Novel cleaning device in vacuum cavity of PECVD (plasma enhanced chemical vapor deposition) carrier plate

Abstract

The utility model discloses a novel cleaning device in a PECVD (Plasma Enhanced Chemical Vapor Deposition) support plate vacuum cavity, which comprises at least one group of brush mechanism and adhesive tape mechanism which are arranged on a support plate, the brush mechanism consists of a brush, a brush fixing seat, a brush fixing right-angle block and a brush fixing bolt, the brush is arranged on the brush fixing seat, and the adhesive tape mechanism is arranged on the support plate. The two ends of the brush fixing base are connected with the brush fixing right-angle blocks respectively, the brush mechanism is installed on the edge of the carrier plate frame through the brush fixing right-angle blocks on the two sides and fixed through the brush fixing bolts, the adhesive tape mechanism is composed of an adhesive tape, an adhesive tape fixing base, adhesive tape fixing right-angle blocks and adhesive tape fixing bolts, and the adhesive tape is installed on the adhesive tape fixing base. The two ends of the adhesive tape fixing base are connected with adhesive tape fixing right-angle blocks respectively. An existing carrier plate frame is used as a conveying edge structure, rapid leading-in can be achieved, air breaking, cavity opening and online cleaning are not needed, the cost is saved, and the productivity is improved.

Description

Technical Field

[0001] The utility model relates to the field of PECVD vacuum equipment, in particular to a novel cleaning device in the vacuum chamber of a PECVD carrier board. Background Art

[0002] PECVD vacuum equipment is widely used in the industry and is an essential important process in the entire photovoltaic industry. PECVD equipment also plays an important role in the deposition and production of photovoltaic solar panels. High production requirements are imposed on PECVD equipment, and it is necessary to maintain a stable working state to create higher production capacity and meet market demand. Currently, in the actual production process of the PECVD process, abnormal conditions and failures cannot be quickly processed, resulting in a great impact on UPTIAM. Therefore, it is necessary to design a novel cleaning device that can be used online and achieve a cleaning effect to realize online cleaning. Content of the Utility Model

[0003] In view of the above problems, the utility model provides a novel cleaning device in the vacuum chamber of a PECVD carrier board with a simple structure and convenient installation and maintenance.

[0004] To solve the above technical problems, the technical solution adopted by the utility model is: a novel cleaning device in the vacuum chamber of a PECVD carrier board, including at least one set of brush mechanism and rubber strip mechanism installed on the carrier board. The brush mechanism and the rubber strip mechanism are arranged in parallel. The brush mechanism is composed of a brush, a brush fixing seat, a brush fixing right-angle block, and a brush fixing bolt. The brush is installed on the brush fixing seat. Both ends of the brush fixing seat are respectively connected to the brush fixing right-angle block. The brush mechanism is installed on the edge of the carrier board frame through the two brush fixing right-angle blocks and fixed by the brush fixing bolt. The rubber strip mechanism is composed of a rubber strip, a rubber strip fixing seat, a rubber strip fixing right-angle block, and a rubber strip fixing bolt. The rubber strip is installed on the rubber strip fixing seat. Both ends of the rubber strip fixing seat are respectively connected to the rubber strip fixing right-angle block. The rubber strip mechanism is installed on the edge of the carrier board frame through the two rubber strip fixing right-angle blocks and fixed by the rubber strip fixing bolt.

[0005] Further, the installation positions of the brush fixing seat and the brush fixing right-angle block, and the rubber strip fixing seat and the rubber strip fixing right-angle block are adjustable.

[0006] Further, the brush of the brush mechanism and the rubber strip of the rubber strip mechanism extend 15 - 25 mm below the bottom of the carrier board frame.

[0007] From the above description of the structure of the utility model, compared with the prior art, the utility model has the following advantages:

[0008] 1. Using the existing PECVD carrier board frame as the transfer edge structure, it is firm and material-saving, can achieve rapid introduction and on-line use, can meet the use in a vacuum environment and can realize on-line cleaning without breaking the vacuum and opening the cavity, saving costs and increasing production capacity.

[0009] 2. The structure is simple and reliable, easy to operate and install, reduces equipment failure rate and maintenance cycle, improves yield and production capacity. In addition, in case of failure during the process, it can be cleaned and used repeatedly. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] The drawings forming a part of this application are used to provide a further understanding of the present utility model. The schematic embodiments and descriptions thereof of the present utility model are used to explain the present utility model and do not constitute an improper limitation to the present utility model. In the drawings:

[0011] Figure 1 is a schematic diagram of the overall structure of an embodiment of the present utility model;

[0012] Figure 2 is a schematic side view structure diagram of an embodiment of the present utility model;

[0013] Figure 3 is for the present utility model Figure 2 -A partial enlarged view;

[0014] Figure 4 is for the present utility model Figure 2 -B partial enlarged view. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0015] In order to make the objectives, technical solutions and advantages of the present utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present utility model and are not used to limit the present utility model.

[0016] Embodiment

[0017] Reference Figures 1-4, a novel cleaning device in the vacuum chamber of a PECVD carrier board, comprising two groups of brush mechanisms 3, 5 and rubber strip mechanisms 4, 6 mounted on the carrier board. The brush mechanism 3 and the rubber strip mechanism 4 are arranged in parallel. The brush mechanism 3 consists of a brush 31, a brush fixing seat 32, a brush fixing right-angle block 33 and a brush fixing bolt 34. The brush 31 is mounted on the brush fixing seat 32. Both ends of the brush fixing seat 32 are respectively connected to the brush fixing right-angle block 33. The brush mechanism 3 is installed on the edge of the frame of the carrier board 1 through the two brush fixing right-angle blocks 33 and fixed by the brush fixing bolt 34. The rubber strip mechanism 4 consists of a rubber strip 41, a rubber strip fixing seat 42, a rubber strip fixing right-angle block 43 and a rubber strip fixing bolt 44. The rubber strip 41 is mounted on the rubber strip fixing seat 42. Both ends of the rubber strip fixing seat 42 are respectively connected to the rubber strip fixing right-angle block 43. The rubber strip mechanism 4 is installed on the edge of the frame of the carrier board 1 through the two rubber strip fixing right-angle blocks 43 and fixed by the rubber strip fixing bolt 44.

[0018] The installation positions of the brush fixing seat 32 and the brush fixing right-angle block 33, and the rubber strip fixing seat 42 and the rubber strip fixing right-angle block 43 are adjustable. Before the brush mechanisms 3, 5 and the rubber strip mechanisms 4, 6 are installed and fixed, the positions of the brush fixing seat 32 and the rubber strip fixing seat 42 need to be adjusted so that the brushes 31 and the rubber strips 41 extend 20 mm below the bottom of the carrier board frame.

[0019] During the use process, after the brush mechanisms 3, 5 and the rubber strip mechanisms 4, 6 are completely installed and fastened to the carrier board 1, they are introduced into the production vacuum equipment cavity by a carrier board moving cart, transmitted to the process cavity position through the carrier board 1. Open the manual, lift the heating plate 2, and use the lifting position of the heating plate 2 to completely fit the brushes 31, 51 and the rubber strips 41, 61. After fitting, transmit the carrier board 1 to the next cavity. Use the cleaning method to remove the residual photovoltaic fragments and other sundries on the surface of the heating plate 2 through physical cleaning and collect the dropped fragments at the bottom of the heating plate 2. After the carrier board 1 is cleaned, it is transmitted to the blanking section through the guide wheel and the carrier board 1 is pushed out by the moving cart. Disassemble the brushes 3, 5 and the rubber strip devices 4, 6, put away the devices, and wait for the next repeated recycling. Then the carrier board 1 is pushed into the main body vacuum equipment again, and the carrier board 1 operates normally.

[0020] This utility model uses the existing PECVD carrier board frame as the transmission edge structure, which is firm and material-saving. It can achieve rapid introduction and on-line use, can meet the use in a vacuum environment and can realize on-line cleaning without breaking the vacuum and opening the cavity, saving costs and increasing production capacity. The structure is simple and reliable, the operation and installation are convenient, the equipment failure rate and maintenance period are reduced, and the yield and production capacity are increased. In addition, in case of a failure during the process, cleaning can be repeated for use.

[0021] The above are only the preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. A new cleaning device in the vacuum chamber of a PECVD carrier board, characterized in that: It includes at least one set of brush mechanism and rubber strip mechanism installed on the carrier board. The brush mechanism and the rubber strip mechanism are arranged in parallel. The brush mechanism is composed of a brush, a brush fixing seat, a brush fixing right-angle block and a brush fixing bolt. The brush is installed on the brush fixing seat. Both ends of the brush fixing seat are respectively connected to the brush fixing right-angle block. The brush mechanism is installed on the edge of the carrier board frame through the two brush fixing right-angle blocks and fixed by the brush fixing bolt. The rubber strip mechanism is composed of a rubber strip, a rubber strip fixing seat, a rubber strip fixing right-angle block and a rubber strip fixing bolt. The rubber strip is installed on the rubber strip fixing seat. Both ends of the rubber strip fixing seat are respectively connected to the rubber strip fixing right-angle block. The rubber strip mechanism is installed on the edge of the carrier board frame through the two rubber strip fixing right-angle blocks and fixed by the rubber strip fixing bolt.

2. The novel cleaning device in the vacuum chamber of the PECVD carrier plate according to claim 1, characterized in that: The installation positions of the brush fixing seat and the brush fixing right-angle block, and the rubber strip fixing seat and the rubber strip fixing right-angle block are adjustable.

3. The novel cleaning device in the vacuum chamber of the PECVD carrier plate according to claim 1, wherein: The brushes of the brush mechanism and the rubber strips of the rubber strip mechanism extend 15 - 25 mm below the bottom of the carrier board frame.

Images