Film thickness distribution adjusting system

Abstract

The utility model relates to the technical field of optical coating, in particular to a film thickness distribution adjusting system which is characterized in that two thickness compensation plate assemblies are oppositely arranged in the first direction, and a gap is formed between the two thickness compensation plate assemblies; the thickness compensation plate assembly comprises a plurality of partition plates and a plurality of partition plate driving units, the partition plates are arranged in the third direction, the partition plate driving units are installed on the partition plates in a one-to-one correspondence mode, and the partition plates are arranged on the partition plates in a one-to-one correspondence mode. The partition plate driving unit is used for driving the partition plate to move in the third direction, and every two of the first direction, the second direction and the third direction are perpendicular to each other. The utility model aims to provide a film thickness distribution adjusting system aiming at at least one technical problem related in the background technology.

Description

Technical Field

[0001] This application relates to the field of coating technology, and more specifically, to a system for adjusting the thickness distribution of a film layer. Background Art

[0002] A solar cell can directly convert solar energy into electrical energy, which is a way to obtain clean energy. The power generation cost of a solar cell depends on the photoelectric conversion efficiency of the solar cell. Data research shows that for every 1% increase in the conversion efficiency, the power generation cost can be reduced by 7%. The development speed of perovskite cells is the fastest. Currently, there is still a large room for improvement from the single-junction theoretical maximum efficiency of 33% of perovskite cells, showing great application prospects. The electron transport layer and the transparent conductive oxide are important component structures of perovskite cells, and RPD equipment and magnetron sputtering equipment are the main equipment for depositing electron transport layer and transparent conductive oxide thin films. Compared with magnetron sputtering coating equipment, RPD coating equipment has low bombardment characteristics, and the formed particles basically do not damage the film surface. At the same time, its high dissociation degree process can result in a high-crystallinity thin film and a higher minority carrier mobility, making the transmittance of the thin film higher, the conductivity better, and the formed film layer grains more orderly and uniform. And the technical problem of the film layer thickness distribution during RPD coating is a key link that urgently needs to be solved.

[0003] When the prior art optimizes the film layer thickness distribution, it mainly adjusts the effective coating area by opening the cavity and modifying the thickness compensation plate to change the film layer thickness. The method of modifying the thickness compensation plate requires opening the cavity. After the atmosphere of the vacuum chamber is damaged, water vapor and vacuum degree will affect the process for a long time. At the same time, the time cost is greatly increased, including opening the cavity and breaking the vacuum, disassembling the thickness compensation plate for cutting and modification, pumping vacuum and removing water vapor, etc., seriously affecting the coating efficiency. Summary of the Utility Model

[0004] The purpose of this application is to provide a system for adjusting the thickness distribution of a film layer for at least one of the technical problems involved in the background art.

[0005] To achieve the above purpose, this application adopts the following technical solutions:

[0006] This application provides a system for adjusting the thickness distribution of a film layer, including a chamber, and two thickness compensation plate assemblies both located in the chamber. In a first direction, the two thickness compensation plate assemblies are arranged oppositely, and a gas passage for the source material gas to pass through is formed between the two thickness compensation plate assemblies. The thickness compensation plate assembly includes a plurality of partition plates and a plurality of partition plate driving units. Each partition plate is arranged in a third direction, and each partition plate driving unit is correspondingly installed on each partition plate. The partition plate driving unit is used to drive the partition plate to move in the first direction, and the first direction and the third direction are perpendicular to each other in the same plane.

[0007] Optionally, in the third direction, any two adjacent partition plates are arranged with gaps therebetween, or any two adjacent partition plates are arranged in sliding contact with each other.

[0008] The beneficial effect of this technical solution is that it can prevent the source gas from passing through the gaps between the partition plates, avoiding interference with the coating area of the substrate.

[0009] Optionally, the partition plate driving unit is a linear displacement mechanism;

[0010] The linear displacement mechanism includes a driven moving part, the partition plate is arranged on the moving part, and the displacement direction of the moving part is the same as the first direction.

[0011] Optionally, the partition plate driving unit further includes a rotational driving member, a fixed base, and a transmission assembly mounted on the fixed base. The rotational driving member and the fixed base are both fixed to the inner wall of the chamber. The rotational driving member, the transmission assembly, and the partition plate are sequentially in transmission cooperation, and the fixed base and the partition plate are in sliding cooperation in the first direction.

[0012] The beneficial effect of this technical solution is that in this way, the volume of the fixed base can be greatly reduced, thereby reducing its occupation of the volume in the coating process chamber. At the same time, the effective displacement stroke of the partition plate is significantly increased. With the same volume of the coating process chamber, a larger area of gas channels can be obtained.

[0013] Optionally, the fixed base includes a main body part and a slideway connected to each other. A chute is formed on the partition plate. The chute and the slideway are in sliding cooperation in the first direction, and in the direction perpendicular to the first direction, the fixed base limits the circumferential freedom degree of the partition plate.

[0014] The beneficial effect of this technical solution is that the cooperation between the chute and the slideway plays a role in limiting the partition plate in multiple directions, further improving the accuracy of the moving direction of the partition plate and the stability of the moving state.

[0015] Optionally, an opening is formed on the wall of the chamber. The partition plate is in sliding cooperation with the opening in the first direction, and the partition plate is in sealing cooperation with the opening.

[0016] The beneficial effect of this technical solution is that in this way, part of the partition plate can move outside the chamber through the opening, so that the partition plate has a larger moving range, and thus can more flexibly adjust the position of the partition plate according to needs.

[0017] Optionally, the transmission assembly includes a rotating shaft, a rack and a gear. The rotating shaft is installed in the fixed base. One end of the rotating shaft is fixedly connected to the gear, and the other end of the rotating shaft is cooperated with the rotation driving member. The rack is fixed on the partition plate and extends in the first direction, and the gear meshes with the rack for transmission.

[0018] The beneficial effect of this technical solution is that in this way, the cooperation between the spur gear and the rack makes the transmission assembly easier to disassemble and assemble, facilitating maintenance and replacement of components.

[0019] Optionally, the transmission assembly further includes a first bevel gear and a second bevel gear that are in transmission cooperation. The first bevel gear is fixed on the rotary end of the rotation driving member, and the second bevel gear is fixed on the rotating shaft.

[0020] The beneficial effect of this technical solution is that the change of the power transmission direction is realized through the cooperation between the first bevel gear and the second bevel gear, so as to adapt to the installation position of the rotation driving member on the chamber.

[0021] Optionally, it further includes film thickness detection sensors. A plurality of the film thickness detection sensors are respectively arranged corresponding to each partition plate, and the film thickness detection sensors are arranged close to the gas channel. Each partition plate corresponds to a film thickness detection sensor, which can accurately detect the film thickness of each area, so as to adjust the film thickness more accurately.

[0022] Optionally, it further includes a film thickness detection assembly. The film thickness detection assembly is arranged between the thickness compensation plate assembly and the coating substrate. The film thickness detection assembly includes a linear displacement module and a film thickness detection sensor arranged on the linear displacement module. The displacement direction of the linear displacement module is the same as the third direction, and the linear displacement module drives the film thickness detection sensor to displace along the third direction to the area where any one of the partition plates is located.

[0023] Optionally, the film layer thickness distribution adjustment system provided by the present application further includes a carrier plate located in the chamber. The carrier plate is perpendicular to the second direction. There is a clearance space between the carrier plate and the inner wall of the chamber in the first direction. The rotation driving member and the fixed base are both fixed on the carrier plate. An opening is formed on the carrier plate, and the partition plate is slidably matched with the opening in the first direction. The top end and / or the bottom end of the carrier plate are fixedly connected to the chamber.

[0024] The beneficial effects of this technical solution are as follows: In this way, both the rotating driving member and the fixed base can be supported by the bearing plate, and through the opening in the bearing plate, the partition plate can extend into the avoidance space. Based on the sufficient moving space of the partition plate, there is no need to open an opening in the chamber wall, thus avoiding the problem of damaging the vacuum environment inside the chamber that may occur due to opening an opening in the chamber.

[0025] Optionally, the film layer thickness distribution adjustment system provided in this application includes two of the bearing plates. The two bearing plates are oppositely arranged in the first direction, and two of the thickness compensation plate assemblies are respectively installed on the two bearing plates.

[0026] The beneficial effects of this technical solution are as follows: In this way, both of the thickness compensation plate assemblies can be supported by the bearing plate.

[0027] The technical solution provided in this application can achieve at least one of the following beneficial effects:

[0028] In the film layer thickness distribution adjustment system provided in this application, during film coating, the vapor-phase material is finally deposited on the glass substrate after passing through the thickness compensation plate assembly. When it is necessary to adjust the film layer thickness distribution, by measuring the film layer thickness distribution on the glass substrate and according to the film thickness and rate conditions detected by the film thickness detection sensor, it can be confirmed how each partition plate in the thickness compensation plate assembly moves so that the film layer thickness distribution or the film layer thickness reaches the target level. By controlling the partition plate driving unit on the target partition plate, the partition plate can be driven to move in the first direction to adjust the area distribution of the entire thickness compensation plate assembly, thereby achieving the effect of controlling the effective film coating area; since each partition plate in each compensation plate assembly can be driven by the partition plate driving unit, there is no need to open the chamber for adjustment, thus avoiding the problem that the atmosphere of the vacuum chamber is damaged due to opening the chamber, and the problem that water vapor and vacuum degree will affect the process for a long time. It also avoids the problem of increased time cost caused by opening the chamber to break the vacuum, disassembling the thickness compensation plate for cutting and modification, evacuating the vacuum, and removing water vapor.

[0029] The additional technical features and their advantages of this application will be more clearly described in the following description content, or can be understood through the specific practice of this application. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to more clearly illustrate the technical solutions of the specific embodiments of this application, the drawings required for use in the description of the specific embodiments will be briefly introduced below. Obviously, the drawings in the following description are some embodiments of this application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0031] Figure 1Schematic front view structure diagram of an implementation manner of the film layer thickness distribution adjustment system provided by the embodiment of the present application;

[0032] Figure 2 Schematic top view structure diagram of the positional relationship of two thickness compensation plate assemblies provided by the embodiment of the present application;

[0033] Figure 3 Partial front view structure diagram of an implementation manner of the film layer thickness distribution adjustment system provided by the embodiment of the present application;

[0034] Figure 4 Partial top view structure diagram of an implementation manner of the film layer thickness distribution adjustment system provided by the embodiment of the present application;

[0035] Figure 5 Partial front view structure diagram of an implementation manner of the film layer thickness distribution adjustment system provided by the embodiment of the present application;

[0036] Figure 6 Partial left view structure diagram of an implementation manner of the film layer thickness distribution adjustment system provided by the embodiment of the present application;

[0037] Figure 7 Schematic structure diagram of the film thickness detection component of the film layer thickness distribution adjustment system provided by the embodiment of the present application.

[0038] Reference numerals:

[0039] 01, film thickness detection sensor; 02, thickness compensation plate assembly;

[0040] 03, ventilation device; 04, oxygen;

[0041] 05, plasma generator; 06, high-density electron beam;

[0042] 07, target; 08, gaseous material;

[0043] 09, plasma region; 10, glass substrate;

[0044] 11, chamber; 12, rotation driving member;

[0045] 13, slider base; 14, partition plate;

[0046] 15, slider; 16, screw;

[0047] 17, rack; 18, rotating shaft;

[0048] 19, gear; 20, fixed base;

[0049] 21, second bevel gear; 22, first bevel gear;

[0050] 23. Slideway; 24. Main body part;

[0051] 25. Bearing plate; 26. Linear displacement module;

[0052] 27. Displacement part. Specific implementation manners

[0053] Next, the technical solutions of the present application will be clearly and completely described in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present application, rather than all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0054] In the description of the present application, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the present application. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0055] In the description of the present application, it should be noted that unless otherwise clearly specified and limited, the terms "installation", "connection", and "connection" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific situations.

[0056] As Figures 1 to 6 shown, the present application provides a film layer thickness distribution adjustment system, including a chamber 11 and two thickness compensation plate assemblies 02 both located in the chamber 11. The two thickness compensation plate assemblies 02 are arranged oppositely in a first direction, and a gas passage for the source material gas to pass through is formed between the two thickness compensation plate assemblies 02. The thickness compensation plate assembly 02 includes a plurality of partition plates 14 and a plurality of partition plate driving units. Each of the partition plates 14 is arranged in a third direction, and each of the partition plate driving units is correspondingly installed on each of the partition plates 14. The partition plate driving unit is used to drive the partition plate 14 to move in the first direction, and the first direction and the third direction are perpendicular to each other in the same plane.

[0057] Preferably, both the first direction and the third direction are horizontal and perpendicular to each other, and the second direction is vertical; each of the thickness compensation plate assemblies 02 includes at least two partition plates 14, and correspondingly, the number of the partition plate driving units is also at least two. In the embodiment of the present application, the partition plate driving unit is used to drive the partition plate 14 to move in the first direction to adjust the local shielding area of the gas passage.

[0058] In the film layer thickness distribution adjustment system provided by the present application, during film coating, the vapor-phase material is finally deposited on the glass substrate after passing through the thickness compensation plate assembly 02. When it is necessary to adjust the film layer thickness distribution, by measuring the film layer thickness distribution on the glass substrate and according to the film layer thickness and rate detected by the film thickness detection sensor 01, it can be confirmed how each partition plate 14 in the thickness compensation plate assembly 02 moves so that the film layer thickness distribution or the film layer thickness distribution reaches the target level. By controlling the partition plate driving unit on the target partition plate 14, the partition plate 14 can be driven to move in the first direction to adjust the area distribution of the entire thickness compensation plate assembly 02, thereby achieving the effect of controlling the effective film coating area; since each partition plate 14 in each compensation plate assembly can be driven by the partition plate driving unit, it is not necessary to open the chamber 11 for adjustment, thereby avoiding the problem that the atmosphere of the vacuum chamber 11 is damaged due to opening the chamber 11, and the water vapor and vacuum degree will affect the process for a long time, and also avoiding the problem of increased time cost caused by opening the chamber to break the vacuum, disassembling the thickness compensation plate for cutting and modification, pumping vacuum and removing water vapor and other matters.

[0059] Optionally, in the third direction, any two adjacent partition plates 14 are arranged with a gap therebetween, or any two adjacent partition plates 14 are arranged in relative sliding contact. This can prevent the source gas from passing through the gap between the partition plates 14 and avoid interfering with the film coating area of the substrate. Preferably, the size of the gap is below 0.5 mm.

[0060] Optionally, the partition plate driving unit is a linear displacement mechanism; the linear displacement mechanism includes a driven moving part, the partition plate 14 is arranged on the moving part, and the displacement direction of the moving part is the same as the first direction.

[0061] In the embodiment of the present application, the linear displacement mechanism includes a screw drive mechanism or a telescopic mechanism.

[0062] The lead screw drive mechanism includes a rotational drive member 12, a slider 15, a lead screw 16, and a slider base 13. The driven moving part is the slider 15. The rotational drive member 12 and the lead screw 16 are both installed on the slider base 13. The length directions of the slider base 13 and the lead screw 16 are both parallel to the first direction. The slider 15 is in threaded engagement with the lead screw 16, and in the first direction, the slider 15 is in sliding engagement with the slider base 13. The rotational drive member 12 is in transmission cooperation with the lead screw 16. Thus, when the rotational drive member 12 drives the lead screw 16, due to the sliding cooperation between the slider 15 and the slider base 13, the slider base 13 restricts the tendency of the slider 15 to rotate with the lead screw 16. Because the slider 15 is in threaded engagement with the lead screw 16, the slider 15 can move along the first direction under the push of the lead screw 16 and the guidance of the slider base 13, achieving the purpose of moving the corresponding partition plate 14.

[0063] Optionally, the partition plate drive unit includes a rotational drive member 12, a fixed base 20, and a transmission assembly installed on the fixed base 20. The rotational drive member 12 and the fixed base 20 are both fixed to the inner wall of the chamber 11. The rotational drive member 12, the transmission assembly, and the partition plate 14 are sequentially in transmission cooperation. The fixed base 20 is in sliding engagement with the partition plate 14 in the first direction. In this way, the volume of the fixed base 20 can be greatly reduced, thereby reducing its occupation of the volume in the coating process chamber. At the same time, the effective displacement stroke of the partition plate 17 is greatly increased. With the same volume of the coating process chamber, a gas passage with a larger area can be obtained.

[0064] Optionally, the fixed base 20 includes a main body portion 24 and a slideway 23 that are connected to each other. A chute is formed on the partition plate 14. The chute is in sliding engagement with the slideway 23 in the first direction. The cooperation between the chute and the slideway 23 plays a role in limiting the partition plate 14 in multiple directions, further improving the accuracy of the moving direction and the stability of the moving state of the partition plate 14. Of course, the chute can also be provided on the fixed base 20 and the slideway 23 can be provided on the partition plate 14. In the embodiments of the present application, the chute and the slideway 23 are preferably inverted dovetail-shaped.

[0065] Optionally, an opening is formed on the wall of the chamber 11. The partition plate 14 is in sliding engagement with the opening in the first direction, and the partition plate 14 is in sealing engagement with the opening. In this way, part of the partition plate 14 can move outside the chamber 11 through the opening, so that the partition plate 14 has a larger moving range, and thus can more flexibly adjust the position of the partition plate 14 according to needs.

[0066] Optionally, the transmission assembly includes a rotating shaft 18, a rack 17, and a gear 19. The rotating shaft 18 is installed in the fixed base 20. One end of the rotating shaft 18 is fixedly connected to the gear 19, and the other end of the rotating shaft 18 is cooperated with the rotation driving member 12. The rack 17 is fixed on the partition plate 14 and extends in the first direction. The gear 19 is in meshing transmission with the rack 17. In this way, the cooperation between the gear 19 and the rack 17 makes the transmission assembly easier to disassemble and assemble, facilitating the maintenance and replacement of components. The gear 19 is a spur gear or a helical gear.

[0067] Optionally, the transmission assembly further includes a first bevel gear 22 and a second bevel gear 21 in transmission cooperation. The first bevel gear 22 is fixed on the rotary end of the rotation driving member 12, and the second bevel gear 21 is fixed on the rotating shaft 18. The cooperation between the first bevel gear 22 and the second bevel gear 21 realizes the change of the power transmission direction, thereby adapting to the installation position of the rotation driving member 12 on the chamber 11.

[0068] The film thickness distribution adjustment system provided by the embodiment of the present application further includes film thickness detection sensors 01. A plurality of the film thickness detection sensors 01 are respectively arranged corresponding to each partition plate 14, and the film thickness detection sensors 01 are arranged close to the gas channel.

[0069] The film thickness distribution adjustment system provided by the embodiment of the present application further includes a film thickness detection assembly. The film thickness detection assembly is arranged between the thickness compensation plate assembly 02 and the coating substrate. The film thickness detection assembly includes a linear displacement module 26 and a film thickness detection sensor 01 arranged on the linear displacement module 26. The displacement direction of the linear displacement module 26 is the same as the third direction. The linear displacement module 26 drives the film thickness detection sensor 01 to be displaced along the third direction to the area where any one of the partition plates 14 is located. The number of film thickness detection sensors used can be reduced, and the equipment cost can be lowered. Preferably, a displacement part 27 moving along the linear displacement module 26 is installed on the linear displacement module 26, and the film thickness detection sensor 01 is installed on the displacement part 27.

[0070] Optionally, the film thickness distribution adjustment system provided by the embodiments of the present application further includes a carrier plate 25 located in the chamber 11. The carrier plate 25 is perpendicular to the second direction, and there is a clearance space between the carrier plate 25 and the inner wall of the chamber 11 in the first direction. The rotation driving member 12 and the fixed base 20 are both fixed to the carrier plate 25. An opening is formed on the carrier plate 25, and the partition plate 14 is slidably engaged with the opening in the first direction. The top end and / or the bottom end of the carrier plate 25 is fixedly connected to the chamber 11. In this way, both the rotation driving member 12 and the fixed base 20 can be supported by the carrier plate 25, and the partition plate 14 can extend into the clearance space through the opening on the carrier plate 25. Based on the sufficient moving space of the partition plate 14, there is no need to open an opening on the wall of the chamber 11, thereby avoiding the problem of damaging the vacuum environment in the chamber 11 that may occur due to opening an opening on the chamber 11.

[0071] Optionally, the film thickness distribution adjustment system provided by the embodiments of the present application includes two carrier plates 25. The two carrier plates 25 are arranged opposite to each other in the first direction, and the two thickness compensation plate assemblies 02 are respectively mounted on the two carrier plates 25. In this way, both the two thickness compensation plate assemblies 02 can be supported by the carrier plates 25. Of course, it is also possible that one thickness compensation plate assembly 02 is directly fixed on the inner wall of the chamber 11, and the other thickness compensation plate assembly 02 is fixed on the carrier plate 25.

[0072] In the embodiments of the present application, the film thickness detection sensor 01 is preferably a quartz crystal microbalance. An air supply device 03 and a quartz crystal microbalance are also installed on the inner wall of the chamber 11. The air supply device 03 supplies the reaction gas oxygen 04 into the chamber 11. The quartz crystal microbalance is a very sensitive mass detection instrument, and its measurement accuracy can reach the nanogram level. The quartz crystal microbalance utilizes the piezoelectric effect and mass loading effect of the quartz crystal, converts the mass change on the surface of the quartz crystal electrode into the frequency change of the output electrical signal of the quartz crystal oscillation circuit, and then obtains high-precision data through other auxiliary devices such as a computer; a plasma region 09 is formed between the glass substrate 10, the target 07, and the two thickness compensation plate assemblies 02; the partition plate driving unit can adopt electric, pneumatic or hydraulic drive.

[0073] In the embodiments of the present application, the film thickness detection sensor 01 can also be used in the RPD device to monitor the film deposition rate in real time to provide data feedback to the experimenter, which can confirm the film thickness distribution situation online through the data, and can provide data support for modifying the thickness compensation plate, and has a high effect on the confirmation of the stability and accuracy of the process and the improvement of production efficiency. In the embodiments of the present application, the application and usage mode of the protective film thickness detection sensor 01 on this device are protected.

[0074] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than limiting them; although the present application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A film layer thickness distribution adjustment system, characterized in that, It includes a chamber, and two thickness compensation plate assemblies both located within the chamber. In a first direction, the two thickness compensation plate assemblies are arranged oppositely, and a gas passage for the source material gas to pass through is formed between the two thickness compensation plate assemblies. The thickness compensation plate assembly includes a plurality of partition plates and a plurality of partition plate driving units. Each of the partition plates is arranged in a third direction, and each of the partition plate driving units is correspondingly installed on each of the partition plates. The partition plate driving unit is used to drive the partition plate to move in the first direction, and the first direction and the third direction are perpendicular to each other in the same plane.

2. The film thickness distribution adjustment system according to claim 1, characterized in that In the third direction, any two adjacent partition plates are arranged with a gap therebetween, or any two adjacent partition plates are arranged in a relatively sliding contact manner.

3. The film thickness distribution adjustment system according to claim 1, characterized in that, The partition plate driving unit is a linear displacement mechanism; The linear displacement mechanism includes a driven moving part, the partition plate is arranged on the moving part, and the displacement direction of the moving part is the same as the first direction.

4. The film thickness distribution adjustment system according to claim 1, characterized in that, The partition plate driving unit includes a rotation driving part, a fixed base, and a transmission component installed on the fixed base. The rotation driving part and the fixed base are both fixed to the inner wall of the chamber. The rotation driving part, the transmission component, and the partition plate are sequentially in transmission cooperation, and the fixed base and the partition plate are in sliding cooperation in the first direction.

5. The film thickness distribution adjustment system according to claim 4, characterized in that, The fixed base includes a main body part and a slideway connected to each other. A chute is formed on the partition plate, and the chute and the slideway are in sliding cooperation in the first direction. And in the direction perpendicular to the first direction, the fixed base limits the circumferential freedom degree of the partition plate.

6. The film thickness distribution adjustment system according to claim 4, wherein An opening is formed on the wall of the chamber. The partition plate is in sliding cooperation with the opening in the first direction, and the partition plate is in sealing cooperation with the opening.

7. The film layer thickness distribution adjustment system according to claim 4, wherein The transmission component includes a rotating shaft, a rack, and a gear. The rotating shaft is installed in the fixed base. One end of the rotating shaft is fixedly connected to the gear, the other end of the rotating shaft is in cooperation with the rotation driving part, the rack is fixed on the partition plate and the rack extends in the first direction, and the gear is in meshing transmission with the rack.

8. The film layer thickness distribution adjustment system according to claim 7, characterized in that The transmission component further includes a first bevel gear and a second bevel gear in transmission cooperation. The first bevel gear is fixed on the rotating end of the rotation driving part, and the second bevel gear is fixed on the rotating shaft.

9. The film layer thickness distribution adjustment system according to claim 1, wherein, It further includes film thickness detection sensors. A plurality of the film thickness detection sensors are respectively arranged corresponding to each partition plate, and the film thickness detection sensors are arranged close to the gas passage.

10. The film layer thickness distribution adjustment system according to claim 1, wherein It further includes a film thickness detection assembly. The film thickness detection assembly is arranged between the thickness compensation plate assembly and the coating substrate. The film thickness detection assembly includes a linear displacement module and a film thickness detection sensor arranged on the linear displacement module. The displacement direction of the linear displacement module is the same as the third direction, and the linear displacement module drives the film thickness detection sensor to be displaced along the third direction to the area where any one of the partition plates is located respectively.

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