[0048] According to a vacuum pump 1000 provided by this embodiment, its working principle is as follows:

[0049] Cooling water enters the water cavity 210 in the cooling plate 200 from the water inlet hole 220 of the cooling plate 200. The water cavity 210 can store a certain amount of cooling water and then flows out from the water outlet of the cooling plate 200 to realize the water circulation of the cooling water. By providing the water cavity 210, the amount of circulating cooling water is increased. At the same time, the cooling water will flow from the water cavity 210 into the cooling chamber 120 of the pump body 100 to cool the pump body 100. In addition to the heat exchange that can be carried out in the cooling chamber 120 of the pump body 100, because the cooling plate 200 is connected to the pump body 100 and is in direct contact with the pump body 100, the cooling plate 200 can also perform heat exchange with the end face of the pump body 100 for large-area cooling. The cooling efficiency of the pump body 100 is improved, thereby avoiding the thermal deformation of the pump body 100 and further causing the situation of pump jamming.

[0050] In summary, the vacuum pump 1000 includes a pump body 100 and a cooling plate 200. The pump body 100 has a gas chamber 110 and a cooling chamber 120, and the cooling chamber 120 wraps the gas chamber 110. The pump body 100 extracts and discharges gas through the gas chamber 110. A large amount of heat is generated during the operation of the pump body 100. Wrapping the cooling chamber 120 outside the gas chamber 110 facilitates cooling of the pump body 100. The cooling plate 200 is connected to the vacuum pump 1000. The cooling plate 200 has a water chamber 210, and the water chamber 210 communicates with the cooling chamber 120. An inlet hole 220 and an outlet hole 230 are formed on one side of the cooling plate 200 away from the pump body 100, and both the inlet hole 220 and the outlet hole 230 communicate with the water chamber 210. External cooling water is introduced into the cooling plate 200 through the inlet hole 220, flows through the water chamber 210 of the cooling plate 200, and reaches the cooling chamber 120 in the pump body 100 to cool the pump body 100. The cooling water in the cooling plate 200 directly flows out through the outlet hole 230 to realize the circulation of the cooling water. By arranging the inlet hole 220 and the outlet hole 230 on the same side of the cooling plate 200, the connection structure of the inlet and outlet water paths is simplified, the manufacturing cost is reduced, and it is beneficial to reduce costs and increase efficiency. In addition, by arranging the water chamber 210 in the cooling plate 200, a large amount of water can be stored, the circulating cooling water volume is increased, and the cooling plate 200 is in direct contact with the pump body 100. The cooling plate 200 can directly exchange heat with the pump body 100, and can also realize large-area cooling of the part of the pump body 100 connected with the cooling plate 200.

[0051] As described above, it is only the specific implementation manner of the present utility model, but the protection scope of the present utility model is not limited thereto. Any changes or substitutions that can be easily thought of by those skilled in the art within the technical scope disclosed by the present utility model should be covered within the protection scope of the present utility model.

Claims

1. A vacuum pump, characterized in that, Comprising: A pump body (100), the pump body (100) having an air cavity (110) and a cooling chamber (120), the cooling chamber (120) surrounding the air cavity (110); A cooling plate (200), the cooling plate (200) being connected to the pump body (100), the cooling plate (200) having a water cavity (210), the water cavity (210) communicating with the cooling chamber (120); One side of the cooling plate (200) away from the pump body (100) is provided with a water inlet hole (220) and a water outlet hole (230), both the water inlet hole (220) and the water outlet hole (230) communicating with the water cavity (210).

2. The vacuum pump according to claim 1, wherein, An end face of the pump body (100) close to the cooling plate (200) is provided with a communication hole (130), the water cavity (210) and the cooling chamber (120) communicating through the communication hole (130).

3. The vacuum pump according to claim 2, wherein The pump body (100) is provided with a drain hole (140), the drain hole (140) communicating with the cooling chamber (120), the drain hole (140) being used to drain the cooling water in the cooling plate (200) out of the water cavity (210) and the cooling chamber (120).

4. The vacuum pump according to claim 3, characterized in that The vacuum pump (1000) further includes a plug (300), one side of the cooling plate (200) provided with the water inlet hole (220) and the water outlet hole (230) is further provided with an air hole (240), the plug (300) being used to seal the air hole (240) when the vacuum pump (1000) is working normally.

5. The vacuum pump according to claim 1, characterized in that, The cooling plate (200) is a hollow cuboid.

6. The vacuum pump according to claim 1, characterized in that, One side of the cooling plate (200) connected to the pump body (100) is provided with a sealing groove (250), the sealing groove (250) being used to install a sealing ring (400).

7. The vacuum pump according to claim 6, wherein, The sealing ring (400) is an O-ring (400).

8. The vacuum pump according to claim 1, characterized in that, The water inlet hole (220) is a straight pipe thread hole, and / or, the water outlet hole (230) is a straight pipe thread hole.

9. The vacuum pump according to claim 1, characterized in that, The cooling plate (200) is detachably connected to the pump body (100).

10. The vacuum pump according to claim 9, characterized in that, The cooling plate (200) is provided with a first mounting hole (260), the pump body (100) is provided with a second mounting hole (150), the cooling plate (200) and the pump body (100) being detachably connected through the first mounting hole (260) and the second mounting hole (150).

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