MEMS sensor resistant to corrosion of battery electrolyte

Abstract

The utility model relates to the field of MEMS (Micro Electro Mechanical System) sensors, and discloses a battery electrolyte corrosion resistant MEMS sensor, which comprises a packaging bottom plate; the mounting ring is mounted on the packaging bottom plate; the packaging cover is mounted on the mounting ring and forms a sealed space; the MEMS sensor body is arranged in the packaging cover and is connected to the mounting ring; the mounting ring comprises a connecting groove formed in the top of the mounting ring. According to the utility model, by adopting a multi-sealing mechanism comprising the air bag, the first sealing ring, the second sealing ring and the third sealing ring and applying the sealant, the protection capability of the sensor in a battery electrolyte environment is obviously enhanced, the permeation of corrosive substances such as the battery electrolyte is effectively prevented, the sensor body is protected from being damaged, and the service life of the sensor is prolonged. The MEMS sensor can keep longer service life in a battery electrolyte environment, and the sensor replacement and maintenance cost caused by packaging failure is reduced.

Description

Technical Field

[0001] The utility model relates to the field of MEMS sensors, in particular to a MEMS sensor resistant to battery electrolyte corrosion. Background Art

[0002] In the automotive field, especially in new energy vehicles, MEMS pressure sensors are widely used in battery pack pressure detection for thermal runaway alarms. Such sensors need to have the ability to withstand corrosive media such as battery vapor, and even need to be fully immersed in battery electrolyte for use, and ensure good accuracy performance and long-term reliability within the full temperature range and full pressure range.

[0003] Although the existing MEMS sensor packaging means can provide a certain degree of protection in a conventional environment, in a battery electrolyte environment, its protection ability is insufficient. Battery electrolyte usually contains various electrolytes and additives, and has strong corrosiveness and conductivity. Once the sensor packaging material leaks, it will not only damage the sensor itself, but also may have a serious impact on the safe operation of the battery pack. The high-voltage environment inside the battery pack also poses higher requirements on the packaging structure of the sensor, and it must be able to withstand a certain pressure without deformation or rupture. Summary of the Utility Model

[0004] To solve the above-mentioned problems, the utility model is realized through the following technical solutions:

[0005] The utility model provides a MEMS sensor resistant to battery electrolyte corrosion, including: a packaging bottom plate; a mounting ring mounted on the packaging bottom plate; a packaging cover mounted on the mounting ring and forming a sealed space; a MEMS sensor body disposed in the packaging cover and connected to the mounting ring; the mounting ring includes: a connection groove opened at the top of the mounting ring, and the packaging cover is connected in the connection groove; an airbag mounted in the connection groove and connected to the packaging cover, and the airbag is configured to expand towards both sides of the packaging cover when being squeezed by the packaging cover, for sealing the connection between the connection groove and the packaging cover.

[0006] According to an embodiment of the utility model, it further includes: two first sealing rings mounted in the connection groove, and the two first sealing rings are respectively in contact with the inner wall and the outer wall of the packaging cover, and the first sealing rings are used for sealing the connection between the connection groove and the packaging cover.

[0007] According to an embodiment of the present utility model, it further includes: a second sealing ring installed on one inner wall of the connection groove, the outer wall of the encapsulation cover contacts the second sealing ring, and the second sealing ring is used to seal the connection between the connection groove and the encapsulation cover; a third sealing ring installed on the other inner wall of the connection groove, the inner wall of the encapsulation cover contacts the third sealing ring, and the third sealing ring is used to seal the connection between the connection groove and the encapsulation cover.

[0008] According to an embodiment of the present utility model, an inclined surface is formed on the second sealing ring for guiding the encapsulation cover to be inserted into the connection groove.

[0009] According to an embodiment of the present utility model, a groove is formed on the third sealing ring for placing glue.

[0010] According to an embodiment of the present utility model, the encapsulation cover includes: a connection strip installed on the inner ring of the encapsulation cover; an extrusion strip installed on the connection strip, and is configured such that when the encapsulation cover is installed into the connection groove, the extrusion strip enters the groove and extrudes the glue to fill the glue between the groove and the inner wall of the encapsulation cover.

[0011] According to an embodiment of the present utility model, it further includes: a sealant installed between the mounting ring and the outer wall of the encapsulation cover and disposed on the second sealing ring.

[0012] According to an embodiment of the present utility model, the projected shapes of the first sealing ring, the second sealing ring, and the third sealing ring are all annular.

[0013] According to an embodiment of the present utility model, a protective film is coated on the MEMS sensor body for providing protection to the MEMS sensor body.

[0014] The present utility model provides a MEMS sensor resistant to corrosion by battery electrolyte. Compared with the prior art, it has the following beneficial effects:

[0015] 1. By adopting a multiple sealing mechanism, including an airbag, the first sealing ring, the second sealing ring, the third sealing ring, and the application of sealant, the protection ability of the sensor in the battery electrolyte environment is significantly enhanced, effectively preventing the infiltration of corrosive substances such as battery electrolyte and protecting the MEMS sensor body from damage.

[0016] 2. In view of the strong corrosiveness and conductivity of various electrolytes and additives contained in the battery electrolyte, the encapsulation structure of this solution ensures the stable operation of the sensor in a harsh environment, avoiding performance degradation or failure caused by corrosion. The MEMS sensor can maintain a longer service life in the battery electrolyte environment, reducing the cost of sensor replacement and repair due to encapsulation failure. Description of the Drawings

[0017] Figure 1 Schematic diagram of the three-dimensional structure proposed by the present utility model.

[0018] Figure 2 Schematic diagram of the cross-sectional structure proposed by the present utility model.

[0019] Figure 3 Schematic diagram of the cross-sectional structure of the airbag proposed by the present utility model.

[0020] Figure 4 Schematic diagram of the cross-sectional structure of the connecting strip and the extrusion strip proposed by the present utility model.

[0021] Figure 5 Schematic diagram of the cross-sectional structure of the second sealing ring and the third sealing ring proposed by the present utility model.

[0022] The reference signs in the figure are:

[0023] 1. Encapsulation bottom plate;

[0024] 2. Mounting ring; 201. Sealant;

[0025] 3. Encapsulation cover; 301. Connecting strip; 302. Extrusion strip;

[0026] 4. Airbag;

[0027] 5. First sealing ring;

[0028] 6. Second sealing ring; 601. Inclined surface;

[0029] 7. Third sealing ring; 701. Groove;

[0030] 8. MEMS sensor body; 801. Protective film. Specific embodiments

[0031] The present utility model will be further described below in conjunction with specific embodiments. It should be understood that these embodiments are only used to illustrate the present utility model and not to limit the protection scope of the present utility model.

[0032] The following illustrates the implementation manners of the present utility model through specific specific examples. Those skilled in the art can easily understand other advantages and effects of the present utility model from the content disclosed in this specification. The present utility model can also be implemented or applied through other different specific implementation manners. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present utility model.

[0033] Refer to Figures 1 - 5, a MEMS sensor resistant to battery electrolyte corrosion, comprising: a packaging bottom plate 1, serving as the basic support structure of the entire MEMS sensor. The packaging bottom plate 1 provides a stable installation platform, ensuring the stability and durability of the sensor assembly, and at the same time helping to protect the internal sensitive components from external physical impacts; a mounting ring 2, mounted on the packaging bottom plate 1. The mounting ring 2 not only serves as a bridge connecting the packaging bottom plate 1 and the packaging cover 3, but also realizes an efficient and reliable sealing function through its internal design, effectively preventing corrosive substances such as battery electrolyte from invading and protecting the safe operation of the MEMS sensor body 8; a packaging cover 3, mounted on the mounting ring 2 and forming a sealed space. The packaging cover 3 and the mounting ring 2 together constitute a sealed space. This design greatly improves the dust-proof, waterproof and corrosion-resistant capabilities of the sensor, ensures the stable operation of the sensor in harsh environments, and extends the service life; a MEMS sensor body 8, disposed within the packaging cover 3 and connected to the mounting ring 2. The MEMS sensor body 8 provides key data for the system by accurately measuring and converting physical signals, and its setting within the sealed space effectively protects it from external environmental interference and damage; a protective film 801 is coated on the MEMS sensor body 8. The protective film 801 is a parylene film, which can make the MEMS sensor body 8 waterproof, oil-proof and corrosion-proof; the mounting ring 2 includes: a connection groove, opened at the top of the mounting ring 2, and the packaging cover 3 is connected within the connection groove. The design of the connection groove facilitates the precise installation of the packaging cover 3 and cooperates with components such as the airbag 4 and the sealing ring to form a multiple sealing mechanism, enhancing the overall sealing performance; an airbag 4, mounted within the connection groove and connected to the packaging cover 3. The airbag 4 is configured such that when squeezed by the packaging cover 3, the airbag 4 expands towards both sides of the packaging cover 3 for sealing the connection between the connection groove and the packaging cover 3. The innovative design of the airbag 4 can expand towards both sides when squeezed, dynamically adapting to and sealing the tiny gaps between the connection groove and the packaging cover 3, improving the flexibility and reliability of the seal.

[0034] Two first sealing rings 5, mounted within the connection groove. The two first sealing rings 5 are respectively in contact with the inner wall and the outer wall of the packaging cover 3. The first sealing ring 5 is used for sealing the connection between the connection groove and the packaging cover 3. The two first sealing rings 5 are respectively in contact with the inner wall and the outer wall of the packaging cover 3, forming a double sealing barrier, effectively preventing the penetration of liquids and gases and enhancing the sealing effect.

[0035] The second sealing ring 6 is installed on one inner wall of the connection groove. The outer wall of the encapsulation cover 3 contacts the second sealing ring 6. The second sealing ring 6 is used to seal the connection between the connection groove and the encapsulation cover 3. A bevel 601 is formed on the second sealing ring 6 for guiding the encapsulation cover 3 to be inserted into the connection groove; The third sealing ring 7 is installed on the other inner wall of the connection groove. The inner wall of the encapsulation cover 3 contacts the third sealing ring 7. The third sealing ring 7 is used to seal the connection between the connection groove and the encapsulation cover 3. The second sealing ring 6 not only provides an additional sealing layer, but also the bevel 601 design on it facilitates the smooth insertion of the encapsulation cover 3, reducing friction and damage during installation. The third sealing ring 7 contacts the inner wall of the encapsulation cover 3, forming another layer of sealing defense line. Especially the groove 701 design on it, used in conjunction with the extrusion strip 302 and glue, further improves the tightness and stability of the seal.

[0036] A groove 701 is formed on the third sealing ring 7 for placing glue.

[0037] The encapsulation cover 3 includes: a connecting strip 301 installed on the inner ring of the encapsulation cover 3; an extrusion strip 302 installed on the connecting strip 301, which is arranged such that when the encapsulation cover 3 is installed into the connection groove, the extrusion strip 302 enters the groove 701 and extrudes the glue to fill the glue between the groove 701 and the inner wall of the encapsulation cover 3. The design of the connecting strip 301 and the extrusion strip 302 enables the encapsulation cover 3 to actively interact with the groove 701 of the third sealing ring 7 during installation, achieving a tighter fit by extruding the glue, enhancing the sealing effect and simplifying the installation process at the same time.

[0038] The sealant 201 is installed between the mounting ring 2 and the outer wall of the encapsulation cover 3 and is disposed on the second sealing ring 6. The application of the sealant 201 provides additional sealing protection for the connection between the mounting ring 2 and the encapsulation cover 3, filling in possible tiny gaps and improving the overall waterproof and corrosion-resistant performance.

[0039] The projected shapes of the first sealing ring 5, the second sealing ring 6, and the third sealing ring 7 are all annular.

[0040] During use, the first sealing ring 5, the second sealing ring 6, and the third sealing ring 7 are installed in the connection groove of the mounting ring 2. An appropriate amount of glue is pre-placed in the groove 701 of the third sealing ring 7. The airbag 4 is installed in the connection groove and ensured to be able to expand freely. The MEMS sensor body 8 is installed on the encapsulation base plate 1 and fixed by the mounting ring 2 to ensure a firm connection between the MEMS sensor body 8 and the mounting ring 2. The encapsulation cover 3 is aligned with the connection groove on the mounting ring 2. Guided by the inclined surface 601 on the second sealing ring 6, the encapsulation cover 3 is easily inserted into the connection groove. During the insertion process, the extrusion strip 302 on the encapsulation cover 3 will enter the groove 701 of the third sealing ring 7 and squeeze the glue, causing the glue to fill the space between the groove 701 and the inner wall of the encapsulation cover 3 to form a tight seal. At the same time, the airbag 4 is squeezed by the encapsulation cover 3 and will expand towards both sides of the encapsulation cover 3 to further seal the tiny gap between the connection groove and the encapsulation cover 3. Sealant 201 is applied between the outer walls of the mounting ring 2 and the encapsulation cover 3, especially at the position of the second sealing ring 6, to ensure there are no gaps at the connection and improve the overall waterproof and corrosion-resistant performance. Check the entire assembly process to ensure that all the sealing rings, the airbag 4, and the sealant 201 are correctly installed and play a sealing role. Deploy the tested MEMS sensor into the actual application environment, such as the electric vehicle battery management system, etc., and regularly monitor the operating status and data output of the sensor to ensure its continuous and stable operation.

[0041] In summary, compared with the prior art, the following beneficial effects are achieved:

[0042] By adopting a multi-sealing mechanism, including the airbag 4, the first sealing ring 5, the second sealing ring 6, and the third sealing ring 7, and the application of the sealant 201, the protection ability of the sensor in the battery electrolyte environment is significantly enhanced, effectively preventing the infiltration of corrosive substances such as battery electrolyte and protecting the MEMS sensor body 8 from damage.

[0043] Regarding the strong corrosiveness and conductivity of various electrolytes and additives contained in the battery electrolyte, the encapsulation structure of this solution ensures the stable operation of the sensor in a harsh environment, avoiding performance degradation or failure caused by corrosion. The MEMS sensor body 8 can maintain a longer service life in the battery electrolyte environment, reducing the sensor replacement and repair costs caused by encapsulation failure.

[0044] Accordingly, while the present utility model has been described herein with reference to its specific embodiments, modifications, various changes and substitutions are also within the above disclosure, and it should be understood that in some cases, some features of the present utility model will be employed without corresponding use of other features, without departing from the scope and spirit of the proposed utility model. Therefore, many modifications can be made to adapt a particular environment or material to the essential scope and spirit of the present utility model. The present utility model is not intended to be limited to the specific terms used in the following claims and / or the specific embodiments disclosed as the best mode contemplated for carrying out the present utility model, but the present utility model will include any and all embodiments and equivalents falling within the scope of the appended claims. Accordingly, the scope of the present utility model will be determined only by the appended claims.

Claims

1. A MEMS sensor resistant to battery electrolyte corrosion, characterized in that, Comprising: Encapsulation bottom plate (1); Installation ring (2), mounted on the encapsulation bottom plate (1); Encapsulation cover (3), mounted on the installation ring (2) and forming a sealed space; MEMS sensor body (8), arranged inside the encapsulation cover (3) and connected to the installation ring (2); The installation ring (2) comprises: Connection groove, opened at the top of the installation ring (2), and the encapsulation cover (3) is connected in the connection groove; Airbag (4), mounted in the connection groove and connected to the encapsulation cover (3), and the airbag (4) is configured to expand towards both sides of the encapsulation cover (3) when being extruded by the encapsulation cover (3), for sealing the connection between the connection groove and the encapsulation cover (3).

2. The MEMS sensor resistant to corrosion by battery electrolyte according to claim 1, characterized in that, Further comprising: Two first sealing rings (5), mounted in the connection groove, and the two first sealing rings (5) are respectively in contact with the inner wall and the outer wall of the encapsulation cover (3), and the first sealing ring (5) is used for sealing the connection between the connection groove and the encapsulation cover (3).

3. The MEMS sensor resistant to battery electrolyte corrosion according to claim 2, wherein, Further comprising: Second sealing ring (6), mounted on one inner wall of the connection groove, and the outer wall of the encapsulation cover (3) is in contact with the second sealing ring (6), and the second sealing ring (6) is used for sealing the connection between the connection groove and the encapsulation cover (3); Third sealing ring (7), mounted on the other inner wall of the connection groove, and the inner wall of the encapsulation cover (3) is in contact with the third sealing ring (7), and the third sealing ring (7) is used for sealing the connection between the connection groove and the encapsulation cover (3).

4. A MEMS sensor resistant to battery electrolyte corrosion according to claim 3, characterized in that, The second sealing ring (6) is formed with an inclined surface (601) for guiding the encapsulation cover (3) to be inserted into the connection groove.

5. A MEMS sensor resistant to battery electrolyte corrosion according to claim 3, characterized in that, The third sealing ring (7) is formed with a groove (701) for placing glue.

6. A MEMS sensor resistant to battery electrolyte corrosion according to claim 5, characterized in that, The encapsulation cover (3) comprises: Connection strip (301), mounted on the inner ring of the encapsulation cover (3); Extrusion strip (302), mounted on the connection strip (301), and configured to enter the groove (701) and extrude the glue when the encapsulation cover (3) is mounted into the connection groove, so as to fill the glue between the groove (701) and the inner wall of the encapsulation cover (3).

7. The MEMS sensor resistant to battery electrolyte corrosion according to claim 3, wherein Further comprising: Sealing glue (201), mounted between the outer walls of the installation ring (2) and the encapsulation cover (3) and arranged on the second sealing ring (6).

8. The MEMS sensor resistant to battery electrolyte corrosion according to claim 3, characterized in that, The projection shapes of the first sealing ring (5), the second sealing ring (6) and the third sealing ring (7) are all annular.

9. A MEMS sensor resistant to battery electrolyte corrosion according to claim 1, characterized in that, A protective film (801) is coated on the MEMS sensor body (8).

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