Substrate sample fixing clamp

Abstract

The utility model belongs to the technical field of magnetron sputtering, and discloses a substrate sample fixing clamp which comprises a tray, a plurality of pressing sheets and a screw clamping seat, a center screw hole is formed in the center of the tray, and a plurality of peripheral screw holes surrounding the center screw hole are further formed in the tray. Each screw clamping seat is in threaded connection with the central screw hole or the peripheral screw holes; and one end of the pressing sheet is fixedly connected with the screw clamping seat, and the other end is pressed on the surface of the substrate sample on the tray. The clamp disclosed by the utility model can be used for simultaneously fixing a plurality of substrate samples of the same type or different types, so that the magnetron sputtering efficiency is improved, and the accidental deviation of a result is reduced. According to the utility model, the substrate sample cannot be driven to slide due to screwing of the pressing sheet in the mounting process of the substrate sample, the damage of the substrate sample in the mounting and dismounting process is avoided, the integrity of the substrate sample is ensured, the application range is wide, the substrate sample can be quickly fixed, the operation is simple and quick, the time for fixing the substrate sample is effectively saved, and the working efficiency is improved. And the working efficiency is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of magnetron sputtering, and specifically discloses a substrate sample fixing fixture for a magnetron sputtering system. Background Art

[0002] Magnetron sputtering is a commonly used technology for thin film preparation due to its characteristics of "high speed, low temperature, and low damage", and it can generally be used for the preparation of various materials such as metals, semiconductors, and insulators. The thickness and uniformity of the thin film prepared by the magnetron sputtering technology are controllable, and it has good denseness and strong adhesion. Currently, it has become an important means for preparing ultra-hard films, superconducting films, magnetic films, optical films, and special functional thin film materials. The magnetron sputtering technology has been widely applied in the fields of integrated circuits, semiconductor lighting, microelectromechanical systems, advanced packaging, and optical coating. In the actual operation process of magnetron sputtering, first, the substrate sample to be sputtered needs to be fixed on the fixture for placing the substrate sample, and then the fixture is placed in the magnetron sputtering equipment for sputtering coating operation. Finally, the sputtered substrate sample is taken off the fixture. Usually, multiple substrate samples are loaded on the fixed fixture, which can not only improve the efficiency but also reduce the accidental deviation of the results.

[0003] There are many types of existing fixtures. The common fixtures are rectangular and square. However, in actual applications, the rectangular and square fixtures have the problems of a small number of substrate samples placed, a single size and shape of the substrate samples, and it is not easy to fix the substrate samples when placing them. There are often phenomena such as sliding, warping of the substrate samples, or fracture and wear of the substrate samples caused by uneven force on the contact surface. Summary of the Invention

[0004] The purpose of the utility model is to provide a substrate sample fixing fixture to solve the technical problems existing in the existing fixture, such as a small number of substrate samples clamped, only being able to clamp the same type of substrate samples, and damaging the substrate samples.

[0005] The utility model provides a substrate sample fixing fixture, which includes a tray, a plurality of pressing pieces, and screw holders;

[0006] A central screw hole is provided at the center position of the tray, and a plurality of peripheral screw holes surrounding the central screw hole are also provided on the tray;

[0007] Each screw holder is threadedly connected to the central screw hole or the peripheral screw hole;

[0008] One end of the pressing piece is fixedly connected to the screw holder, and the other end presses against the surface of the substrate sample on the tray.

[0009] Preferably, each screw holder includes a limiting body, a lifting body, and a screw;

[0010] The limiting body is arranged on the upper surface of the lifting body;

[0011] The lifting body is arranged on the tray;

[0012] One end of the pressing piece is sleeved on the limiting body;

[0013] The screw sequentially passes through the limiting body, the lifting body and the tray.

[0014] Preferably, the cross-section of the limiting body is polygonal.

[0015] Preferably, the lifting body is a cylinder or a prism.

[0016] Preferably, the pressing piece is a rectangular sheet body with a descending step;

[0017] One end of the rectangular sheet body is provided with a hole groove matching the limiting body, and the other end is a crimping end and is crimped on the surface of the substrate sample on the tray.

[0018] Preferably, the material of the pressing piece is molybdenum steel alloy.

[0019] Preferably, it further includes a bracket and a furnace body mounting plate;

[0020] The tray is lapped on the bracket;

[0021] The bracket is fixedly arranged on the surface of the furnace body mounting plate.

[0022] Preferably, the bracket is of a C-shaped structure;

[0023] The lower bottom plate of the C-shaped structure extends towards the inner ring side to form a lapping plate matching the shape of the tray;

[0024] The tray is arranged on the lapping plate and the upper surface of the tray is flush with the upper surface of the C-shaped structure.

[0025] Preferably, the tray extends out a hand-held end;

[0026] The hand-held end is fixedly connected to the furnace body mounting plate.

[0027] Preferably, the peripheral screw holes are uniformly arranged with the central screw hole as the center.

[0028] The substrate sample fixing fixture of the present utility model has the following beneficial effects compared with the prior art:

[0029] Since the present utility model is provided with screw holes both at the center and the periphery of the tray, the positions of the screw card holders and the pressing plates can be determined according to the shape and size of the substrate sample, so that multiple substrate samples of the same type or different types can be fixed simultaneously, thereby improving the magnetron sputtering efficiency and reducing the accidental deviation of the results. Further, the present utility model uses screw card holders to fix the substrate samples. During the installation and disassembly process, it is not necessary to move the pressing plates. Only by rotating the screws in the screw card holders can the pressing plates be separated from the substrate samples. Therefore, the substrate samples will not slide or wear due to the screwing of the pressing plates, avoiding damage during the installation and disassembly process of the substrate samples, ensuring the integrity of the substrate samples, enabling rapid fixation of the substrate samples, with simple and fast operation, effectively saving the time for fixing the substrate samples and improving work efficiency.

[0030] The applicable range of the substrate sample fixing fixture of the present utility model can be extended to all physical vapor deposition (PVD) systems in which the substrate samples are placed above the evaporation source and the target in thermal evaporation, electron beam evaporation, and sputtering coating methods. The applicable range is wide, and the structure is simple, easy to process and manufacture, and convenient to assemble. Description of the Drawings

[0031] Figure 1 It is a schematic structural view of the tray in the embodiment of the present utility model.

[0032] Figure 2 It is a schematic structural view when fixing a circular substrate sample on the tray in the embodiment of the present utility model.

[0033] Figure 3 It is a schematic structural view when fixing four triangular substrate samples on the tray in the embodiment of the present utility model.

[0034] Figure 4 It is another schematic structural view when fixing four triangular substrate samples on the tray in the embodiment of the present utility model.

[0035] Figure 5 It is a schematic structural view when fixing a total of 4 circular and square substrate samples on the tray simultaneously in the embodiment of the present utility model.

[0036] Figure 6 It is a schematic structural view when fixing a total of 4 circular, square and triangular substrate samples on the tray simultaneously in the embodiment of the present utility model.

[0037] Figure 7 It is a schematic structural view of the screw card holder in the embodiment of the present utility model.

[0038] Figure 8 is Figure 7 cross-sectional view of.

[0039] Figure 9Schematic structural view of the tablet in the embodiment of the present utility model.

[0040] Figure 10 Schematic structural view of the bracket in the embodiment of the present utility model.

[0041] Figure 11 Schematic structural view of the furnace body mounting plate in the embodiment of the present utility model.

[0042] Figure 12 Cross-sectional view of the assembly result of the substrate sample fixing fixture in the embodiment of the present utility model.

[0043] In the figure: 1, tray; 101, central screw hole; 102, peripheral screw hole; 103, hand-held end; 104, end screw hole; 2, bracket; 201, bracket screw hole; 202, innermost circle of the bracket; 203, second innermost circle of the bracket; 204, outer circle of the bracket; 3, screw holder; 301, limiting body; 302, screw holder screw hole; 303, lifting body; 4, furnace body mounting plate; 401, furnace body mounting plate screw hole; 402, fixing screw hole; 5, tablet; 501, hole groove; 502, crimping end; 6, substrate sample. Detailed implementation manners

[0044] In order to make the objectives and advantages of the present utility model clearer, the present utility model will be further described in detail below in conjunction with embodiments. It should be understood that the specific embodiments described herein are only used to explain the present utility model and are not used to limit the present utility model.

[0045] The embodiment of the present utility model provides a substrate sample fixing fixture, as Figures 1 to 12 shown, including a tray 1, a plurality of tablets 5 and a screw holder 3; wherein the structure of the tray 1 is as Figure 1 shown, a central screw hole 101 is provided at the center position of the tray 1, and a plurality of peripheral screw holes 102 surrounding the central screw hole 101 are further provided on the tray 1; each screw holder 3 is threadedly connected to the central screw hole 101 or the peripheral screw hole 102; one end of the tablet 5 is fixedly connected to the screw holder 3, and the other end is crimped on the surface of the substrate sample 6 on the tray 1.

[0046] Since the present utility model is provided with screw holes both at the center and the periphery of the tray 1, the positions of the screw holder 3 and the tablet 5 can be determined according to the shape and size of the substrate sample 6, so Figures 2 to 6As shown, multiple substrate samples 6 of the same type or different types are fixed simultaneously, thereby improving the magnetron sputtering efficiency and reducing the accidental deviation of the results. Further, the utility model uses a screw clamp seat 3 to fix the substrate sample 6. During the installation and disassembly process, there is no need to move the pressing piece 5. Only by rotating the screw in the screw clamp seat 3 can the pressing piece 5 be separated from the substrate sample 6. Therefore, the substrate sample 6 will not slide or wear due to the rotation of the pressing piece 5, avoiding damage during the installation and disassembly process of the substrate sample 6, ensuring the integrity of the substrate sample 6, enabling rapid fixation of the substrate sample 6, with simple and fast operation, effectively saving the time for fixing the substrate sample 6 and improving work efficiency.

[0047] The applicable range of the substrate sample fixing fixture of the utility model can be extended to all physical vapor deposition (PVD) systems in which the substrate sample 6 is placed above the evaporation source and the target material in all thermal evaporation, electron beam evaporation, and sputtering coating methods. The applicable range is wide, and the structure is simple, easy to process and manufacture, and convenient to assemble.

[0048] In the embodiment of the utility model, the structure of each screw clamp seat 3 is as Figure 7 and Figure 8 shown, including a limiting body 301, a lifting body 303, and a screw; the limiting body 301 is arranged on the upper surface of the lifting body 303; the lifting body 303 is arranged on the tray 1; one end of the pressing piece 5 is sleeved on the limiting body 301; the screw sequentially passes through the limiting body 301, the lifting body 303, and the tray 1. Correspondingly, screw clamp seat screw holes 302 with corresponding positions and the same size are arranged on both the limiting body 301 and the lifting body 303. Further, the central screw hole 101 or the peripheral screw hole 102 at the position corresponding to the screw clamp seat screw hole 302 also has the same size as the screw clamp seat screw hole 302, so as to realize the accurate connection of the limiting body 301, the lifting body 303, and the tray 1.

[0049] In this embodiment, the function of the limiting body 301 is to limit the rotation of the pressing piece 5, making the pressing piece 5 integrated with the limiting body 301; the function of the lifting body 303 is to increase the height of one end of the pressing piece 5 to avoid the problem that the whole pressing piece 5 contacts the substrate sample 6, resulting in excessive pressure and an increased probability of wear due to a large contact area; the screw sequentially passes through the limiting body 301, the lifting body 303, and the tray 1, thereby realizing the fixed connection between the screw clamp seat 3 and the tray 1. This structure enables the working state to remain stable even when the tray 1 rotates. At the same time, during the installation and disassembly process of the substrate sample 6, there is no need to move the pressing piece 5. Only by rotating the screw can the pressing piece 5 be separated from the substrate sample 6. Therefore, the substrate sample 6 will not slide or wear due to the rotation of the pressing piece 5, avoiding damage during the installation and disassembly process of the substrate sample 6 and ensuring the integrity of the substrate sample 6.

[0050] The cross-section of the limiting body 301 in the embodiment of the present utility model is a polygon. Exemplarily, it can be a triangle, a square, a pentagon, or other shapes that can limit the rotation of the pressing piece 5.

[0051] The lifting body 303 in the embodiment of the present utility model is a cylinder or a prism. Since the outer wall of the prism has a prism surface, it can effectively utilize clamping tools for operation, simplify the operation process of installing and disassembling the substrate sample 6, greatly improve the operation efficiency, and save a large amount of time for replacing the substrate sample 6.

[0052] To ensure the crimping effect of the pressing piece 5 and avoid damaging the substrate sample 6, the structure of the pressing piece 5 in the embodiment of the present utility model is as Figure 9 shown as a rectangular sheet body with a descending step; one end of the rectangular sheet body is provided with a hole groove 501 matching the limiting body 301, and the right part of the pressing piece 5 is bent towards the substrate sample 6 side along the central axis in the length direction of the pressing piece 5 to form a crimping end 502, and the crimping end 502 is crimped on the surface of the substrate sample 6 on the tray 1. This kind of structural design can make the area where the pressing piece 5 contacts the substrate sample 6 fixed and the force application uniform. When multiple pressing pieces 5 are crimped on the same substrate sample 6, since the contact area between the crimping end 502 of each pressing piece 5 and the substrate sample 6 is the same and the substrate sample 6 is stressed evenly, there will be no phenomena such as loosening, abrasion, warping of the substrate sample 6, or fracture of the substrate sample 6 caused by uneven force on the contact surface during the installation of the substrate sample 6 and the process of taking the piece, and the substrate sample 6 can be firmly fixed.

[0053] The material of the pressing piece 5 in the embodiment of the present utility model is an elastic alloy material, preferably molybdenum steel alloy. When the pressing piece 5 is subjected to pressure, the pressing piece 5 has a certain elasticity and has a series of excellent properties such as high hardness, wear resistance, good strength and toughness, heat resistance, good heat conductivity, uniform temperature distribution, and corrosion resistance, so that it can work stably even under high-temperature conditions and will not contaminate the substrate sample 6 and affect the performance of the substrate sample 6.

[0054] To facilitate the setting of the substrate sample fixing fixture in the embodiment of the present utility model in a magnetron sputtering device, the fixture in this embodiment further includes a bracket 2 and a furnace body mounting plate 4; the structure of the bracket 2 is as Figure 10 shown, and the structure of the furnace body mounting plate 4 is as Figure 11 shown. The tray 1 is lapped on the bracket 2; the bracket 2 is fixedly arranged on the surface of the furnace body mounting plate 4, and the furnace body mounting plate 4 is fixedly connected to the magnetron sputtering device.

[0055] To facilitate the placement of the tray 1 on the bracket 2, the bracket 2 in this embodiment has a C-shaped structure; the lower bottom plate of the C-shaped structure extends inwardly towards the inner ring side to form a lapping plate that matches the shape of the tray 1; the tray 1 is placed on the lapping plate and the upper surface of the tray 1 is flush with the upper surface of the C-shaped structure. During use, the tray 1 can be simply and conveniently pushed onto the lapping plate inside the bracket 2.

[0056] Exemplarily, the bracket 2 has a C-shaped structure. The outer bracket ring 204 and the inner bracket ring are both arc-shaped. A plurality of bracket screw holes 201 are provided on the outer bracket ring 204. The inner bracket ring is divided into the innermost bracket ring 202 and the second innermost bracket ring 203. The thickness of the innermost bracket ring 202 is less than that of the second innermost bracket ring 203, and the thickness difference between the two is the thickness of the tray 1. The design of such a structure of the innermost bracket ring 202 and the second innermost bracket ring 203 can form the lapping plate.

[0057] The furnace body mounting plate 4 in the embodiment of the present invention is circular. A plurality of furnace body mounting plate screw holes 401 are provided on the furnace body mounting plate 4. The size of the outer bracket ring 204 corresponds to it. The size of the furnace body mounting plate 4 can be changed according to actual needs, but still needs to maintain the principle that the size of the furnace body mounting plate 4 corresponds to the size of the outer bracket ring 204, and the sizes of the furnace body mounting plate screw holes 401 and the bracket screw holes 201 are the same. The furnace body mounting plate 4 is mainly used to fix the bracket 2.

[0058] To facilitate the taking of the tray 1, the tray 1 in the embodiment of the present invention extends out a handheld end 103; a terminal screw hole 104 is provided on the handheld end 103. The screw sequentially passes through the terminal screw hole 104 of the handheld end 103 and the fixing screw hole 402 at the corresponding position of the furnace body mounting plate 4 to realize the fixed connection between the handheld end 103 and the furnace body mounting plate 4.

[0059] The peripheral screw holes 102 in the embodiment of the present invention can be distributed in a polygon or a circle around the central screw hole 101. In this embodiment, it is preferably a circular distribution with the peripheral screw holes 102 evenly arranged with the central screw hole 101 as the center. This structure is more convenient for installing the same type or different types of substrate samples 6, and has a wider application range.

[0060] The present invention includes the following steps during use:

[0061] Step S1: Take a pressing sheet 5 and a screw holder 3. Set the hole slot 501 of the pressing sheet 5 on the limiting body 301 of the screw holder 3, and then pass the screw through the limiting body 301, the lifting body 303 and the tray 1 in sequence (do not tighten at this time).

[0062] Step S2: Place the substrate sample 6 on the tray 1 and adjust the position of the substrate sample 6 to a reasonable placement area.

[0063] Step S3: Adjust the direction of the pressing piece 5 so that the crimping end 502 of the pressing piece 5 contacts the substrate sample 6, ensuring that the contact surface is the pressing surface part of the pressing piece 5. Then tighten the screw in Step S1. Install multiple pressing pieces 5 according to this operation, ensuring that the substrate sample 6 is stressed equally in all directions and is firmly and stably fixed on the tray 1 (do not tighten or loosen the screw too much, just ensure that the pressing piece 5 is in direct contact with the substrate sample 6).

[0064] Step S4: Repeat Steps S1 to S3 to successively install multiple substrate samples 6 of the same type or different types to obtain a tray 1 with multiple substrate samples 6.

[0065] Step S5: Screw the bracket 2 onto the fixed furnace body mounting plate 4. If the bracket 2 has already been fixed, this step can be skipped;

[0066] Step S6: Use the handheld end 103 on the tray 1 to move the tray 1 with one substrate sample 6 obtained in Step S3 or the tray 1 with multiple substrate samples 6 obtained in Step S4, and push the tray 1 onto the bracket 2. Screw the screw on the handheld end 103 to complete the fixation of the substrate sample 6.

[0067] The structural schematic diagram of the substrate sample fixing fixture of the present utility model after assembly is as Figure 12 shown. This fixture provides a substrate sample fixing fixture for the magnetron sputtering coating method that can meet substrate samples 6 of different sizes and shapes and is simple, fast, convenient, and stably fixed in operation.

[0068] The above are only several embodiments of the present utility model and do not impose any form of limitation on the present utility model. Although the present utility model is disclosed above with preferred embodiments, it is not intended to limit the present utility model. Any person skilled in the art, within the scope of the technical solution of the present utility model, making some changes or modifications using the disclosed technical content is equivalent to equivalent implementation cases and all fall within the scope of the technical solution.

Claims

1. A substrate sample fixing fixture, characterized in that, It includes a tray, multiple pressing plates and screw holders; A central screw hole is provided at the center position of the tray, and a plurality of peripheral screw holes surrounding the central screw hole are also provided on the tray; Each screw holder is threadedly connected to the central screw hole or the peripheral screw hole; One end of the pressing plate is fixedly connected to the screw holder, and the other end is pressed against the surface of the substrate sample on the tray.

2. The substrate sample fixing fixture according to claim 1, wherein Each screw holder includes a limiting body, a lifting body and a screw; The limiting body is provided on the upper surface of the lifting body; The lifting body is provided on the tray; One end of the pressing plate is sleeved on the limiting body; The screw sequentially passes through the limiting body, the lifting body and the tray.

3. The substrate sample fixing jig according to claim 2, characterized in that, The cross-section of the limiting body is polygonal.

4. The substrate sample fixing jig according to claim 2, characterized in that, The lifting body is a cylinder or a prism.

5. The substrate sample fixing jig according to claim 2, characterized in that, The pressing plate is a rectangular sheet body with a descending step; One end of the rectangular sheet body is provided with a hole groove matching the limiting body, and the other end is a pressing end and is pressed against the surface of the substrate sample on the tray.

6. The substrate sample fixing jig according to claim 1, wherein The material of the pressing plate is molybdenum steel alloy.

7. The substrate sample fixing jig according to claim 1, wherein It further includes a bracket and a furnace body mounting plate; The tray is lapped on the bracket; The bracket is fixedly arranged on the surface of the furnace body mounting plate.

8. The substrate sample fixing fixture according to claim 7, wherein, The bracket is of a C-shaped structure; The lower bottom plate of the C-shaped structure extends inward to the inner ring side to form a lapping plate matching the shape of the tray; The tray is arranged on the lapping plate and the upper surface of the tray is flush with the upper surface of the C-shaped structure.

9. The substrate sample fixing fixture according to claim 7, wherein The tray extends outward to form a handheld end; The handheld end is fixedly connected to the furnace body mounting plate.

10. The substrate sample fixing jig according to claim 1, characterized in that, The peripheral screw holes are evenly arranged with the central screw hole as the center.

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