Detection device
Through parallel horizontal positive and negative stiffness mechanisms, combined with leveling and dampers, the product scratching problem caused by vibration transmission in the detection equipment is solved, and a high-precision and safe detection process is achieved.
Patent Information
- Application Number
- CN202422024220.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-20
- Publication Date
- 2025-07-11
- Estimated Expiration
- 2034-08-20
AI Technical Summary
In existing testing equipment, the connection stiffness between the frame and the mounting seat is too large, causing vibration of the detection table to be transmitted to the frame, causing vibration of the handling module to vibrate, scratch the product and form a vicious cycle.
The horizontal positive stiffness mechanism and the horizontal negative stiffness mechanism are adopted to provide a large static connection stiffness through the horizontal positive stiffness mechanism. The horizontal negative stiffness mechanism generates negative stiffness when vibrating near the balanced position, isolates medium and high-frequency vibrations, reduces dynamic stiffness, and adjusts the horizontality and vibration attenuation of the detection table in combination with the leveling mechanism and the damper.
It effectively isolates medium and high frequency vibration, reduces vibration transmission, ensures the positioning accuracy of the handling module and product safety, avoids equipment damage, and improves detection efficiency.
Smart Images
Figure CN223091305U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of detection equipment, in particular to a detection equipment. Background Art
[0002] Before a product enters the next process or before leaving the factory, its performance usually needs to be detected, and the detection of the product is usually completed on detection equipment. For example, the detection of wafers is usually completed on wafer detection equipment.
[0003] The detection equipment includes a loading device and a detection device. The loading device includes a frame and a handling module arranged on the frame. The detection device includes a mounting seat and a detection table movably arranged on the mounting seat. During detection, the handling module obtains the product from the cassette and places the product on the detection table. The detection table is controlled to move on the mounting seat to detect different parts of the product.
[0004] The time required for the detection table to move from the original position to the target position each time and the time to stay at the target position are very short, the movement acceleration is large, and the movement frequency is low (less than 10 Hz). During each start and stop, due to the action of inertia force, the mounting seat will generate a large impact vibration, which is likely to cause the displacement of the mounting seat and the frame, affecting the position accuracy of the handling module to place the product on the detection table each time. In order to ensure the positioning accuracy between the mounting seat and the frame, the frame and the mounting seat are connected by a connecting plate. Since the connecting plate is relatively hard, the connection stiffness between the frame and the mounting seat is extremely large. The vibration of the detection table will be transmitted to the frame through the connecting plate, resulting in the vibration of the handling module on the frame. The vibrating handling module will scratch the product during loading and unloading, causing a vicious cycle of equipment damaging the product. Summary of the Utility Model
[0005] Based on this, in view of the problem that the connection method between the frame and the mounting seat results in a large stiffness, and the vibration of the detection table will cause a large vibration of the handling module and scratch the product, it is necessary to provide a detection equipment that can not only ensure the positioning accuracy between the mounting seat and the frame but also reduce the vibration transmission between the mounting seat and the frame.
[0006] A detection equipment, comprising:
[0007] A loading device, including a cassette, a frame and a handling module, the cassette and the handling module are installed on the frame;
[0008] A detection device, including a mounting seat and a detection table, the mounting seat and the frame are arranged at intervals in the horizontal direction, the detection table is movably installed on the mounting seat; the handling module is used for handling the product and circulating between the detection table and the cassette;
[0009] A quasi-zero stiffness device, including:
[0010] A horizontally positive stiffness mechanism and a horizontally negative stiffness mechanism in parallel, the horizontally positive stiffness mechanism connecting the frame and the mounting base, the horizontally negative stiffness mechanism being connected to the mounting base, and the horizontally positive stiffness mechanism and the horizontally negative stiffness mechanism causing the mounting base to tend to the equilibrium position.
[0011] In the above detection device, when the detection table starts to work and detects different parts of the product, the mounting base will vibrate near the equilibrium position under the action of inertia force. When the mounting base vibrates near the equilibrium position, the horizontally positive stiffness mechanism has a positive stiffness in the horizontal direction, and the horizontally negative stiffness mechanism has a negative stiffness in the horizontal direction. The positive stiffness and the negative stiffness are in parallel, so that the dynamic connection stiffness between the mounting base and the frame is extremely low, the isolation of medium and high-frequency vibrations can be achieved, and the transmission of vibrations between the mounting base and the frame can be reduced. Compared with the prior art method of connecting the frame and the mounting base through a connecting plate, it is not easy to cause vibrations of the handling module, and the handling module will not scratch the product when picking and placing materials, and will not cause a vicious cycle of the equipment damaging the product. Moreover, the positive stiffness of the horizontally positive stiffness mechanism is very large, and the horizontally negative stiffness mechanism will only generate negative stiffness when deviating from the equilibrium position. Therefore, the static connection stiffness between the frame and the mounting base is very large, ensuring the positioning accuracy between the mounting base and the frame.
[0012] In one embodiment, the horizontally positive stiffness mechanism includes a horizontal spring, the horizontal spring connecting the frame and the mounting base and being compressed in the horizontal direction between the frame and the mounting base.
[0013] In one embodiment, the horizontally negative stiffness mechanism includes a first negative stiffness element and a second negative stiffness element respectively connected to the top and bottom of the mounting base, and at least one of the first negative stiffness element and the second negative stiffness element is connected to the frame through a connecting mechanism.
[0014] In one embodiment, the first negative stiffness element includes a first vertical spring, a connecting mechanism being connected to the frame and extending horizontally above the mounting base, and the first vertical spring being connected to the connecting mechanism and the top of the mounting base and being compressed in the vertical direction between the connecting mechanism and the mounting base.
[0015] In one embodiment, the mounting base includes a base and a support base, the support base being mounted on the base, the detection table being movably mounted on the support base, and the horizontally positive stiffness mechanism connecting the frame and the support base;
[0016] The second negative stiffness element includes a diagonal tension spring, the diagonal tension spring extending obliquely with respect to both the vertical direction and the horizontal direction and being compressed between the support base and the base; the support base is suspended on the base under the action of the diagonal tension spring; or
[0017] The second negative stiffness element includes a second vertical spring. A connecting mechanism is connected to the frame and extends horizontally to the lower side of the mounting seat. The second vertical spring is connected to the connecting mechanism and the bottom of the mounting seat and is compressed in the vertical direction and disposed between the connecting mechanism and the mounting seat.
[0018] In one embodiment, the second negative stiffness element includes two sets of spring groups. The two sets of spring groups are disposed at both ends of the support seat in a first direction. Each set of spring groups includes at least one of the stay cables.
[0019] The horizontal direction, the first direction, and the vertical direction are perpendicular to each other pairwise. The extending direction of the stay cable intersects with the first direction.
[0020] In one embodiment, the detection device further includes a leveling mechanism. The leveling mechanism adjusts the compression amount of the spring included in the horizontal negative stiffness mechanism to adjust the levelness of the detection table mounted on the mounting seat.
[0021] In one embodiment, the leveling mechanism includes a plurality of adjusting screws. The adjusting screws are disposed through the connecting mechanism. Each adjusting screw is connected to the corresponding first vertical spring or the second vertical spring to adjust the compression amount of the first vertical spring or the second vertical spring; and / or
[0022] The leveling mechanism includes a plurality of adjusting groups. The number of the adjusting groups is equal to and corresponds to the number of the stay cables one by one. Each adjusting group includes a guide rail and an adjusting block. One of the guide rail and the adjusting block is disposed on the support seat, and the other is connected to the corresponding stay cable. The position of the adjusting block on the guide rail is adjustable to adjust the compression amount of the stay cable.
[0023] In one embodiment, a level sensor is disposed on the frame and / or the mounting seat. The level sensor is configured to detect the distance between at least two positions of the frame and the mounting seat in the horizontal direction in the vertical direction.
[0024] In one embodiment, the detection device further includes a damper. The damper is disposed between the frame and the mounting seat in the horizontal direction;
[0025] A displacement sensor is disposed on the frame and / or the mounting seat. The displacement sensor is configured to obtain a vibration signal on the mounting seat or the frame;
[0026] Wherein, the damping value of the damper can change with the change of the vibration signal.
[0027] In one embodiment, the frame and the mounting seat are both disposed on the mounting surface;
[0028] The detection device further includes a vibration isolation spring, and the vibration isolation spring is disposed between the mounting seat and the mounting surface in a vertically compressed manner. Description of the Drawings
[0029] Figure 1 The front view of the detection device provided by an embodiment of the present application;
[0030] Figure 2 is Figure 1 The axonometric view of the loading device of the detection device shown in
[0031] Figure 3 is Figure 1 The axonometric view of the detection device of the detection device shown in Figure 3 (the stay cable spring is not shown in
[0032] Figure 4 is Figure 1 The side view of the partial structure of the detection device shown in
[0033] Figure 5 is Figure 1 The axonometric view of the partial structure of the detection device shown in
[0034] Figure 6 is Figure 1 The plan view of the detection device of the detection device shown in
[0035] Figure 7 is Figure 3 The axonometric view of another perspective of the detection device shown in
[0036] Figure 8 The frequency and power curve graph of the solution of the present application and the prior art solution.
[0037] Description of the reference numerals:
[0038] 100, detection device; 10, loading device; 11, frame; 12, handling module; 13, cartridge; 20, detection device; 21, mounting seat; 211, base; 212, support seat; 22, detection table; 221, moving platform; 222, wafer stage; 31, positive stiffness mechanism; 311, horizontal spring; 32, negative stiffness mechanism; 321, first vertical spring; 322, stay cable spring; 40, connection mechanism; 51, adjusting screw; 52, adjusting group; 521, guide rail; 522, adjusting block; 60, level sensor; 70, vibration isolation spring; 80, damper; 90, displacement sensor; 110, controller; 200, mounting surface. Detailed Embodiments
[0039] To make the above objects, features, and advantages of the present utility model more apparent and understandable, the following provides a detailed description of the specific embodiments of the present utility model in conjunction with the accompanying drawings. A lot of specific details are set forth in the following description to facilitate a full understanding of the present utility model. However, the present utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the connotation of the present utility model. Therefore, the present utility model is not limited by the specific embodiments disclosed below.
[0040] In the description of the present utility model, it should be understood that the orientation or positional relationships indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. are based on the orientation or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation of the present utility model.
[0041] In addition, the terms "first" and "second" are only used for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of such features. In the description of the present utility model, the meaning of "a plurality" is at least two, such as two, three, etc., unless otherwise specifically defined.
[0042] In the present utility model, unless otherwise clearly defined and limited, the terms "installed", "connected", "connected to", "fixed", etc. should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements or the interaction relationship between two elements, unless otherwise clearly limited. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.
[0043] In the present utility model, unless otherwise clearly specified and defined, the first feature being "on" or "under" the second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature may mean that the first feature is directly above or obliquely above the second feature, or merely indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature being "under", "beneath" and "underneath" the second feature may mean that the first feature is directly below or obliquely below the second feature, or merely indicates that the horizontal height of the first feature is less than that of the second feature.
[0044] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or there may also be an intermediate element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are only for the purpose of illustration and do not represent the only implementation.
[0045] As described in the background art: In order to ensure the positioning accuracy between the mounting base and the frame, so as to avoid the displacement of the mounting base and the frame, the frame and the mounting base are connected by a connecting plate. Since the connecting plate is relatively hard, the connection stiffness between the frame and the mounting base is extremely high, and the vibration of the test bench is transmitted to the frame through the connecting plate. Since the vibration of the test bench is continuous impact vibration, the frame will also continuously generate responses, and the vibrations of the two are coupled and affect each other, resulting in further intensified vibration. In this way, the handling module on the frame vibrates greatly, resulting in scratches on the product when the handling module picks and places the material, causing a vicious cycle of equipment damaging the product.
[0046] To solve the above problems, refer to Figure 1 , an embodiment of the present application provides a detection device 100 for detecting a product. Specifically, the detection device 100 is a wafer detection device 100 for detecting wafers. Of course, in some other embodiments, the detection device 100 can also be used to detect other products, which is not limited herein.
[0047] Continue to refer to Figure 1 , the detection device 100 includes a loading device 10 and a detection device 20. Refer to Figure 2 , the loading device 10 includes a frame 11, a cassette 13 and a handling module 12, and the cassette 13 and the handling module 12 are installed on the frame 11. Optionally, the handling module 12 is a manipulator disposed on the frame 11. Continue to refer to Figure 1, the detection device 20 includes a mounting base 21 and a detection table 22. The mounting base 21 is arranged at an interval from the frame 11 in the horizontal direction, and the detection table 22 is movably mounted on the mounting base 21. The handling module 12 is used to handle products and transfer them between the detection table 22 and the magazine 13. In this way, when detecting a product, the handling module 12 takes out the product from the magazine 13 and places it on the detection table 22 for detection. When the detection of the product on the detection table 22 is completed, the product on the detection table 22 is taken away, and the handling module 12 takes out the product from the magazine 13 again and places it on the detection table 22, and so on in a cycle, so as to achieve the purpose of detecting multiple products.
[0048] It should be noted here that when the detection device 100 is used to detect wafers, probes are provided on the detection table 22, and the wafers are detected through the probes. In some other embodiments, depending on the type of the product to be detected, the probes on the detection table 22 can also be omitted.
[0049] In some embodiments, the detection table 22 is slidably mounted on the mounting base 21 in the first direction. The first direction, the horizontal direction and the vertical direction are perpendicular to each other pairwise. That is, the first direction is the direction perpendicular to the interval direction between the mounting base 21 and the frame 11. Figure 1 In the X direction is the horizontal direction, and the Z direction is the vertical direction. Figure 4 In the Y direction is the first direction.
[0050] Optionally, referring to Figure 3 , the detection table 22 includes a moving platform 221 and a wafer stage 222. The moving platform 221 is movably arranged on the mounting base 21 in the first direction, and the wafer stage 222 is movably arranged on the moving platform 221 in the horizontal direction. The handling module 12 can transfer the product to the wafer stage 222 for detection.
[0051] It should be understood that in some other embodiments, the detection table 22 can also be movably arranged on the mounting base 21 in other directions, which is not limited here. And the detection table 22 can also omit the moving platform 221 and only include the wafer stage 222, which is not limited here either.
[0052] Continuing to refer to Figure 1 , the detection device 100 further includes a quasi-zero stiffness device, and the quasi-zero stiffness device includes a horizontal positive stiffness mechanism 31 and a horizontal negative stiffness mechanism 32. The horizontal positive stiffness mechanism 31 connects the frame 11 and the mounting base 21. Specifically, the two ends of the horizontal positive stiffness mechanism 31 are respectively connected to the frame 11 and the mounting base 21. The horizontal negative stiffness mechanism 32 is connected to the mounting base 21, and the horizontal positive stiffness mechanism 31 and the horizontal negative stiffness mechanism 32 make the mounting base 21 tend to the equilibrium position.
[0053] It should be noted here that the horizontal positive stiffness mechanism 31 is a mechanism capable of generating positive stiffness in the horizontal direction, and the horizontal negative stiffness mechanism 32 is a mechanism capable of generating negative stiffness in the horizontal direction. The equilibrium position is the position where the mounting base 21 remains relatively stationary with respect to other components after the components of the detection device 100 are adjusted and the detection table 22 is not working.
[0054] For the detection device 100 provided by the embodiment of the present application, when the detection table 22 starts to work and detects different parts of the product, the mounting base 21 will vibrate near the equilibrium position under the action of inertia force. When the mounting base 21 vibrates near the equilibrium position, the horizontal positive stiffness mechanism 31 has positive stiffness in the horizontal direction, and the horizontal negative stiffness mechanism 32 has negative stiffness in the horizontal direction. The positive stiffness and the negative stiffness are connected in parallel, so that the dynamic stiffness of the connection between the mounting base 21 and the frame 11 is extremely low, and the isolation of medium and high-frequency vibrations can be achieved, reducing the transmission of vibrations between the mounting base 21 and the frame 11. Compared with the prior art method of connecting the frame 11 and the mounting base 21 through a connecting plate, it is not easy to cause the handling module 12 to vibrate, and the handling module 12 will not scratch the product during picking and placing, and will not cause a vicious cycle of equipment damaging the product. Moreover, the positive stiffness of the horizontal positive stiffness mechanism 31 is very large, and the horizontal negative stiffness mechanism 32 only generates negative stiffness when deviating from the equilibrium position. Therefore, the static connection stiffness between the frame 11 and the mounting base 21 is very large, ensuring the positioning accuracy between the mounting base 21 and the frame 11.
[0055] In some embodiments, continue to refer to Figure 1 , the horizontal positive stiffness mechanism 31 includes a horizontal spring 311. The two ends of the horizontal spring 311 are respectively connected to the frame 11 and the mounting base 21, and are compressed in the horizontal direction and arranged between the frame 11 and the mounting base 21. The horizontal spring 311 has positive stiffness in the horizontal direction. With such a setting, the structure of the horizontal positive stiffness mechanism 31 is relatively simple.
[0056] It can be understood that in some other embodiments, the horizontal positive stiffness mechanism 31 can also adopt other setting methods, as long as it has positive stiffness in the horizontal direction and ensures sufficient static connection stiffness, which is not limited herein.
[0057] Specifically, the horizontal positive stiffness mechanism 31 includes a plurality of horizontal springs 311. The plurality of horizontal springs 311 are arranged at intervals between the frame 11 and the mounting base 21, and the specific number of the horizontal springs 311 is not limited herein.
[0058] In some embodiments, the horizontal negative stiffness mechanism 32 includes a first negative stiffness element and a second negative stiffness element respectively connected to the top and bottom of the mounting base 21, and at least one of the first negative stiffness element and the second negative stiffness element is connected to the frame 11 through a connecting mechanism 40. In this way, the first negative stiffness element and the second negative stiffness element jointly form a negative stiffness in the horizontal direction to ensure the vibration isolation effect.
[0059] In some specific embodiments, continue to refer to Figure 1 , and refer to Figure 4 , the first negative stiffness element includes a first vertical spring 321. A connecting mechanism 40 is connected to the frame 11 and extends horizontally above the mounting base 21. The two ends of the first vertical spring 321 are respectively connected to the connecting mechanism 40 and the top of the mounting base 21, and it is compressively arranged between the connecting mechanism 40 and the mounting base 21 in the vertical direction. The second negative stiffness element includes a second vertical spring (not shown in the figure). A connecting mechanism 40 is connected to the frame 11 and extends horizontally below the mounting base 21. The two ends of the second vertical spring are respectively connected to the connecting mechanism 40 and the bottom of the mounting base 21, and it is compressively arranged between the connecting mechanism 40 and the mounting base 21 in the vertical direction. Optionally, the connecting mechanism 40 includes a connecting plate, the connecting plate is connected to the frame 11, and the vertical spring is arranged between the frame 11 and the mounting base 21 in the vertical direction.
[0060] With the above arrangement, the horizontal negative stiffness mechanism 32 includes the first vertical spring 321 and the second vertical spring. In this way, when the inspection table 22 starts to work and inspects different parts of the product, the mounting base 21 will vibrate near the equilibrium position under the action of inertia force. The first vertical spring 321 and the second vertical spring jointly generate a negative stiffness in the horizontal direction and are connected in parallel with the positive stiffness, reducing the dynamic stiffness of the connection between the mounting base 21 and the frame 11.
[0061] Optionally, the number of both the first vertical spring 321 and the second vertical spring is multiple. The multiple first vertical springs 321 are arranged at intervals between the connecting mechanism 40 and the top of the mounting base 21, and the multiple second vertical springs are arranged at intervals between the connecting mechanism 40 and the bottom of the mounting base 21.
[0062] In some other embodiments, refer to Figures 5 - 7 , the mounting base 21 includes a base 211 and a support base 212. The base 211 is an integral structure. The support base 212 is installed on the base 211. The inspection table 22 is movably installed on the support base 212. The horizontal positive stiffness mechanism 31 connects the frame 11 and the support base 212. Continue to refer to Figure 5, the second negative stiffness mechanism 32 includes a diagonal tension spring 322. The diagonal tension spring 322 is inclined with respect to both the vertical direction and the horizontal direction, and is compressively arranged between the support seat 212 and the base 211. Among them, the support seat 212 floats on the base 211 under the action of the diagonal tension spring 322, and the diagonal tension spring 322 is compressed by a certain length under the action of the gravity of the support seat 212 and the testing table 22. The first negative stiffness element includes a first vertical spring 321. A connecting mechanism 40 is connected to the frame 11 and extends horizontally above the support seat 212. The two ends of the first vertical spring 321 are respectively connected to the connecting mechanism 40 and the top of the support seat 212, and are compressively arranged between the connecting mechanism 40 and the support seat 212 in the vertical direction.
[0063] With the above settings, the horizontal negative stiffness mechanism 32 includes the first vertical spring 321 and the diagonal tension spring 322. When the testing table 22 starts to work and detects different parts of the product, the support seat 212 will vibrate near the equilibrium position under the action of inertia. The first vertical spring 321 and the diagonal tension spring 322 jointly generate negative stiffness in the horizontal direction and are connected in parallel with the positive stiffness to reduce the dynamic stiffness of the connection between the mounting seat 21 and the frame 11.
[0064] It can be understood that in some other embodiments, the first negative stiffness element and the second negative stiffness element can also be arranged in other ways. For example, the first negative stiffness element and the second negative stiffness element can also generate negative stiffness through magnetic force, as long as it can generate negative stiffness.
[0065] Optionally, the number of the diagonal tension springs 322 is also multiple, and the multiple diagonal tension springs 322 are arranged at intervals. Further, the second negative stiffness element includes two spring groups. The two spring groups are arranged at both ends of the support seat 212 in the first direction, and each spring group includes at least one diagonal tension spring 322. Among them, the horizontal direction, the first direction and the vertical direction are perpendicular to each other in pairs, and the extending direction of the diagonal tension spring 322 intersects with the first direction. At this time, the diagonal tension spring 322 is located in the plane formed by the first direction and the vertical direction, and the extending direction of the diagonal tension spring 322 intersects with the horizontal direction in space. With such a setting, the component force directions generated by the diagonal tension spring 322 are the first direction and the vertical direction, and no component force in the horizontal direction is generated, ensuring the effect of generating negative stiffness.
[0066] Generally, the detection device 100 has strict requirements for the levelness of the detection table 22. In the traditional technology, the connection plate between the frame 11 and the mounting seat 21 is used for adjustment. Both ends of the connection plate are connected to the frame 11 and the mounting seat 21 through bolts. When adjusting the levelness of the detection table 22, the loading device 10 remains stationary. The adjusting bolts are screwed to make the mounting seat 21 and the frame 11 have a certain inclination angle, and then the two ends of the connection plate are fixed to the frame 11 and the mounting seat 21 through bolts respectively, so as to complete the adjustment of the levelness. This way of adjusting the levelness has low accuracy and cannot intuitively feedback the inclination angle between the mounting seat 21 and the frame 11. At the same time, since the contact state of the connection plate is changed, the contact area between the connection plate and the mounting seat 21 is reduced, which will further exacerbate the vibration of the device.
[0067] In some embodiments, the detection device 100 further includes a leveling mechanism. The leveling mechanism adjusts the compression amount of the spring included in the horizontal negative stiffness mechanism 32 to adjust the levelness of the detection table 22 mounted on the mounting seat 21. Specifically, the leveling mechanism adjusts the compression amount of the spring included in the horizontal negative stiffness mechanism 32 to adjust the levelness of the wafer stage 222 mounted on the mounting seat 21.
[0068] With the above settings, compared with the way of adjusting the inclination angle between the mounting seat 21 and the frame 11 by adjusting the connection plate in the prior art to adjust the levelness of the detection table 22, the leveling mechanism can directly adjust the compression amount of the spring, will not change the connection state between the frame 11 and the mounting seat 21, and will not cause the vibration to intensify.
[0069] In some specific embodiments, continue to refer to Figure 1 , the leveling mechanism includes a plurality of adjusting screws 51, and the adjusting screws 51 are arranged on the connecting mechanism 40. Specifically, each first vertical spring 321 and each second vertical spring correspond to an adjusting screw 51, and the adjusting screw 51 is connected to the corresponding vertical spring to adjust the compression amount of the vertical spring, so as to adjust the levelness of the detection table 22.
[0070] In some other specific embodiments, continue to refer to Figure 4 , the leveling mechanism includes a plurality of adjusting groups 52, and the number of the adjusting groups 52 is equal to and corresponds to the number of the diagonal tension springs 322 one by one. Each adjusting group 52 includes a guide rail 521 and an adjusting block 522. One of the guide rail 521 and the adjusting block 522 is arranged on the support seat 212, and the other is connected to the corresponding diagonal tension spring 322. The position of the adjusting block 522 on the guide rail 521 is adjustable to adjust the compression amount of the diagonal tension spring 322. It should be noted here that when the adjusting block 522 is adjusted to a preset position on the guide rail 521, the adjusting block 522 and the guide rail 521 can be locked through a locking mechanism.
[0071] Of course, in some other specific embodiments, the setting manner of the leveling mechanism is not limited, as long as it can adjust the compression amount of the spring included in the horizontal negative stiffness mechanism 32.
[0072] In some embodiments, referring further to Figure 1 , a level sensor 60 is provided on the frame 11 and / or the support base 212. The level sensor 60 is used to detect the distance in the horizontal direction between at least two positions of the frame 11 and the support base 212 in the vertical direction. In this way, by observing the reading of the level sensor 60, the inclination degree between the support base 212 and the frame 11 can be understood. By comparing the distances measured at different positions, after exceeding the range, the compression amount of the spring is adjusted through the leveling mechanism, so as to realize the adjustment of the levelness of the inspection table 22.
[0073] Preferably, the number of the level sensors 60 is two. The two level sensors 60 are arranged at intervals in the vertical direction on one of the frame 11 and the support base 212 and are used to detect the distance in the horizontal direction between two positions in the vertical direction. When the distance in the horizontal direction between the two positions has a large difference, it proves that the inclination degree between the support base 212 and the frame 11 is large, and it is necessary to adjust the compression amount of the spring included in the horizontal negative stiffness mechanism 32 so that the inspection table 22 tends to be level.
[0074] Of course, in some other embodiments, the number of the level sensors 60 is not limited. For example, it can also be set that the detection device 100 only includes one or more than two level sensors 60.
[0075] The applicant's research finds that when the detection device 100 works normally, the frequency of the excitation generated on the inspection table 22 is relatively low. According to the linear vibration isolation theory, if a vibration isolator is added between the frame 11 and the mounting base 21, only a vibration isolator with a natural frequency lower than times the excitation frequency can play a role in vibration isolation. Such a low natural frequency means that the stiffness of the vibration isolator is also extremely low, resulting in a relatively soft connection between the frame 11 and the support base 212, which does not meet the reliability requirements of the positioning accuracy. Therefore, in the traditional technology, there is a lack of a solution to low-frequency resonance, and only by reducing the speed can the resonance frequency band be avoided as much as possible, which will reduce the working efficiency of the inspection table 22.
[0076] In some embodiments, referring further to Figure 1, the detection device 100 further includes a damper 80, which is horizontally arranged between the frame 11 and the support base 212. A displacement sensor 90 is provided on the frame 11 or the support base 212. The displacement sensor 90 is used to obtain the vibration signal on the support base 212 or the frame 11, and the damping value of the damper 80 can change in real time with the change of the vibration signal. Specifically, the detection device 100 further includes a controller 110. Both the damper 80 and the displacement sensor 90 are electrically connected to the controller 110. The vibration signal detected by the displacement sensor 90 is transmitted to the controller 110. The controller 110 performs simple filtering and calculation on the vibration signal of the displacement sensor 90, and adjusts the damping value of the damper 80 in real time to achieve rapid attenuation of the vibration between the frame 11 and the support base 212.
[0077] Optionally, the level sensor 60 and the displacement sensor 90 are integrated into one body. The integrated sensor has both the level detection function and the displacement detection function. In this way, the structural setting of the detection device 100 can be simplified.
[0078] In some specific embodiments, the adjustment method (time-domain control strategy) of the damping value of the damper 80 is as follows:
[0079]
[0080]
[0081]
[0082] Among them, c max is the maximum damping value of the damper 80, and c min is the minimum damping value of the damper 80. c is the damping value of the damper 80 at time t, and c out is the damping value of the damper 80 at time t + 1. k is the change rate of the damping value of the damper 80 with time, which is a constant and varies according to the type of the damper 80. F(t) is the exciting force on the support base 212 of the detection device 20 at time t. x1(t) and x2(t) are the vibration signals on the mounting base 21 or the frame 11 obtained by the displacement sensor 90 at time t. is the derivative of x(t).
[0083] When the vibration signals x1(t) and x2(t) on the mounting base 21 or the frame 11 are detected, the relative vibration between the frame 11 and the support base 212 can be converted to: The controller 110 can differentiate the monitored vibration signal into a velocity signal and an acceleration signal through a built-in control algorithm, or perform Fourier transform on the vibration signal in the time domain to a signal in the frequency domain. The damping value of the damper 80 is between the maximum value c max and the minimum value c minvarying therebetween, the controller 110 adjusts the damping value of the damper 80 according to the signal monitored by the displacement sensor 90.
[0084] At time t when and c ≥ c max then the damping value c at time t + 1 out is c max ; At time t when and c < c max then the damping value c at time t + 1 out is c + k * t; At time t when and c ≥ c min then the damping value c at time t + 1 out is c - k * t; At time t when and c ≤ c min then the damping value c at time t + 1 out is c min . Thus, the damping value of the damper 80 is in an adjustment state in real time, achieving the purpose of isolating the vibration between the frame 11 and the support base 212 to the greatest extent.
[0085] The applicant's research also found that when the weight distribution of the detection device 100 is uneven, it is likely to affect the levelness of the detection table 22. In particular, when the base 211 is an integral structure, that is, when the detection device 20 uses an integral anchor bolt support, the uneven weight distribution of the detection device 100 is likely to cause warping of the integral base 211, affecting the levelness of the detection table 22.
[0086] In some embodiments, both the frame 11 and the base 211 are installed on the installation surface 200. Specifically, the installation surface 200 is the ground. Continuing to refer to Figure 1 , the detection device 100 further includes vibration isolation springs 70, and the vibration isolation springs 70 are arranged vertically between the detection device 100 and the installation surface 200. In some specific embodiments, the vibration isolation springs 70 are arranged between the base 211 of the detection device 100 and the installation surface 200.
[0087] By providing the vibration isolation springs 70, not only can the excitation of the installation surface 200 be isolated to a certain extent, but also the levelness of the detection table 22 can be adjusted by adjusting the compression amount of the vibration isolation springs 70. Specifically, the vibration isolation springs 70 are air springs for easy adjustment.
[0088] The detection device 100 provided by the embodiments of the present application has the following beneficial effects:
[0089] 1. When the mounting base 21 vibrates near the equilibrium position, the horizontal positive stiffness mechanism 31 has positive stiffness in the horizontal direction, and the horizontal negative stiffness mechanism 32 has negative stiffness in the horizontal direction. The positive stiffness and the negative stiffness are in parallel, making the dynamic connection stiffness between the mounting base 21 and the frame 11 close to zero, enabling the isolation of medium and high-frequency vibrations and reducing the transmission of vibrations between the mounting base 21 and the frame 11. At the same time, the positive stiffness of the horizontal positive stiffness mechanism 31 is very large, and the static connection stiffness between the frame 11 and the mounting base 21 is very large, ensuring the positioning accuracy between the mounting base 21 and the frame 11. As can be seen from Figure 8 that the vibration isolation scheme of the present application ( Figure 8 the sepia dotted line therein) can isolate vibrations above 4 Hz, and the connecting plate scheme of the prior art ( Figure 8 the orange line therein) can only isolate vibrations above 20 Hz. The vibration isolation effect of the detection device 100 of the present application is strong.
[0090] 2. The inclination degree between the frame 11 and the support base 212 can be obtained through the level sensor 60, and by adjusting the compression amounts of the vertical spring, the diagonal tension spring 322, and the vibration isolation spring 70, it is convenient to adjust the levelness of the detection table 22.
[0091] 3. A damper 80 with a variable damping value is introduced to achieve controllable adjustment of the vibration parameters of the detection device 100, and the resonance risk brought by low vibration frequencies can be avoided. As can be seen from Figure 8 that when the control strategy of the damping value of the damper 80 of the present application is further adopted on the hardware basis of the vibration isolation scheme of the present application, the low-frequency resonance peak of the vibration curve ( Figure 8 the blue dotted line therein) under the control strategy of the present application is eliminated, the response is further improved, the vibration isolation effect is strong, and the vibration can be quickly attenuated when the impact is too large.
[0092] 4. The horizontal spring 311, the longitudinal spring, the diagonal tension spring 322, and the vibration isolation spring 70 all have a certain vibration isolation effect, enabling the detection device 100 to isolate vibrations in multiple directions.
[0093] The technical features of the above-described embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered to be within the scope described in this specification.
[0094] The above-described embodiments merely represent several implementation manners of the present utility model. The description thereof is relatively specific and detailed, but it should not be construed as a limitation on the scope of the utility model patent. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present utility model, several variations and improvements can still be made, and these all fall within the protection scope of the present utility model. Therefore, the protection scope of the present utility model patent shall be subject to the appended claims.
Claims
1. A detection device, characterized in that, Comprising: A loading device (10), including a magazine (13), a frame (11) and a handling module (12), the magazine (13) and the handling module (12) being installed on the frame (11); A detection device (20), including a mounting base (21) and a detection table (22), the mounting base (21) being arranged at a horizontal interval from the frame (11), the detection table (22) being movably installed on the mounting base (21); the handling module (12) is used for handling products and circulating between the detection table (22) and the magazine (13); A quasi-zero stiffness device, including: A horizontally positive stiffness mechanism (31) and a horizontally negative stiffness mechanism (32) connected in parallel, the horizontally positive stiffness mechanism (31) connecting the frame (11) and the mounting base (21), the horizontally negative stiffness mechanism (32) being connected to the mounting base (21), the horizontally positive stiffness mechanism (31) and the horizontally negative stiffness mechanism (32) causing the mounting base (21) to tend to a balanced position.
2. The detection device according to claim 1, characterized in that The horizontally positive stiffness mechanism (31) includes a horizontal spring (311), the horizontal spring (311) connecting the frame (11) and the mounting base (21) and being compressed in the horizontal direction between the frame (11) and the mounting base (21).
3. The detection device according to claim 1, characterized in that, The horizontally negative stiffness mechanism (32) includes a first negative stiffness element and a second negative stiffness element respectively connected to the top and bottom of the mounting base (21), at least one of the first negative stiffness element and the second negative stiffness element being connected to the frame (11) through a connecting mechanism (40).
4. The detection device according to claim 3, characterized in that, The first negative stiffness element includes a first vertical spring (321), a connecting mechanism (40) being connected to the frame (11) and extending horizontally above the mounting base (21), the first vertical spring (321) being connected to the connecting mechanism (40) and the top of the mounting base (21) and being compressed in the vertical direction between the connecting mechanism (40) and the mounting base (21).
5. The detection device according to claim 3, characterized in that The mounting base (21) includes a base (211) and a support base (212), the support base (212) being installed on the base (211), the detection table (22) being movably installed on the support base (212), the horizontally positive stiffness mechanism (31) connecting the frame (11) and the support base (212); The second negative stiffness element includes a diagonal tension spring (322), the diagonal tension spring (322) extending obliquely with respect to both the vertical direction and the horizontal direction and being compressed between the support base (212) and the base (211); the support base (212) is suspended on the base (211) under the action of the diagonal tension spring (322); or The second negative stiffness element includes a second vertical spring. One of the connecting mechanisms (40) is connected to the frame (11) and extends horizontally to the lower side of the mounting base (21). The second vertical spring is connected to the connecting mechanism (40) and the bottom of the mounting base (21) and is compressively arranged between the connecting mechanism (40) and the mounting base (21) in the vertical direction.
6. The detection device according to claim 5, wherein, The second negative stiffness element includes two sets of spring groups. The two sets of spring groups are arranged at both ends of the support base (212) in a first direction. Each set of spring groups includes at least one of the diagonal tension springs (322). The horizontal direction, the first direction, and the vertical direction are perpendicular to each other pairwise. The extending direction of the diagonal tension spring (322) intersects with the first direction.
7. The detection device according to claim 4, wherein The detection device further includes a leveling mechanism. The leveling mechanism adjusts the compression amount of the springs included in the horizontal negative stiffness mechanism (32) to adjust the levelness of the detection table (22) mounted on the mounting base (21).
8. The detection device according to claim 7, wherein The leveling mechanism includes a plurality of adjusting screws (51). The adjusting screws (51) are penetrated through the connecting mechanism (40). Each adjusting screw (51) is connected to the corresponding first vertical spring (321) to adjust the compression amount of the first vertical spring (321).
9. The detection device according to claim 5, characterized in that, The detection device further includes a leveling mechanism. The leveling mechanism adjusts the compression amount of the springs included in the horizontal negative stiffness mechanism (32) to adjust the levelness of the detection table (22) mounted on the mounting base (21).
10. The detection device according to claim 9, wherein when the second negative stiffness element includes the second vertical spring, the leveling mechanism includes a plurality of adjusting screws (51). The adjusting screws (51) are penetrated through the connecting mechanism (40). Each adjusting screw (51) is connected to the corresponding second vertical spring to adjust the compression amount of the second vertical spring. or when the second negative stiffness element includes the diagonal tension spring (322), the leveling mechanism includes a plurality of adjusting groups (52). The number of the adjusting groups (52) is equal to and corresponds to the number of the diagonal tension springs (322). Each adjusting group (52) includes a guide rail (521) and an adjusting block (522). One of the guide rail (521) and the adjusting block (522) is arranged on the support base (212), and the other is connected to the corresponding diagonal tension spring (322). The position of the adjusting block (522) on the guide rail (521) is adjustable to adjust the compression amount of the diagonal tension spring (322).
11. The detection device according to claim 1, characterized in that A levelness sensor (60) is provided on the frame (11) and / or the mounting base (21). The levelness sensor (60) is used to detect the distance between at least two positions of the frame (11) and the mounting base (21) in the horizontal direction in the vertical direction.
12. The detection device according to claim 1, wherein, The detection device further includes a damper (80). The damper (80) is arranged between the frame (11) and the mounting base (21) in the horizontal direction. A displacement sensor (90) is provided on the frame (11) and / or the mounting base (21), and the displacement sensor (90) is used to obtain vibration signals on the mounting base (21) or the frame (11); Among them, the damping value of the damper (80) can change with the change of the vibration signal.
13. The detection device according to claim 1, characterized in that, Both the frame (11) and the mounting base (21) are provided on the mounting surface (200); The detection device further includes a vibration isolation spring (70), and the vibration isolation spring (70) is compressively arranged in the vertical direction between the mounting base (21) and the mounting surface (200).