Hot plate

Abstract

The utility model discloses a hot plate which comprises a heat storage layer, a heating layer, a fixed pressure plate layer and a double-end screw which are sequentially overlapped from top to bottom. The fixed pressure plate layer comprises an upper pressure plate and a lower pressure plate, the upper pressure plate and the lower pressure plate are arranged at an interval, the upper pressure plate and the lower pressure plate are located on the two sides of the double-end screw respectively, and an air layer is formed between the upper pressure plate and the lower pressure plate. And an air layer is formed between the upper pressing disc and the lower pressing disc, heat can be isolated through the air layer, and heat waste is avoided. The two ends of the double-end screw are made of the same material as the heat storage layer and the fixed pressure plate layer, it is guaranteed that the collision expansion coefficients of the two ends are close to the heat storage layer and the fixed pressure plate layer, the expansion coefficients of the double-end screw and peripheral materials are close during heating, the deformation quantities of the double-end screw and the peripheral materials are close, and loosening of bolts cannot be caused.

Description

Technical Field

[0001] The utility model relates to the technical field of hot plates, and more specifically, to a hot plate. Background Art

[0002] In the coating / development process of wafers, a heat treatment process of heating the wafers is included. The heat treatment process is to place the wafers in a hot plate unit for baking. The existing hot plate unit includes a hot plate cover, a hot plate, and a pin system. Among them, the hot plate is a multi-layer composite plate structure. For example, the hot plate of the existing technology uses a heat storage layer, a heating layer, a heat insulation layer, and a fixed platen, which are stacked inside the housing and fixed together by bolts passing through.

[0003] For the hot plate structure used in the existing technology, due to the unreasonable design of each layer structure, excessive heat loss and high energy consumption are caused. At the same time, because the expansion coefficient of the heat insulation layer material is relatively large, when the hot plate is working, the deformation of the heat insulation layer material is large, resulting in a large pressure on the upper heating layer and the lower fixed platen; and for the existing design of passing through with bolts, since it is difficult for the expansion coefficients of the bolt material and the materials of each layer of the composite layer to be similar, the expansion degrees of the bolt and each layer of the composite layer are different, resulting in the loosening or even falling off of the bolt, causing the composite layer hot plate to be unable to maintain fixation. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a hot plate to solve the technical problems existing in the above background art.

[0005] The technical solution of the utility model provides a hot plate, which includes a heat storage layer, a heating layer, a fixed platen layer, and double-headed screws that are sequentially stacked from top to bottom;

[0006] The fixed platen layer includes an upper platen and a lower platen. The upper platen and the lower platen are arranged at intervals, and the upper platen and the lower platen are respectively located on both sides of the double-headed screws. An air layer is formed between the upper platen and the lower platen.

[0007] In a preferred embodiment, the heat storage layer, the heating layer, and the upper platen are fixed on one side of the double-headed screws, and the lower platen is fixed on the other side of the double-headed screws.

[0008] In a preferred embodiment, screw mounting holes are provided on the heat storage layer, the heating layer, and the fixed platen layer. The screw mounting holes on the heat storage layer are located on the back of the heat storage layer. One end of the double-headed screw is connected to the heat storage layer, and the other end passes through the lower platen layer and extends outside the lower platen layer, and is fixed by a nut outside the lower platen layer.

[0009] In a preferred embodiment, the heating layer includes an upper mica sheet, a heating wire, and a lower mica sheet. The upper mica sheet and the lower mica sheet are adhesively connected, the heating wire is fixed between them, and a power cord outlet is provided on the lower mica sheet.

[0010] In a preferred embodiment, a plurality of support pins are evenly arranged on the top surface of the heat storage layer, support pins are arranged in the notch, and the top surface of the support pins protrudes from the notch.

[0011] In a preferred embodiment, the top surface of the support pin is a dome.

[0012] In a preferred embodiment, the heat storage layer is an aluminum nitride ceramic plate, both the upper pressing plate and the lower pressing plate are made of stainless steel, and the lower pressing plate is a stainless steel plate with side edges.

[0013] In a preferred embodiment, the materials at both ends of the double-headed screw are the same as those of the heat storage layer and the fixed pressing plate layer respectively.

[0014] The beneficial effects of the technical solution of the present utility model are as follows:

[0015] 1. The materials at both ends of the double-headed screw are respectively the same as those of the heat storage layer and the fixed pressing plate layer, ensuring that the expansion coefficients at both ends are close to those of the heat storage layer and the fixed pressing plate layer respectively. When heated, the expansion coefficients of the double-headed screw and the surrounding materials are similar, so that their deformation amounts are similar, and the loosening of the bolt will not be caused.

[0016] 2. An air layer is formed between the upper pressing plate and the lower pressing plate. The setting of the air layer can isolate heat and avoid heat waste. Description of the Drawings

[0017] Figure 1 is a schematic diagram of the overall structure of the present utility model,

[0018] Figure 2 is an exploded view of the structure of the present utility model,

[0019] Figure 3 is a cross-sectional view of the present utility model,

[0020] Figure 4 is of the present utility model Figure 3 an enlarged view of part A in,

[0021] Figure 5 is an exploded view of the heating layer structure of the present utility model.

[0022] Description of the reference numerals: 1 heat storage layer, 2 heating layer, 201 upper mica sheet, 202 heating wire, 203 lower mica sheet, 3 fixed pressure plate layer, 301 upper pressure plate, 302 lower pressure plate, 4 air layer, 5 double-headed screw, 6 screw mounting hole, 7 nut, 8 notch, 9 support pin, 10 power cord outlet. Detailed implementation manners

[0023] The present utility model will be further described in detail below in conjunction with the accompanying drawings and specific implementation manners. The embodiments of the present utility model are given for the convenience of illustration and description, and are not exhaustive or limit the present utility model to the disclosed form. Many modifications and variations are obvious to those of ordinary skill in the art. The embodiments are selected and described to better illustrate the principles and practical applications of the present utility model, and enable those of ordinary skill in the art to understand the present utility model and thus design various embodiments with various modifications suitable for specific purposes.

[0024] As Figures 1-5 shown, the technical solution of the present utility model provides a hot plate, which includes a heat storage layer 1, a heating layer 2, a fixed pressure plate layer 3 and a double-headed screw 5 that are sequentially stacked from top to bottom. The heating layer 2 includes an upper mica sheet 201, a heating wire 202 and a lower mica sheet 203. The upper mica sheet 201 is adhesively connected to the lower mica sheet 203, the heating wire 202 is fixed between the two, and a power cord outlet 10 is provided on the lower mica sheet 203. The mica sheet plays a role in insulation and protection of the heating wire 202. After the heating wire 202 is energized, heat is generated and transferred to the heat storage layer 1, and the heat storage layer 1 realizes heating and baking of the wafer. The fixed pressure plate realizes the fixation of the heating layer 2 to prevent the heating layer 2 from loosening.

[0025] The fixed pressure plate layer 3 includes an upper pressure plate 301 and a lower pressure plate 302. The upper pressure plate 301 and the lower pressure plate 302 are arranged at intervals, and the upper pressure plate 301 and the lower pressure plate 302 are respectively located on both sides of the double-headed screw 5. An air layer 4 is formed between the upper pressure plate 301 and the lower pressure plate 302. The setting of the air layer 4 can isolate heat and avoid heat waste. The heat storage layer 1 is an aluminum nitride ceramic plate, which has the characteristic of high thermal conductivity and can quickly respond to temperature changes. The upper pressure plate 301 and the lower pressure plate 302 are both made of stainless steel, and the lower pressure plate 302 is a stainless steel plate with side edges, which has a certain strength and plays a protective role. In order to further ensure the effect, heat insulation materials can also be filled in the air layer 4.

[0026] The heat storage layer 1, the heating layer 2 and the upper pressing plate 301 are fixed on one side of the double-headed screw 5, and the lower pressing plate 302 is fixed on the other side of the double-headed screw 5. Screw mounting holes 6 are provided on the heat storage layer 1, the heating layer 2 and the fixed pressing plate layer 3. The screw mounting holes 6 on the heat storage layer 1 are located on the back surface of the heat storage layer 1. One end of the double-headed screw 5 is connected to the heat storage layer 1, and the other end passes through the lower pressing plate 302 layer and extends outside the lower pressing plate 302 layer, and is fixed by a nut 7 outside the lower pressing plate 302 layer.

[0027] When fixing, first fix the heat storage layer 1, the heating layer 2 and the upper pressing plate 301 through one end of the double-headed screw 5, and then the other end of the double-headed screw 5 passes through the lower pressing plate 302 and is fixed by a nut 7 outside the lower pressing plate 302. Both ends of the double-headed screw 5 are made of the same material as the heat storage layer 1 and the fixed pressing plate layer 3, ensuring that the expansion coefficients of both ends are close to those of the heat storage layer 1 and the fixed pressing plate layer 3 respectively. When heated, the expansion coefficients of the double-headed screw 5 and the surrounding materials are close, so that their deformation amounts are similar, and the loosening of the bolts will not be caused.

[0028] A plurality of notches 8 are evenly arranged on the top surface of the heat storage layer. A support pin 9 is arranged in the notch 8. The top surface of the support pin 9 protrudes from the notch 8. The top surface of the support pin 9 is a dome. The support pin 9 is used to support the wafer. The top surface of the support pin 9 is a dome, which reduces the contact with the wafer, avoids abrasion of the wafer, and at the same time avoids temperature difference between the contact part and its position.

[0029] Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art and related fields without creative work shall fall within the protection scope of the present invention. The structures, devices and operation methods not specifically described and explained in the present invention, unless otherwise specified and limited, are implemented according to the conventional means in the art.

Claims

1. A hot plate, characterized in that: It includes a heat storage layer, a heating layer, a fixed pressure plate layer and double-headed screws which are stacked in sequence from top to bottom; The fixed pressure plate layer includes an upper pressure plate and a lower pressure plate. The upper pressure plate and the lower pressure plate are arranged at intervals, and the upper pressure plate and the lower pressure plate are respectively located on both sides of the double-headed screws. An air layer is formed between the upper pressure plate and the lower pressure plate.

2. A hot plate according to claim 1, characterized in that: The heat storage layer, the heating layer and the upper pressure plate are fixed on one side of the double-headed screws, and the lower pressure plate is fixed on the other side of the double-headed screws.

3. A hot plate according to claim 1, characterized in that: Screw mounting holes are provided on the heat storage layer, the heating layer and the fixed pressure plate layer. The screw mounting holes on the heat storage layer are located on the back surface of the heat storage layer. One end of the double-headed screw is connected to the heat storage layer, and the other end passes through the lower pressure plate layer and extends outside the lower pressure plate layer, and is fixed by a nut outside the lower pressure plate layer.

4. A hot plate according to claim 1, wherein: The heating layer includes an upper mica sheet, a heating wire and a lower mica sheet. The upper mica sheet and the lower mica sheet are adhesively connected, the heating wire is fixed between the two, and a power cord outlet is provided on the lower mica sheet.

5. A hot plate according to claim 1, characterized in that: A plurality of notches are uniformly arranged on the top surface of the heat storage layer, and support pins are arranged in the notches. The top surface of the support pins protrudes from the notches.

6. A hot plate according to claim 5, characterized in that: The top surface of the support pin is a dome.

7. A hot plate according to claim 1, characterized in that: The heat storage layer is an aluminum nitride ceramic plate. The upper pressure plate and the lower pressure plate are both made of stainless steel, and the lower pressure plate is a stainless steel plate with side edges.

8. A hot plate according to claim 1, characterized in that: The materials at both ends of the double-headed screw are the same as those of the heat storage layer and the fixed pressure plate layer respectively.

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