Laser environment objective table suitable for atomic force microscope
By designing the reflector and XY axis fine-tuning structure on the atomic force microscope stage, the precise adjustment of laser irradiation angle and displacement is achieved, and the problem of insufficient adjustment accuracy in laser environment in the prior art is solved, and the efficiency and accuracy of sample testing are improved.
Patent Information
- Application Number
- CN202422035455.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-21
- Publication Date
- 2025-07-11
- Estimated Expiration
- 2034-08-21
AI Technical Summary
The existing atomic force microscope stage cannot accurately adjust the laser scanning angle and displacement in a laser environment, affecting the accuracy and efficiency of sample testing.
A laser environmental stage including a disc structure body, a reflector and an XY axis fine-tuning structure is designed. The displacement of the laser fiber and reflector is adjusted through the XY axis fine-tuning structure to achieve accurate adjustment of the laser irradiation angle and displacement.
With limited stage thickness, high-precision laser irradiation angle and displacement adjustment is achieved, improving the efficiency and accuracy of sample testing and avoiding interference with the detection equipment.
Smart Images

Figure CN223091986U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of atomic force microscope equipment, and particularly relates to a laser environment stage applicable to an atomic force microscope. Background Art
[0002] An atomic force microscope (AFM) is an analytical instrument that can be used to study the microscopic structure of the surface of solid materials including insulators. It studies the surface structure and properties of substances by detecting the extremely weak interatomic interaction force between the surface of a sample to be measured and a micro force-sensitive element. The atomic force microscope is currently the surface three-dimensional profile measuring instrument with the highest resolution in the world and is an indispensable detection device in the fields of materials science research and nano detection. The atomic force microscope has been widely used due to its high resolution, wide application range, simple sample preparation, and the ability to perform micro-nano detection in various environments.
[0003] The test samples on the stage of the existing atomic force microscope work in a normal atmospheric environment. However, in the field of scientific research, different samples need to be processed in a laser environment. For example, when using an atomic force microscope to test different crystal orientations of crystal materials, morphological scanning is carried out along different crystal orientation directions. When it comes to the study of optical properties, the angle and displacement of laser scanning on the existing stage cannot be adjusted. If the stage is rotated, the adjustment accuracy cannot be guaranteed, and the stage needs to be further improved. Summary of the Utility Model
[0004] The utility model provides a laser environment stage applicable to an atomic force microscope, which can provide a high-precision laser irradiation angle for a sample under the condition of strict limitations on size and mass, and can realize small-angle and displacement adjustment.
[0005] To solve the above problems, the technical solutions provided by the utility model are as follows:
[0006] An embodiment of the utility model provides a laser environment stage applicable to an atomic force microscope, including a disc-shaped structure body (1). A right-angled notch (4) is provided at a preset position on the edge of the disc-shaped structure body (1). A reflecting mirror (6) is arranged in the right-angled notch (4). A laser fiber (3) is arranged in a position corresponding to the inclined reflecting surface of the reflecting mirror (6).
[0007] On two right-angled sides of the right-angled notch (4), there is an XY-axis fine-tuning structure (5) connected. The XY-axis fine-tuning structure (5) is provided with an X-axis direction slider (7) along the X-axis direction. On the X-axis direction slider (7), the laser fiber (3) and the X-axis adjustment button (8) are connected. Push and pull the X-axis adjustment button (8) to move the X-axis direction slider (7) so as to adjust the displacement of the laser fiber (3); the XY-axis fine-tuning structure (5) is provided with a Y-axis direction slider (9) along the Y-axis direction. On the Y-axis direction slider (9), the reflector (6) and the Y-axis adjustment button (10) are connected. Push and pull the Y-axis adjustment button (10) to move the Y-axis direction slider (9) so as to adjust the displacement of the reflector (6).
[0008] According to an optional embodiment of the present invention, a quartz lens (2) with a thickness of 1 mm is provided on the reflector (6).
[0009] According to an optional embodiment of the present invention, the XY-axis fine-tuning structure (5) is fixed to two right-angled sides of the right-angled notch (4) by screws.
[0010] Beneficial effects: The embodiment of the present invention provides a laser environment stage suitable for an atomic force microscope, including a disc structure body. At a preset position on the edge of the disc structure body, there is a right-angled notch. Inside the right-angled notch, there is a reflector. On the inclined reflecting surface of the reflector, a laser fiber is disposed in alignment. On two right-angled sides of the right-angled notch, there is an XY-axis fine-tuning structure. On the XY-axis fine-tuning structure, there are an X-axis direction slider and a Y-axis direction slider. The X-axis direction slider is used to adjust the lateral movement of the laser fiber, and the Y-axis direction slider adjusts the reflector to adjust the Y-direction displacement of its light spot; under the limited thickness of the stage, this laser environment stage can add laser irradiation conditions to the sample to be tested, and adjust the displacement of the laser without interfering with the test instrument and avoiding affecting the operation of the detection device, thereby improving the efficiency and accuracy of the sample test. Description of the Drawings
[0011] In order to more clearly illustrate the technical solutions in the embodiments or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.
[0012] Figure 1 It is a front structural schematic diagram of a laser environment stage suitable for an atomic force microscope provided by an embodiment of the present application.
[0013] Figure 2Schematic diagram of the back structure of a laser environment stage applicable to an atomic force microscope provided by an embodiment of the present application.
[0014] Figure 3 Schematic diagram of a quartz lens and an XY-axis fine-tuning structure of a laser environment stage applicable to an atomic force microscope provided by an embodiment of the present application.
[0015] Figure 4 Schematic diagram of the XY-axis fine-tuning structure of a laser environment stage applicable to an atomic force microscope provided by an embodiment of the present application. Detailed implementation manners
[0016] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative efforts shall fall within the protection scope of the present application.
[0017] As Figure 1 、 Figure 2 、 Figure 3 and Figure 4 shown, an embodiment of the present invention provides a laser environment stage applicable to an atomic force microscope. The laser environment stage includes a disc structure body 1. A right-angled notch 4 is provided at a preset position on the edge of the disc structure body 1. A reflecting mirror 6 is arranged in the right-angled notch 4. A laser fiber 3 is arranged in alignment on the inclined reflecting surface of the reflecting mirror 6.
[0018] XY-axis fine-tuning structures 5 are connected to the two right-angled sides of the right-angled notch 4. The XY-axis fine-tuning structure 5 is provided with an X-axis direction slider 7 along the X-axis direction. The laser fiber 3 and an X-axis adjustment button 8 are connected to the X-axis direction slider 7. Push and pull the X-axis adjustment button 8 to move the X-axis direction slider 7 to adjust the displacement of the laser fiber 3. The XY-axis fine-tuning structure 5 is provided with a Y-axis direction slider 9 along the Y-axis direction. The reflecting mirror 6 and a Y-axis adjustment button 10 are connected to the Y-axis direction slider 9. Push and pull the Y-axis adjustment button 10 to move the Y-axis direction slider 9 to adjust the displacement of the reflecting mirror 6.
[0019] A quartz lens 2 with a thickness of 1 mm is arranged on the reflecting mirror 6. The XY-axis fine-tuning structure 5 is fixed to the two right-angled sides of the right-angled notch 4 by screws.
[0020] As described above, the laser environmental stage is applicable to an atomic force microscope and can be used for experiments that add laser irradiation conditions to a sample to be tested. With a limited stage thickness, an XY-axis fine adjustment structure is added. A slider in the X-axis direction is used to adjust the lateral movement of the laser fiber. A slider in the Y-axis direction adjusts the mirror to regulate the Y-direction displacement of its light spot. The utility model provides adjustable displacement in a limited-thickness space, does not interfere with the test instrument, avoids affecting the operation of the detection device, and improves the efficiency and accuracy of the sample test.
[0021] In summary, although the present utility model has been disclosed above with the preferred embodiments, the above preferred embodiments are not intended to limit the present utility model. Those of ordinary skill in the art can make various changes and modifications without departing from the spirit and scope of the present utility model. Therefore, the protection scope of the present utility model shall be subject to the scope defined by the claims.
Claims
1. A laser environmental stage applicable to an atomic force microscope, characterized in that, It includes a disc structure body (1), a right-angled notch (4) is provided at a preset position on the edge of the disc structure body (1), a reflector (6) is provided in the right-angled notch (4), and a laser optical fiber (3) is arranged in alignment on the inclined reflecting surface of the reflector (6); Two right-angled sides of the right-angled notch (4) are connected with an XY-axis fine-tuning structure (5). The XY-axis fine-tuning structure (5) is provided with an X-axis direction slider (7) along the X-axis direction. The X-axis direction slider (7) is connected with the laser optical fiber (3) and an X-axis adjustment button (8). Push and pull the X-axis adjustment button (8) to move the X-axis direction slider (7) so as to adjust the displacement of the laser optical fiber (3); the XY-axis fine-tuning structure (5) is provided with a Y-axis direction slider (9) along the Y-axis direction. The Y-axis direction slider (9) is connected with the reflector (6) and a Y-axis adjustment button (10). Push and pull the Y-axis adjustment button (10) to move the Y-axis direction slider (9) so as to adjust the displacement of the reflector (6).
2. The laser environment stage applicable to an atomic force microscope according to claim 1, characterized in that, A quartz lens (2) with a thickness of 1 mm is provided on the reflector (6).
3. The laser environmental stage applicable to an atomic force microscope according to claim 1, wherein, The XY-axis fine-tuning structure (5) is fixed to two right-angled sides of the right-angled notch (4) by screws.