Suspension structure, detection module comprising suspension structure and micro-displacement detection device comprising suspension structure

Abstract

The utility model provides a suspension structure, and a detection module and a micro-displacement detection device comprising the same, the suspension structure comprises a central area, a fixed frame and a plurality of suspension beams, the central area is circular, and the central area is used for fixing the upper end of a probe or supporting the lower end of a reflector assembly; the fixing frame is arranged around the central area, the inner edge of the fixing frame is circular, the inner edge of the fixing frame and the central area are coaxially arranged, and the fixing frame is used for being fixed with other components; the suspension beam is arranged between the central area and the fixed frame, and the two ends of the suspension beam are connected with the outer edge of the central area and the inner edge of the fixed frame respectively; the multiple suspension beams are evenly distributed in the circumferential direction of the center area. The plurality of suspension beams which are uniformly distributed along the circumferential direction are connected with the central area, so that the measuring needle fixed in the central area is uniformly stressed, the measuring needle can be kept in a vertical state under the condition of no external force, meanwhile, the measuring ball is not hindered from moving along with the fluctuation of the surface of the sample, and the accuracy and the stability of sample measurement are ensured.

Description

Technical Field

[0001] The utility model relates to a suspension structure, a detection module and a micro-displacement detection device including the same. Background Art

[0002] Currently, common measurement means in micro-nano scale three-dimensional measurement include scanning probe microscopes, confocal microscopes, white light interference microscopes, micro-nano coordinate measuring machines, etc. Micro-nano coordinate measurement technology can overcome the contradiction between the measurement range and measurement accuracy, and at the same time has the detection and sensing capabilities in three directions, and can achieve true 3D measurement. It is a relatively effective means to solve the problem of micro-nano scale three-dimensional measurement at present.

[0003] The lower end of the probe used in micro-nano coordinate measurement is provided with a probe ball, and the probe ball is in contact with the surface of the sample. When the sample moves, the probe ball will displace following the undulation of the sample surface. The displacement of the probe ball in contact with the sample surface can be calculated by a detector, so as to obtain the surface topography data of the sample and the three-dimensional measurement results of key dimensions. In order to ensure the accuracy of the measurement results, it is necessary to ensure that the probe remains vertical without external force, and at the same time, it cannot prevent the probe ball from displacing following the undulation of the sample surface.

[0004] How to ensure that the probe remains vertical without external force and at the same time does not prevent the probe ball from displacing following the undulation of the sample surface is an important problem that needs to be solved by the current micro-nano coordinate measurement technology. Summary of the Utility Model

[0005] In order to ensure that the probe remains vertical without external force and at the same time does not prevent the probe ball from displacing following the undulation of the sample surface, the utility model provides a suspension structure, a detection module and a micro-displacement detection device including the same.

[0006] The utility model solves the above technical problems through the following technical solutions:

[0007] The utility model provides a suspension structure for suspending a probe. The suspension structure includes a central area, a fixed frame and a plurality of suspension beams. The central area is circular and is used to fix the upper end of the probe. The fixed frame is arranged around the central area. The inner edge of the fixed frame is circular and is coaxially arranged with the central area. The fixed frame is used to be fixed to other components. The suspension beams are arranged between the central area and the fixed frame. The two ends of the suspension beam are respectively connected to the outer edge of the central area and the inner edge of the fixed frame. The plurality of suspension beams are evenly distributed along the circumferential direction of the central area.

[0008] In this technical solution, since several suspension beams are evenly distributed along the circumferential direction of the central area, the force on the probe is evenly distributed. The probe remains vertical without external force, and at the same time, it does not prevent the probe ball from displacing along with the undulation of the sample surface.

[0009] Preferably, the center line of the suspension beam is an Archimedean spiral, and the polar coordinate origin of the center line coincides with the center of the central area.

[0010] In this technical solution, the suspension beam extending along the direction of the Archimedean spiral can make the force on the probe evenly distributed, remain vertical without external force, and at the same time, the probe can maintain sufficient rigidity and drive the mirror assembly to displace along with the undulation of the sample surface.

[0011] Preferably, the radius of the inner edge of the fixed frame is 0.6 mm, and the radius of the outer edge of the central area is 2.6 mm; the polar coordinate equation of the center line of the suspension beam is r = a + bθ, where a = 0.6 mm.

[0012] In this technical solution, the suspension structure set according to the above dimensions can make the probe maintain sufficient rigidity and drive the mirror assembly to displace along with the undulation of the sample surface.

[0013] Preferably, the number of suspension beams is 3 to 6.

[0014] In this technical solution, 3 to 6 suspension beams can ensure the strength of the suspension structure while not preventing the probe ball from displacing along with the undulation of the sample surface.

[0015] Preferably, the suspension structure is made of beryllium copper or silicon material.

[0016] In this technical solution, the suspension structure made of beryllium copper or silicon material can achieve the isotropy of the detection stiffness during the lateral and longitudinal detection of the probe head.

[0017] The present utility model also provides a detection module, which includes a suspension structure, a clamping assembly and a probe. The suspension structure is as described in the above technical solution; the clamping assembly fixes the fixed frame of the suspension structure to make the suspension structure horizontally placed; the clamping assembly is also used to be fixed to other components; the upper end of the probe is fixed to the lower surface of the central area of the suspension structure to make the probe in a suspended state.

[0018] In this technical solution, through the clamping assembly, the whole detection module can be fixed on the mounting table of the micro-displacement detection device to make the suspension structure horizontally placed.

[0019] Preferably, the clamping assembly is arranged around the suspension structure, and the central area and the suspension beams of the suspension structure are surrounded in the middle.

[0020] In this technical solution, the clamping assembly is arranged around the suspension structure. The clamping assembly encloses the central area and the suspension beam of the suspension structure in the middle, which can ensure the uniform force on the suspension structure.

[0021] Preferably, the clamping assembly includes a lower base, an upper pressing plate and a clamping member. A placing surface is provided on the upper surface of the lower base, and the lower surface of the fixed frame of the suspension structure is placed on the placing surface of the lower base; the upper pressing plate presses on the upper surface of the fixed frame of the suspension structure; the clamping member clamps the upper pressing plate and the lower base, so that the fixed frame of the suspension structure is clamped between the lower base and the upper pressing plate.

[0022] In this technical solution, by clamping the fixed frame of the suspension structure with the lower base and the upper pressing plate, and then using the clamping member to clamp the upper pressing plate and the lower base, the suspension structure can be fixed and presented in a horizontal state.

[0023] Preferably, the lower base is provided with a convex platform protruding upward, and the placing surface is formed on the upper surface of the convex platform.

[0024] In this technical solution, when the suspension structure is installed, it is placed on the convex platform. The convex platform plays a role in positioning the suspension structure; at the same time, the setting of the convex platform also facilitates the design and installation of the clamping member, enabling the clamping member to realize the function of clamping the lower base and the upper pressing plate.

[0025] Preferably, the lower base is provided with a flange extending outward, and the flange is used for fixing with other components.

[0026] In this technical solution, the clamping assembly is fixed on the installation table through the flange, so that the detection module is integrally fixed on the micro-displacement detection device.

[0027] Preferably, the clamping member includes a clamping main body, an upper pressing edge and a lower fixing edge. The upper pressing edge is formed on the upper edge of the clamping main body, and the upper pressing edge presses on the upper surface of the upper pressing plate; the lower fixing edge is formed on the lower edge of the clamping main body, and the lower fixing edge is fixed to the lower base.

[0028] In this technical solution, for the clamping member with the above structure, through the fixation of the lower fixing edge to the lower base, the upper pressing edge can press on the upper pressing plate, thereby pressing and fixing the suspension structure.

[0029] Preferably, a receiving groove recessed downward is formed on the upper surface of the upper pressing plate, and the upper pressing edge is located in the receiving groove.

[0030] In this technical solution, the receiving groove is used to position the upper pressing edge, so that the position of the clamping member is relatively fixed with respect to the upper pressing plate during installation.

[0031] Preferably, the number of clamping members is several, and several clamping members are arranged around the suspension structure.

[0032] In this technical solution, several clamping members are arranged around the suspension structure, enabling the suspension structure to be uniformly stressed and ensuring that the probe can always remain in the middle position.

[0033] Preferably, the detection module further includes a mirror assembly, and the lower end of the mirror assembly is fixed to the upper surface of the central area of the suspension structure.

[0034] In this technical solution, a mirror body is provided at the upper end of the mirror assembly, and the displacement of the probe ball of the probe can be calculated by detecting the displacement of the mirror body.

[0035] The present utility model also provides a micro-displacement detection device, including a detection module, a connection module, and a mounting table. The detection module is as described in the above technical solution; the connection module is fixed to the clamping assembly of the detection module, enabling the suspension structure to be horizontally placed; the connection module is fixed to the mounting table, and the mounting table is also used to be fixed to the measurement platform.

[0036] In this technical solution, when the above detection module is installed on the micro-displacement detection device, the connection module is fixed to the clamping assembly of the detection module, enabling the suspension structure to be horizontally placed; the connection module is fixed to the mounting table, and the mounting table is also used to be fixed to the measurement platform.

[0037] Preferably, the detection module further includes a mirror assembly, the lower end of the mirror assembly is fixed to the upper surface of the central area of the suspension structure, and the upper end of the mirror assembly forms a mirror body; the micro-displacement detection device further includes at least one detector, and the detector is installed on the mounting table and is used to detect the displacement of the mirror body.

[0038] In this technical solution, the detector is used to detect the displacement of the mirror body of the mirror assembly, and the displacement of the probe ball of the probe is calculated through the displacement of the mirror body, thereby obtaining the topography data of the sample surface and the three-dimensional measurement results of the key dimensions.

[0039] On the basis of conforming to the common knowledge in the art, the above preferred conditions can be arbitrarily combined to obtain various preferred examples of the present utility model.

[0040] The positive and progressive effects of the present utility model are as follows:

[0041] The above suspension structure and the detection module and micro-displacement detection device including it. For the suspension structure used to suspend the probe, the central area is connected by several suspension beams evenly distributed in the circumferential direction, enabling the probe fixed in the central area to be uniformly stressed. The probe can maintain a vertical state without external forces, and at the same time, it does not prevent the probe ball from displacing following the undulation of the sample surface, ensuring the accuracy and stability of sample measurement. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] Figure 1 It is a schematic structural diagram of the micro-displacement detection device of the present utility model.

[0043] Figure 2 is Figure 1 The partial enlarged view of area A of the micro-displacement detection device shown in the figure.

[0044] Figure 3 is the structural schematic diagram of the suspension structure of the present utility model.

[0045] Figure 4 is Figure 3 The top view of the suspension structure shown in the figure.

[0046] Figure 5 is Figure 3 The assembly schematic diagram of the suspension structure, the probe needle and the mirror assembly shown in the figure.

[0047] Figure 6 is the structural schematic diagram of the detection module of the present utility model.

[0048] Figure 7 is Figure 6 The cross-sectional schematic diagram of the detection module shown in the figure.

[0049] Figure 8 is Figure 6 The assembly schematic diagram of the detection module and the connection module shown in the figure.

[0050] Explanation of reference numerals

[0051] Detection module 100

[0052] Suspension structure 1

[0053] Central area 11

[0054] Outer edge 111

[0055] Fixed frame 12

[0056] Inner edge 121

[0057] Suspension beam 13

[0058] Center line 131

[0059] Probe needle 2

[0060] Probe ball 21

[0061] Mirror assembly 3

[0062] Mirror body 31

[0063] Clamping assembly 4

[0064] Lower base 41

[0065] Placement surface 411

[0066] Boss 412

[0067] Flange 413

[0068] Mounting hole 414

[0069] Upper pressure plate 42

[0070] Receiving groove 421

[0071] Clamping member 43

[0072] Clamping body 431

[0073] Upper pressing edge 432

[0074] Lower fixing edge 433

[0075] Detector 200

[0076] Connection module 300

[0077] Mounting table 400 Detailed implementation manner

[0078] The present utility model will be further described below by way of embodiments, but the present utility model is not limited to the scope of the described embodiments.

[0079] Figure 1 、 Figure 2 As shown, there is a micro-displacement detection device. The detection module 100 of the detection device is provided with a probe 2 fixed to the lower surface of the suspension structure 1 and a mirror assembly 3 fixed to the upper surface of the suspension structure 1. A probe ball 21 is formed at the lower end of the probe 2. The probe ball 21 is used to contact the surface of the sample and can move along with the undulation of the sample surface. A mirror body 31 is formed at the upper end of the mirror assembly 3. When the probe ball 21 moves, the mirror body 31 of the mirror assembly 3 also moves together. The displacement of the probe ball 21 can be converted into the displacement of the mirror body 31. The detection device further includes a plurality of detectors 200. The detectors 200 can detect the displacement of the mirror body 31, so that the displacement of the probe ball 21 can be calculated, and the topography data of the sample surface and the three-dimensional measurement results of the key dimensions can be obtained.

[0080] In order to ensure that the probe 2 remains vertical without external force and at the same time does not prevent the probe ball 21 from moving along with the undulation of the sample surface, the structure of the suspension structure 1 is as Figures 3 to 4As shown in the figure. The suspension structure 1 includes a central area 11, a fixed frame 12 and a plurality of suspension beams 13. The central area 11 is circular; the fixed frame 12 is arranged around the central area 11, the inner edge 121 of the fixed frame 12 is circular, and the inner edge 121 of the fixed frame 12 is coaxially arranged with the central area 11; the suspension beams 13 are arranged between the central area 11 and the fixed frame 12, and the two ends of the suspension beams 13 are respectively connected to the outer edge 111 of the central area 11 and the inner edge 121 of the fixed frame 12; the plurality of suspension beams 13 are evenly distributed along the circumferential direction of the central area 11.

[0081] As Figure 5 shown, the stylus 2 is fixed to the lower surface of the central area 11. Since the plurality of suspension beams 13 are evenly distributed along the circumferential direction of the central area 11, the stylus 2 is uniformly stressed. The stylus 2 remains vertical without external force, and at the same time, it does not prevent the probe ball 21 from moving along with the undulation of the sample surface.

[0082] The mirror assembly 3 is fixed to the upper surface of the central area 11. When the probe ball 21 moves, the stylus 2 rotates, and the central area 11 of the suspension structure 1 will rotate along with the stylus 2; since the mirror assembly 3 is fixed to the upper surface of the central area 11, the mirror assembly 3 will also rotate along with the stylus 2, so that the displacement of the probe ball 21 can be converted into the displacement of the mirror body 31 of the mirror assembly 3.

[0083] In order to ensure the symmetry of the displacements of the probe ball 21 and the mirror body 31, both the stylus 2 and the mirror assembly 3 are coaxially arranged with the central area 11 of the suspension structure 1.

[0084] As Figure 3 and Figure 4 shown, the center line 131 of the suspension beam 13 is an Archimedean spiral, and the polar coordinate origin of the center line 131 coincides with the center of the central area 11. The suspension beam 13 extending along the direction of the Archimedean spiral can make the stylus 2 uniformly stressed and remain vertical without external force. At the same time, the probe ball 21 can maintain sufficient sensitivity and can move along with the undulation of the sample surface.

[0085] Among them, the radius of the inner edge 121 of the fixed frame 12 is 2.6 mm, and the radius of the outer edge 111 of the central area 11 is 0.6 mm; the polar coordinate equation of the center line 131 of the suspension beam 13 is r = a + bθ, a = 0.6 mm, The suspension structure 1 with the above size settings can make the probe ball 21 of the stylus 2 maintain sufficient sensitivity and can move along with the undulation of the sample surface.

[0086] In this embodiment, the center line 131 of the suspension beam 13 is an Archimedean spiral. In other embodiments, the center line 131 of the suspension beam 13 can be other shapes that can achieve uniform stress on the stylus 2.

[0087] In this embodiment, the number of suspension beams 13 is three. The three suspension beams 13 are evenly distributed along the circumferential direction of the central area 11, so that the stylus 2 fixed below the central area 11 is evenly stressed. In other embodiments, the number of suspension beams 13 can be 3 to 6. The suspension beams 13 with a number of 3 to 6 can ensure the strength of the suspension structure 1 while not preventing the displacement of the measuring ball 21 following the undulation of the sample surface.

[0088] In this embodiment, the suspension structure 1 is made of beryllium copper or silicon material. The suspension structure 1 made of beryllium copper or silicon material can achieve isotropic stiffness in lateral and longitudinal detections.

[0089] Install the above-mentioned suspension structure 1 on the detection module 100, as Figures 6 to 7 shown. The detection module 100 includes a suspension structure 1, a clamping assembly 4 and a stylus 2. The clamping assembly 4 fixes the fixed frame 12 of the suspension structure 1 so that the suspension structure 1 is placed horizontally; the upper end of the stylus 2 is fixed on the lower surface of the central area 11 of the suspension structure 1, so that the stylus 2 is in a suspended state. Through the clamping assembly 4, the detection module 100 as a whole can be fixed on the mounting table 400 of the micro-displacement detection device.

[0090] The stylus 2 is fixed on the lower surface of the central area 11, and the measuring ball 21 of the stylus 2 can displace following the undulation of the sample surface; the mirror assembly 3 is fixed on the upper surface of the central area 11. When the measuring ball 21 moves, the stylus 2 rotates, and the central area 11 of the suspension structure 1 and the mirror assembly 3 will rotate together with the stylus 2, so that the displacement of the measuring ball 21 can be converted into the displacement of the mirror body 31 of the mirror assembly 3.

[0091] To ensure the uniform stress of the suspension structure 1, the clamping assembly 4 is arranged around the suspension structure 1, and the clamping assembly 4 encloses the central area 11 and the suspension beams 13 of the suspension structure 1.

[0092] As Figures 6 to 7 shown, the clamping assembly 4 includes a lower base 41, an upper pressing plate 42 and a clamping member 43. The upper surface of the lower base 41 is provided with a placement surface 411, and the lower surface of the fixed frame 12 of the suspension structure 1 is placed on the placement surface 411 of the lower base 41; the upper pressing plate 42 presses on the upper surface of the fixed frame 12 of the suspension structure 1; the clamping member 43 clamps the upper pressing plate 42 and the lower base 41, so that the fixed frame 12 of the suspension structure 1 is clamped between the lower base 41 and the upper pressing plate 42.

[0093] By clamping the fixed frame 12 of the suspension structure 1 by the lower base 41 and the upper pressing plate 42, and then using the clamping member 43 to clamp the upper pressing plate 42 and the lower base 41, the suspension structure 1 can be fixed and presented in a horizontally unfolded state.

[0094] Among them, the lower base 41 is provided with a convex platform 412 protruding upward, and the placement surface 411 is formed on the upper surface of the convex platform 412. When the suspension structure 1 is installed, it is placed on the convex platform 412, and the convex platform 412 plays a role in positioning the suspension structure 1; at the same time, the setting of the convex platform 412 also facilitates the design and installation of the clamping member 43, enabling the clamping member 43 to realize the function of clamping the lower base 41 and the upper pressing plate 42.

[0095] Among them, the convex platform 412, the upper pressing plate 42, and the fixed frame 12 of the suspension structure 1 have the same outer shape, so that the convex platform 412, the suspension structure 1, and the upper pressing plate 42 are stacked to form an integral body, facilitating the installation of the clamping member 43; at the same time, the central area 11 and the suspension beam 13 of the suspension structure 1 are surrounded between the upper pressing plate 42 and the convex platform 412.

[0096] As Figure 6 shown, the lower base 41 is provided with a flange 413 extending outward, and the clamping assembly 4 is fixed on the mounting table 400 of the micro-displacement detection device through the flange 413. In this embodiment, a plurality of mounting holes 414 are provided on the flange 413. As Figure 8 shown, the lower base 41 is fixed to the connection module 300 through fixing bolts passing through the mounting holes 414, and then through the fixing of the connection module 300 to the mounting table 400, the detection module 100 is fixed to the mounting table 400.

[0097] As Figures 6 to 7 shown, the clamping member 43 includes a clamping main body 431, an upper pressing edge 432, and a lower fixing edge 433. The upper pressing edge 432 is formed on the upper edge of the clamping main body 431, and the upper pressing edge 432 presses on the upper surface of the upper pressing plate 42; the lower fixing edge 433 is formed on the lower edge of the clamping main body 431, and the lower fixing edge 433 is fixed to the lower base 41. The clamping member 43 with the above structure, through the fixing of the lower fixing edge 433 to the lower base 41, enables the upper pressing edge 432 to press the upper pressing plate 42, thereby pressing and fixing the suspension structure 1.

[0098] Among them, a receiving groove 421 recessed downward is formed on the upper surface of the upper pressing plate 42, and the upper pressing edge 432 is located in the receiving groove 421. The receiving groove 421 is used to position the upper pressing edge 432, so that the position of the clamping member 43 is relatively fixed with respect to the upper pressing plate 42 during installation.

[0099] In this embodiment, the upper pressing plate 42 and the convex platform 412 are square in shape; correspondingly, the number of clamping members 43 is four, which are respectively arranged on the four sides of the upper pressing plate 42, so that the suspension structure 1 clamped between the upper pressing plate 42 and the convex platform 412 can be uniformly stressed. In other embodiments, the shapes of the upper pressing plate 42 and the convex platform 412, and the number and positions of the clamping members 43 can also be set according to actual requirements. The number of the clamping members 43 is preferably several, and several clamping members 43 are arranged around the suspension structure 1, so that the suspension structure 1 can be uniformly stressed and ensure that the probe 2 can always be kept in the middle position.

[0100] As Figure 1 , Figure 2 and Figure 8 shown, when the above-mentioned detection module 100 is installed on the micro-displacement detection device, the connection module 300 is fixed to the clamping component 4 of the detection module 100, so that the suspension structure 1 is placed horizontally; the connection module 300 is fixed on the mounting table 400, and the mounting table 400 is also used to be fixed to the measurement platform.

[0101] The micro-displacement detection device further includes several detectors 200. The detectors 200 are installed on the mounting table 400, and the detectors 200 are used to detect the displacement of the mirror body 31 of the mirror assembly 3. In this embodiment, the mirror body 31 is a cube; the number of detectors 200 is three, and the displacement of the mirror body 31 is detected from the X, Y, and Z directions respectively. In other embodiments, the shape of the mirror body 31, and the number and directions of the detectors 200 can also be set according to actual requirements.

[0102] The present utility model is not limited to the above embodiments. No matter what changes are made in its shape or structure, they all fall within the protection scope of the present utility model. The protection scope of the present utility model is defined by the appended claims. Those skilled in the art can make various changes or modifications to these embodiments without departing from the principle and essence of the present utility model, but these changes and modifications all fall within the protection scope of the present utility model.

Claims

1. A suspension structure for suspending a probe needle, characterized in that, The suspension structure includes: A central area, which is circular and is used to fix the upper end of the probe needle. A fixed frame, which is arranged around the central area. The inner edge of the fixed frame is circular and is coaxially arranged with the central area. The fixed frame is used to be fixed to other components. A plurality of suspension beams, which are arranged between the central area and the fixed frame. The two ends of the suspension beam are respectively connected to the outer edge of the central area and the inner edge of the fixed frame. The plurality of suspension beams are evenly distributed along the circumferential direction of the central area.

2. The suspension structure according to claim 1, wherein: The center line of the suspension beam is an Archimedean spiral, and the pole coordinate origin of the center line coincides with the center of the central area.

3. The suspension structure according to claim 2, characterized in that: The radius of the inner edge of the fixed frame is 0.6 mm, and the radius of the outer edge of the central region is 2.6 mm; the polar coordinate equation of the center line of the suspension beam is r = a + bθ, where a = 0.6 mm, 4. The suspension structure according to any one of claims 1 to 3, characterized in that: The number of the suspension beams is 3 to 6.

5. The suspension structure according to any one of claims 1 to 3, characterized in that: The suspension structure is made of beryllium copper or silicon material.

6. A detection module, characterized in that, The detection module includes: A suspension structure as described in any one of claims 1 to 5. A clamping assembly, which fixes the fixed frame of the suspension structure to make the suspension structure horizontally placed. The clamping assembly is also used to be fixed to other components. A probe needle, the upper end of which is fixed on the lower surface of the central area of the suspension structure, so that the probe needle is in a suspended state.

7. The detection module according to claim 6, wherein: The clamping assembly is arranged around the suspension structure, and the central area and the suspension beams of the suspension structure are surrounded in the middle.

8. The detection module according to claim 6, wherein The clamping assembly includes: A lower base, the upper surface of which is provided with a placement surface, and the lower surface of the fixed frame of the suspension structure is placed on the placement surface of the lower base. An upper pressing plate, which presses on the upper surface of the fixed frame of the suspension structure. A clamping member, which clamps the upper pressing plate and the lower base, so that the fixed frame of the suspension structure is clamped between the lower base and the upper pressing plate.

9. The detection module according to claim 8, wherein: The lower base is provided with an upward protruding boss, and the placement surface is formed on the upper surface of the boss.

10. The detection module according to claim 8 or 9, characterized in that: The lower base is provided with a flange extending outward, and the flange is used to be fixed to other components.

11. The detection module according to claim 8, characterized in that: The clamping member includes: A clamping main body; An upper pressing edge, which is formed on the upper edge of the clamping main body and presses on the upper surface of the upper pressing plate. A lower fixing edge, which is formed on the lower edge of the clamping main body and is fixed to the lower base.

12. The detection module according to claim 11, wherein: A receiving groove is formed on the upper surface of the upper pressing plate, and the upper pressing edge is located in the receiving groove.

13. The detection module according to claim 8, 11 or 12, characterized in that: The number of the clamping members is several, and the several clamping members are arranged around the suspension structure.

14. The detection module according to claim 6, wherein: The detection module further includes a mirror assembly, the lower end of which is fixed on the upper surface of the central area of the suspension structure.

15. A micro-displacement detection device, characterized in that, It includes: A detection module as described in any one of claims 6 to 14. A connection module, which is fixed to the clamping assembly of the detection module to make the suspension structure horizontally placed. An installation table, the connection module is fixed on the installation table, and the installation table is also used to be fixed to the measurement platform.

16. The micro-displacement detection device according to claim 15, wherein: The detection module further includes a mirror assembly, the lower end of the mirror assembly is fixed on the upper surface of the central area of the suspension structure, and the upper end of the mirror assembly forms a mirror body; the micro-displacement detection device further includes at least one detector, the detector is installed on the mounting table, and the detector is used to detect the displacement of the mirror body.

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