Communication testing device based on vacuum adsorption

Abstract

The utility model discloses a communication test device based on vacuum adsorption, and relates to the technical field of semiconductor storage automation test equipment, the communication test device comprises a diagnosis plate and a needle tower base, and the diagnosis plate is provided with a mounting hole; nut columns are arranged on the needle tower base, sealing rings are arranged on the two sides of the needle tower base, and the two sealing rings are used for making contact with a testing machine back plate and a diagnosis plate respectively. Wherein the needle tower base is connected with the diagnosis plate through a fastener, the fastener penetrates through the mounting hole to be in threaded connection with the nut column, and after the needle tower base is connected with the diagnosis plate through the fastener, one sealing ring is in contact with the diagnosis plate. According to the communication test device based on vacuum adsorption, the pre-fixed connection between the diagnosis plate and the needle tower base is realized by using the fastener and the nut column arranged on the needle tower base, and compared with the traditional split type needle tower base and the diagnosis plate which need a probe station as a support, the dependence on the probe station is reduced, the occupation of excessive resources is avoided, and the cost is reduced. And the use cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor storage automatic test equipment, and particularly relates to a connection test device based on vacuum adsorption. Background Technique

[0002] Automatic Test Equipment (ATE) is a device for testing devices, circuit boards, subsystems, etc. through computer control. By replacing manual labor with computer programming, the test sequence is completed automatically. Automatic test equipment has become an important part of the global semiconductor equipment industry.

[0003] In semiconductor wafer testing CP (Chip Probing), the test head and the wafer prober need to be docked to generate signal connections, and the backplane of the test head needs to be connected to the probe card of the prober through the docking system. The docking system refers to the docking method that interfaces with the prober in the automatic test equipment. Common docking systems are generally based on spring pins or connector architectures. A spring pin is a spring-type probe formed by riveting and pre-pressing three basic components, namely a pin shaft, a spring, and a pin tube, through a precision instrument, and it has a precision spring structure inside. Spring pins are mainly used for current and signal transmission, that is, for charging and conducting electricity.

[0004] The stable connection of the mechanical interface of the docking system is quite important. Customers often face a series of challenges such as frequent test docking tasks, high measurement accuracy requirements, different combinations of test machines and probers, and displacements. Therefore, a stable and reliable signal connection relationship needs to be established between the test machine and the prober. To ensure the reliability of the docking system itself, relevant test verification must be carried out. The usual method is to use a diagnostic board to conduct contact connectivity tests.

[0005] In circuit testing, the contact test involves the principle of chip testing, aiming to ensure that all signal pins of the chip under test are properly connected to the tester, and no signal pin is short-circuited with other signal pins, power supply or ground. The test methods include open and short tests on the chip to verify its normal working state. For example, by supplying a specific current to the chip pins and measuring the pin voltages, the normal value should be the offset voltage of a diode (about 0.7 volts). If the voltage value exceeds the set upper limit (such as 1.5 volts) or is lower than the set lower limit (such as 0.2 volts), it is respectively judged as an open failure or a short failure. The connectivity test is used to confirm that all signal pins are electrically connected to the corresponding channels of the test system during device testing, and no signal pin is short-circuited with other signal pins, power supply or ground. The connectivity test can also promptly inform the test of some problems related to test accessories, such as the contact points of the contact interface between the tester and the probe card are not correctly connected.

[0006] The connectivity test device provides a path from the signal contact point of the tester to the chip pin contact point, that is, the electrical connection from the tester backplane to the diagnostic board, so as to complete the connectivity test of the docking system and ensure the reliability and accuracy of the docking system.

[0007] In the existing connectivity test device of the tester in the mass production environment, the diagnostic board and the pin tower base in the spring pin tower module have no hard connection. When performing the backplane connectivity test of the tester, the spring pin tower module is fixed by the probe station, and then the diagnostic board is lifted by the chuck, which is too dependent on the automated probe station and occupies a lot of resources, so the test cost is relatively high. Moreover, during the test, the tester is fixed on the robot arm, and the tester is moved to the corresponding position by the robot arm. Since the tester is relatively heavy, a robot arm with a large load is required, which not only has a large structural size but also a high price. After the test, it is also necessary to reinstall a new tester on the robot arm, which is time-consuming and laborious, and the test efficiency is low. Therefore, there are still disadvantages and deficiencies in the existing technology. Summary of the Utility Model

[0008] The purpose of the present utility model is to provide a connectivity test device based on vacuum adsorption, which solves the technical problem that in the existing connectivity test device of the tester, the diagnostic board and the pin tower base have no hard connection, and when performing the backplane connectivity test of the tester, it is too dependent on the automated probe station and the test cost is relatively high.

[0009] To achieve the above purpose, the present utility model provides a connectivity test device based on vacuum adsorption, including:

[0010] A diagnostic board, on which mounting holes are provided;

[0011] The needle tower base is provided with nut columns, and sealing rings are arranged on both sides of the needle tower base. The two sealing rings are respectively used to contact the back panel of the testing machine and the diagnostic board.

[0012] Among them, the needle tower base and the diagnostic board are connected by fasteners. The fasteners pass through the mounting holes and are threadedly connected to the nut columns. When the needle tower base and the diagnostic board are connected by fasteners, one of the sealing rings contacts the diagnostic board.

[0013] Preferably, a lifting platform is further included. After the needle tower base and the diagnostic board are connected, they are placed on the lifting platform. The lifting platform can be lifted in the vertical direction, so that the other sealing ring contacts the back panel of the testing machine.

[0014] Preferably, a plurality of spring pin modules are fixedly arranged on the needle tower base. A plurality of spring pins are arranged on the spring pin modules. The spring pins are used to contact the diagnostic board and the back panel of the testing machine to achieve conduction.

[0015] Preferably, air holes are arranged inside the needle tower base.

[0016] Preferably, it further includes:

[0017] A vacuum pump for providing a vacuum source;

[0018] An air pipe, one end of which is connected to the vacuum pump and the other end is communicated with the air holes inside the needle tower base;

[0019] A control valve arranged on the air pipe for controlling the on-off of the air path inside the air pipe;

[0020] A pressure sensor installed inside the air pipe or inside the air holes for detecting the pressure value and providing an alarm feedback.

[0021] Preferably, a control device is further included. The control device is electrically connected to the vacuum pump, the control valve, and the pressure sensor.

[0022] Preferably, a plurality of contact points are arranged on one side of the diagnostic board, and electronic components are arranged on the other side of the diagnostic board.

[0023] Preferably, the mounting holes are arranged on the edge of the diagnostic board, and the mounting holes correspond to the nut columns one by one.

[0024] Preferably, the number of the mounting holes is three.

[0025] Preferably, the spring pin modules are evenly arranged on the needle tower base.

[0026] Compared with the above background art, the communication test device based on vacuum adsorption provided by the present utility model has a fastener passing through the mounting hole and threadedly connecting with a nut post. The nut post provided on the fastener and the needle tower base is used to realize the pre-fixed connection between the diagnostic board and the needle tower base. On the one hand, it can ensure the connection between the diagnostic board and the needle tower base and prevent the diagnostic board from falling off the needle tower base. On the other hand, after the diagnostic board and the needle tower base are connected by the fastener, the sealing ring on one side of the needle tower base can be brought into contact with the diagnostic board, facilitating subsequent vacuum adsorption operations. Compared with the traditional method where the needle tower base and the diagnostic board in a split form require a probe station as a support, it reduces the dependence on the probe station, avoids occupying too many resources, and reduces the usage cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only the embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on the provided drawings.

[0028] Figure 1 It is a schematic structural diagram of the communication test device based on vacuum adsorption provided by the embodiment of the present utility model;

[0029] Figure 2 It is a top view structural diagram of the needle tower base provided by the embodiment of the present utility model;

[0030] Figure 3 It is a top view structural diagram of the diagnostic board provided by the embodiment of the present utility model;

[0031] Figure 4 It is a cross-sectional structural diagram when the fastener is connected to the nut post.

[0032] Figures 1 to 4 In the drawings, reference numerals: 10, diagnostic board; 11, mounting hole; 12, fastener; 13, contact point; 20, needle tower base; 21, nut post; 22, sealing ring; 23, spring pin module; 231, spring pin; 30, test machine backplane; 40, air pipe. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0033] The following will clearly and completely describe the technical solutions in the embodiments of the present utility model with reference to the drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the protection scope of the present utility model.

[0034] To enable those skilled in the art of this technical field to better understand the solution of the present utility model, the present utility model will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0035] The present utility model provides a connection test device based on vacuum adsorption, which uses the spring pin 231 as the installation medium for docking, and adopts the vacuum adsorption method to realize the contact connection between the spring pin 231 and the backplane 30 of the test machine and the diagnostic board 10.

[0036] Please refer to Figures 1 to 4 together. The connection test device based on vacuum adsorption provided by the present utility model includes a diagnostic board 10 and a needle tower base 20. An installation hole 11 is provided on the diagnostic board 10; a nut column 21 is provided on the needle tower base 20, and sealing rings 22 are provided on both sides of the needle tower base 20. The two sealing rings 22 are respectively used to contact the backplane 30 of the test machine and the diagnostic board 10;

[0037] Among them, the needle tower base 20 and the diagnostic board 10 are connected by a fastener 12. The fastener 12 passes through the installation hole 11 and is threadedly connected to the nut column 21. When the needle tower base 20 and the diagnostic board 10 are connected by the fastener 12, one of the sealing rings 22 contacts the diagnostic board 10.

[0038] With such a setting, the fastener 12 passes through the installation hole 11 and is threadedly connected to the nut column 21. By using the fastener 12 and the nut column 21 provided on the needle tower base 20, the pre-fixed connection between the diagnostic board 10 and the needle tower base 20 can be realized. On the one hand, it can ensure the connection between the diagnostic board 10 and the needle tower base 20 and prevent the diagnostic board 10 from falling off the needle tower base 20. On the other hand, after the diagnostic board 10 and the needle tower base 20 are connected by the fastener 12, one of the sealing rings 22 on the needle tower base 20 can contact the diagnostic board 10, which is convenient for subsequent vacuum adsorption operations. Moreover, compared with the traditional way that the split needle tower base 20 and diagnostic board 10 need a probe table as a support, the dependence on other equipment is reduced, and the use cost is lowered.

[0039] In this embodiment, the fastener 12 can be a locking screw or a bolt, etc., as long as the connection between the diagnostic board 10 and the needle tower base 20 can be realized through the cooperation of the fastener 12 and the nut column 21, and no specific limitation is made.

[0040] The connection test device based on vacuum adsorption provided by the present utility model further includes a lifting table (not shown in the figure). After the needle tower base 20 and the diagnostic board 10 are connected by the fastener 12, they are placed on the lifting table. The lifting table can be lifted in the vertical direction, so that the other sealing ring 22 contacts the backplane 30 of the test machine.

[0041] It should be noted that during the connectivity test, the test machine remains stationary. After the needle tower base 20 and the diagnostic board 10 are connected by the fastener 12, they are placed on the lifting table. The lifting table operates to move up and down, thereby driving the needle tower base 20 to move up and down in the vertical direction until another sealing ring 22 contacts the back panel 30 of the test machine. Compared with the method of using a manipulator to clamp the test machine and drive the test machine to move so that the sealing ring 22 contacts the back panel 30 of the test machine, by moving the needle tower base 20 and the diagnostic board 10 through the lifting table instead of moving the test machine, the use of the manipulator is cancelled, the clamping action during each test is avoided, the operation is simple, and the test efficiency is improved.

[0042] In this embodiment, the lifting table can be a scissor lift table, or other lifting devices can also be used, such as an electric or hydraulic lift table, etc., as long as it can move up and down to drive the needle tower base 20 and the diagnostic board 10 to move in the vertical direction, and no specific limitation is made.

[0043] Please refer to Figures 1 to 3 Please refer to Figure 1 and Figure 2 On the needle tower base 20, a plurality of spring pin modules 23 are fixedly arranged. On the spring pin modules 23, a plurality of spring pins 231 are fixedly arranged. The spring pins 231 are used to contact the diagnostic board 10 and the back panel 30 of the test machine to achieve conduction.

[0044] When the spring pins 231 are installed and fixed on the spring pin modules 23, both ends of the spring pins 231 protrude from the spring pin modules 23. When the spring pin modules 23 are installed on the needle tower base 20, the needle tower base 20 does not affect both ends of the spring pins 231. Optionally, a plurality of receiving holes can be provided on the needle tower base 20, and the spring pin modules 23 are arranged in the receiving holes by an interference fit method. Through such a setting, the spring pin modules 23 are fixedly arranged on the needle tower base 20. The spring pin modules 23 can also be installed on the needle tower base 20 in other ways, such as by a clearance fit installation method or by using bolts, screws, etc. for fixed connection, and no specific installation method is limited.

[0045] The spring pin modules 23 are evenly arranged on the needle tower base 20, and the spring pins 231 are evenly arranged on the spring pin modules 23. The distribution method of the spring pin modules 23 on the needle tower base 20 and the distribution method of the spring pins 231 on the spring pin modules 23 are set according to actual needs, and no specific distribution method is limited.

[0046] In addition, air holes are also provided in the needle tower base 20 for vacuum adsorption, so that both ends of the spring pins 231 contact and communicate with the back panel 30 of the test machine and the diagnostic board 10.

[0047] Please refer to Figure 3, on one side of the diagnostic board 10, there are a plurality of contact points 13. The contact points 13 are used for contact connection with one end of the spring pin 231. On the other side of the diagnostic board 10, there are electronic components, so as to be able to judge whether the corresponding contact points on the backplane 30 of the testing machine are connected. In use, the two ends of the spring pin 231 respectively touch the contact points on the backplane 30 of the testing machine and the contact points 13 on the diagnostic board 10, thereby conducting the electrical path from the contact points on the backplane 30 of the testing machine to the spring pin 231 and then to the contact points 13 on the diagnostic board 10.

[0048] The connectivity testing device based on vacuum adsorption provided by the present utility model further includes a vacuum control module. The vacuum control module includes a vacuum pump, an air pipe 40, a pressure sensor and a control device. Among them, the vacuum pump is used to provide a vacuum source; one end of the air pipe 40 is connected to the vacuum pump, and the other end of the air pipe 40 is communicated with the air holes inside the needle tower base 20; a control valve is arranged on the air pipe 40, and the control valve is used to control the on-off of the air path in the air pipe 40; the pressure sensor is installed inside the air pipe 40 or inside the air holes, and is used to detect the pressure value and provide an alarm feedback; the control device is electrically connected to the vacuum pump, the control valve and the pressure sensor, and controls the operation of the vacuum pump, the control valve and the pressure sensor through the control device. Among them, the control device can be a controller, etc.

[0049] Please refer to Figure 1 , after the two sealing rings 22 are respectively in contact with the backplane 30 of the testing machine and the diagnostic board 10, start the vacuum pump and open the control valve. The closed space formed by one of the sealing rings 22 between the backplane 30 of the testing machine and the needle tower base 20 is evacuated to vacuum, and the closed space formed by the other sealing ring 22 between the diagnostic board 10 and the needle tower base 20 is evacuated to vacuum. Under the action of atmospheric pressure, the backplane 30 of the testing machine and the diagnostic board 10 are adsorbed on both sides of the needle tower base 20, and the spring pins 231 on the spring pin module 23 are pressed. The two ends of the spring pin 231 respectively touch the contact points on the backplane 30 of the testing machine and the contact points 13 on the diagnostic board 10, thereby conducting the electrical path from the contact points on the backplane 30 of the testing machine to the spring pin 231 and then to the contact points 13 on the diagnostic board 10. Then, through the diagnostic board 10, it can be judged whether the corresponding contact points on the backplane 30 of the testing machine are connected. After the test is completed, the next testing machine can be quickly placed at the designated station through the transport vehicle, so as to efficiently carry out a new round of testing, and the testing efficiency is high.

[0050] Please refer to Figure 3 , mounting holes 11 are arranged on the edge of the diagnostic board 10. The number of mounting holes 11 is multiple, and the multiple mounting holes 11 correspond to the multiple nut columns 21 one by one. The diagnostic board 10 and the needle tower base 20 are reliably connected through the cooperation between the multiple fasteners 12 and the multiple nut columns 21.

[0051] In this embodiment, the number of the mounting holes 11 is three, and the three mounting holes 11 are circumferentially distributed along the diagnostic board 10. In other embodiments, the number of the mounting holes 11 may be four, five or more, as long as the mounting holes 11 correspond to the nut posts 21 one by one, and no specific limitation is made.

[0052] The connection test device based on vacuum adsorption provided by the present utility model pre-fixes the needle tower base 20 and the diagnostic board 10 through the fastener 12, reduces the dependence on the probe station, and moves the needle tower base 20 and the diagnostic board 10 through the lifting table to realize the contact connection with the backplane 30 of the testing machine, cancels the use of the manipulator, avoids the clamping action during each test, is simple to operate, reduces the cost of the entire test device, and can improve the test efficiency.

[0053] It should be noted that in this specification, relational terms such as first and second are only used to distinguish one entity from several other entities, and do not necessarily require or imply any actual relationship or order between these entities.

[0054] Specific examples are used in this article to elaborate on the principle and implementation manner of the present utility model. The description of the above embodiments is only used to help understand the method and its core idea of the present utility model. It should be pointed out that for those of ordinary skill in the art of this technology, without departing from the principle of the present utility model, several improvements and modifications can be made to the present utility model, and these improvements and modifications also fall within the protection scope of the present utility model.

Claims

1. A connectivity test device based on vacuum adsorption, characterized in that Comprising: A diagnostic board, on which mounting holes are provided; A needle tower base, on which nut posts are provided, and sealing rings are provided on both sides of the needle tower base, and the two sealing rings are respectively used to contact the backplane of the testing machine and the diagnostic board; Wherein, the needle tower base and the diagnostic board are connected by fasteners, the fasteners pass through the mounting holes and are threadedly connected with the nut posts. After the needle tower base and the diagnostic board are connected by fasteners, one of the sealing rings contacts the diagnostic board.

2. The connectedness testing device based on vacuum adsorption according to claim 1, characterized in that, It further includes a lifting table. After the needle tower base and the diagnostic board are connected, they are placed on the lifting table, and the lifting table can be lifted in the vertical direction, so that the other sealing ring contacts the backplane of the testing machine.

3. The connectivity test device based on vacuum adsorption according to claim 1, characterized in that, A plurality of spring pin modules are fixedly arranged on the needle tower base, and a plurality of spring pins are arranged on the spring pin modules, and the spring pins are used to contact the diagnostic board and the backplane of the testing machine to achieve conduction.

4. The vacuum adsorption-based connectivity test device according to any one of claims 1-3, characterized in that, Air holes are arranged inside the needle tower base.

5. The connectivity testing device based on vacuum adsorption according to claim 4, wherein It further includes: A vacuum pump, used to provide a vacuum source; An air pipe, one end of which is connected to the vacuum pump, and the other end is communicated with the air holes inside the needle tower base; A control valve, arranged on the air pipe, used to control the on-off of the gas path inside the air pipe; A pressure sensor, installed inside the air pipe or inside the air holes, used to detect the pressure value and provide an alarm feedback.

6. The vacuum adsorption-based connectivity testing device according to claim 5, wherein, It further includes a control device, and the control device is electrically connected to the vacuum pump, the control valve, and the pressure sensor.

7. The vacuum adsorption-based connectivity test device according to claim 1, wherein A plurality of contact points are arranged on one side of the diagnostic board, and electronic components are arranged on the other side of the diagnostic board.

8. The connection test device based on vacuum adsorption according to claim 1, wherein, The mounting holes are arranged at the edge of the diagnostic board, and the mounting holes correspond to the nut posts one by one.

9. The vacuum adsorption-based connectivity test device according to claim 8, wherein, The number of the mounting holes is three.

10. The vacuum adsorption-based connectivity test device according to claim 3, wherein, The spring pin modules are evenly arranged on the needle tower base.

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