Silica powder filter

Abstract

The utility model relates to a silica powder filter which comprises an outer shell, a material inlet, a gas outlet and a silica powder outlet are connected onto the outer shell, the material inlet and the gas outlet are separated by a filter screen in the outer shell, and an anhydrous hydrogen chloride spray pipe is arranged in the outer shell between the filter screen and the silica powder outlet. Silicon micro-powder is introduced into the material inlet of the silicon powder filter, airflow passes through the filter screen to block the silicon micro-powder, and a gas phase is discharged from the upper part; the anhydrous hydrogen chloride spray pipe is used for introducing anhydrous hydrogen chloride, so that the anhydrous hydrogen chloride reacts with the silica powder, trichlorosilane and hydrogen are generated in the reaction, and gas-phase materials generated in the reaction are extracted from the upper part of the silica powder filter after the silica powder which is not completely reacted is blocked by the filter screen; waste silicon powder reacts in the filter to generate trichlorosilane, the amount of discharged waste silicon powder is reduced, the generated trichlorosilane can serve as a raw material of a back-end procedure to participate in the back-end procedure, and the good effects of reducing cost and improving efficiency are achieved.

Description

Technical Field

[0001] The utility model relates to a silicon powder filter. Background Art

[0002] In the current cold hydrogenation process of silane production, the main reaction equipment is a fluidized bed, and its main raw materials are silicon powder, silicon tetrachloride, and hydrogen. The materials are fluidized in the fluidized bed to produce trichlorosilane. The silicon powder continuously rubs in the fluidized bed, resulting in fine powders broken into silicon fine powder, which is difficult to remove by a cyclone separator. Only after being filtered by a silicon powder filter, this part of silicon fine powder is discharged from the reaction system and treated as hazardous waste. However, since the discharge amount of silicon fine powder after being filtered by the silicon powder filter is still large, it causes great waste. Summary of the Utility Model

[0003] In view of the deficiencies of the prior art, the technical problem to be solved by the utility model is to provide a silicon powder filter.

[0004] To solve the above technical problem, the technical solution of the utility model is: a silicon powder filter, including an outer shell body, and a material inlet, a gas outlet, and a silicon powder outlet are connected to the outer shell body. The material inlet and the gas outlet are separated by a filter screen inside the outer shell body, and an anhydrous hydrogen chloride spray pipe is arranged inside the outer shell body between the filter screen and the silicon powder outlet.

[0005] Preferably, the gas outlet is connected to the top of the outer shell body.

[0006] Preferably, a pressure relief port is further arranged at the top of the outer shell body.

[0007] Preferably, pressure gauges are arranged at both the top and the side of the outer shell body, and a thermometer is arranged at the side of the outer shell body.

[0008] Preferably, the material inlet is arranged at the middle and lower side of the outer shell body.

[0009] Preferably, the silicon powder outlet is arranged at the bottom of the outer shell body.

[0010] Preferably, the anhydrous hydrogen chloride spray pipe is in a ring shape, and a plurality of nozzles are evenly distributed along the circumference thereof, and the spray ports of the nozzles are all inclined downward.

[0011] Preferably, the anhydrous hydrogen chloride spray pipe is connected with an anhydrous hydrogen chloride inlet pipe.

[0012] Preferably, a backwashing nozzle is arranged above the filter screen, and the backwashing nozzle is connected with a backwashing gas inlet.

[0013] Compared with the prior art, the utility model has the following beneficial effects: The material inlet of the silicon powder filter is fed with silicon micro powder. The air flow passes through the filter screen, blocking the silicon micro powder, and the gas phase is discharged from the upper part; the anhydrous hydrogen chloride spray pipe is used to feed anhydrous hydrogen chloride, so that anhydrous hydrogen chloride reacts with the silicon micro powder. Trichlorosilane and hydrogen are generated by the reaction. After the gas-phase material generated by the reaction passes through the filter screen to intercept the unreacted silicon micro powder completely, it is taken out from the upper part of the silicon powder filter; realizing the reaction of waste silicon powder in the filter to generate trichlorosilane, reducing the amount of discharged waste silicon powder, and the generated trichlorosilane can also be used as a raw material for the subsequent process to participate in the subsequent process, achieving the good effect of cost reduction and efficiency increase.

[0014] The following further describes the present utility model in detail with reference to the drawings and specific embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic structural diagram of an embodiment of the present utility model.

[0016] Figure 2 It is a top view of the anhydrous hydrogen chloride spray pipe. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0017] The present utility model will be further described below with reference to the drawings and embodiments.

[0018] It should be noted that the following detailed description is exemplary and is intended to provide further explanation of the present application. Unless otherwise specified, all technical and scientific terms used herein have the same meaning as commonly understood by those of ordinary skill in the technical field to which this application belongs.

[0019] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0020] As Figures 1 - 2 As shown, this embodiment provides a silicon powder filter, which includes an outer shell 1. A material inlet 2, a gas outlet 3, and a silicon powder outlet 4 are connected to the outer shell. The space between the material inlet and the gas outlet inside the outer shell is separated by a filter screen 5, and an anhydrous hydrogen chloride spray pipe 6 is arranged inside the outer shell between the filter screen and the silicon powder outlet.

[0021] Silica powder is introduced into the material inlet of the silica powder filter. The air flow passes through the filter screen, intercepting the silica powder, and the gas phase is discharged from the upper part. The anhydrous hydrogen chloride spray pipe is used to introduce anhydrous hydrogen chloride, enabling anhydrous hydrogen chloride to react with the silica powder. Trichlorosilane and hydrogen are produced in the reaction. After the gas-phase material produced in the reaction passes through the filter screen to intercept the unreacted silica powder completely, it is taken out from the upper part of the silica powder filter. The reaction of waste silica powder in the filter to produce trichlorosilane is realized, reducing the amount of discharged waste silica powder. The produced trichlorosilane can also be used as a raw material for the subsequent process to participate in the subsequent process, achieving a good effect of cost reduction and efficiency improvement.

[0022] In an embodiment of the present invention, the gas outlet is connected to the top of the outer shell.

[0023] In an embodiment of the present invention, a pressure relief port 7 is further provided at the top of the outer shell.

[0024] In an embodiment of the present invention, pressure gauges 8 are provided at both the top and the side of the outer shell, and a thermometer 9 is provided at the side of the outer shell.

[0025] In an embodiment of the present invention, the material inlet is provided at the middle and lower side of the outer shell.

[0026] In an embodiment of the present invention, the silica powder outlet is provided at the bottom of the outer shell.

[0027] In an embodiment of the present invention, the anhydrous hydrogen chloride spray pipe is in a ring shape, and a plurality of nozzles 10 are evenly distributed along the circumference. The spray ports of the nozzles are all inclined downward. This can prevent silica powder from falling into the nozzle holes during backwashing to block the pipeline, and at the same time, it can accelerate the blowing of the silica powder deposited at the bottom to the silica powder outlet during backwashing.

[0028] In an embodiment of the present invention, the anhydrous hydrogen chloride spray pipe is connected to an anhydrous hydrogen chloride inlet pipe 11.

[0029] In an embodiment of the present invention, a backwashing nozzle 12 is provided above the filter screen, and the backwashing nozzle is connected to a backwashing gas inlet 13.

[0030] In the embodiment of the present utility model, the working principle of the silicon powder filter is as follows: The gas-phase material produced from the top of the fluidized bed reactor entrains some silicon micro-powder, and this part of the silicon micro-powder can be introduced into the filter through the material inlet. The gas flow passes through the filter screen, blocking the silicon micro-powder, and the gas phase is discharged from the upper part; the anhydrous hydrogen chloride spray pipe is used to introduce anhydrous hydrogen chloride, so that anhydrous hydrogen chloride reacts with the silicon micro-powder, and the reaction produces trichlorosilane and hydrogen. After the gas-phase material produced by the reaction passes through the filter screen and intercepts the unreacted completely silicon micro-powder, it is taken out from the upper part of the silicon powder filter; it realizes the reaction of waste silicon powder in the filter to produce trichlorosilane, reduces the amount of waste silicon powder discharged, and the produced trichlorosilane can also be used as a raw material for the subsequent process to participate in the subsequent process, achieving a good effect of cost reduction and efficiency increase.

[0031] After the silicon powder has reacted and been filtered according to the above principle, the anhydrous hydrogen chloride spray pipe can be used to introduce high-pressure hydrogen, and the backflush gas inlet also introduces high-pressure hydrogen for backflushing, blowing the residual silicon micro-powder below the filter screen and itself to the silicon powder outlet for collection.

[0032] The above is only a preferred embodiment of the present utility model, and it is not a limitation to the present utility model in other forms. Any person skilled in the art may use the technical content disclosed above to make changes or modifications into equivalent embodiments with equivalent changes. However, any simple modification, equivalent change and modification made to the above embodiments based on the technical essence of the present utility model without departing from the technical solution content of the present utility model still belong to the protection scope of the technical solution of the present utility model.

Claims

1. A silicon powder filter, characterized in that: It includes a housing body, on which a material inlet, a gas outlet and a silicon powder outlet are connected. Inside the housing body, a filter screen separates the space between the material inlet and the gas outlet, and an anhydrous hydrogen chloride spray pipe is arranged between the filter screen and the silicon powder outlet.

2. The silica powder filter according to claim 1, wherein: The gas outlet is connected to the top of the housing body.

3. The silica powder filter according to claim 1, characterized in that: A pressure relief port is also arranged at the top of the housing body.

4. The silicon powder filter according to claim 1, wherein: Pressure gauges are arranged at both the top and the side of the housing body, and a thermometer is arranged at the side of the housing body.

5. The silicon powder filter according to claim 1, characterized in that: The material inlet is arranged at the middle and lower side of the housing body.

6. The silica powder filter according to claim 1, characterized in that: The silicon powder outlet is arranged at the bottom of the housing body.

7. The silica powder filter according to claim 1, characterized in that: The anhydrous hydrogen chloride spray pipe is in a ring shape, and a number of nozzles are evenly distributed along its circumference. The spray ports of the nozzles all incline downward.

8. The silica powder filter according to claim 1, wherein: The anhydrous hydrogen chloride spray pipe is connected to an anhydrous hydrogen chloride inlet pipe.

9. The silica powder filter according to claim 1, wherein: A backflush nozzle is arranged above the filter screen, and the backflush nozzle is connected to a backflush gas inlet.

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