Single crystal furnace

Abstract

The utility model discloses a single crystal furnace. The single crystal furnace comprises: a thermal insulation cylinder; the crucible is located on the inner side of the heat preservation cylinder; the soft felt surrounds the peripheral surface of the heat preservation cylinder; the curing felt surrounds the outer circumferential surface of the soft felt, a groove is formed in the inner circumferential surface of the curing felt, an opening of the groove points to the soft felt, and the groove and the soft felt are matched to form an air cavity; and the furnace wall surrounds the peripheral surface of the curing felt. The single crystal furnace is good in heat preservation effect and low in energy consumption.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor manufacturing equipment, and particularly relates to a single crystal furnace. Background Art

[0002] The single crystal furnace is used for pulling single crystal rods, such as single crystal silicon rods. As the diameter of the single crystal rod increases, the thermal field size of the single crystal furnace also increases, and the power consumption of the single crystal furnace continues to increase. Summary of the Utility Model

[0003] The utility model provides a single crystal furnace to reduce power consumption.

[0004] The technical solution of the utility model is as follows: A single crystal furnace, comprising:

[0005] A heat preservation cylinder;

[0006] A crucible, located inside the heat preservation cylinder;

[0007] A soft felt surrounding the outer peripheral surface of the heat preservation cylinder;

[0008] A cured felt surrounding the outer peripheral surface of the soft felt, wherein a groove is provided on the inner peripheral surface of the cured felt, the opening of the groove points to the soft felt, and the groove and the soft felt cooperate to form an air chamber;

[0009] A furnace wall surrounding the outer peripheral surface of the cured felt.

[0010] Optionally, the number of the grooves is 1, the groove is annular and surrounds the soft felt, the part of the inner peripheral surface of the cured felt above the groove is an upper arc surface surrounding the soft felt, and the part of the inner peripheral surface of the cured felt below the groove is a lower arc surface surrounding the soft felt.

[0011] Optionally, it further comprises a hoop, and the soft felt is fastened on the heat preservation cylinder by the hoop.

[0012] Optionally, the cured felt and the soft felt are fixedly connected by extrusion stress and friction force.

[0013] Optionally, the thickness of the soft felt is 10 mm to 180 mm.

[0014] Optionally, the thickness of the soft felt is 80 mm to 120 mm.

[0015] Optionally, the ratio of the depth of the groove to the thickness of the cured felt is 0.4 to 0.6.

[0016] Optionally, the cured felt is a cured graphite felt.

[0017] Optionally, the soft felt is a viscose-based graphite soft felt.

[0018] Optionally, the number of the grooves is multiple and evenly distributed.

[0019] Optionally, the multiple grooves are annular and surround the soft felt, and the multiple grooves are arranged in parallel. Specifically, the planes defined by the multiple grooves are parallel to each other.

[0020] In a single crystal furnace, the soft felt, the heat preservation cylinder and the solidification felt jointly play a role in heat insulation. And because the grooves are arranged on the inner circumferential surface of the solidification felt, the heat dissipation mode is the combination of heat conduction and heat radiation, which improves the heat insulation effect, effectively reduces the heat loss in the furnace, greatly reduces the power consumption of the single crystal furnace, and saves costs. Description of the Drawings

[0021] Figure 1 is a schematic structural view of the solidification felt in the single crystal furnace of the present invention, wherein a partial area is cut away to show the cross section.

[0022] Figure 2 is a schematic cross-sectional view of a partial structure of the single crystal furnace of the present invention.

[0023] The reference numerals are as follows: 1-solidification felt; 1.1-upper arc surface, 1.2-lower arc surface, 1.3-annular groove; 2-soft felt; 3-heat preservation cylinder; 4-furnace wall; 5-crucible; 6-heater. Detailed Embodiments

[0024] The present invention will be further described below in conjunction with specific embodiments, but the protection scope of the present invention is not limited thereto.

[0025] Figure 1 is a schematic structural view of the solidification felt in the single crystal furnace of the present invention, wherein a partial area is cut away to show the cross section. Figure 2 is a schematic cross-sectional view of a partial structure of the single crystal furnace of the present invention.

[0026] Refer to Figure 1 and Figure 2 , an embodiment of the present invention provides a single crystal furnace, including:

[0027] A heat preservation cylinder 3;

[0028] A crucible 5, located inside the heat preservation cylinder 3;

[0029] A soft felt 2 surrounding the outer circumferential surface of the heat preservation cylinder 3;

[0030] A solidification felt 1 surrounding the outer circumferential surface of the soft felt 2, wherein grooves 1.3 are provided on the inner circumferential surface of the solidification felt 1, the openings of the grooves 1.3 point to the soft felt 2, and the grooves 1.3 cooperate with the soft felt 2 to form an air chamber;

[0031] A furnace wall 4 surrounding the outer circumferential surface of the solidification felt 1.

[0032] The present utility model does not limit the structure inside the heat preservation cylinder 3 in the single crystal furnace, and it can be designed according to the existing technology. For example, the crucible 5 is arranged inside the crucible collar (not shown), and a heater 6 is arranged between the crucible collar and the heat preservation cylinder 3. The present utility model does not limit the overall structure of the single crystal furnace, and it can be designed according to the existing technology. For example, the periphery of the single crystal furnace is composed of a furnace cylinder (not shown), a furnace cover (not shown), and a furnace bottom (not shown). Figure 2 The shown furnace wall 4 is, for example, a partial section of the furnace cylinder.

[0033] In the single crystal furnace, the soft felt 2, the heat preservation cylinder 3, and the cured felt 1 together play the function of heat insulation. And because grooves 1.3 are arranged on the inner circumferential surface of the cured felt 1, the heat dissipation mode is a combination of heat conduction and heat radiation, which improves the heat insulation effect, effectively reduces the heat loss in the furnace, greatly reduces the power consumption of the single crystal furnace, and saves costs.

[0034] Optionally, the number of the grooves 1.3 is 1. The groove 1.3 is annular and surrounds the soft felt 2. The part of the inner circumferential surface of the cured felt 1 above the groove 1.3 is the upper arc surface 1.1 surrounding the soft felt 2, and the part of the inner circumferential surface of the cured felt 1 below the groove 1.3 is the lower arc surface 1.2 surrounding the soft felt 2. Designed in this way, the manufacturing process of the cured felt 1 is simpler, and the area of heat radiation is as large as possible, and the temperature field is relatively uniform.

[0035] In some other embodiments, the grooves 1.3 are multiple and separated from each other. The multiple grooves 1.3 are, for example, multiple rectangular grooves evenly distributed, multiple circular grooves evenly distributed, or multiple annular grooves evenly distributed up and down.

[0036] Optionally, it further includes a hoop (not shown), and the soft felt 2 is fastened on the heat preservation cylinder 3 by the hoop. The hoop can be a conventional hoop. The hoop surrounds the soft felt 2 and presses the soft felt 2 towards the heat preservation cylinder 3.

[0037] Optionally, the cured felt 1 and the soft felt 2 are fixedly connected by extrusion stress and friction force. The inner diameter of the cured felt 1 is slightly smaller than the outer diameter of the soft felt 2 in the fluffy state.

[0038] During assembly, first, the soft felt 2 is wrapped around the outer circumferential surface of the heat preservation cylinder 3, and the soft felt 2 is fixed by the hoop. Then, the cured felt 1 is sleeved on the outer circumferential surface of the soft felt 2. The area of the inner circumferential surface of the cured felt 1 outside the groove 1.3 is closely attached to the soft felt 2.

[0039] Optionally, the thickness of the soft felt 2 is 10 mm to 180 mm.

[0040] Further preferably, the thickness of the soft felt 2 is 80 mm to 120 mm.

[0041] The soft felt 2 should have sufficient thickness to play a heat insulation role. In addition, sufficient space should be reserved for the curing felt 1 and the groove 1.3 formed on the curing felt 1.

[0042] Optionally, the ratio of the depth of the groove 1.3 to the thickness of the curing felt 1 is 0.4 to 0.6. The solid part of the curing felt 1 also plays a heat insulation role, so the depth of the groove 1.3 should not be too large. If the depth of the groove 1.3 is too small, the space for heat radiation is small. The overall heat insulation effect is better within this ratio range.

[0043] The heat preservation cylinder 3, the curing felt 1 and the soft felt 2 are all made of heat insulation materials. Optionally, the curing felt 1 is a cured graphite felt. Optionally, the soft felt 2 is a viscose-based graphite soft felt 2. Optionally, the material of the heat preservation cylinder 3 is a carbon-carbon composite material. The heat preservation cylinder 3, the curing felt 1 and the soft felt 2 can also be made of other known heat insulation materials.

[0044] In the single crystal furnace, the soft felt 2, the heat preservation cylinder 3 and the curing felt 1 jointly play a role in heat insulation and heat preservation. And because the groove 1.3 is arranged on the inner circumferential surface of the curing felt 1, the heat dissipation mode is a combination of heat transfer and heat radiation, which improves the heat insulation effect, effectively reduces the heat loss in the furnace, greatly reduces the power consumption of the single crystal furnace, and saves costs.

[0045] Each embodiment in the present utility model is described in a progressive manner. The same or similar parts among the embodiments can be referred to each other, and the key point of each embodiment is to illustrate the differences from other embodiments.

[0046] The protection scope of the present utility model is not limited to the above embodiments. Obviously, those skilled in the art can make various changes and deformations to the present utility model without departing from the scope and spirit of the present utility model. If these changes and deformations belong to the scope of the claims of the present utility model and their equivalent technologies, the intention of the present utility model also includes these changes and deformations.

Claims

1. A single crystal furnace, characterized in that, Comprising: Heat preservation cylinder; Crucible, located inside the heat preservation cylinder; Soft felt surrounding the outer peripheral surface of the heat preservation cylinder; Cured felt surrounding the outer peripheral surface of the soft felt, wherein a groove is provided on the inner peripheral surface of the cured felt, the opening of the groove points to the soft felt, and the groove and the soft felt cooperate to form an air chamber; Furnace wall surrounding the outer peripheral surface of the cured felt.

2. The single crystal furnace according to claim 1, characterized in that, The number of the grooves is one, the groove is annular and surrounds the soft felt, the part of the inner peripheral surface of the cured felt above the groove is an upper arc surface surrounding the soft felt, and the part of the inner peripheral surface of the cured felt below the groove is a lower arc surface surrounding the soft felt.

3. The single crystal furnace according to claim 1, characterized in that, Further comprising a hoop, and the soft felt is fastened to the heat preservation cylinder by the hoop.

4. The single crystal furnace according to claim 1, characterized in that, The thickness of the soft felt is 10 mm to 180 mm.

5. The single crystal furnace according to claim 4, characterized in that, The thickness of the soft felt is 80 mm to 120 mm.

6. The single crystal furnace according to claim 1, characterized in that, The ratio of the depth of the groove to the thickness of the cured felt is 0.4 to 0.

6.

7. The single crystal furnace according to claim 1, characterized in that, The cured felt is a cured graphite felt.

8. The single crystal furnace according to claim 1, characterized in that, The soft felt is a viscose-based graphite soft felt.

9. The single crystal furnace according to claim 1, characterized in that, The number of the grooves is multiple and evenly distributed.

10. The single crystal furnace according to claim 9, characterized in that, The multiple grooves are annular and surround the soft felt, and the multiple grooves are arranged in parallel with each other.

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