Target material production flatness detection device with different position detection structures

Abstract

The utility model provides a target material production flatness detection device with different position detection structures, which comprises a bottom plate, a first detection assembly and second detection assemblies, a bottom box is installed on the upper side surface of the bottom plate, the first detection assembly is installed on the upper side surface of the bottom box, and the two second detection assemblies are symmetrically installed on the upper side surface of the bottom box in a sliding mode through sliding grooves. Compared with the prior art, the target detection device has the advantages that the second detection assembly, the first detection assembly and the second detection assembly are matched for use, the target detection device can better adapt to complex detection scenes, the first detection assembly can accurately detect the center area of a target, and the detection accuracy is improved. However, some target material edge detection blind areas possibly exist, at the moment, the second detection assembly symmetrically slides in the sliding groove in the upper side surface of the bottom box, can reach the edge position of the target material and then is matched with the rotating piece to detect the edge position of the target material, and the second detection assembly is matched with the first detection assembly, so that the coverage range of the detection device to the target material is greatly expanded; the effect that the target material is detected by the detection assemblies at different positions is achieved, and the flatness detection effect is ensured.

Description

Technical Field

[0001] The utility model belongs to the field of target production equipment, and particularly relates to a flatness detection device for target production with different position detection structures. Background Technique

[0002] The target is a key material used in coating processes such as physical vapor deposition (PVD) and chemical vapor deposition (CVD). The flatness detection device for target production is a device specifically used to detect the flatness of the target surface. There are some drawbacks in the current flatness detection devices for target production. First of all, due to the lack of different position detection structures, the detection results may not be comprehensive and accurate enough. It can only detect specific positions, and it is easy to miss the unevenness problems in other areas of the target. This drawback is mainly due to the limitations of the design of the detection device, which usually only detects a single position or a limited area. The conventional countermeasure is to increase the number of detections and perform detections at different positions separately, but this will consume more time and labor costs and reduce production efficiency. Moreover, multiple detections may lead to inconsistent results due to factors such as operation differences, making it difficult to ensure the stability and reliability of the detection. At the same time, increasing the number of detections cannot fully guarantee that all areas are accurately detected, and there is still a risk of missed detections. In addition, this method cannot monitor the flatness of the entire target in real time. For continuously produced targets, new unevenness problems may occur during the detection interval and cannot be discovered in time. Therefore, a new structure is needed to solve the above technical problems. Content of the Utility Model

[0003] Aiming at the deficiencies of the existing technology, the purpose of the utility model is to provide a flatness detection device for target production with different position detection structures to solve the problems raised in the above background technique.

[0004] The utility model is realized through the following technical solutions: A flatness detection device for target production with different position detection structures includes: a bottom plate, a first detection component, and a second detection component. The upper surface of the bottom plate is provided with a bottom box. The upper surface of the bottom box is provided with the first detection component. Two second detection components are symmetrically and slidably installed on the upper surface of the bottom box through chutes. A rotating member is installed inside the bottom box. A placement plate is rotatably installed on the upper surface of the bottom box through the rotating member. The first detection component includes: a first mounting plate, a control box, an electric push rod, and a detection probe. The detection probe is installed on the lower surface of the first mounting plate through the electric push rod. The control box is installed on the upper surface of the first mounting plate. The second detection component includes: a second mounting plate, a crank, a slider, and a threaded rod. The threaded rod is rotatably installed on the lower surface of the second mounting plate through the crank. The slider is slidably installed on the outer surface of the threaded rod.

[0005] As a preferred embodiment, a support leg is respectively installed at each of the four corners of the lower side surface of the bottom plate. A bottom box is installed at the center position of the upper side surface of the bottom plate. A box door is dampingly hinged to the front side surface of the bottom box. An accommodation cavity is arranged inside the bottom box. The rotating member includes: a motor, a rotating shaft, a driven gear, a driving gear, and a gear belt.

[0006] As a preferred embodiment, a rotating shaft is rotatably installed at the center position of the bottom of the accommodation cavity inside the bottom box. The upper end of the rotating shaft penetrates through the upper side surface of the bottom box and is connected to the lower side surface of the placement plate. A driven gear is installed on the outer side surface of the rotating shaft. A motor is installed through the bottom box to the left of the rotating shaft. A driving gear is installed on the output shaft of the motor. The driving gear is drivingly connected to the driven gear through a gear belt.

[0007] As a preferred embodiment, a groove is formed by downward depression on the upper side surface of the placement plate. Mounting plates one are installed at the center positions of the left and right edges of the upper side surface of the bottom box. Both the mounting plates one and the mounting plates two are in a C-shaped structure. An electric push rod is installed at the center position of the lower side surface of the mounting plate one. A detection probe is installed at the end of the electric push rod away from the mounting plate one. The detection probe inside the detection component one can detect the center position of the target material, covering the area of the center of the target material. Then, combined with the detection by the detection component two, it can avoid the omission that may occur in the detection of a single position.

[0008] As a preferred embodiment, the central axis of the detection probe is collinear with the central axis of the placement plate. Two chutes are symmetrically formed on the front and rear edges of the upper side surface of the bottom box respectively.

[0009] As a preferred embodiment, two mounting plates two are symmetrically and slidably installed between the two chutes on the left edge and the two chutes on the right edge through a screw motor. The height of the mounting plate two is lower than that of the mounting plate one. A wire groove is formed at the center position of the upper side surface of the mounting plate two. A crank is rotatably installed on the front side surface of the mounting plate two. A threaded rod is rotatably installed below the mounting plate two through the crank.

[0010] As a preferred embodiment, the slider is slidably mounted on the lower surface of the second mounting plate, and the threaded rod penetrates through the front surface of the slider. A detection probe is mounted on the lower surface of the slider, and the wire of the detection probe penetrates through the wire groove and is electrically connected to the control box. The control box is electrically connected to the computer device through a wire. The combined use of the first detection component and the second detection component can better adapt to these complex detection scenarios. The first detection component can perform relatively accurate detection on the central area of the target, but there may be some detection blind spots at the edge of the target. At this time, the second detection component can symmetrically slide through the chute on the upper surface of the bottom box to reach the edge position of the target and then cooperate with the rotating part to detect the edge position of the target. Cooperating with the first detection component, it greatly expands the coverage range of the detection device for the target.

[0011] After adopting the above technical solution, the beneficial effect of the present utility model is: by setting the first detection component, the first detection component is mounted on the upper surface of the bottom box. The first detection component includes: a first mounting plate, a control box, an electric push rod and a detection probe. When in use, the first mounting plate provides a stable mounting platform for the first detection component, enabling the control box, the electric push rod and the detection probe to work together. The detection probe inside the first detection component can detect the central position of the target, covering the central area of the target, and then cooperating with the second detection component for detection can avoid omissions that may occur in single-position detection.

[0012] By setting the second detection component, two second detection components are symmetrically slidably mounted on the upper surface of the bottom box through chutes. The second detection component includes: a second mounting plate, a crank, a slider and a threaded rod. During the actual production process of the target, it is necessary to detect the flatness of the target surface. At this time, the combined use of the first detection component and the second detection component can better adapt to these complex detection scenarios. The first detection component can perform relatively accurate detection on the central area of the target, but there may be some detection blind spots at the edge of the target. At this time, the second detection component can symmetrically slide through the chute on the upper surface of the bottom box to reach the edge position of the target and then cooperate with the rotating part to detect the edge position of the target. Cooperating with the first detection component, it greatly expands the coverage range of the detection device for the target, achieving the effect of detecting the target by detection components at different positions and ensuring the detection effect of flatness. Description of the Drawings

[0013] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0014] Figure 1 This is a schematic diagram of the overall structure of a flatness detection device for target production with different position detection structures according to the present utility model.

[0015] Figure 2 This is a schematic diagram of the first detection component of a flatness detection device for target production with different position detection structures according to the present utility model.

[0016] Figure 3 This is a schematic diagram of the second detection component of a flatness detection device for target production with different position detection structures according to the present utility model.

[0017] Figure 4 This is a schematic diagram of the rotating part of a flatness detection device for target production with different position detection structures according to the present utility model.

[0018] In the figure, 100 - bottom plate, 110 - bottom box, 111 - sliding groove, 120 - placement plate, 130 - motor, 140 - rotating shaft;

[0019] 200 - first detection component, 210 - first mounting plate, 220 - electric push rod, 230 - detection probe, 240 - control box;

[0020] 300 - second detection component, 310 - second mounting plate, 311 - wire groove, 320 - slider, 330 - crank. Specific embodiments

[0021] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without making creative efforts belong to the scope of protection of the present utility model.

[0022] Please refer to Figures 1 to 4, the present utility model provides a technical solution: a flatness detection device for target production with different position detection structures, comprising: a bottom plate 100, a first detection component 200, and a second detection component 300. A bottom box 110 is installed on the upper side surface of the bottom plate 100. The first detection component 200 is installed on the upper side surface of the bottom box 110. Two second detection components 300 are symmetrically and slidably installed on the upper side surface of the bottom box 110 through a chute 111. A rotating member is installed inside the bottom box 110. A placement plate 120 is rotatably installed on the upper side surface of the bottom box 110 through the rotating member. The first detection component 200 comprises: a first mounting plate 210, a control box 240, an electric push rod 220, and a detection probe 230. The detection probe 230 is installed on the lower side surface of the first mounting plate 210 through the electric push rod 220. The control box 240 is installed on the upper side surface of the first mounting plate 210. The second detection component 300 comprises: a second mounting plate 310, a crank 330, a slider 320, and a threaded rod. The threaded rod is rotatably installed on the lower side surface of the second mounting plate 310 through the crank 330. The slider 320 is slidably installed on the outer surface of the threaded rod.

[0023] Please refer to Figures 1 to 4 , as the first embodiment of the present utility model: A support leg is respectively installed at each of the four corners of the lower side surface of the bottom plate 100. The bottom box 110 is installed at the central position of the upper side surface of the bottom plate 100. A box door is damping hinged on the front side surface of the bottom box 110. An accommodation cavity is provided inside the bottom box 110. The rotating member comprises: a motor 130, a rotating shaft 140, a driven gear, a driving gear, and a gear belt;

[0024] The rotating shaft 140 is rotatably installed at the central position of the bottom of the accommodation cavity inside the bottom box 110. The upper end of the rotating shaft 140 penetrates through the upper side surface of the bottom box 110 and is connected to the lower side surface of the placement plate 120. A driven gear is installed on the outer surface of the rotating shaft 140. The motor 130 is installed through the bottom box 110 to the left of the rotating shaft 140. The output shaft of the motor 130 is installed with a driving gear. The driving gear is in transmission connection with the driven gear through the gear belt;

[0025] When in use, the user first places the target material to be detected at the center position inside the groove on the upper surface of the placement plate 120. After the placement of the target material is completed, the user can start the first detection component 200 and the second detection component 300 to detect the flatness of the target material on the upper surface of the placement plate 120. After the flatness detection is completed, the target material on the upper surface of the placement plate 120 can be removed. When the second detection component 300 is performing the detection, the user can start the motor 130 inside the bottom box 110 at this time, so that the output shaft of the motor 130 drives the driving gear to rotate, and then the driving gear drives the driven gear to rotate through the gear belt. When the driven gear rotates, the rotating shaft 140 then rotates to drive the placement plate 120 to rotate, thereby driving the target material on the upper surface of the placement plate 120 to rotate (the motor 130 is a stepper motor 130, and the driving force is transmitted through the driven gear, the driving gear, and the gear slope bottom to control a relatively low rotation speed, and the detection result will not be affected by a relatively fast rotation speed), so as to cooperate with the second detection component 300 to perform rotational detection on the edge of the target material for one circle.

[0026] Please refer to Figures 1 to 4 , as the second embodiment of the present invention: a groove is formed by recessing downward on the upper surface of the placement plate 120, and mounting plates one 210 are installed at the left edge and the center position of the right edge on the upper surface of the bottom box 110. The mounting plates one 210 and the mounting plates two 310 are both in a C-shaped structure. An electric push rod 220 is installed at the center position of the lower surface of the mounting plate one 210, and a detection probe 230 is installed at one end of the electric push rod 220 away from the mounting plate one 210;

[0027] The central axis of the detection probe 230 is collinear with the central axis of the placement plate 120. Two sliding grooves 111 are symmetrically opened on the front edge and the rear edge of the upper surface of the bottom box 110 respectively;

[0028] Two mounting plates two 310 are symmetrically slidably installed between the two sliding grooves 111 on the left edge and the two sliding grooves 111 on the right edge through a lead screw motor. The height of the mounting plates two 310 is lower than the height of the mounting plates one 210. A wire groove 311 is opened at the center position of the upper surface of the mounting plate two 310. A crank 330 is rotatably installed on the front surface of the mounting plate two 310, and a threaded rod is rotatably installed below the mounting plate two 310 through the crank 330;

[0029] A slider 320 is slidably installed on the lower surface of the mounting plate two 310, and the threaded rod penetrates through the front surface of the slider 320. A detection probe 230 is installed on the lower surface of the slider 320. The wire of the detection probe 230 penetrates through the wire groove 311 and is electrically connected to the control box 240. The control box 240 is electrically connected to the computer device through a wire;

[0030] When in use, after the target is placed through the placement plate 120 and it is necessary to perform flatness detection, the user can activate the detection probe 230-1 on the lower surface of the mounting plate 210 at this time, so that the detection end of the detection probe 230-1 irradiates the center position of the surface of the target, and then the data is transmitted to the computer device through the control box 240 for viewing. Since the mounting plate 210 provides a stable mounting platform for the detection component 200, the control box 240, the electric push rod 220, and the detection probe 230 can work together. The detection probe 230 inside the detection component 200 can detect the center position of the target, covering the area of the center of the target, and then cooperating with the detection component 300 for detection can avoid omissions that may occur in single-position detection;

[0031] After the detection of the central position of the target material is completed, the user can start the lead screw motor at this time, so that the lead screw motor rotates, thereby driving the mounting plate two 310 inside the chute 111 on the upper surface of the bottom box 110 to move towards or away from each other, so as to change the left and right positions of the detection probe 230 on the lower surface of the mounting plate two 310 through the mounting plate two 310. Just move the mounting plate two 310 above the target material. After the position of the mounting plate two 310 is changed, the user can rotate the crank 330 at this time, so that the crank 330 drives the threaded rod to rotate, thereby driving the slider 320 on the outer surface of the threaded rod to slide, and then driving the detection probe 230 on the lower surface of the slider 320 to move, so that the detection probe 230 moves to the edge area of the target material through the threaded rod and the crank 330 (the maximum height of the target material to be detected shall not exceed the height of the detection probe 230 on the lower surface of the slider 320). At this time, the target material rotates through the rotating part, and then the detection probe 230 detects the edge of the rotating target material. After one side of the target material is detected, the user moves the detection component two 300 away, then turns the target material over and continues to detect through the above steps. After the detection is completed, the target material can be removed through the operation steps of the first embodiment (the detection probe 230 is a prior art, and the user can select a suitable laser interference detection head, optical microscope detection head, etc. suitable for the flatness detection of the target material according to the actual detection needs. The specific detection principle, structure and steps are not described in detail here). Since in the actual production process of the target material, it is necessary to detect the flatness of the target material surface. At this time, the combined use of the detection component one 200 and the detection component two 300 can better adapt to these complex detection scenarios. The detection component one 200 can detect the central area of the target material more accurately, but there may be some detection blind spots at the edge of the target material. At this time, the detection component two 300 can reach the edge position of the target material by symmetrically sliding in the chute 111 on the upper surface of the bottom box 110 and then cooperate with the rotating part to detect the edge position of the target material. Cooperating with the detection component one 200, it greatly expands the coverage range of the detection device for the target material, realizes the effect of detecting the target material by different position detection components, and ensures the detection effect of flatness.

[0032] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A flatness detection device for target production with different position detection structures, comprising: A bottom plate (100), a detection component one (200) and a detection component two (300), characterized in that a bottom box (110) is installed on the upper surface of the bottom plate (100), a detection component one (200) is installed on the upper surface of the bottom box (110), and two detection components two (300) are symmetrically slidably installed on the upper surface of the bottom box (110) through a slide groove (111); A rotating member is installed inside the bottom box (110), a placement plate (120) is rotatably installed on the upper surface of the bottom box (110) via the rotating member, the detection component (200) comprises: a mounting plate (210), a control box (240), an electric push rod (220) and a detection probe (230), and a detection probe (230) is installed on the lower surface of the mounting plate (210) via the electric push rod (220); A control box (240) is installed on the upper surface of the mounting plate 1 (210), and the detection component 2 (300) includes: a mounting plate 2 (310), a crank (330), a slider (320) and a threaded rod. The threaded rod is rotatably installed on the lower surface of the mounting plate 2 (310) through the crank (330), and the slider (320) is slidably installed on the outer surface of the threaded rod.

2. The flatness detection device for target production with different position detection structures according to claim 1, wherein: A supporting leg is respectively installed at the four corners of the lower surface of the bottom plate (100); a bottom box (110) is installed at the center of the upper surface of the bottom plate (100); a door is hingedly connected to the front surface of the bottom box (110); a receiving cavity is arranged inside the bottom box (110); and the rotating part comprises: a motor (130), a rotating shaft (140), a driven gear, a driving gear and a gear belt.

3. The flatness detection device for target production with different position detection structures according to claim 2, wherein: A rotating shaft (140) is rotatably mounted at the bottom center of the internal accommodating cavity of the bottom box (110); the upper end of the rotating shaft (140) penetrates the upper surface of the bottom box (110) and is connected to the lower surface of the placement plate (120); a driven gear is mounted on the outer surface of the rotating shaft (140); a motor (130) is mounted on the left side of the rotating shaft (140) through the bottom box (110); a driving gear is mounted on the output shaft of the motor (130); and the driving gear is transmission-connected to the driven gear via a gear belt.

4. The flatness detection device for target production with different position detection structures according to claim 3, wherein: The upper surface of the placement plate (120) is concave downward to form a groove, and a mounting plate 1 (210) is installed at the center of the left edge and the right edge of the upper surface of the bottom box (110), and the mounting plate 1 (210) and the mounting plate 2 (310) are both in a "匚" shape. An electric push rod (220) is installed at the center of the lower surface of the mounting plate 1 (210), and a detection probe (230) is installed at one end of the electric push rod (220) away from the mounting plate 1 (210).

5. The flatness detection device for target production with different position detection structures according to claim 4, characterized in that: The central axis of the detection probe (230) is colinear with the central axis of the placement plate (120), and two slide grooves (111) are symmetrically provided on the front edge and the rear edge of the upper surface of the bottom box (110).

6. The flatness detection device for target production with different position detection structures according to claim 5, characterized in that: Two mounting plates II (310) are symmetrically and slidably mounted between the two chutes (111) on the left edge and the two chutes (111) on the right edge. The height of the mounting plate II (310) is lower than that of the mounting plate I (210). A wire groove (311) is formed at the center of the upper surface of the mounting plate II (310). A crank (330) is rotatably mounted on the front surface of the mounting plate II (310). A threaded rod is rotatably mounted below the mounting plate II (310) through the crank (330).

7. The flatness detection device for target production with different position detection structures according to claim 1, characterized in that: The slider (320) is slidably mounted on the lower surface of the mounting plate II (310), and the threaded rod penetrates through the front surface of the slider (320). A detection probe (230) is mounted on the lower surface of the slider (320). The wire of the detection probe (230) penetrates through the wire groove (311) and is electrically connected to the control box (240). The control box (240) is electrically connected to the computer device through a wire.

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