Vacuum magnetic control coating machine

Abstract

The utility model discloses a vacuum magnetic control coating machine, which belongs to the technical field of coating and comprises a bottom frame, a vacuum box is connected above the bottom frame, a rotary placing mechanism is arranged between the vacuum box and the bottom frame, an air cooling component is arranged between the vacuum box and the bottom frame and positioned on the periphery of the rotary placing mechanism, and one side of the vacuum box is connected with a sealing door; the air cooling assembly is arranged, after substrate coating operation is completed, an electric push rod is started to drive a connecting block to move, the connecting block moves to drive a sealing plate to move away from the mounting frame, then a cooling fan is started, and air in the external environment enters the mounting frame after being filtered by a filter screen plate and then enters the vacuum box through an air outlet; and air cooling operation is carried out on the coated substrate on the rotary placement mechanism, then the sealing door is opened, and the coated substrate is taken out from the rotary placement mechanism, so that the hand scalding accident when an operator takes the substrate is avoided.

Description

Technical Field

[0001] The utility model belongs to the technical field of coating technology, and particularly relates to a vacuum magnetron coating machine. Background Art

[0002] Vacuum coating machines mainly refer to a type of coating that needs to be carried out under a relatively high vacuum degree, including many specific types, such as vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD pulsed laser deposition, ion beam sputtering, and many others.

[0003] Chinese Patent Application No. 202320929353.4 discloses a vacuum magnetron coating device, which includes a base and a coating system. Four support legs are fixedly installed at the bottom of the base, a vacuum chamber is fixedly installed at the top of the base, a sealing door is hinged to the front of the vacuum chamber, a placement tray is rotatably connected inside the vacuum chamber, a feeding device is arranged at the top of the vacuum chamber, and a vacuum pump is fixedly installed at the top of the vacuum chamber and on the right side of the feeding device. This vacuum magnetron coating production line and its coating system realize the installation of the vacuum chamber through the setting of the base, support the base through the setting of the support legs, place objects through the setting of the vacuum chamber, hold raw materials through the setting of the feeding device, rotate objects through the setting of the placement tray, so as to realize comprehensive coating of objects, and realize coating of objects through the setting of the coating system.

[0004] After the substrate is coated in the above patent, the coating temperature is transferred to the substrate, and when the substrate needs to be taken out later, it is easy to cause scalding accidents; in addition, the raw materials required for coating are directly placed inside the material storage box. When the size of the raw materials placed is large, it takes a long time for the subsequent raw materials to enter the spray head for evaporation operation, affecting the processing efficiency. Summary of the Utility Model

[0005] To solve the problems raised in the above background art, the utility model provides a vacuum magnetron coating machine, which has the characteristics of air-cooling and separation.

[0006] To achieve the above object, the utility model provides the following technical solution: a vacuum magnetron coating machine, including a chassis, a vacuum chamber is connected above the chassis, a rotary placement mechanism is arranged between the vacuum chamber and the chassis, an air-cooling component is arranged between the vacuum chamber and the chassis and outside the rotary placement mechanism, a sealing door is connected to one side of the vacuum chamber, a material storage box is connected above the vacuum chamber, a coating mechanism is arranged between the vacuum chamber and the material storage box, a feeding port is connected above the material storage box, and a separation component is arranged inside the feeding port.

[0007] Preferably, the air-cooling assembly includes a seal, a filter screen plate, a cooling fan, an air outlet, and a mounting frame. A mounting frame is connected below the chassis and around the rotary placement mechanism. Cooling fans are connected to both sides of the mounting frame. Air outlets are provided on the vacuum chamber and the chassis at positions corresponding to the cooling fans. A filter screen plate is connected inside the mounting frame, and a seal is provided at one end of the mounting frame.

[0008] Preferably, the seal includes a sealing plate, connecting blocks, and electric push rods. Electric push rods are connected below the chassis and on both sides of the mounting frame. Connecting blocks are connected to the output ends of the two electric push rods, and a sealing plate is connected between the two connecting blocks and at one end of the mounting frame.

[0009] Preferably, a sealing gasket is connected to the side of the sealing plate close to the mounting frame, and a sealing groove is provided at the end of the mounting frame corresponding to the sealing gasket.

[0010] Preferably, the separation assembly includes a mounting cylinder, a mounting ring, and a filter screen cylinder. A mounting ring is connected to the inner side wall of the feeding port, a mounting cylinder is connected inside the mounting ring, and a filter screen cylinder is provided inside the mounting cylinder.

[0011] Preferably, a guiding rotary ring is connected to the outer side wall of the filter screen cylinder, a guiding rotary hole is provided on the inner side wall of the filter screen cylinder corresponding to the guiding rotary ring, and a rotating rod is connected to the inner side wall of the filter screen cylinder.

[0012] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0013] 1. The present utility model is provided with an air-cooling assembly. After the substrate coating operation is completed, the electric push rod is started to drive the connecting block to move. The movement of the connecting block drives the sealing plate to move away from the mounting frame. Then, the cooling fan is started, and the air in the external environment enters the inside of the mounting frame after being filtered by the filter screen plate, and then enters the vacuum chamber through the air outlet to perform air-cooling operation on the coated substrate on the rotary placement mechanism. Then, the sealing door is opened, and the coated substrate is taken out from the rotary placement mechanism, avoiding the accident of the operator getting burned when taking the substrate.

[0014] 2. The present utility model is provided with a separation assembly. The raw materials are injected into the filter screen cylinder, and then the filter screen cylinder is rotated by holding the rotating rod. During the rotation of the filter screen cylinder, the small-particle raw materials fall into the material receiving box through the gaps on the filter screen cylinder, and the large-particle raw materials remain inside the filter screen cylinder, avoiding the large-particle raw materials from entering the coating mechanism and affecting the coating efficiency. When it is necessary to take out the large-particle raw materials inside the filter screen cylinder for reprocessing, the mounting cylinder is rotated to make it away from the mounting ring, and then the mounting cylinder is taken out from the feeding port, and then the large-particle raw materials inside the filter screen cylinder are poured out and reprocessed, facilitating the subsequent coating operation of other substrates using the processed large-particle raw materials. Brief Description of the Drawings

[0015] Figure 1 is a schematic structural diagram of the present utility model;

[0016] Figure 2 is a cross-sectional view of the present utility model;

[0017] Figure 3 is the present utility model Figure 2 an enlarged view of part A in;

[0018] Figure 4 is a cross-sectional view of the feeding port of the present utility model.

[0019] In the figure: 1, vacuum chamber; 2, material storage box; 3, feeding port; 4, sealing door; 5, chassis; 6, air-cooling assembly; 61, sealing member; 611, sealing plate; 612, connecting block; 613, electric push rod; 62, filter screen plate; 63, cooling fan; 64, air outlet; 65, mounting frame; 7, coating mechanism; 8, rotating placement mechanism; 9, separation assembly; 91, mounting cylinder; 92, mounting ring; 93, filter screen cylinder; 94, rotating rod. Detailed Description of the Preferred Embodiments

[0020] The following will clearly and completely describe the technical solutions in the embodiments of the present utility model with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0021] Embodiment 1

[0022] Please refer to Figures 1-4 , the present utility model provides the following technical solutions: A vacuum magnetron sputtering coater, including a chassis 5, a vacuum chamber 1 is connected above the chassis 5, a rotating placement mechanism 8 is arranged between the vacuum chamber 1 and the chassis 5, an air-cooling assembly 6 is arranged between the vacuum chamber 1 and the chassis 5 and outside the rotating placement mechanism 8, a sealing door 4 is connected to one side of the vacuum chamber 1, a material storage box 2 is connected above the vacuum chamber 1, a coating mechanism 7 is arranged between the vacuum chamber 1 and the material storage box 2, a feeding port 3 is connected above the material storage box 2, and a separation assembly 9 is arranged inside the feeding port 3.

[0023] Specifically, the air-cooling component 6 includes a seal 61, a filter screen plate 62, a cooling fan 63, an air outlet 64, and a mounting frame 65. A mounting frame 65 is connected below the chassis 5 and outside the rotating placement mechanism 8. Cooling fans 63 are connected to both sides of the mounting frame 65. Air outlets 64 are provided on the vacuum chamber 1 and the chassis 5 at positions corresponding to the cooling fans 63. A filter screen plate 62 is connected inside the mounting frame 65, and a seal 61 is provided at one end of the mounting frame 65.

[0024] By adopting the above technical solution, after the substrate coating is completed, first release the sealing effect of the seal 61 on the mounting frame 65, and then start the cooling fan 63. The air in the external environment enters the inside of the mounting frame 65 after being filtered by the filter screen plate 62, and then enters the vacuum chamber 1 through the air outlet 64 to perform air-cooling on the coated substrate on the rotating placement mechanism 8, avoiding the accident of burning hands when subsequent operators take the substrate.

[0025] Specifically, the seal 61 includes a sealing plate 611, a connecting block 612, and an electric push rod 613. Electric push rods 613 are connected below the chassis 5 and on both sides of the mounting frame 65. Connecting blocks 612 are connected to the output ends of the two electric push rods 613, and a sealing plate 611 is connected between the two connecting blocks 612 and at one end of the mounting frame 65.

[0026] By adopting the above technical solution, start the electric push rod 613 to drive the connecting block 612 to move. The movement of the connecting block 612 drives the sealing plate 611 to move away from the mounting frame 65, facilitating the air in the external environment to enter the vacuum chamber 1 through the mounting frame 65. Also, the electric push rod 613 can be started to drive the connecting block 612 to move. The movement of the connecting block 612 drives the sealing plate 611 to move and fit the mounting frame 65 to perform a sealing operation on the end of the mounting frame 65, facilitating the operator to perform the vacuum pumping operation on the vacuum chamber 1.

[0027] Specifically, a sealing gasket is connected to the side of the sealing plate 611 close to the mounting frame 65, and a sealing groove is provided at the end of the mounting frame 65 corresponding to the sealing gasket.

[0028] By adopting the above technical solution, after the sealing plate 611 moves and fits the side wall of the mounting frame 65, the sealing gasket is correspondingly clamped into the sealing groove. Under the action of the sealing gasket and the sealing groove, it is possible to avoid gaps between the sealing plate 611 and the mounting frame 65, ensuring the sealing effect of the sealing plate 611.

[0029] When this embodiment is in use, open the sealing door 4, place the substrate to be coated on the rotary placement mechanism 8, then inject the raw materials required for coating into the inside of the material storage box 2 through the feeding port 3, and then evaporate and move the injected raw materials onto the substrate through the coating mechanism 7 to complete the coating operation of the substrate. After the coating operation is completed, start the electric push rod 613 to drive the connecting block 612 to move. The movement of the connecting block 612 drives the sealing plate 611 to move away from the installation frame 65. Then start the cooling fan 63. The air in the external environment enters the inside of the installation frame 65 after being filtered by the filter screen plate 62, and then enters the vacuum box 1 through the air outlet 64 to perform air cooling on the coated substrate on the rotary placement mechanism 8. Then open the sealing door 4, and then take out the coated substrate from the rotary placement mechanism 8 to avoid scalding accidents when the operator takes the substrate.

[0030] Embodiment 2

[0031] The difference between this embodiment and Embodiment 1 is that the separation component 9 includes an installation cylinder 91, an installation ring 92 and a filter screen cylinder 93. The inner side wall of the feeding port 3 is connected with the installation ring 92, the inside of the installation ring 92 is connected with the installation cylinder 91, and the inside of the installation cylinder 91 is provided with the filter screen cylinder 93.

[0032] Specifically, a guiding rotary ring is connected to the outer side wall of the filter screen cylinder 93, a guiding rotary groove is arranged on the inner side wall of the filter screen cylinder 93 at the position corresponding to the guiding rotary ring, and a rotating rod 94 is connected to the inner side wall of the filter screen cylinder 93.

[0033] By adopting the above technical solution, after injecting raw materials into the filter screen cylinder 93, hold the rotating rod 94 and drive the filter screen cylinder 93 to rotate. The rotation of the filter screen cylinder 93 drives the guiding rotary ring to rotate inside the guiding rotary groove. During the rotation of the filter screen cylinder 93, the feeding efficiency of the raw materials inside the filter screen cylinder 93 can be accelerated.

[0034] When this embodiment is in use, inject the raw materials into the filter screen cylinder 93, then hold the rotating rod 94 and drive the filter screen cylinder 93 to rotate. During the rotation of the filter screen cylinder 93, the small particle raw materials fall into the inside of the material storage box 2 through the gaps on the filter screen cylinder 93, and the large particle raw materials remain inside the filter screen cylinder 93, avoiding the large particle raw materials from entering the coating mechanism 7 and affecting the coating efficiency. When it is necessary to take out the large particle raw materials inside the filter screen cylinder 93 for reprocessing, rotate the installation cylinder 91 to make it away from the installation ring 92, then take out the installation cylinder 91 from the feeding port 3, and then pour out the large particle raw materials inside the filter screen cylinder 93 and perform reprocessing on the large particle raw materials, which is convenient for subsequent coating operations of other substrates using the processed large particle raw materials.

[0035] The cooling fan 63 in the present utility model is an existing publicly disclosed technology, and the selected model is G-71A.

[0036] The structure and principle of the coating mechanism 7 composed of a vacuum pump, a feeding pipe, a second servo motor, a mounting plate, a mounting rod, a third servo motor, a strong magnetic head, a spraying head, a limiting groove, a first sliding groove, a limiting rod, a first slider, a first threaded rod, a second sliding groove, and a second slider in the present utility model have been disclosed in a vacuum magnetron coating device with a Chinese patent application number of 202320929353.4. Its working principle is as follows: A vacuum pump is connected above the vacuum chamber 1 and on one side of the material storage box 2. The right side of the bottom of the material storage box 2 is communicated with a feeding pipe, and the bottom of the feeding pipe penetrates through the vacuum chamber 1. Mounting plates are connected to both sides inside the vacuum chamber 1. Limiting grooves are provided on the relatively close sides of the two mounting plates. A limiting rod is slidably connected inside the limiting groove. One side of the limiting rod is fixedly connected to a mounting rod. A first sliding groove is opened inside the mounting plate, and a first slider is slidably connected inside the first sliding groove. One side of the first slider is fixedly connected to the mounting rod. A second servo motor is fixedly installed on the top of the vacuum chamber 1. A second threaded rod is fixedly installed on the output shaft of the second servo motor, and the second threaded rod penetrates into the first sliding groove and is rotationally connected to the first slider through a thread. A strong magnetic head is connected to the right side of the mounting rod on the left side inside the vacuum chamber 1, and a spraying head is connected to the left side of the mounting rod on the right side inside the vacuum chamber 1. The top of the spraying head is communicated with the bottom of the feeding pipe. A second sliding groove is opened inside the mounting rod, and a second slider is slidably connected inside the second sliding groove. One side of the second slider is fixedly connected to the spraying head and the strong magnetic head. When in use, the air inside the vacuum chamber 1 is pumped out by the vacuum pump to make it in a vacuum state. The raw material is sent into the inside of the spraying head through the feeding pipe, and is heated and evaporated by the spraying head. At the same time, the evaporated substance is attracted by the action of the strong magnetic head, so that the evaporated substance moves and adheres to the side of the object. The lifting adjustment of the first slider is realized through the cooperation between the second servo motor, the second threaded rod, and the thread, so as to realize the lifting adjustment of the mounting rod to drive the strong magnetic head and the spraying head to rise, and realize the comprehensive coating of the object.

[0037] The structure and principle of the rotating placement mechanism 8 composed of a first servo motor and a placement disk in the present utility model have been disclosed in a vacuum magnetron coating device with a Chinese patent application number of 202320929353.4. Its working principle is as follows: A first servo motor is connected below the chassis 5, and the output end of the first servo motor is connected to a placement disk. When in use, the substrate to be coated is placed on the placement disk, and then the first servo motor is started. The first servo motor runs to drive the placement disk to rotate, and the placement disk rotates to drive the substrate to rotate.

[0038] Working principle and usage process of the present utility model: Open the sealing door 4 of the present utility model, place the substrate to be coated on the rotating placement mechanism 8, then inject the raw materials into the interior of the filter screen cylinder 93, and then hold the rotating rod 94 and drive the filter screen cylinder 93 to rotate. During the rotation of the filter screen cylinder 93, the small particle raw materials fall into the material receiving box 2 through the gaps on the filter screen cylinder 93, and the large particle raw materials remain in the interior of the filter screen cylinder 93. Then, the evaporation and movement of the injected raw materials are carried out by the coating mechanism 7 and adhered to the substrate to complete the coating operation of the substrate. After the coating operation is completed, start the electric push rod 613 to drive the connecting block 612 to move. The movement of the connecting block 612 drives the sealing plate 611 to move away from the installation frame 65. Then start the cooling fan 63. The air in the external environment enters the interior of the installation frame 65 after being filtered by the filter screen plate 62, and then enters the vacuum box 1 through the air outlet 64 to perform air cooling on the coated substrate on the rotating placement mechanism 8. Then open the sealing door 4, and take out the coated substrate from the rotating placement mechanism 8 to avoid scalding accidents when the operator takes the substrate. When it is necessary to take out the large particle raw materials in the filter screen cylinder 93 for reprocessing operations, rotate the installation cylinder 91 to make it away from the installation ring 92, then take out the installation cylinder 91 from the feeding port 3, and then pour out the large particle raw materials in the filter screen cylinder 93 and perform reprocessing operations on the large particle raw materials, which is convenient for subsequent coating operations of other substrates using the processed large particle raw materials.

[0039] Although the embodiments of the present utility model have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principle and spirit of the present utility model. The scope of the present utility model is defined by the appended claims and their equivalents.

Claims

1. A vacuum magnetron sputtering coater, comprising a chassis, characterized in that: A vacuum box is connected above the chassis. A rotary placement mechanism is arranged between the vacuum box and the chassis. An air-cooling assembly is arranged between the vacuum box and the chassis and around the rotary placement mechanism. A sealing door is connected to one side of the vacuum box. A material storage box is connected above the vacuum box. A coating mechanism is arranged between the vacuum box and the material storage box. A feeding port is connected above the material storage box. A separation assembly is arranged inside the feeding port; The air-cooling assembly includes a sealing member, a filter screen plate, a cooling fan, an air outlet, and a mounting frame. The mounting frame is connected below the chassis and around the rotary placement mechanism. Cooling fans are connected to both sides of the mounting frame. Air outlets are arranged on the vacuum box and the chassis at positions corresponding to the cooling fans. The filter screen plate is connected inside the mounting frame. A sealing member is arranged at one end of the mounting frame; The separation assembly includes a mounting cylinder, a mounting ring, and a filter screen cylinder. The mounting ring is connected to the inner side wall of the feeding port. The mounting cylinder is connected inside the mounting ring. The filter screen cylinder is arranged inside the mounting cylinder.

2. The magnetron sputtering coater according to claim 1, wherein: The sealing member includes a sealing plate, a connecting block, and an electric push rod. Electric push rods are connected to both sides of the mounting frame below the chassis. Connecting blocks are connected to the output ends of the two electric push rods. The sealing plate is connected between the two connecting blocks and at one end of the mounting frame.

3. A vacuum magnetron sputtering coater according to claim 2, characterized in that: A sealing gasket is connected to the side of the sealing plate close to the mounting frame. A sealing groove is arranged at the end of the mounting frame at a position corresponding to the sealing gasket.

4. A vacuum magnetron sputtering coater according to claim 1, characterized in that: A guiding rotary ring is connected to the outer side wall of the filter screen cylinder. A guiding rotary hole is arranged on the inner side wall of the filter screen cylinder at a position corresponding to the guiding rotary ring. A rotating rod is connected to the inner side wall of the filter screen cylinder.

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