Transmission system for vacuum coating equipment and vacuum coating equipment

Abstract

The utility model provides a transmission system for vacuum coating equipment and the vacuum coating equipment, and the transmission system for the vacuum coating equipment comprises a plurality of rolling shafts, a plurality of transmission devices and a plurality of transmission devices, the mesh belt is arranged on the plurality of rolling shafts; the tensioning wheel is used for tensioning the mesh belt; the first driving device is provided with a telescopic rod, and the telescopic rod stretches out and draws back to enable the tensioning wheel to move; the tension sensor is arranged between the telescopic rod and the tensioning wheel and is used for obtaining the counter-acting force applied to the tensioning wheel by the mesh belt; and the tension sensor and the first driving device are both in electric control connection with the control device. By the adoption of the technical scheme, the problem that in the prior art, a mesh belt of a conveying system of vacuum coating equipment is prone to deviation and looseness can be effectively solved.

Description

Technical Field

[0001] The utility model relates to the field of solar cell production equipment, and more specifically, to a transmission system for a vacuum coating equipment and a vacuum coating equipment. Background Art

[0002] With the development of modern industry, vacuum equipment has been widely used in many fields, especially in the coating technology. Coating technology is a process of depositing a thin film on the surface of a substrate, which is widely used in the fields of semiconductors, optics, new energy, etc. In order to improve production efficiency and product quality, vacuum coating equipment needs to operate for a long time under high-efficiency and stable conditions.

[0003] Among them, the transmission system is one of the key components that affect the operation efficiency and maintenance frequency of vacuum coating equipment. Traditional vacuum coating equipment usually uses ceramic roller tracks to transport substrates. However, ceramic roller tracks are prone to wear and breakage under long-term high-temperature and high-pressure conditions, and during the production of the coating, the deposited coating material is plated on the roller shaft, and the circumference and flatness of the roller shaft are inconsistent, affecting the transmission accuracy, resulting in frequent equipment shutdowns for maintenance and replacement, which affects production efficiency and cost control.

[0004] In order to overcome the shortcomings of ceramic roller tracks, more and more research and practice have begun to focus on the metal mesh belt transmission system. The metal mesh belt transmission system has high strength, high wear resistance and good heat conductivity, and can maintain stable performance and a long service life under high-temperature and high-pressure conditions. In addition, the structure of the metal mesh belt transmission system is relatively simple, which can reduce the density of supporting roller shafts, and the coating material will not accumulate on the roller shafts. The mesh belt has a mesh structure, and the coating material is not easy to accumulate and thicken, which can significantly reduce the downtime and maintenance cost of the equipment.

[0005] The basic structure of the metal mesh belt transmission system in the prior art is as follows:

[0006] Metal mesh belt: A mesh belt made of stainless steel or other high-strength heat-resistant metal materials, and its mesh structure can be designed according to needs to adapt to different types and sizes of substrates.

[0007] Drive device: Comprising a motor and a transmission mechanism for driving the operation of the metal mesh belt.

[0008] Support device: Used to support the metal mesh belt to ensure its smooth operation.

[0009] Tensioning device: Used to adjust the tension of the mesh belt to prevent the mesh belt from loosening or running off during operation.

[0010] Control device: Used to control the transmission speed and operating state to ensure the stability and accuracy of the transmission process.

[0011] The working principle and effects of the metal mesh belt transmission system in the prior art are as follows:

[0012] The substrate is placed on the metal mesh belt, and the driving device drives the metal mesh belt to run, transmitting the substrate into the vacuum coating chamber. The mesh hole design of the metal mesh belt ensures that the substrate passes smoothly during transmission, while avoiding sliding and displacement of the substrate. The entire transmission process is monitored and adjusted by the control device to ensure the stability of the transmission speed and operating state.

[0013] However, when the metal mesh belt transmission system with the above structure is actually applied and works in the coating equipment, the mesh belt still tends to become loose, resulting in the mesh belt being prone to running off track, thus affecting the transmission speed and operating stability. Summary of the Utility Model

[0014] The main object of the present utility model is to provide a transmission system for a vacuum coating equipment and a vacuum coating equipment, so as to solve the problems that the mesh belt of the transmission system of the vacuum coating equipment in the prior art is prone to running off track and becoming loose.

[0015] To achieve the above object, according to one aspect of the present utility model, there is provided a transmission system for a vacuum coating equipment, including: a plurality of rollers; a mesh belt disposed on the plurality of rollers, and the rollers can drive the mesh belt to move; a tensioning wheel movably arranged for tensioning the mesh belt; a first driving device having a telescopic rod, and the telescopic rod expands and contracts to move the tensioning wheel; a tension sensor disposed between the telescopic rod and the tensioning wheel for obtaining the reaction force exerted by the mesh belt on the tensioning wheel; a control device, both the tension sensor and the first driving device are electrically connected to the control device. When the value of the reaction force obtained by the tension sensor is greater than or equal to a preset value, the control device controls the telescopic rod of the first driving device to move in a first direction, so that the tensioning wheel moves in a direction to reduce the tension of the mesh belt. When the value of the reaction force obtained by the tension sensor is less than the preset value, the control device controls the telescopic rod to move in a second direction opposite to the first direction, so that the tensioning wheel moves in a direction to increase the tension of the mesh belt.

[0016] In one embodiment, the tensioning wheel is a tensioning shaft with the same extending direction as the roller, the first driving device is two arranged at both ends of the tensioning wheel, the telescopic rod of the first driving device expands and contracts to move the end of the tensioning shaft, and the tension sensor is two corresponding to the first driving device, and the tension sensor is used to obtain the reaction force exerted by the mesh belt on the end of the tensioning shaft.

[0017] In one embodiment, the transfer system for a vacuum coating apparatus further includes: a motion conversion mechanism having a rotating member and a moving member that cooperate with each other. A tension pulley is pivotally disposed on the moving member. The rotating member includes a rotating body that cooperates with the moving member and a rotating shaft. A rotating seal is disposed through the rotating shaft. A wheel disc is disposed through the rotating shaft. The wheel disc and the rotating body are located on both sides of the rotating seal. The wire of the tension sensor is wound around the wheel disc, and the tension sensor is fixed to the telescopic rod.

[0018] In one embodiment, the rotating body is a gear and the moving member is a rack.

[0019] In one embodiment, the rotating shaft is vertically disposed, and the horizontal line where the center of the gear is located and the pivot axis of the tension pulley are in the same horizontal plane.

[0020] In one embodiment, the transfer system for a vacuum coating apparatus further includes: a protective cover. The tension sensor and the first driving device are both disposed in the protective cover, and the end face at the opening of the protective cover is a sealing surface.

[0021] In one embodiment, the transfer system for a vacuum coating apparatus further includes: a position sensor located on both sides of the mesh belt in the roller direction. The position sensor is electrically connected to the control device.

[0022] In one embodiment, the transfer system for a vacuum coating apparatus further includes: a plurality of guiding devices. Two of the plurality of guiding devices are located on both sides of the mesh belt in the roller direction. The guiding device includes an elastic member and a pressing wheel. One end of the elastic member is fixedly disposed, and the pressing wheel is pivotally disposed at the other end of the elastic member and abuts against the side edge of the mesh belt.

[0023] In one embodiment, the transfer system for a vacuum coating apparatus further includes: a second driving device drivingly connected to one of the rollers; a transmission belt is disposed between adjacent rollers to synchronously rotate the plurality of rollers.

[0024] According to another aspect of the present invention, there is provided a vacuum coating apparatus, including: a plurality of vacuum coating chambers; a plurality of transfer systems respectively corresponding to the plurality of vacuum coating chambers. The transfer system is the transfer system for a vacuum coating apparatus as described above. The rollers, the mesh belt, and the tension pulleys of the transfer system are disposed in the corresponding vacuum coating chambers, and the first driving device, the tension sensor, and the control device of the transfer system are disposed outside the vacuum coating chambers.

[0025] Applying the technical solution of the present utility model, the tension sensor can obtain in real time the reaction force exerted by the mesh belt on the tension pulley. Before the vacuum coating is carried out, the mesh belt needs to be pre-tensioned. The control device determines whether the tension force of the mesh belt reaches the preset value according to the value of the reaction force sent by the tension sensor. If it is less than the preset value, the control device controls the telescopic rod to move in the second direction, so that the tension pulley continues to press against the mesh belt. If it is greater than or equal to the preset value, the control device controls the telescopic rod to move in the first direction, so that the tension pulley moves in the direction of reducing the tension force of the mesh belt until the pre-tension force meets the requirements. When the vacuum coating is in progress, the temperature in the vacuum coating chamber rises, and the mesh belt expands. At this time, the reaction force exerted by the mesh belt on the tension pulley measured by the tension sensor in real time decreases, and then the control device immediately reacts and controls the telescopic rod to move in the second direction, so that the tension pulley continues to press against the mesh belt, ensuring the tension force of the mesh belt, thereby reducing the probability of the mesh belt loosening and running off, and ensuring the transmission speed and operation stability of the entire metal mesh belt transmission system. When the temperature in the vacuum coating chamber drops and the mesh belt shrinks, the reaction force exerted by the mesh belt on the tension pulley measured by the tension sensor in real time increases, and then the control device immediately reacts and controls the telescopic rod to move in the first direction, so that the tension pulley moves in the direction of reducing the tension force of the mesh belt, ensuring the service life of the mesh belt. Therefore, applying the technical solution of the present utility model, the metal mesh belt transmission system can automatically adjust the tension force of the mesh belt according to the actual situation through the first driving device, the tension sensor and the control device, ensuring the transmission speed, operation stability and service life of the entire metal mesh belt transmission system.

[0026] In addition to the purposes, features and advantages described above, the present utility model has other purposes, features and advantages. The following will refer to the drawings to further elaborate on the present utility model in detail. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] The specification drawings forming a part of the present utility model are used to provide a further understanding of the present utility model. The schematic embodiments of the present utility model and their descriptions are used to explain the present utility model and do not constitute an improper limitation to the present utility model. In the drawings:

[0028] Figure 1 Fig. 1 shows a front view structural schematic diagram of the first embodiment of the transmission system for a vacuum coating device according to the present utility model;

[0029] Figure 2 Fig. 2 shows Figure 1 a top view schematic diagram of the cooperation between the tension pulley and the motion conversion mechanism of the transmission system;

[0030] Figure 3 Fig. 3 shows Figure 1 a top view schematic diagram of the transmission system;

[0031] Figure 4 Figure 1 shows a front view structural schematic diagram of a partial structure of the second embodiment of a transmission system for a vacuum coating device according to the present utility model.

[0032] Among them, the above-mentioned drawings include the following reference numerals:

[0033] 10, roller; 20, mesh belt; 30, tensioning wheel; 40, first driving device; 41, telescopic rod; 50, tension sensor; 60, motion conversion mechanism; 61, rotating member; 611, rotating body; 612, rotating shaft; 62, moving member; 70, rotating seal; 80, wheel disc; 90, protective cover; 100, position sensor; 110, guiding device; 111, abutting wheel; 112, elastic member; 120, second driving device; 130, transmission belt; 140, vacuum coating chamber. Detailed implementation manners

[0034] It should be noted that, without conflict, the embodiments in the present utility model and the features in the embodiments may be combined with each other. The present utility model will be described in detail below with reference to the drawings and in combination with the embodiments.

[0035] In order to enable those skilled in the art to better understand the solution of the present utility model, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments in the present utility model, all other embodiments obtained by those of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present utility model.

[0036] It should be noted that the terms "first", "second", etc. in the description and claims of the present utility model and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that such terms can be interchanged under appropriate circumstances, so as to describe the embodiments of the present utility model here. In addition, the terms "comprising" and "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device that includes a series of steps or units does not necessarily have to be limited to those steps or units clearly listed, but may include other steps or units not clearly listed or inherent to these processes, methods, products or devices.

[0037] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular forms are also intended to include the plural forms. In addition, it should also be understood that when the terms "comprise" and / or "include" are used in this specification, they specify the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0038] After long-term research, the inventor found that when the metal mesh belt transmission system in the prior art is applied to a vacuum coating equipment, the reason why the mesh belt will become loose and deviate is that during vacuum coating, the environment in the vacuum coating chamber is high-temperature. Once the temperature rises, the mesh belt will expand. Once the mesh belt expands, the phenomena of loosening and deviation will occur. To solve the above technical problems, as Figures 1 to 3 shown, the transmission system for a vacuum coating equipment in Embodiment 1 includes: a plurality of rollers 10, a mesh belt 20, a tensioning wheel 30, a first driving device 40, a tension sensor 50, and a control device. Among them, the mesh belt 20 is arranged on the plurality of rollers 10, and the rollers 10 can drive the mesh belt 20 to move. The tensioning wheel 30 is movably arranged to tension the mesh belt 20. The first driving device 40 has a telescopic rod 41, and the telescopic rod 41 expands and contracts to move the tensioning wheel 30. The tension sensor 50 is arranged between the telescopic rod 41 and the tensioning wheel 30 to obtain the reaction force exerted by the mesh belt 20 on the tensioning wheel 30; both the tension sensor 50 and the first driving device 40 are electrically connected to the control device. When the value of the reaction force obtained by the tension sensor 50 is greater than or equal to a preset value, the control device controls the telescopic rod 41 of the first driving device 40 to move in a first direction, so that the tensioning wheel 30 moves in a direction to reduce the tension of the mesh belt 20. When the value of the reaction force obtained by the tension sensor 50 is less than the preset value, the control device controls the telescopic rod 41 to move in a second direction opposite to the first direction, so that the tensioning wheel 30 moves in a direction to increase the tension of the mesh belt 20.

[0039] Applying the technical solution of Application Example 1, the tension sensor 50 can obtain the reaction force exerted by the mesh belt 20 on the tension pulley 30 in real time. Before the vacuum coating is carried out, it is necessary to pre-tension the mesh belt 20. The control device judges whether the tension force of the mesh belt 20 reaches the preset value according to the value of the reaction force sent by the tension sensor 50. If it is less than the preset value, the control device controls the telescopic rod to move in the second direction, so that the tension pulley 30 continues to press against the mesh belt 20. If it is greater than or equal to the preset value, the control device controls the telescopic rod to move in the first direction, so that the tension pulley 30 moves in the direction of reducing the tension force of the mesh belt 20 until the pre-tension force meets the requirements. When the vacuum coating is carried out, the temperature in the vacuum coating chamber rises, and the mesh belt 20 expands. At this time, the reaction force exerted by the mesh belt 20 on the tension pulley 30 measured by the tension sensor 50 decreases. Then the control device immediately reacts and controls the telescopic rod 41 to move in the second direction, so that the tension pulley 30 continues to press against the mesh belt 20, ensuring the tension force of the mesh belt 20, thereby reducing the probability of the mesh belt 20 becoming loose and running off, and ensuring the transmission speed and operation stability of the entire metal mesh belt transmission system. When the temperature in the vacuum coating chamber decreases and the mesh belt 20 shrinks, the reaction force exerted by the mesh belt 20 on the tension pulley 30 measured by the tension sensor 50 increases. Then the control device immediately reacts and controls the telescopic rod 41 to move in the first direction, so that the tension pulley 30 moves in the direction of reducing the tension force of the mesh belt 20, ensuring the service life of the mesh belt 20. Therefore, applying the technical solution of Application Example 1, the metal mesh belt transmission system can automatically adjust the tension force of the mesh belt 20 according to the actual situation through the first driving device 40, the tension sensor 50 and the control device, ensuring the transmission speed, operation stability and service life of the entire metal mesh belt transmission system.

[0040] Preferably, in Embodiment 1, the first direction is the extending direction of the telescopic rod, and the second direction is the contracting direction of the telescopic rod. It should be noted that the first direction and the second direction are set according to the installation position of the tension pulley 30.

[0041] In Embodiment 1, the tension pulley 30 is a tension shaft whose extending direction is the same as that of the roller 10. There are two first driving devices 40 arranged at both ends of the tension pulley 30. The telescopic rods 41 of the first driving devices 40 extend and contract to move the corresponding ends of the tension shaft. There are two tension sensors 50 correspondingly arranged with the first driving devices 40. The tension sensors 50 are used to obtain the reaction force exerted by the mesh belt 20 on the ends of the tension shaft. The above structure enables the first driving device 40 to provide tension for both ends of the tension pulley 30 at the same time, so that the force on the tension pulley 30 is uniform, ensuring that the tension at both ends of the tension pulley is consistent. In addition, the two tension sensors 50 can monitor and adjust the tension at both ends of the tension pulley 30 in real time, maintaining the stability and consistency of the transmission process of the metal mesh belt 20.

[0042] Due to the relatively high temperature inside the vacuum coating chamber, in order to ensure the service life of the tension sensor and the first driving device 40, as Figure 1 and Figure 2 shown, in the first embodiment, the transmission system for the vacuum coating equipment further includes: a motion conversion mechanism 60, a rotary seal 70, and a disk 80. Among them, the motion conversion mechanism 60 has a rotating member 61 and a moving member 62 that cooperate with each other. The tension pulley 30 is pivotally arranged on the moving member 62. The rotating member 61 includes a rotating body 611 that cooperates with the moving member 62 and a rotating shaft 612. The rotary seal 70 is sleeved on the rotating shaft 612. The disk 80 is sleeved on the rotating shaft 612. The disk 80 and the rotating body 611 are located on both sides of the rotary seal 70. The steel wire of the tension sensor 50 is wound around the disk 80, and the tension sensor 50 is fixed on the telescopic rod 41. Specifically, a plurality of rollers 10, the mesh belt 20, the tension pulley 30, and the motion conversion mechanism 60 and other non-electronic components are arranged inside the vacuum coating chamber. The first driving device 40, the tension sensor 50, and the control device are arranged outside the vacuum coating chamber. The driving force is transmitted from the outside to the tension pulley 30 through the rotating shaft 612, and the rotary seal 70 seals the perforation where the rotating shaft 612 passes through the vacuum coating chamber to ensure the vacuum degree of the vacuum coating chamber. The above structure can not only ensure the vacuum degree of the vacuum coating chamber but also enable the heat-sensitive electronic components to be arranged outside the vacuum coating chamber to ensure the service life of the electronic components. Preferably, in this embodiment, the rotary seal 70 is a magnetic fluid.

[0043] Of course, in other embodiments not shown in the figure, the transmission system for the vacuum coating equipment may not include a motion conversion mechanism. Specifically, the transmission system for the vacuum coating equipment further includes a swinging member, a rotary seal 70, and a disk 80. Among them, the swinging member includes a swing arm and a rotating shaft. One end of the swing arm is fixed on the rotating shaft, and the other end of the swing arm applies pressure to the tension pulley 30. The rotating seal 70 and the disk are sleeved on the rotating shaft. The disk and the swing arm are located on both sides of the rotary seal 70. The steel wire of the tension sensor 50 is wound around the disk, and the tension sensor 50 is fixed on the telescopic rod 41. The above structure is simple and easy to implement.

[0044] As Figure 1 and Figure 2As shown, in the first embodiment, the rotating body 611 is a gear and the moving member 62 is a rack. Specifically, when vacuum coating is carried out, the temperature in the vacuum coating chamber rises, and the mesh belt 20 expands. At this time, the tension sensor 50 measures in real time that the reaction force exerted by the mesh belt 20 on the tension pulley 30 decreases. Then the control device immediately reacts and controls the telescopic rod 41 to contract. The contraction of the telescopic rod 41 causes the tension sensor 50 to move away from the wheel disc. As the tension sensor 50 moves, the steel wire rope of the tension sensor 50 is released from the wheel disc and drives the wheel disc to rotate counterclockwise (taking the figure as an example). As the wheel disc 80 rotates, the rotation of the wheel disc 80 drives the gear to rotate counterclockwise through the rotating shaft 612. The counterclockwise rotation of the gear drives the rack to move leftward, further causing the tension pulley 30 to continue to press against the mesh belt 20, increasing the tension of the mesh belt. On the contrary, when the temperature in the vacuum coating chamber decreases, the mesh belt 20 contracts. At this time, the tension sensor 50 measures in real time that the reaction force exerted by the mesh belt 20 on the tension pulley 30 increases. Then the control device immediately reacts and controls the telescopic rod 41 to extend. The extension of the telescopic rod 41 causes the tension sensor 50 to move towards the wheel disc. At this time, the tension transmitted by the telescopic rod 41 to the tension pulley becomes smaller. The tension pulley 30 moves rightward under the action of the reaction force exerted by the mesh belt 20 on it, causing the rack connected to the tension pulley 30 to move rightward. The rightward movement of the rack causes the gear to rotate clockwise, and further causes the wheel disc 80 to rotate clockwise to wind the steel wire rope of the tension sensor 50, finally reaching equilibrium. The above structure is simple and has high precision.

[0045] In the first embodiment, the transmission system for the vacuum coating equipment further includes a limiting groove (not shown in the figure), and the rack is movably arranged in the limiting groove. The above structure can limit the movement of the rack along the preset direction, ensuring the reliability and stability of the transmission system of the vacuum coating equipment.

[0046] Since the existing vacuum coating chamber occupies more space in the horizontal direction and less space in the height direction (a flat-shaped chamber), in order to adapt to the existing vacuum coating chamber, as Figure 1 and Figure 2 shown, in the first embodiment, the rotating shaft 612 is vertically arranged, and the horizontal line where the center of the gear is located is in the same horizontal plane as the pivot shaft of the tension pulley 30. That is, the above structure utilizes the shape characteristics of the vacuum coating chamber itself, making the gear and the rack occupy more space in the horizontal direction of the vacuum coating chamber and less space in the height direction. Even if components are added, there is no need to redesign the vacuum coating chamber, thus reducing production costs.

[0047] As Figure 3As shown in the figure, the transfer system for a vacuum coating apparatus further includes: a position sensor 100. The position sensor 100 is located on both sides of the mesh belt 20 in the direction of the roller 10, and the position sensor 100 is electrically connected to the control device. The position sensor 100 is used to detect whether the mesh belt 20 is misaligned (running off track). The user can know whether the mesh belt 20 inside the vacuum coating chamber is operating normally according to the detection result of the position sensor 100. Preferably, in the first embodiment, the position sensor 100 is a laser sensor, that is, the position sensor 100 includes a light generator and a light receiver disposed on the upper and lower sides of the mesh belt 20. When the light receiver cannot receive the light source emitted by the light generator, it indicates that the mesh belt 20 is misaligned. Of course, the position sensor 100 can also be other sensors, such as an ultrasonic sensor, etc.

[0048] After the mesh belt 20 is misaligned, since the mesh belt 20 is in a closed vacuum coating chamber, the user cannot actively adjust the position of the mesh belt 20, which may lead to the stagnation of production. In order to improve production efficiency, as Figure 3 shown in the figure, in the first embodiment, the transfer system for a vacuum coating apparatus further includes: a plurality of guiding devices 110. Two of the plurality of guiding devices 110 are located on both sides of the mesh belt 20 in the direction of the roller 10. The guiding device 110 includes an elastic member 112 and a pressing wheel 111. One end of the elastic member 112 is fixedly arranged, and the pressing wheel 111 is pivotally arranged at the other end of the elastic member 112 and abuts against the side edge of the mesh belt 20. Specifically, when the mesh belt 20 is misaligned to one side, the pressing wheel 111 can provide a pressing force for the mesh belt 20 to move to the other side, so that the mesh belt 20 returns to its position. In addition, since the pressing wheel 111 elastically abuts against the mesh belt 20, the pressing wheel 111 will not cause damage to the mesh belt 20, ensuring the service life of the mesh belt 20. Preferably, in the first embodiment, the transfer system further includes a chute for limiting the pressing wheel 111, so that the pressing wheel 111 slides along a preset direction.

[0049] As Figure 3 shown in the figure, in the first embodiment, the transfer system for a vacuum coating apparatus further includes: a second driving device 120 and a transmission belt 130. Among them, the second driving device 120 is drivingly connected to one of the rollers 10. A transmission belt 130 is arranged between two adjacent rollers 10 to make the plurality of rollers 10 rotate synchronously. The above structure enables the plurality of rollers 10 to rotate synchronously through the same second driving device 120, reducing the number of driving parts and lowering the production cost.

[0050] As Figure 4As shown, the difference between the transmission system of the vacuum coating equipment in the second embodiment and that in the first embodiment lies only in the driving method and sealing method of the transmission system of the vacuum coating equipment. Specifically, in the second embodiment, the transmission system for the vacuum coating equipment further includes: a protective cover 90, a tension sensor 50 and a first driving device 40 are both arranged in the protective cover 90, and the end face at the opening of the protective cover 90 is a sealing surface. Specifically, the tension sensor is fixed on the telescopic rod 41, and the steel wire rope of the tension sensor is directly connected to the tension pulley. When the vacuum coating is in progress, the temperature in the vacuum coating chamber rises, and the mesh belt 20 expands. At this time, the tension sensor 50 measures in real time that the reaction force exerted by the mesh belt 20 on the tension pulley 30 decreases, and then the control device immediately reacts, controlling the telescopic rod 41 to contract, so that the tension pulley 30 continues to press against the mesh belt 20, ensuring the tension of the mesh belt 20, thereby reducing the probability of the mesh belt 20 becoming loose and running off track, and ensuring the transmission speed and operation stability of the entire metal mesh belt transmission system. When the temperature in the vacuum coating chamber drops and the mesh belt 20 contracts, the tension sensor 50 measures in real time that the reaction force exerted by the mesh belt 20 on the tension pulley 30 increases, and then the control device immediately reacts, controlling the telescopic rod 41 to extend, so that the tension pulley 30 moves in the direction of reducing the tension of the mesh belt 20, ensuring the service life of the mesh belt 20. Therefore, by applying the technical solution of the second embodiment, the metal mesh belt transmission system can automatically adjust the tension of the mesh belt 20 according to the actual situation through the first driving device 40, the tension sensor 50 and the control device, ensuring the transmission speed, operation stability and service life of the entire metal mesh belt transmission system. In addition, the tension sensor 50 and the first driving device 40 are both arranged in the protective cover 90 outside the vacuum coating chamber, so that the tension sensor 50 and the first driving device 40 are not affected by high temperature, thus ensuring their service life. At the same time, the sealing surface of the protective cover 90 is hermetically matched with the outer wall of the vacuum coating chamber 140, which can ensure the vacuum degree in the vacuum coating chamber 140 and ensure the normal progress of the vacuum coating.

[0051] The present application also provides a vacuum coating equipment. The embodiment of the vacuum coating equipment according to the present application includes: a plurality of vacuum coating chambers 140 and a transmission system. Among them, there are a plurality of transmission systems arranged in one-to-one correspondence with the plurality of vacuum coating chambers 140. The transmission system is the above-mentioned transmission system for the vacuum coating equipment. The rollers 10, the mesh belt 20 and the tension pulleys 30 of the transmission system are arranged in the corresponding vacuum coating chamber 140, and the first driving device 40, the tension sensor 50 and the control device of the transmission system are arranged outside the vacuum coating chamber 140. Since the above-mentioned transmission system has the advantages of controllable transmission speed, strong operation stability and long service life, the vacuum coating equipment with it also has these advantages.

[0052] It should be noted that in this embodiment, the transmission system in the vacuum coating equipment includes the integrated and optimized layout of components such as a metal mesh belt, a driving device, a tensioning structure, a transmission structure, a magnetic fluid seal, a pneumatic telescopic cylinder, and a tension sensor, ensuring the efficient and stable operation of the system in high-temperature, high-pressure, and vacuum environments.

[0053] The metal mesh belt is made of high-strength and high-temperature-resistant stainless steel material and is designed with a mesh structure that adapts to different substrate sizes and shapes. The edges of the mesh belt are strengthened to increase tensile strength and wear resistance.

[0054] The transmission structure includes a gear rack and a gear bar installed in the vacuum chamber. The tensioning wheel is connected to the gear bar, and the telescopic function can be achieved through gear drive to ensure that the metal mesh belt maintains appropriate tension during transmission. The main gear shaft is connected to the outside of the vacuum chamber through a magnetic fluid seal to ensure sealed transmission in a vacuum environment. The magnetic fluid seal technology effectively prevents gas leakage and improves the operation stability and efficiency of the vacuum equipment. A pneumatic telescopic cylinder is installed outside the chamber. Through a wire traction pulley, it drives the gear bar in the chamber, and then pulls the tensioning wheel to achieve the tensioning effect. The pneumatic telescopic cylinder is equipped with a high-precision tension sensor to ensure that the tension on both ends of the tensioning wheel is consistent. In addition, a high-precision tension sensor is configured on the pneumatic telescopic cylinder, which can monitor and adjust the tension on both ends of the tensioning wheel in real time to maintain the stability and consistency of the metal mesh belt during transmission.

[0055] Unless otherwise specifically stated, the relative arrangements, numerical expressions, and numerical values of the components and steps set forth in these embodiments do not limit the scope of the present invention. At the same time, it should be understood that for the sake of description, the dimensions of the various parts shown in the drawings are not drawn in actual proportional relationships. Technologies, methods, and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, the said technologies, methods, and devices should be regarded as part of the authorization specification. In all the examples shown and discussed here, any specific value should be interpreted as merely exemplary and not as a limitation. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that like reference numerals and letters denote like items in the following drawings, and thus, once an item is defined in one drawing, it does not need to be further discussed in subsequent drawings.

[0056] For ease of description, spatial relative terms such as "above", "over", "on the upper surface", "upper" etc. can be used here to describe the spatial positional relationship of a device or feature shown in the figure with other devices or features. It should be understood that the spatial relative terms are intended to encompass different orientations in use or operation in addition to the orientation depicted in the figure. For example, if the device in the attached drawing is inverted, a device described as "above" or "over" other devices or structures will then be positioned "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both the orientations of "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the corresponding explanations should be made for the spatial relative descriptions used here.

[0057] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by orientation terms such as "front, rear, upper, lower, left, right", "lateral, vertical, perpendicular, horizontal" and "top, bottom" etc. is generally based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present utility model and simplifying the description. Without contrary description, these orientation terms do not indicate and imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and thus should not be construed as a limitation on the protection scope of the present utility model; the orientation terms "inner, outer" refer to the inside and outside relative to the contour of each component itself.

[0058] The above are only the preferred embodiments of the present utility model and are not used to limit the present utility model. For those skilled in the art, the present utility model can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. A transfer system for a vacuum coating device, characterized in that, include: A plurality of rollers (10); A mesh belt (20) is arranged on the plurality of rollers (10), and the rollers (10) are capable of driving the mesh belt (20) to move; A tensioning wheel (30) is movably arranged to tension the mesh belt (20); A first driving device (40) having a telescopic rod (41), wherein the telescopic rod (41) is telescopic to move the tensioning wheel (30); A tension sensor (50) is arranged between the telescopic rod (41) and the tension wheel (30) to obtain the reaction force applied by the mesh belt (20) to the tension wheel (30); A control device, wherein the tension sensor (50) and the first drive device (40) are both electrically connected to the control device. When the value of the reaction force obtained by the tension sensor (50) is greater than or equal to a preset value, the control device controls the telescopic rod (41) of the first drive device (40) to move in a first direction so that the tension wheel (30) moves in a direction that reduces the tension of the mesh belt (20). When the value of the reaction force obtained by the tension sensor (50) is less than the preset value, the control device controls the telescopic rod (41) to move in a second direction opposite to the first direction so that the tension wheel (30) moves in a direction that increases the tension of the mesh belt (20).

2. The transfer system for a vacuum coating apparatus according to claim 1, wherein, The tension wheel (30) is a tension shaft extending in the same direction as the roller (10); the first driving device (40) is two devices arranged at both ends of the tension wheel (30); the telescopic rod (41) of the first driving device (40) is telescopic to move the end of the tension shaft; the tension sensors (50) are two devices arranged corresponding to the first driving device (40); the tension sensors (50) are used to obtain the reaction force applied by the mesh belt (20) to the end of the tension shaft.

3. The transfer system for a vacuum coating device according to claim 1, wherein, The transmission system for vacuum coating equipment also includes: A motion conversion mechanism (60) comprising a rotating member (61) and a moving member (62) that cooperate with each other, the tension wheel (30) being pivotally arranged on the moving member (62), the rotating member (61) comprising a rotating body (611) and a rotating shaft (612) that cooperate with the moving member (62); A rotating seal (70) is disposed on the rotating shaft (612); A wheel disc (80) is inserted into the rotating shaft (612). The wheel disc (80) and the rotating body (611) are located on both sides of the rotating seal (70). The steel wire of the tension sensor (50) is wound around the wheel disc (80). The tension sensor (50) is fixed on the telescopic rod (41).

4. The transfer system for a vacuum coating device according to claim 3, characterized in that, The rotating body (611) is a gear, and the moving member (62) is a rack.

5. The transfer system for a vacuum coating apparatus according to claim 4, characterized in that, The rotating shaft (612) is arranged vertically, and the horizontal line where the center of the gear is located is located in the same horizontal plane as the pivot axis of the tensioning wheel (30).

6. The transfer system for a vacuum coating apparatus according to claim 1, characterized in that, The transmission system for vacuum coating equipment also includes: A protective cover (90), wherein the tension sensor (50) and the first driving device (40) are both arranged inside the protective cover (90), and the end face at the opening of the protective cover (90) is a sealing surface.

7. The transfer system for a vacuum coating device according to claim 1, wherein, The transmission system for a vacuum coating device further includes: Position sensors (100), located on both sides of the mesh belt (20) in the direction of the roller (10), and the position sensors (100) are electrically connected to the control device.

8. The transfer system for a vacuum coating device according to claim 1, characterized in that, The transmission system for a vacuum coating device further includes: A plurality of guiding devices (110), two of the plurality of guiding devices (110) are located on both sides of the mesh belt (20) in the direction of the roller (10), and the guiding device (110) includes an elastic member (112) and a pressing wheel (111), one end of the elastic member (112) is fixedly arranged, and the pressing wheel (111) is pivotally arranged at the other end of the elastic member (112) and abuts against the side edge of the mesh belt (20).

9. The transfer system for a vacuum coating apparatus according to claim 1, wherein, The transmission system for a vacuum coating device further includes: A second driving device (120), drivingly connected to one of the rollers (10); A transmission belt (130) is arranged between adjacent rollers (10) to enable the plurality of rollers (10) to rotate synchronously.

10. A vacuum coating device, comprising: A plurality of vacuum coating chambers (140); A plurality of transmission systems, each corresponding to one of the plurality of vacuum coating chambers (140). It is characterized in that the transmission system is the transmission system for a vacuum coating device according to any one of claims 1 to 9. The rollers (10), the mesh belt (20), and the tensioning wheels (30) of the transmission system are arranged inside the corresponding vacuum coating chamber (140), and the first driving device (40), the tension sensor (50), and the control device of the transmission system are arranged outside the vacuum coating chamber (140).

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