Evaporation device with high evaporation efficiency

Abstract

The utility model relates to the technical field of evaporation devices, in particular to an evaporation device with high evaporation efficiency. The utility model discloses an evaporation device with high evaporation efficiency. The evaporation device comprises evaporation boats arranged on the left side and the right side in the evaporation device. The evaporation boats on the left side and the evaporation boats on the right side are arranged in a staggered manner; and detection equipment is arranged above the evaporation boat. According to the evaporation device with the high evaporation efficiency, the evaporation boats are arranged in a staggered mode, the evaporation efficiency of the evaporation boats can be at least improved by about 5%, consumption of raw materials is remarkably reduced, and the production cost is reduced; therefore, the evaporation efficiency of the evaporation boat can be obviously improved through the placement mode of the efficient evaporation boat and real-time detection of the film thickness to ensure whether the evaporation boat fails or not, and a new route is provided for developing a subsequent efficient evaporation coating process.

Description

Technical Field

[0001] This application relates to the technical field of evaporation devices, and particularly to an evaporation device with high evaporation efficiency. Background Art

[0002] Currently, during the preparation of composite aluminum foil, in a high-temperature environment, the evaporation boat made of boron nitride material reacts with molten aluminum liquid to generate aluminum nitride (AlN) and aluminum dodecaboride (AlB 12 ). Since the generated aluminum boride blocks the connection of the conductive phase titanium diboride, it causes uneven resistance distribution and uneven heating during resistance heating; in addition, due to the larger molar mass of the generated aluminum dodecaboride, the evaporation boat is prone to expansion during long-term use, resulting in a reduction in the effective area of the evaporation boat. These two factors lead to the failure of the evaporation boat.

[0003] During the process of aluminum film evaporation, when using the method of placing evaporation boats in a uniform single row, the evaporation efficiency is often relatively low, and if a local evaporation boat fails, it is likely to cause unevenness of the deposited thin film. Therefore, inventing an evaporation device with high evaporation efficiency will be of great significance. Utility Model Content

[0004] In order to overcome the deficiencies of the prior art, this application provides an evaporation device with high evaporation efficiency. The evaporation boats are arranged in a staggered manner, and the evaporation efficiency of the evaporation boats can be increased by at least about 5%. It significantly reduces the consumption of raw materials and the production cost. Therefore, by arranging the evaporation boats in an efficient way and real-time detecting the film thickness to ensure whether the evaporation boat fails, the evaporation efficiency of the evaporation boat can be significantly improved, providing a new route for the development of subsequent high-efficiency evaporation coating processes.

[0005] The technical solution adopted by this application to solve its technical problems is:

[0006] An evaporation device with high evaporation efficiency, including evaporation boats arranged on the left and right sides inside the evaporation device; the evaporation boats on the left side and the evaporation boats on the right side are arranged in a staggered manner;

[0007] A detection device is arranged above the evaporation boat.

[0008] In some embodiments, the number of evaporation boats ≥ 6, and a detection device for thickness detection is arranged above three evaporation boats on the same side.

[0009] In some embodiments, the detection device is an eddy current thickness gauge.

[0010] In some embodiments, the lateral gap size measured by the detection device is 50 mm.

[0011] In some embodiments, the specifications of the evaporation boat are set as follows: length is 150 mm, width is 35 mm, and depth is 10 mm.

[0012] In some embodiments, a slot is provided on the evaporation boat, and the specifications of the slot are set as follows: length is 130 mm, width is 31 mm, and depth is 1 mm.

[0013] In some embodiments, there are 36 evaporation boats on the left side or the right side.

[0014] In some embodiments, the evaporation boat is fed with wire through a wire feeding mechanism. The wire feeding mechanism includes a wire feeding conduit. The evaporation boat is fixed to a bracket through a card slot. A wire feeding conduit is provided on the bracket, and the outlet of the wire feeding conduit is arranged on the evaporation boat.

[0015] In some embodiments, an air supply pipe is provided at one end of the evaporation boat away from the bracket.

[0016] In some embodiments, the wire feeding mechanism includes a wire feeding disc, a wire guiding device, and a wire pressing wheel. A wire feeding conduit is provided on the wire guiding device. A wire pressing wheel is arranged between the wire guiding device and the bracket. The wire feeding disc supplies metal wire to the wire guiding device.

[0017] Therefore, the evaporation boat is fixed through the card slot. During the wire feeding process of the wire feeding mechanism, the aluminum wire is extruded and transmitted by the wire pressing wheel. The wire pressing wheel is divided into a driving wheel and a driven wheel, and the driving wheel and the driven wheel rotate and transmit in different directions respectively. The wire feeding conduit sends the aluminum wire to the evaporation boat (inside the slot), preventing the aluminum wire from shaking. At the same time, an air supply pipe is provided to introduce pure oxygen to prepare oxides, which is convenient for the subsequent preparation of oxide films.

[0018] The beneficial effects of this application are as follows:

[0019] 1. For the evaporation device described in this application, by changing the arrangement method of the evaporation boats and arranging the evaporation boats in a staggered manner, the evaporation efficiency is improved, the heat distribution during the evaporation process is more uniform, the evaporation efficiency is increased by at least about 5%, and the consumption of raw materials is significantly reduced.

[0020] 2. For the evaporation device described in this application, a detection device (such as an eddy current thickness measuring device) is provided above the evaporation boat to detect the film thickness in real time, so as to monitor the evaporation effect and timely detect the failure of the evaporation boat, ensuring the stability and reliability of the evaporation process and timely detecting and handling the failure of the evaporation boat.

[0021] 3. For the evaporation device described in this application, the aluminum wire is stably fed into the evaporation boat through a wire feeding mechanism (including a wire feeding disc, a wire guiding device, a wire pressing wheel, and a wire feeding conduit), preventing the aluminum wire from shaking. At the same time, an air supply pipe is designed to introduce pure oxygen to prepare oxides, optimizing the evaporation process. Description of the Drawings

[0022] The present application will be further described below in conjunction with the accompanying drawings and embodiments.

[0023] Figure 1 It is a schematic structural diagram of an evaporation device with high evaporation efficiency according to the present application;

[0024] Figure 2 It is a schematic structural diagram of the wire feeding mechanism according to the present application;

[0025] Figure 3 It is a schematic structural diagram of a single evaporation boat according to the present application.

[0026] Wherein: 1. Evaporation boat; 2. Detection equipment; 3. Wire feeding mechanism; 11. Groove; 31. Wire guide; 32. Wire feeding disc; 33. Wire feeding conduit; 34. Bracket; 35. Wire pressing wheel; 36. Air supply pipe. Specific embodiments

[0027] The concept, specific structure and technical effects of the present application will be clearly and completely described below in conjunction with the embodiments and the accompanying drawings to fully understand the purpose, features and effects of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all embodiments. Other embodiments obtained by those skilled in the art based on the embodiments of the present application without creative efforts belong to the scope of protection of the present application. In addition, all the connection / connection relationships involved in the patent do not simply refer to the direct connection of components, but refer to the formation of a more optimal connection structure by adding or reducing connection accessories according to specific implementation situations. The various technical features in the present application can be combined with each other without conflict.

[0028] As Figure 1 shown, an evaporation device with high evaporation efficiency includes evaporation boats 1 arranged on the left and right sides inside the evaporation device; the evaporation boats 1 on the left side and the evaporation boats 1 on the right side are arranged in a staggered manner;

[0029] A detection device 2 is arranged above the evaporation boat 1.

[0030] Specifically, the inside of the evaporation device is divided into two areas on the left and right sides, and the evaporation boats are arranged in an orderly and staggered manner in these two areas, rather than the traditional uniform single-row placement;

[0031] As in Example 1, the evaporation boats on the left and right sides can be respectively arranged in two or more rows, but the evaporation boats in each row are not on the same horizontal line, but are staggered. For example, the first row of evaporation boats on the left side may be located at a lower position, while the second row of evaporation boats is located at a higher position, forming a stepped arrangement; correspondingly, the evaporation boats on the right side are also arranged in a similar manner, but may be mirror-symmetrical or offset from the left side.

[0032] Example 2: On the same side (left or right), the evaporation boats can be arranged in a zigzag or sawtooth pattern, that is, adjacent evaporation boats are offset horizontally, forming a well - arranged layout. This arrangement helps to increase the coverage area of the evaporation region and improve the evaporation efficiency.

[0033] Example 3: Considering that the number of evaporation boats may be relatively large (such as 36 * 2 evaporation boats), the staggered layout can be further refined into multiple groups. The evaporation boats within each group are arranged according to any of the above examples, and the overall staggered layout is achieved by a larger interval or different height levels between the groups.

[0034] Specifically, the detection device is a device for detecting the film thickness, which can be set according to actual needs. For example, it can be any one of a laser thickness gauge, an ultrasonic thickness gauge, a magnetic thickness gauge, an optical interferometer, a capacitive thickness gauge, and an eddy current thickness measuring device, as long as it can achieve the detection of the thickness.

[0035] Specifically, the evaporation device is a device used for the vacuum evaporation process.

[0036] Therefore, in the above - mentioned technical solution, the staggered arrangement of the evaporation boats can effectively improve the evaporation efficiency, reduce the consumption of raw materials and production costs. At the same time, by real - time detecting the film thickness to ensure the evaporation efficiency of the evaporation boats and timely discover the failure situation, the quality of the product and the stability of production can be further guaranteed.

[0037] In some embodiments, the number of the evaporation boats 1 is ≥ 6, and above three of the evaporation boats 1 on the same side, a detection device 2 for detecting the thickness is provided. The detection device 2 is an eddy current thickness measuring device.

[0038] In this application, an eddy current thickness measuring device is introduced as the detection device. The eddy current thickness measuring device is a non - contact measuring instrument, which has the advantages of high measuring accuracy, fast response speed, wide application range, etc. During the evaporation process, the eddy current thickness measuring device can monitor the thickness of the coating in real - time and feed the data back to the control system. Once abnormal coating thickness or signs of evaporation boat failure are detected, the control system can immediately take measures to adjust or replace the evaporation boat, thus avoiding the impact on the product quality.

[0039] Moreover, the number of evaporation boats should be greater than or equal to 6, and a detection device for detecting the film thickness is provided above three evaporation boats on the same side. This design further improves the flexibility and adaptability of the evaporation device; by increasing the number of evaporation boats, the production capacity of the evaporation coating can be significantly improved to meet the needs of large - scale production. At the same time, the layout of the detection device above three evaporation boats on the same side ensures the comprehensiveness and accuracy of the monitoring, and can timely discover and solve problems in the evaporation process.

[0040] In addition, above every three evaporation boats, an eddy current thickness measuring device is also placed. The area occupied by the way of arranging the evaporation boats in a staggered pattern is not much different from that of arranging the evaporation boats in a single row. However, compared with the way of arranging the evaporation boats in a single row, this staggered arrangement of evaporation boats can make the evaporation material evaporate more evenly, reduce the mutual shielding between the evaporation boats, improve the uniform deposition of the evaporation material, and thus improve the uniformity of the coating. In addition, the staggered arrangement of the evaporation boats can reduce the mutual influence between the evaporation boats, reduce the competition between the evaporation materials, enable each evaporation boat to evaporate more fully, and improve the overall evaporation efficiency.

[0041] In some embodiments, the lateral gap size measured by the detection device 2 is 50 mm. As Figure 3 shown, the specifications of the evaporation boat 1 are set as follows: the length is 150 mm, the width is 35 mm, and the depth is 10 mm. A slot 11 is provided on the evaporation boat 1, and the specifications of the slot 11 are set as follows: the length is 130 mm, the width is 31 mm, and the depth is 1 mm.

[0042] Specifically, in this example, the lateral gap size measured by the eddy current thickness measuring device is 50 mm, the length of each evaporation boat is 150 mm, the width is 35 mm, and the placement interval distance is 50 mm. The thickness of the sample can be monitored in real time to determine whether the evaporation boat fails. If the thickness displayed by one of the eddy current thickness measuring devices differs greatly from the thicknesses displayed by other eddy current thickness measuring devices, it indicates that the three evaporation boats monitored by this eddy current thickness measuring device have failed, and then the evaporation boats are checked one by one and replaced in time.

[0043] The specifications of the evaporation boat are set as a length of 150 mm, a width of 35 mm, and a depth of 10 mm. This size design takes into account both the bearing capacity and thermal stability of the evaporation boat and the requirements of evaporation efficiency. At the same time, the slot (length 130 mm, width 31 mm, depth 1 mm) provided on the evaporation boat further improves the evaporation efficiency. The slot design can increase the evaporation area, enable the aluminum wire to contact the high temperature more fully during the evaporation process, and accelerate the melting and evaporation process. In addition, the slot helps to evenly distribute the evaporation gas flow, reduce local overheating phenomena, and ensure the uniformity of the coating.

[0044] In some embodiments, there are 36 evaporation boats on the left side or the right side of the evaporation boat 1.

[0045] Specifically, by increasing the number of evaporation boats (36 on each side), the overall evaporation area of the evaporation device is significantly increased, thereby enhancing the evaporation efficiency of the aluminum wire or other materials. This way of increasing the evaporation area can evaporate more materials in the same time, and thus improve the production efficiency.

[0046] As Figure 2As shown, in some embodiments, the evaporation boat 1 is fed with wire through a wire feeding mechanism 3. The wire feeding mechanism 3 includes a wire feeding conduit 33. The evaporation boat 1 is fixed on a bracket 34 through a clamping groove. The wire feeding conduit 33 is arranged on the bracket 34, and the discharge port of the wire feeding conduit 33 is arranged on the evaporation boat 1. One end of the evaporation boat 1 away from the bracket 34 is provided with a gas supply pipe 36. The wire feeding mechanism 3 includes a wire feeding disk 32, a wire guide 31, and a wire pressing wheel 35. The wire feeding conduit 33 is arranged on the wire guide 31, and a wire pressing wheel 35 is arranged between the wire guide 31 and the bracket 34. The wire feeding disk 32 supplies the metal wire to the wire guide 31.

[0047] In the traditional evaporation device, there are often problems of jitter and instability during the wire feeding process, resulting in uneven distribution of the aluminum wire in the evaporation boat, and thus affecting the evaporation efficiency. The wire feeding mechanism in this application forms a stable wire feeding system by introducing components such as a wire feeding disk, a wire guide, a wire pressing wheel, and a wire feeding conduit. The wire pressing wheel ensures the stability and continuity of the aluminum wire during transmission through the cooperation of the driving wheel and the driven wheel, reduces the jitter phenomenon, and thus improves the accuracy of wire feeding.

[0048] In this application, the design of the wire feeding conduit enables the aluminum wire to be directly and efficiently transported into the evaporation boat. The discharge port is directly arranged on the evaporation boat, shortening the transmission distance of the aluminum wire, reducing the energy loss and friction loss, and further improving the wire feeding efficiency. In addition, the layout of the wire feeding conduit also takes into account the layout of the evaporation boat to ensure that each evaporation boat can receive the aluminum wire evenly and in a timely manner.

[0049] At the same time, fixing the evaporation boat on the bracket through the clamping groove not only ensures the stability of the evaporation boat but also facilitates the replacement and maintenance of the evaporation boat. This design makes the installation and disassembly of the evaporation boat more convenient and improves the production efficiency. At the same time, the staggeredly arranged evaporation boats can make more full use of the space in the evaporation device, improving the density of the evaporation boats and the evaporation efficiency.

[0050] A kind of evaporation device with high evaporation efficiency described in this application has the following specific working process:

[0051] By adopting the design of staggeredly arranged evaporation boats and combining the wire feeding mechanism with real-time detection equipment, the evaporation efficiency is significantly improved and the stability of the evaporation process is ensured.

[0052] The evaporation boats are staggeredly arranged on the left and right sides inside the evaporation device. This layout not only increases the evaporation area but also reduces the thermal interference between the evaporation boats, thus improving the overall evaporation efficiency. At the same time, each evaporation boat is firmly fixed on the bracket through the clamping groove, and the wire feeding conduit is integrated on the bracket to ensure that the aluminum wire can be smoothly and continuously fed into the evaporation boat;

[0053] The wire feeding mechanism consists of components such as a wire feeding reel, a wire guide, and a wire pressing wheel. Through a precise transmission mechanism, the aluminum wire is evenly fed into the evaporation boat under the extrusion of the wire pressing wheel, effectively preventing the shaking and breaking of the aluminum wire. In addition, an air supply pipe is provided at one end of the evaporation boat far from the bracket, through which pure oxygen can be introduced to assist in the preparation of the oxide film, further improving the quality of evaporation coating.

[0054] During the evaporation process, real-time detection equipment (such as an eddy current thickness measurement device) continuously monitors the thickness of the film to ensure the stable working state of the evaporation boat. Once it is found that the evaporation boat fails or the film thickness is abnormal, adjustments can be made in a timely manner, thus ensuring the uniformity and consistency of the coating.

[0055] In summary, the evaporation device with high evaporation efficiency realizes a substantial improvement in evaporation efficiency and precise control of the evaporation process by means of optimizing the evaporation boat layout, improving the wire feeding mechanism, and introducing real-time detection equipment, providing strong technical support for the preparation of materials such as composite aluminum foil.

[0056] The above is a specific description of the preferred embodiment of the present application. However, the present application is not limited to the described embodiment. Those skilled in the art can make various equivalent deformations or substitutions without departing from the spirit of the present application, and these equivalent deformations or substitutions are all included within the scope defined by the claims of the present application.

Claims

1. An evaporation device with high evaporation efficiency, characterized in that It includes evaporation boats (1) arranged on the left and right sides inside the evaporation device; the evaporation boats (1) on the left side and the evaporation boats (1) on the right side are arranged in a staggered manner; A detection device (2) is arranged above the evaporation boat (1).

2. The evaporation device according to claim 1, characterized in that, The number of the evaporation boats (1) is ≥6, and a detection device (2) for detecting thickness is arranged above three evaporation boats (1) on the same side.

3. The evaporation device according to claim 1, wherein, The detection device (2) is an eddy current thickness measuring device.

4. The evaporation device according to claim 1, characterized in that, The lateral gap size measured by the detection device (2) is 50 mm.

5. The evaporation device according to claim 1, characterized in that The specifications of the evaporation boat (1) are set as: length 150 mm, width 35 mm, and depth 10 mm.

6. The evaporation device according to claim 5, characterized in that A slot (11) is arranged on the evaporation boat (1), and the specifications of the slot (11) are set as: length 130 mm, width 31 mm, and depth 1 mm.

7. The evaporation device according to claim 1, characterized in that, There are 36 evaporation boats (1) on the left side or the right side.

8. The evaporation device according to claim 1, characterized in that, The evaporation boat (1) is fed with wire through a wire feeding mechanism (3), and the wire feeding mechanism (3) includes a wire feeding conduit (33); the evaporation boat (1) is fixed on a bracket (34) through a card slot, a wire feeding conduit (33) is arranged on the bracket (34), and the discharge port of the wire feeding conduit (33) is arranged on the evaporation boat (1).

9. The evaporation device according to claim 1, characterized in that, An air supply pipe (36) is arranged at one end of the evaporation boat (1) away from the bracket (34).

10. The evaporation device according to claim 8, characterized in that, The wire feeding mechanism (3) includes a wire feeding disk (32), a wire guiding device (31), and a wire pressing wheel (35); a wire feeding conduit (33) is arranged on the wire guiding device (31), a wire pressing wheel (35) is arranged between the wire guiding device (31) and the bracket (34), and the wire feeding disk (32) supplies metal wire to the wire guiding device (31).

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