Phosphorus source supply and cleaning valve control pipeline structure

Abstract

The utility model discloses a phosphorus source supply and cleaning valve control pipeline structure, which relates to the field of phosphorus diffusion process of photovoltaic cells and comprises a phosphorus source supply pipeline. The device further comprises a first end tee joint and a second end tee joint. The first end socket tee joint is mounted at a front end port of the phosphorus source supply pipeline, two branch pipes of the first end socket tee joint are communicated with the phosphorus source supply pipeline, the other branch pipe is connected with the cleaning part, and the three branch pipes of the first end socket tee joint are respectively provided with an electromagnetic valve; the second end tee joint is installed at a tail end port of the phosphorus source supply pipeline, two branch pipes of the second end tee joint are communicated with the phosphorus source supply pipeline, the other branch pipe of the second end tee joint is connected with the recovery part, and the three branch pipes of the second end tee joint are respectively provided with an electromagnetic valve. According to the utility model, the first end tee joint, the second end tee joint and the plurality of electromagnetic valves are matched, so that the pipeline not only can normally realize phosphorus source supply, but also can be cleaned, the supply requirement of the phosphorus source pipeline can be simultaneously met, and the smooth proceeding of the process and the product quality are ensured.

Description

Technical Field

[0001] The utility model relates to the field of phosphorus diffusion process for photovoltaic cells, and more specifically to a phosphorus source supply and cleaning valve control pipeline structure. Background Technique

[0002] With the development of society, non-renewable resources such as coal and oil are decreasing day by day. Searching for and developing new energy has become an urgent issue faced by mankind. The impact of non-renewable energy on the ecological environment during use has also continuously attracted people's attention. As one of the most potential ways to utilize renewable energy, photovoltaic power generation has become the main technology to replace traditional fossil energy and support the sustainable development of mankind. It has developed rapidly in recent years and will occupy an important position in the world's energy consumption in the near future. It will not only replace some conventional energy sources, but also become the main body of the world's energy supply.

[0003] The diffusion furnace is an important process equipment in the process of solar cells, mainly used for doping process and for the preparation of PN junctions. The quality of the PN junction of crystalline silicon solar cells directly determines the photoelectric conversion efficiency. Therefore, the diffusion furnace is a key process equipment on the production line of crystalline silicon solar cells. It usually includes a control cabinet, a purification operation table, a furnace body cabinet and a gas source cabinet. The furnace body cabinet is composed of a heating control system, a transformer, a heating furnace body, a reaction tube, a rack and a cooling system heating accessory. The furnace mouth is on the side close to the purification operation table. The reaction tube is installed inside the heating furnace body and is heated by thermal radiation inside the reaction tube. A quartz boat loaded with silicon wafers is placed inside the reaction tube.

[0004] At present, most of the phosphorus diffusion uses liquid phosphorus oxychloride as the N-type diffusion source, which is carried by nitrogen and enters the high-temperature diffusion system from the source bottle. In the phosphorus diffusion process of solar energy, cleaning the pipeline of the supplied gas is an important link to ensure the smooth progress of the process and product quality.

[0005] Therefore, how to provide a valve control pipeline structure that can effectively clean the phosphorus source supply pipeline is an urgent problem to be solved by those skilled in the art. Content of the Utility Model

[0006] In view of this, the utility model provides a phosphorus source supply and cleaning valve control pipeline structure, aiming to solve the above technical problems.

[0007] In order to achieve the above purpose, the utility model adopts the following technical scheme:

[0008] A phosphorus source supply and cleaning valve control pipeline structure includes: a phosphorus source supply pipeline; and further includes:

[0009] The first end tee, which is installed at the front end port of the phosphorus source supply pipeline. Two branch pipes of the first end tee are connected to the phosphorus source supply pipeline, and the other branch pipe is connected to the cleaning part. Solenoid valves are installed on all three branch pipes of the first end tee;

[0010] The second end tee, which is installed at the end port of the phosphorus source supply pipeline. Two branch pipes of the second end tee are connected to the phosphorus source supply pipeline, and the other branch pipe is connected to the recovery part. Solenoid valves are installed on all three branch pipes of the second end tee.

[0011] Through the above technical solution, the utility model provides a phosphorus source supply and cleaning valve control pipeline structure. By using the cooperation of the first end tee, the second end tee and multiple solenoid valves, the pipeline can not only normally supply the phosphorus source, but also clean the pipeline, which can meet the supply requirements of the phosphorus source pipeline at the same time, and ensure the smooth progress of the process and the product quality.

[0012] Preferably, in the above phosphorus source supply and cleaning valve control pipeline structure, a first solenoid valve and a second solenoid valve are respectively installed on the two branch pipes of the first end tee that are connected along the supply direction of the phosphorus source supply pipeline, and a third solenoid valve is installed on the branch pipe of the first end tee that is connected to the cleaning part; a fourth solenoid valve and a fifth solenoid valve are respectively installed on the two branch pipes of the second end tee that are connected along the supply direction of the phosphorus source supply pipeline, and a sixth solenoid valve is installed on the branch pipe of the second end tee that is connected to the recovery part. By setting multiple solenoid valves, the on-off control of various requirements of the pipeline can be realized.

[0013] Preferably, in the above phosphorus source supply and cleaning valve control pipeline structure, the cleaning part includes a cleaning agent pipeline, a rinsing agent pipeline and a drying pipeline that are respectively connected to the branch pipes of the first end tee; the cleaning agent pipeline is used to supply the cleaning agent, the rinsing agent pipeline is used to supply the rinsing agent for cleaning the residue of the cleaning agent, and the drying pipeline is used to introduce the drying gas. By setting the cleaning agent pipeline, the rinsing agent pipeline and the drying pipeline, the requirements of flushing, rinsing and drying can be met.

[0014] Preferably, in the above phosphorus source supply and cleaning valve control pipeline structure, a seventh solenoid valve is installed on the cleaning agent pipeline, and an eighth solenoid valve is installed on the rinsing agent pipeline; the cleaning agent pipeline and the rinsing agent pipeline are connected with a summary pipeline, and a circulation pump is installed on the summary pipeline. The circulation pump can select different liquids for cleaning and provide liquid power.

[0015] Preferably, in the above-described phosphorus source supply and cleaning valve-controlled pipeline structure, the summary pipeline is respectively connected to a cleaning agent supply pipeline and a rinsing agent supply pipeline. The cleaning agent supply pipeline is connected to a cleaning agent barrel, and the rinsing agent supply pipeline is connected to a rinsing agent barrel. A ninth solenoid valve is installed on the cleaning agent supply pipeline, and a tenth solenoid valve is installed on the rinsing agent supply pipeline. This can meet the supply of the cleaning agent and the rinsing agent.

[0016] Preferably, in the above-described phosphorus source supply and cleaning valve-controlled pipeline structure, the drying pipeline is sequentially connected to an eleventh solenoid valve and a compressed air pump. This can meet the supply of compressed air.

[0017] Preferably, in the above-described phosphorus source supply and cleaning valve-controlled pipeline structure, a heat preservation layer is wrapped around the phosphorus source supply pipeline between the first end tee and the second end tee, and an electric heating layer is installed inside the heat preservation layer. In order to improve the soaking and cleaning effect, the present utility model adds an electric heating layer structure, which can accelerate and optimize the soaking effect.

[0018] Preferably, in the above-described phosphorus source supply and cleaning valve-controlled pipeline structure, a pressure relief valve is installed on the phosphorus source supply pipeline between the first end tee and the second end tee, and the pressure relief port of the pressure relief valve extends outside the heat preservation layer. The pressure relief valve can relieve pressure when the heating pressure is too high.

[0019] Preferably, in the above-described phosphorus source supply and cleaning valve-controlled pipeline structure, a temperature sensor is installed on the phosphorus source supply pipeline between the first end tee and the second end tee. The temperature sensor can detect the temperature inside the pipeline, which is convenient for control.

[0020] Preferably, in the above-described phosphorus source supply and cleaning valve-controlled pipeline structure, the recovery part is connected back to the cleaning part through a filter. The present utility model can selectively recycle the recovered liquid, saving the cleaning agent.

[0021] Through the above technical solutions, compared with the prior art, the present utility model discloses a phosphorus source supply and cleaning valve-controlled pipeline structure, which has the following beneficial effects:

[0022] 1. The present utility model provides a phosphorus source supply and cleaning valve-controlled pipeline structure. By using the cooperation of the first end tee, the second end tee and multiple solenoid valves, the pipeline can not only normally supply the phosphorus source, but also clean the pipeline, which can meet the supply requirements of the phosphorus source pipeline at the same time, ensuring the smooth progress of the process and the product quality.

[0023] 2. The present utility model can meet the requirements of flushing, rinsing and drying by setting the cleaning agent pipeline, the rinsing agent pipeline and the drying pipeline.

[0024] 3. In order to improve the soaking and cleaning effect, the present utility model adds an electric heating layer structure, which can accelerate and optimize the soaking effect. Brief Description of the Drawings

[0025] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only the embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on the provided drawings.

[0026] Figure 1 The attached drawing is a pipeline schematic diagram of the phosphorus source supply and cleaning valve control pipeline structure of Embodiment 1 provided by the present utility model;

[0027] Figure 2 The attached drawing is a pipeline schematic diagram of the phosphorus source supply and cleaning valve control pipeline structure of Embodiment 2 provided by the present utility model;

[0028] Figure 3 The attached drawing is a pipeline schematic diagram of the phosphorus source supply and cleaning valve control pipeline structure of Embodiment 3 provided by the present utility model.

[0029] Wherein:

[0030] 1 - Phosphorus source supply pipeline;

[0031] 11 - Pressure relief valve; 12 - Temperature sensor;

[0032] 2 - First end three - way joint;

[0033] 21 - First solenoid valve; 22 - Second solenoid valve; 23 - Third solenoid valve;

[0034] 3 - Second end three - way joint;

[0035] 31 - Fourth solenoid valve; 32 - Fifth solenoid valve; 33 - Sixth solenoid valve;

[0036] 4 - Cleaning part;

[0037] 41 - Cleaning agent pipeline; 411 - Seventh solenoid valve; 42 - Rinsing agent pipeline; 421 - Eighth solenoid valve; 43 - Drying pipeline; 431 - Eleventh solenoid valve; 432 - Compressed air pump; 44 - Summarizing pipeline; 441 - Circulation pump; 45 - Cleaning agent supply pipeline; 451 - Ninth solenoid valve; 46 - Rinsing agent supply pipeline; 461 - Tenth solenoid valve; 47 - Cleaning agent barrel; 48 - Rinsing agent barrel;

[0038] 5 - Recycling part;

[0039] 6 - Thermal insulation layer. Detailed implementation manners

[0040] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0041] Embodiment 1:

[0042] See the attached Figure 1 , the embodiments of the present invention disclose a phosphorus source supply and cleaning valve control pipeline structure, including: a phosphorus source supply pipeline 1; further including:

[0043] A first end tee 2, the first end tee 2 is installed at the front end port of the phosphorus source supply pipeline 1. Two branch pipes of the first end tee 2 are connected to the phosphorus source supply pipeline 1, and the other branch pipe is connected to the cleaning part 4. Electromagnetic valves are installed on all three branch pipes of the first end tee 2;

[0044] A second end tee 3, the second end tee 3 is installed at the end port of the phosphorus source supply pipeline 1. Two branch pipes of the second end tee 3 are connected to the phosphorus source supply pipeline 1, and the other branch pipe is connected to the recovery part 5. Electromagnetic valves are installed on all three branch pipes of the second end tee 3.

[0045] To further optimize the above technical solution, a first solenoid valve 21 and a second solenoid valve 22 are respectively installed on the two branch pipes of the first end tee 2 that are connected along the supply direction of the phosphorus source supply pipeline 1, and a third solenoid valve 23 is installed on the branch pipe of the first end tee 2 that is connected to the cleaning part 4; a fourth solenoid valve 31 and a fifth solenoid valve 32 are respectively installed on the two branch pipes of the second end tee 3 that are connected along the supply direction of the phosphorus source supply pipeline 1, and a sixth solenoid valve 33 is installed on the branch pipe of the second end tee 3 that is connected to the recovery part 5.

[0046] In this embodiment, when the phosphorus source is normally supplied, the first solenoid valve 21, the second solenoid valve 22, the fourth solenoid valve 31 and the fifth solenoid valve 32 are opened, and the third solenoid valve 23 and the sixth solenoid valve 33 are closed. When cleaning is required, the second solenoid valve 22, the third solenoid valve 23, the fourth solenoid valve 31 and the sixth solenoid valve 33 are opened, the first solenoid valve 21 and the fifth solenoid valve 32 are closed, the cleaning liquid of the cleaning part 4 enters the phosphorus source supply pipeline 1 for cleaning, and then is discharged and recovered by the recovery part 5.

[0047] Embodiment 2:

[0048] See the attached Figure 2 , this embodiment is further optimized on the basis of Embodiment 1:

[0049] The cleaning section 4 includes a cleaning agent pipeline 41, a rinsing agent pipeline 42, and a drying pipeline 43 that are respectively connected to the branch pipes of the first end three-way pipe 2; the cleaning agent pipeline 41 is used to supply the cleaning agent, the rinsing agent pipeline 42 is used to supply the rinsing agent for cleaning the residue of the cleaning agent, and the drying pipeline 43 is used to introduce the drying gas.

[0050] To further optimize the above technical solution, a seventh solenoid valve 411 is installed on the cleaning agent pipeline 41, and an eighth solenoid valve 421 is installed on the rinsing agent pipeline 42; the cleaning agent pipeline 41 and the rinsing agent pipeline 42 are connected to a summary pipeline 44, and a circulation pump 441 is installed on the summary pipeline 44.

[0051] To further optimize the above technical solution, the summary pipeline 44 is respectively connected to a cleaning agent supply pipeline 45 and a rinsing agent supply pipeline 46, the cleaning agent supply pipeline 45 is connected to a cleaning agent barrel 47, the rinsing agent supply pipeline 46 is connected to a rinsing agent barrel 48, a ninth solenoid valve 451 is installed on the cleaning agent supply pipeline 45, and a tenth solenoid valve 461 is installed on the rinsing agent supply pipeline 46.

[0052] To further optimize the above technical solution, the drying pipeline 43 is sequentially connected to an eleventh solenoid valve 431 and a compressed air pump 432.

[0053] The opening and closing form of the cleaning mode in this embodiment is the same as that in Embodiment 1, and will not be elaborated here.

[0054] This embodiment is divided into four-step cleaning:

[0055] First step, rinsing: Use the cleaning agent to rinse the phosphorus source supply pipeline 1 to remove loose particles and sediments. The cleaning agent includes an acidic or alkaline solution. Here, cooperate with opening the seventh solenoid valve 411 and the ninth solenoid valve 451 to perform cleaning agent cleaning.

[0056] Second step, soaking: If there are sediments in the phosphorus source supply pipeline 1 that are difficult to rinse off, the pipeline needs to be soaked in the cleaning agent for a period of time and then rinsed. At this time, only keep the third solenoid valve 23 open. After the phosphorus source supply pipeline 1 is filled with the cleaning agent, close all the solenoid valves.

[0057] Third step, rinsing: After cleaning, use deionized water or other appropriate solvents to rinse the pipeline to remove the residual cleaning agent. Here, cooperate with opening the eighth solenoid valve 421 and the tenth solenoid valve 461 to perform deionized water cleaning.

[0058] Fourth step, drying: Open the eleventh solenoid valve 431 and the compressed air pump 432 to perform drying treatment.

[0059] The opening and closing of the solenoid valves are adaptively controlled in the above steps to ensure the smoothness of the required pipeline.

[0060] Example 3:

[0061] Refer to the appendix Figure 3 , this example is further optimized on the basis of Example 2:

[0062] The phosphorus source supply pipeline 1 between the first end tee 2 and the second end tee 3 is wrapped with a heat preservation layer 6, and an electric heating layer is installed inside the heat preservation layer 6.

[0063] In order to further optimize the above technical solution, a pressure relief valve 11 is installed on the phosphorus source supply pipeline 1 between the first end tee 2 and the second end tee 3, and the pressure relief port of the pressure relief valve 11 extends outside the heat preservation layer 6.

[0064] In order to further optimize the above technical solution, a temperature sensor 12 is installed on the phosphorus source supply pipeline 1 between the first end tee 2 and the second end tee 3.

[0065] This example can be heated during the soaking process to improve the effect of soaking and cleaning.

[0066] In this specification, each example is described in a progressive manner. The key point of each example is to illustrate the differences from other examples. For the same or similar parts between each example, reference can be made to each other. For the device disclosed in the example, since it corresponds to the method disclosed in the example, the description is relatively simple, and reference can be made to the description in the method part for related parts.

[0067] The above description of the disclosed examples enables those skilled in the art to implement or use the present invention. Various modifications to these examples will be obvious to those skilled in the art. The general principles defined herein can be implemented in other examples without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to these examples shown herein, but rather to the broadest scope consistent with the principles and novel features disclosed herein.

Claims

1. A phosphorus source supply and cleaning valve control pipeline structure, comprising: Phosphorus source supply pipeline (1); characterized in that it further comprises: A first end tee (2), the first end tee (2) is installed at the front end port of the phosphorus source supply pipeline (1), two branches of the first end tee (2) are connected to the phosphorus source supply pipeline (1), and the other branch is connected to the cleaning part (4). Solenoid valves are installed on all three branches of the first end tee (2); A second end tee (3), the second end tee (3) is installed at the end port of the phosphorus source supply pipeline (1), two branches of the second end tee (3) are connected to the phosphorus source supply pipeline (1), and the other branch is connected to the recovery part (5). Solenoid valves are installed on all three branches of the second end tee (3).

2. The phosphorus source supply and cleaning valve control pipeline structure according to claim 1, wherein, A first solenoid valve (21) and a second solenoid valve (22) are respectively installed on the two branches of the first end tee (2) that are connected along the supply direction of the phosphorus source supply pipeline (1), and a third solenoid valve (23) is installed on the branch of the first end tee (2) that is connected to the cleaning part (4); a fourth solenoid valve (31) and a fifth solenoid valve (32) are respectively installed on the two branches of the second end tee (3) that are connected along the supply direction of the phosphorus source supply pipeline (1), and a sixth solenoid valve (33) is installed on the branch of the second end tee (3) that is connected to the recovery part (5).

3. A phosphorus source supply and cleaning valve control pipeline structure according to claim 1, characterized in that The cleaning part (4) includes a cleaning agent pipeline (41), a rinsing agent pipeline (42) and a drying pipeline (43) that are respectively connected to the branch of the first end tee (2); the cleaning agent pipeline (41) is used to supply the cleaning agent, the rinsing agent pipeline (42) is used to supply the rinsing agent for cleaning the residue of the cleaning agent, and the drying pipeline (43) is used to introduce dry gas.

4. A phosphorus source supply and cleaning valve control pipeline structure according to claim 3, characterized in that, A seventh solenoid valve (411) is installed on the cleaning agent pipeline (41), and an eighth solenoid valve (421) is installed on the rinsing agent pipeline (42); the cleaning agent pipeline (41) and the rinsing agent pipeline (42) are connected to a summary pipeline (44), and a circulation pump (441) is installed on the summary pipeline (44).

5. A phosphorus source supply and cleaning valve control pipeline structure according to claim 4, characterized in that, The summary pipeline (44) is respectively connected to a cleaning agent supply pipeline (45) and a rinsing agent supply pipeline (46), the cleaning agent supply pipeline (45) is connected to a cleaning agent barrel (47), the rinsing agent supply pipeline (46) is connected to a rinsing agent barrel (48), a ninth solenoid valve (451) is installed on the cleaning agent supply pipeline (45), and a tenth solenoid valve (461) is installed on the rinsing agent supply pipeline (46).

6. The structure of a phosphorus source supply and cleaning valve control pipeline according to claim 5, characterized in that The drying pipeline (43) is sequentially connected to an eleventh solenoid valve (431) and a compressed air pump (432).

7. A phosphorus source supply and cleaning valve control pipeline structure according to any one of claims 1-6, characterized in that A heat preservation layer (6) is wrapped on the phosphorus source supply pipeline (1) between the first end tee (2) and the second end tee (3), and an electric heating layer is installed inside the heat preservation layer (6).

8. A phosphorus source supply and cleaning valve control pipeline structure according to claim 7, characterized in that, A pressure relief valve (11) is installed on the phosphorus source supply pipeline (1) between the first end tee (2) and the second end tee (3), and the pressure relief port of the pressure relief valve (11) extends outside the heat preservation layer (6).

9. A phosphorus source supply and cleaning valve control pipeline structure according to claim 7, characterized in that, A temperature sensor (12) is installed on the phosphorus source supply pipeline (1) between the first end tee (2) and the second end tee (3).

10. A phosphorus source supply and cleaning valve control pipeline structure according to claim 1, characterized in that, The recovery section (5) is connected back to the cleaning section (4) through a filter.

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