Multi-band exposure light source with combination of LED (light-emitting diode) and laser

Abstract

An LED and laser combined multi-band exposure light source comprises a first light source module which comprises a laser light source and a first dodging device used for dodging laser beams; the at least one second light source module comprises a first LED light source, a second LED light source, and a second dodging device a and a second dodging device b which are respectively used for dodging the two groups of LED light beams; the front group lens comprises a first type of front group lens and a second type of front group lens which are respectively used for performing focusing processing on the laser beam and the LED beam after dodging processing; the first front group of lenses and the second front group of lenses share one group of rear group of lenses, LED light beams and laser light beams are integrated, the lenses are simple in structure, the number of used lenses is reduced, rapid switching of light sources of different wave bands can be achieved, better applicability to photosensitive characteristics of photoresist and printing ink is achieved, and the production cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of light sources, in particular to a multi-band exposure light source combined with an LED and a laser. Background Art

[0002] In recent years, with the wide application of ultraviolet exposure machines in many fields, many different types of photoresists and inks have emerged. The photosensitive characteristics of different photoresists and inks are different. If the light source of the exposure machine does not meet the photosensitive characteristics of the photoresist and ink, it will lead to an extended exposure time, affecting production efficiency, and even causing problems such as exposure failure.

[0003] Currently, the exposure machine mainly uses a semiconductor laser light source with a wavelength of 405nm, which can no longer meet different application requirements. Although there has also emerged a light source using a multi-band LED combination, due to the large divergence angle and low power of the LED, the lithography speed is slow and the production efficiency is low. Therefore, although combining an LED and a high-power laser increases the power, the overall structure is complex, the number of lenses is large, and the cost is high.

[0004] Therefore, those skilled in the art have provided a multi-band exposure light source combined with an LED and a laser to solve the problems raised in the above background art. Summary of the Utility Model

[0005] The purpose of the utility model is to provide a multi-band exposure light source combined with an LED and a laser to solve the problems raised in the above background art.

[0006] To achieve the above purpose, the utility model provides the following technical solutions:

[0007] A multi-band exposure light source combined with an LED and a laser, comprising: a first light source module, including a laser light source and a first light homogenizer for homogenizing the laser beam;

[0008] At least one second light source module, including a first LED light source, a second LED light source, and a second light homogenizer a and a second light homogenizer b for homogenizing the two groups of LED beams respectively;

[0009] A front group of lenses, including a first front group of lenses and a second front group of lenses, respectively used for focusing the homogenized laser beam and LED beam;

[0010] A light combiner, including a first light combiner and a second light combiner, respectively used for mixing the homogenized laser beam and LED beam;

[0011] A rear group of lenses, used for focusing the beam mixed by the light combiner onto the illumination surface.

[0012] As a further solution of the present utility model: the first front group of lenses and the rear group of lenses form a first illumination lens, and the second front group of lenses and the rear group of lenses form a second illumination lens. The magnifications of the first illumination lens and the second illumination lens are different, and the image planes of the first illumination lens and the second illumination lens are both located on the illumination plane and have the same size.

[0013] As a further solution of the present utility model: the ratio of the magnification of the first illumination lens to the magnification of the second illumination lens is α, and the ratio of the light-emitting surface size of the first light homogenizer to the light-emitting surface size of the second light homogenizer a is 1 / α.

[0014] As a further solution of the present utility model: the second light homogenizer a and the second light homogenizer b have the same structure.

[0015] As a further solution of the present utility model: the laser light source generates a first type of light beam with a wavelength between 395 nm and 430 nm. The first light homogenizer is a square light homogenizing rod, which is used to homogenize the first type of light beam to form a first type of uniform light beam.

[0016] As a further solution of the present utility model: the first LED light source and the second LED light source respectively generate a second type of light beam and a third type of light beam with wavelengths between 350 nm and 395 nm. The second light homogenizer a and the second light homogenizer b are both conical light homogenizing rods. The second light homogenizer a homogenizes the second type of light beam to form a second type of uniform light beam, and the second light homogenizer b homogenizes the third type of light beam to form a third type of uniform light beam. The first light combiner is used to mix the first type of uniform light beam, the second type of uniform light beam, and the third type of uniform light beam, and the second light combiner mixes the second type of uniform light beam and the third type of uniform light beam.

[0017] As a further solution of the present utility model: the first front group of lenses includes a first lens and a second lens, the second front group of lenses includes a third lens and a fourth lens, and the rear group of lenses includes a fifth lens, a sixth lens, and a seventh lens; the second LED light source, the second light homogenizer b, the second light combiner, the third lens, the fourth lens, the first light combiner, the fifth lens, the sixth lens, and the seventh lens are arranged in sequence and on the same horizontal straight line.

[0018] As a further solution of the present utility model: the first LED light source, the second light homogenizer a, and the second light combiner are arranged in sequence and on the same vertical straight line, and the laser light source, the first light homogenizer, the first lens, the second lens, and the first light combiner are arranged in sequence and on the same vertical straight line.

[0019] As a further solution of the present utility model: the first lens is a meniscus lens with the concave surface facing the first light homogenizer, the second lens, the third lens, the fourth lens and the seventh lens are all double convex lenses, the fifth lens is a meniscus lens with the concave surface facing the illumination surface, and the sixth lens is a meniscus lens with the concave surface facing the first light combiner.

[0020] As a further solution of the present utility model: the first lens, the second lens, the third lens, the fourth lens, the sixth lens and the seventh lens have positive optical power, and the fifth lens has negative optical power.

[0021] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0022] By arranging that the first front lens group and the second front lens group share a set of rear lens group, the LED light beam and the laser light beam are integrated, and the lens structure is simple, the number of lenses used is reduced, the rapid switching of light sources with different wavelengths can be realized, it has better applicability to the photosensitive characteristics of photoresist and ink, and the production cost is reduced. Description of the Drawings

[0023] Figure 1 It is a schematic structural diagram of a multi-band exposure light source combined with an LED and a laser.

[0024] In the figure: 1. Laser light source; 2. First light homogenizer; 3. First LED light source; 4. Second LED light source; 5. Second light homogenizer a; 6. Second light homogenizer b; 7. First light combiner; 8. Second light combiner; 9. First lens; 10. Second lens; 11. Third lens; 12. Fourth lens; 13. Fifth lens; 14. Sixth lens; 15. Seventh lens. Detailed Embodiments

[0025] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model. Embodiment

[0026] A multi-band exposure light source combining an LED and a laser, comprising: a first light source module, including a laser light source 1 and a first light homogenizer 2 for homogenizing the laser beam; at least one second light source module, including a first LED light source 3, a second LED light source 4, and a second light homogenizer a5 and a second light homogenizer b6 for homogenizing the two groups of LED beams respectively; a front group of lenses, including a first front group of lenses and a second front group of lenses, respectively used for focusing the homogenized laser beam and LED beam; a light combiner, including a first light combiner 7 and a second light combiner 8, respectively used for mixing the homogenized laser beam and LED beam.

[0027] The laser light source 1 generates a first beam with a wavelength between 395nm and 430nm. The first light homogenizer 2 is a square light homogenizing rod, which is used to homogenize the first beam to form a first uniform beam, eliminate the problem of uneven light spots, ensure the uniform distribution of the beam on the illumination surface, and improve the exposure effect.

[0028] The first LED light source 3 and the second LED light source 4 respectively generate a second beam and a third beam with wavelengths between 350nm and 395nm. The second light homogenizer a5 and the second light homogenizer b6 are both conical light homogenizing rods. The second light homogenizer a5 homogenizes the second beam to form a second uniform beam, and the second light homogenizer b6 homogenizes the third beam to form a third uniform beam.

[0029] The first front group of lenses focuses the first uniform beam to improve the focusing and uniformity quality of the first uniform beam.

[0030] The second light combiner 8 mixes the second uniform beam and the third uniform beam, and then the second front group of lenses focuses the beam after mixing the second uniform beam and the third uniform beam to improve the focusing and uniformity quality of the mixed beam.

[0031] The first light combiner 7 is used to mix the first uniform beam, the second uniform beam and the third uniform beam to form a multi-band mixed beam.

[0032] A rear group of lenses is used to focus the multi-band mixed beam after being mixed by the light combiner onto the illumination surface.

[0033] The first front lens group and the rear lens group form the first illumination lens, and the second front lens group and the rear lens group form the second illumination lens. The magnifications of the first illumination lens and the second illumination lens are different. The ratio of the magnification of the first illumination lens to the magnification of the second illumination lens is α. The ratio of the light-emitting surface area of the first light homogenizer 2 to the light-emitting surface area of the second light homogenizer a5 is 1 / α. The product of the magnification of the first illumination lens and the light-emitting area of the first light homogenizer 2 is expressed as the image plane area of the first light source module on the illumination surface. The product of the magnification of the second illumination lens and the light-emitting area of the second light homogenizer is expressed as the image plane area of the second light source module on the illumination surface. Then, the image planes of the first illumination lens and the second illumination lens are both located on the illumination surface and have the same size. The second light homogenizer a5 and the second light homogenizer b6 have the same structure, ensuring the consistency of the image plane of the mixed light beam.

[0034] The first front lens group and the second front lens group share a set of rear lens groups, integrating the LED beam and the laser beam. Moreover, the lens structure is simple, the number of lenses used is reduced, rapid switching between light sources of different wavelengths can be achieved, it has better applicability to the photosensitive characteristics of photoresist and ink, and the production cost is reduced.

[0035] The first front lens group includes the first lens 9 and the second lens 10. The second front lens group includes the third lens 11 and the fourth lens 12. The rear lens group includes the fifth lens 13, the sixth lens 14, and the seventh lens 15. The second LED light source 4, the second light homogenizer b6, the second light combiner 8, the third lens 11, the fourth lens 12, the first light combiner 7, the fifth lens 13, the sixth lens 14, and the seventh lens 15 are arranged in sequence and on the same horizontal straight line.

[0036] The first LED light source 3, the second light homogenizer a5, and the second light combiner 8 are arranged in sequence and on the same vertical straight line. The laser light source 1, the first light homogenizer 2, the first lens 9, the second lens 10, and the first light combiner 7 are arranged in sequence and on the same vertical straight line.

[0037] Through this arrangement, it can be ensured that the light beam remains stable and uniform during transmission, improving the uniformity and stability of the light beam.

[0038] The first lens 9 is a meniscus lens with its concave surface facing the first light homogenizer 2, which can effectively focus the laser beam. The second lens 10, the third lens 11, the fourth lens 12, and the seventh lens 15 are all biconvex lenses. Through the design of biconvex lenses, the positive aberration can be further focused and shared, improving the quality of beam focusing and uniformity. The fifth lens 13 is a meniscus lens with its concave surface facing the illumination surface, which can effectively control the divergence angle of the beam and ensure the uniform distribution of the beam on the illumination surface. The sixth lens 14 is a meniscus lens with its concave surface facing the first beam combiner 7. By reasonably designing the shape and position of the lens, efficient beam transmission and focusing can be achieved, improving the exposure accuracy and efficiency.

[0039] The first lens 9, the second lens 10, the third lens 11, the fourth lens 12, the sixth lens 14, and the seventh lens 15 have positive optical powers. Through the design of positive optical powers, the beam can be effectively focused and transmitted, improving the uniformity and stability of the beam. The fifth lens 13 has a negative optical power. Through the design of negative optical power, the divergence angle of the beam can be effectively controlled and the positive aberration can be offset, ensuring the uniform distribution of the beam on the illumination surface and improving the exposure effect.

[0040] As described above, it is only the preferred specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution and inventive concept of the present invention, making equivalent substitutions or changes, shall be covered by the protection scope of the present invention.

Claims

1. A multi-band exposure light source combining an LED and a laser, characterized in that, Comprising: A first light source module, including a laser light source and a first light homogenizer for homogenizing the laser beam; At least one second light source module, including a first LED light source, a second LED light source, and a second light homogenizer a and a second light homogenizer b for homogenizing two groups of LED beams respectively; A front group of lenses, including a first front group of lenses and a second front group of lenses, which are respectively used for focusing the homogenized laser beam and LED beam; A light combiner, including a first light combiner and a second light combiner, which are respectively used for mixing the homogenized laser beam and LED beam; A rear group of lenses, which is used for focusing the beam mixed by the light combiner onto the illumination surface.

2. The multi-band exposure light source combined with an LED and a laser according to claim 1, characterized in that The first front group of lenses and the rear group of lenses form a first illumination lens, and the second front group of lenses and the rear group of lenses form a second illumination lens. The magnifications of the first illumination lens and the second illumination lens are different, and the image planes of the first illumination lens and the second illumination lens are both located on the illumination surface and have the same size.

3. The multi-band exposure light source combining an LED and a laser according to claim 2, wherein The ratio of the magnification of the first illumination lens to the magnification of the second illumination lens is α, and the ratio of the size of the light exit surface of the first light homogenizer to the size of the light exit surface of the second light homogenizer a is 1 / α.

4. The multi-band exposure light source combining an LED and a laser according to claim 3, characterized in that, The second light homogenizer a and the second light homogenizer b have the same structure.

5. The multi-band exposure light source combining an LED and a laser according to claim 1, characterized in that, The laser light source generates a first beam with a wavelength between 395 nm and 430 nm. The first light homogenizer is a square light homogenizing rod, which is used for homogenizing the first beam to form a first uniform beam.

6. The multi-band exposure light source combining an LED and a laser according to claim 5, characterized in that, The first LED light source and the second LED light source respectively generate a second beam and a third beam with wavelengths between 350 nm and 395 nm. The second light homogenizer a and the second light homogenizer b are both conical light homogenizing rods. The second light homogenizer a homogenizes the second beam to form a second uniform beam, and the second light homogenizer b homogenizes the third beam to form a third uniform beam. The first light combiner is used for mixing the first uniform beam, the second uniform beam, and the third uniform beam, and the second light combiner mixes the second uniform beam and the third uniform beam.

7. A multi-band exposure light source combining an LED and a laser according to claim 1, characterized in that, The first front group of lenses includes a first lens and a second lens, the second front group of lenses includes a third lens and a fourth lens, and the rear group of lenses includes a fifth lens, a sixth lens, and a seventh lens; the second LED light source, the second light homogenizer b, the second light combiner, the third lens, the fourth lens, the first light combiner, the fifth lens, the sixth lens, and the seventh lens are arranged in sequence and on the same horizontal straight line.

8. A multi-band exposure light source combining an LED and a laser according to claim 7, characterized in that, The first LED light source, the second light homogenizer a, and the second light combiner are arranged in sequence and on the same vertical straight line, and the laser light source, the first light homogenizer, the first lens, the second lens, and the first light combiner are arranged in sequence and on the same vertical straight line.

9. The multi-band exposure light source combining an LED and a laser according to claim 7, characterized in that, The first lens is a meniscus lens with the concave surface facing the first light homogenizer, the second lens, the third lens, the fourth lens, and the seventh lens are all double convex lenses, the fifth lens is a meniscus lens with the concave surface facing the illumination surface, and the sixth lens is a meniscus lens with the concave surface facing the first light combiner.

10. A multi-band exposure light source combining an LED and a laser according to claim 7, characterized in that The first lens, the second lens, the third lens, the fourth lens, the sixth lens, and the seventh lens have positive optical power, and the fifth lens has negative optical power.

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