Reduction furnace
The still furnace with segmented feed pipes and adjustable pressure control ensures uniform reactant distribution and reaction rates, enhancing the quality and consistency of polycrystalline silicon production.
Patent Information
- Application Number
- CN202422100562.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-28
- Publication Date
- 2025-07-15
- Estimated Expiration
- 2034-08-28
AI Technical Summary
The material entry effect in the existing reduction furnace is poor, resulting in uneven feeding volumes in various places in the reduction furnace, affecting the inconsistent growth rate and reaction rate of silicon rods, resulting in a decline in product quality.
The feed pipe is designed as at least two feed pipe sections, arranged at intervals along the circumference of the chassis, and spaced or cross-arranged in the height direction. Combined with the pressure and flow detection parts, the pressure and flow rate in the feed main pipe are adjusted to ensure even distribution of the materials.
It improves the balance of feed volume and uniformity of reaction rate in various places in the reduction furnace, reduces the occurrence of side reactions, and improves product quality and production efficiency.
Smart Images
Figure CN223102752U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of polysilicon production, and in particular to a reduction furnace. Background Art
[0002] With the rapid development of the electronic information industry and the solar photovoltaic industry, the market demand for polysilicon continues to increase. The mainstream process for preparing polysilicon is the modified Siemens process. The modified Siemens process includes the cold hydrogenation reaction to prepare trichlorosilane, distillation, trichlorosilane reduction and tail gas recovery processes.
[0003] In the prior art, the trichlorosilane reduction reaction process is to mix vaporized trichlorosilane with hydrogen in a certain proportion and introduce it into a polysilicon reduction furnace, and apply voltage to both ends of the rod-shaped silicon core placed in the reduction furnace to generate high temperature, so that the silicon core is a high-temperature silicon core. On the surface of the high-temperature silicon core, trichlorosilane is reduced to silicon by hydrogen and deposited on the surface of the silicon core. In this way, polysilicon rods of the required specifications are gradually generated in the reduction furnace. At this stage, a feed pipe is arranged under the bottom plate of the reduction furnace, and a plurality of feed nozzles are arranged on the feed pipe. The trichlorosilane and hydrogen materials to be reacted first enter the feed pipe, and then enter the reduction furnace through the feed nozzle to react.
[0004] However, the existing reduction furnace has the problem of poor material entry effect. Utility Model Content
[0005] The present application provides a reduction furnace, which reduces the impact of uneven feeding of each nozzle due to pressure drop in a feed pipe section, improves the balance of feed amounts at various locations in the reduction furnace, and improves the uniformity of material distribution in the furnace of the reduction furnace.
[0006] The present application provides a reduction furnace. The reduction furnace includes a furnace body, a chassis and a feed pipe. The chassis is connected to the furnace body. The chassis and the furnace body surround to form a furnace. The feed pipe is arranged on a side of the chassis away from the furnace body. The feed pipe is connected to the furnace. The feed pipe is arranged near the periphery of the chassis.
[0007] The feed pipe comprises at least two feed pipe sections. The at least two feed pipe sections are arranged in sequence and spaced apart along the circumference of the chassis.
[0008] In the above reduction furnace, optionally, the feed pipe includes a first feed pipe and a second feed pipe. The first feed pipe and the second feed pipe are sequentially spaced apart along the height direction of the furnace body.
[0009] In the above reduction furnace, optionally, the feed pipe includes a first feed pipe and a second feed pipe. The first feed pipe and the second feed pipe are sequentially arranged at intervals from the center to the periphery of the bottom plate.
[0010] In the above-mentioned reduction furnace, optionally, the first feed pipe includes at least two first pipe segments. Along the circumferential direction of the chassis, the at least two first pipe segments are arranged at intervals in sequence. The second feed pipe includes at least two second pipe segments. Along the circumferential direction of the chassis, the at least two second pipe segments are arranged at intervals in sequence.
[0011] In the above-mentioned reduction furnace, optionally, there is a first gap between adjacent first pipe segments. There is a second gap between adjacent second pipe segments.
[0012] When the first feed pipe and the second feed pipe are in a first plane, the first plane is parallel to the plane where the chassis is located. Along the direction from the center of the chassis to the outer circumference of the chassis, the projection of the first gap on the second feed pipe covers at least part of the second gap.
[0013] In the above-mentioned reduction furnace, optionally, a plurality of first nozzles are arranged on the first pipe segment. Along the extending direction of the first pipe segment, the plurality of first nozzles are arranged at intervals in sequence.
[0014] A plurality of first feed ports are arranged on the chassis. The plurality of first nozzles are in one-to-one correspondence and communicate with the plurality of first feed ports through feed branch pipes.
[0015] In the above-mentioned reduction furnace, optionally, a plurality of second nozzles are arranged on the second pipe segment. Along the extending direction of the second pipe segment, the plurality of second nozzles are arranged at intervals in sequence.
[0016] A plurality of second feed ports are arranged on the chassis. The plurality of second nozzles are in one-to-one correspondence and communicate with the plurality of second feed ports through feed branch pipes.
[0017] In the above-mentioned reduction furnace, optionally, the first pipe segment and / or the second pipe segment is an annular pipe.
[0018] In the above-mentioned reduction furnace, optionally, the diameter of the first pipe segment is not equal to the diameter of the second pipe segment.
[0019] In the above-mentioned reduction furnace, optionally, the diameters of both the first pipe segment and the second pipe segment are greater than or equal to 80 mm and less than or equal to 150 mm.
[0020] In the above-mentioned reduction furnace, optionally, it further includes a feed main pipe and a pressure detection member. The first pipe segment and the second pipe segment communicate with the feed main pipe through connecting pipes.
[0021] The pressure detection member is connected to the feed main pipe. The pressure detection member is configured to detect the pressure of the material in the feed main pipe.
[0022] In the above-mentioned reduction furnace, optionally, the pressure of the feed main pipe is greater than or equal to 0.6 MPa and less than or equal to 0.7 MPa.
[0023] In the above-mentioned reduction furnace, optionally, it further includes a regulating member, which is arranged on the connecting pipe and is configured to regulate the flow of the material in the connecting pipe.
[0024] In the above-mentioned reduction furnace, optionally, the reduction furnace further includes a flow detection component, which is disposed on the connecting pipe and is configured to detect the flow of the material in the connecting pipe.
[0025] The present application provides a reduction furnace. The reduction furnace includes a furnace body, a chassis and a feed pipe. The chassis is connected to the furnace body. The chassis and the furnace body are surrounded to form a furnace. The feed pipe is arranged on the side of the chassis away from the furnace body. The feed pipe is connected to the furnace. The feed pipe is arranged close to the outer periphery of the chassis. The feed pipe includes at least two feed pipe sections. At least two feed pipe sections are arranged in sequence at intervals along the circumference of the chassis. By arranging the feed pipe into at least two feed pipe sections, the influence of uneven feeding of each nozzle due to pressure drop of the material in the feed pipe section is reduced, the balance of the feed amount in each part of the reduction furnace is improved, the uniformity of material distribution in the furnace of the reduction furnace is improved, and the uniformity of the reaction rate of each part in the reduction furnace is improved. BRIEF DESCRIPTION OF THE DRAWINGS
[0026] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present application and, together with the description, serve to explain the principles of the present application.
[0027] Figure 1 A schematic diagram of the structure of the reduction furnace provided in the first embodiment of the present application Figure 1 ;
[0028] Figure 2 A schematic diagram of the structure of the reduction furnace provided in the first embodiment of the present application Figure 2 ;
[0029] Figure 3 A schematic diagram of the structure of a reduction furnace provided in the second embodiment of the present application;
[0030] Figure 4 A schematic diagram of the structure of a reduction furnace provided in the third embodiment of the present application;
[0031] Figure 5 A schematic diagram of the structure of a reduction furnace provided in a fourth embodiment of the present application;
[0032] Figure 6 A schematic diagram of the structure of the first pipe section of the reduction furnace provided in an embodiment of the present application;
[0033] Figure 7 A schematic diagram of the structure of the second tube section of the reduction furnace provided in an embodiment of the present application;
[0034] Figure 8This is a schematic structural diagram of the chassis of the reduction furnace provided by the embodiments of the present application.
[0035] Explanation of the reference numerals in the drawings:
[0036] 100: Furnace body;
[0037] 200: Chassis; 210: First feed inlet; 220: Second feed inlet;
[0038] 300: Feed pipe;
[0039] 310: First feed pipe; 311: First pipe section; 311a: First nozzle; 320: Second feed pipe; 321: Second pipe section; 321a: Second nozzle;
[0040] 400: Feed branch pipe;
[0041] 500: Feed main pipe;
[0042] 600: Connecting pipe.
[0043] Through the above-mentioned drawings, the specific embodiments of the present application have been shown, and there will be more detailed descriptions hereinafter. These drawings and text descriptions are not intended to limit the scope of the concept of the present application in any way, but to illustrate the concept of the present application to those skilled in the art by referring to specific embodiments. Detailed Description of the Embodiments
[0044] Here, the exemplary embodiments will be described in detail, and the examples are shown in the drawings. When the following description refers to the drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present application. On the contrary, they are merely examples of devices and methods consistent with some aspects of the present application as detailed in the appended claims.
[0045] Polysilicon is a key material for manufacturing integrated circuits, photovoltaic solar cells, and high-purity silicon products. With the rapid development of the electronic information industry and the solar photovoltaic industry, the market demand for polysilicon is increasing continuously. At present, the mainstream process for preparing polysilicon is the improved Siemens process, which includes cold hydrogenation reaction to prepare trichlorosilane, rectification, trichlorosilane reduction, and tail gas recovery processes.
[0046] In the prior art, in the trichlorosilane reduction reaction process, vaporized trichlorosilane and hydrogen are mixed in a certain proportion and then introduced into a polysilicon reduction furnace, and a voltage is applied to both ends of the rod-shaped silicon core placed in the reduction furnace to generate high temperature, so that the silicon core becomes a high-temperature silicon core. On the surface of the high-temperature silicon core, trichlorosilane is reduced to silicon by hydrogen and deposited on the surface of the silicon core. In this way, polysilicon rods of the required specifications are gradually formed in the reduction furnace.
[0047] The reaction in the reduction furnace is a chemical vapor deposition reaction. The main production process includes several process stages such as furnace loading, nitrogen replacement, hydrogen replacement, silicon core breakdown, silicon core growth, furnace shutdown, nitrogen replacement, cooling and material collection, which is a typical intermittent production process. In the production process of each furnace, the factors that play an important role in the growth of silicon rods include the current of the reduction furnace system, the temperature field and pressure field in the furnace, and the ratio, flow rate and distribution of the feed trichlorosilane and hydrogen. Therefore, for the quality of the product silicon rod, the most important control factors are the reaction current, the temperature, pressure and feed flow rate of the reduction furnace.
[0048] Regarding pressure and feed flow rate, the uneven gas distribution caused by poor control of pressure and feed flow rate in the reduction furnace will also lead to many problems such as uneven growth of silicon rods and uneven distribution of thermal field gradients in the furnace. One reason for the uneven gas distribution in the reduction furnace is the design of the air inlet of the reduction furnace. At present, an annular feed pipe is set under the chassis of the reduction furnace, and multiple feed nozzles are set on the feed pipe. The trichlorosilane and hydrogen mixture to be reacted first enters the feed pipe, and then enters the reduction furnace through the feed nozzle to react.
[0049] However, multiple feed nozzles at the reduction furnace feed port are all installed on one feed pipe, resulting in a small flow rate at some feed nozzles at the end of the feed pipe (usually the center of the reduction furnace), and the flow rate of each nozzle in the feed pipe cannot be adjusted, and can only be naturally distributed through the pressure drop in the pipeline and fluid mechanics. This structure will affect the growth rate of silicon rods in the inner and outer circles of the reduction furnace. The current mainstream reduction furnace types are basically the same, with a DN150 or DN200 annular distribution pipe located under the chassis of the reduction furnace, and all feed nozzles are led out from the annular pipe in a certain order. The flow rate at each location in the annular distribution pipe cannot be adjusted. Therefore, the flow rate and pressure of the nozzle at the end of the annular pipe are affected by the pressure drop in the pipe and will be smaller than the front nozzle, resulting in a slow local growth rate of the silicon rods and a smaller diameter of the silicon rods due to the small amount of feed near the nozzle; at the same time, due to the different feed amounts and material concentrations in various locations in the reduction furnace, the reaction rate and thermal field distribution in various locations in the reduction furnace are uneven, which will also cause the ratio of trichlorosilane to hydrogen in local areas to change, promote side reactions or other decomposition reactions, and cause phenomena that are not conducive to product quality and production control during the deposition process of the reduction furnace, such as a decrease in the conversion rate of the raw material trichlorosilane and the generation of more amorphous silicon powder as a side reaction product. Therefore, the existing reduction furnace has the problem of poor material entry effect.
[0050] In view of this, an embodiment of the present application provides a reduction furnace, which includes a furnace body, a chassis and a feed pipe. The chassis is connected to the furnace body. The chassis and the furnace body are surrounded to form a furnace. The feed pipe is arranged on the side of the chassis away from the furnace body. The feed pipe is connected to the furnace. The feed pipe is arranged near the outer periphery of the chassis. The feed pipe includes at least two feed pipe sections. At least two feed pipe sections are arranged in sequence at intervals along the circumference of the chassis. By arranging the feed pipe into at least two feed pipe sections, the influence of uneven feeding of each nozzle due to pressure drop of the material in the feed pipe section is reduced, the balance of the feed amount at various places in the reduction furnace is improved, the uniformity of material distribution in the furnace of the reduction furnace is improved, and the uniformity of the reaction rate of various parts in the reduction furnace is improved. By arranging the feed pipe sections to be arranged at intervals along the circumference of the chassis, the space under the chassis of the reduction furnace is reasonably utilized, and the compact structural design of the reduction furnace is realized.
[0051] The technical solution of the present application and how the technical solution of the present application solves the above-mentioned technical problems are described in detail below with specific embodiments. The following specific embodiments can be combined with each other, and the same or similar concepts or processes may not be repeated in some embodiments. The embodiments of the present application will be described below in conjunction with the accompanying drawings.
[0052] Figure 1 Schematically showing the structure of the reduction furnace provided in the first embodiment of the present application Figure 1 . Figure 2 Schematically showing the structure of the reduction furnace provided in the first embodiment of the present application Figure 2 .
[0053] Reference Figure 1 and Figure 2 As shown, an embodiment of the present application provides a reduction furnace. The reduction furnace includes a furnace body 100, a chassis 200 and a feed pipe 300. The chassis 200 is connected to the furnace body 100. The chassis 200 and the furnace body 100 surround to form a furnace. The furnace is used to accommodate and process materials to be reduced. The feed pipe 300 is arranged on the side of the chassis 200 away from the furnace body 100. The feed pipe 300 is connected to the furnace. The feed pipe 300 is arranged close to the outer periphery of the chassis 200. The feed pipe 300 includes at least two feed pipe sections. Along the circumference of the chassis 200, at least two feed pipe sections are arranged in sequence at intervals. The feed pipe 300 is arranged as at least two feed pipe sections, which reduces the unevenness of the material pressure in the feed pipe section, improves the balance of the feed amount at various locations in the reduction furnace, improves the uniformity of the material distribution in the furnace of the reduction furnace, and improves the uniformity of the reaction rate of various parts in the reduction furnace.
[0054] Exemplarily, the number of the feed pipe sections is two.
[0055] Exemplarily, during the use of the reduction furnace, the materials enter two feed pipe sections respectively and then enter the furnace chamber of the reduction furnace through the two feed pipe sections. By setting two feed pipe sections, the pressure in the feed pipe sections is improved, and the influence of the pressure drop in the pipe on the entry of the materials into the reduction furnace is avoided when the materials are in a relatively long feed pipe section. In this way, the uniformity of the materials entering the furnace chamber of the reduction furnace is improved, the problem of uneven material concentration at local positions in the furnace chamber is avoided, the problem of inconsistent reaction rates of the reduction reaction at different parts in the furnace chamber is avoided, and the uniformity of the products in the reduction furnace is improved. At the same time, the occurrence of unnecessary side reactions is avoided.
[0056] Exemplarily, in the field of polysilicon production technology, the material is a mixture of trichlorosilane and hydrogen. The product is a silicon rod. In the subsequent description of this article, for the convenience of description, the material represents the mixture of trichlorosilane and hydrogen, and the product represents the silicon rod.
[0057] It can be understood that the material can also be other gases, and the product can also be other reduction products. The present application does not limit the types of the material and the product.
[0058] Exemplarily, the chassis 200 can be a disc.
[0059] Exemplarily, along the circumferential direction of the chassis 200, at least two feed pipe sections are arranged at intervals in sequence, making rational use of the space below the chassis 200 of the reduction furnace and realizing the compact structure design of the reduction furnace.
[0060] Exemplarily, the number of the feed pipe sections can be two, three, four, and the present application does not limit the number of the feed pipe sections.
[0061] Figure 3 Schematically shows the structural schematic diagram of the reduction furnace provided by the second embodiment of the present application.
[0062] As an implementable embodiment, referring to Figure 3 As shown, the feed pipe 300 includes a first feed pipe 310 and a second feed pipe 320. The first feed pipe 310 and the second feed pipe 320 are arranged at intervals in sequence along the height direction of the furnace body 100.
[0063] Exemplarily, the first feed pipe 310 is arranged at a first height position. The second feed pipe 320 is arranged at a second height position. Relative to the first feed pipe 310, the second feed pipe 320 is located closer to the chassis 200. By spacing the first feed pipe 310 and the second feed pipe 320 in the height direction, the vertical space can be effectively utilized, thereby saving the horizontal space. In this way, the space under the reduction furnace chassis 200 is reasonably utilized, and the compact structure design of the reduction furnace is realized. At the same time, the structure in which the first feed pipe 310 and the second feed pipe 320 are spaced apart allows sufficient space between the first feed pipe 310 and the second feed pipe 320, which is convenient for maintenance and overhaul.
[0064] As an achievable implementation, the first feed pipe 310 includes at least two first pipe sections 311. At least two first pipe sections 311 are sequentially spaced apart along the circumference of the chassis 200. The second feed pipe 320 includes at least two second pipe sections 321. At least two second pipe sections 321 are sequentially spaced apart along the circumference of the chassis 200.
[0065] Exemplarily, along the height direction of the reduction furnace, the first feed pipe 310 and the second feed pipe 320 are arranged in two layers, one above the other. The first feed pipe 310 includes two first pipe sections 311. The second feed pipe 320 includes two second pipe sections 321. The multiple first nozzles 311a on the first pipe section 311 and the multiple first feed ports 210 on the chassis 200 are arranged correspondingly. The multiple second nozzles 321a on the second pipe section 321 and the multiple second feed ports 220 on the chassis 200 are arranged correspondingly. The first feed port 210 and the second feed port 220 are connected to the raw materials respectively, so that the pressure inside any first pipe section 311 and any second pipe section 321 is balanced and can be independently controlled and adjusted, further ensuring the consistency of the concentration of the materials entering the furnace of the reduction furnace from the first pipe section 311 and the second pipe section 321, and ensuring the relative uniformity of the material flow field at various locations in the furnace of the reduction furnace.
[0066] For example, the number of the first pipe segments 311 may be two, three, or four. The number of the second pipe segments 321 may be two, three, or four. The present application does not limit the number of the first pipe segments 311 and the second pipe segments 321.
[0067] Figure 4 The schematic diagram of the structure of the reduction furnace provided in the third embodiment of the present application is schematically shown.
[0068] As an achievable implementation, the feed pipe 300 includes a first feed pipe 310 and a second feed pipe 320. From the center of the bottom plate 200 to the periphery of the bottom plate 200, the first feed pipe 310 and the second feed pipe 320 are sequentially arranged at intervals.
[0069] For example, refer toFigure 4 As shown, the first feed pipe 310 and the second feed pipe 320 are in a first plane, and the first plane is parallel to the plane where the chassis 200 is located. The first feed pipe 310 includes two first pipe segments 311. The second feed pipe 320 includes two second pipe segments 321. A plurality of first nozzles 311a on the first pipe segment 311 are correspondingly arranged with a plurality of first feed ports 210 on the chassis 200. A plurality of second nozzles 321a on the second pipe segment 321 are correspondingly arranged with a plurality of second feed ports 220 on the chassis 200. The first feed port 210 and the second feed port 220 are respectively connected to the raw materials. In this way, it is ensured that the pressure inside any one of the first pipe segments 311 and any one of the second pipe segments 321 is balanced and can be independently controlled and adjusted, further ensuring the consistency of the material concentration of the materials entering the reduction furnace hearth from the first pipe segment 311 and the second pipe segment 321, and ensuring the relative uniformity of the material flow field at various places in the reduction furnace hearth.
[0070] As an implementable embodiment, the reduction furnace further includes a feed main pipe 500 and a pressure detection member. The first pipe segment 311 and the second pipe segment 321 are communicated with the feed main pipe 500 through a connecting pipe 600.
[0071] The pressure detection member is connected to the feed main pipe 500. The pressure detection member is configured to detect the pressure of the material in the feed main pipe 500.
[0072] Exemplarily, the feed main pipe 500 is used to convey the hydrogen and trichlorosilane gas after being mixed by the static mixer to the feed pipe 300. The pressure detection member is connected to the feed main pipe 500 to realize real-time detection of the feed pressure of the feed main pipe 500. By real-time detecting the pressure of the feed main pipe 500 and manually regulating it, the stability of the feed pressure can be maintained, which helps to provide materials with a fixed pressure to the feed pipe 300, and further helps to ensure the stability of the reaction conditions in the reduction furnace, thereby ensuring the consistency of the quality of the reduction products in the reduction furnace. At the same time, by manually regulating the pressure of the feed main pipe 500 according to the pressure value of the pressure detection member, the feed pressure of the material can be optimized, the reaction efficiency can be improved, and the energy consumption and material waste can be reduced. In addition, by real-time detecting the feed pressure of the feed main pipe 500, it is possible to prevent the pressure in the feed main pipe 500 from being too high, avoiding dangerous situations such as explosion or leakage. The abnormal change of the pressure detected by the pressure detection member may indicate a pipeline leak, and timely detection can quickly take measures to prevent accidents.
[0073] Exemplarily, the pressure detection member can be a pressure sensor.
[0074] As an implementable embodiment, the pressure of the feed main pipe 500 is greater than or equal to 0.6 MPa and less than or equal to 0.7 MPa.
[0075] Exemplarily, when the pressure of the material in the feed main pipe 500 is greater than 0.7 MPa, the pressure of the feed main pipe 500 is too high, which may cause damage or failure of the internal structure of the reduction furnace.
[0076] Exemplarily, when the pressure of the material in the feed main pipe 500 is less than 0.6 MPa, insufficient feed pressure may cause insufficient power at the nozzle, insufficient injection distance of the material into the reduction furnace, too low material concentration at the top of the reduction furnace, affecting the reaction conditions and product quality in the reduction furnace. Uneven feeding may lead to incomplete reduction reaction, affecting the quality and output of the product. Low pressure may cause a decrease in the reaction rate, prolong the reaction time, and affect the production efficiency.
[0077] Therefore, in this application, the pressure of the material in the feed main pipe 500 is set to be greater than or equal to 0.6 MPa and less than or equal to 0.7 MPa. Keeping the pressure of the feed main pipe 500 within a stable range can ensure stable reaction conditions in the reduction furnace, thereby improving the reaction efficiency and output. Stable pressure helps to maintain the consistency of the reaction process, thus ensuring the stability and consistency of the product quality.
[0078] As an implementable embodiment, the reduction furnace further includes an adjusting member, which is arranged on the connecting pipe 600, and the adjusting member is configured to adjust the flow rate of the material in the connecting pipe 600;
[0079] Exemplarily, by arranging an adjusting member on the connecting pipe 600, the amount of material entering the reduction furnace can be precisely controlled, thereby ensuring the stability and efficiency of the reduction process.
[0080] Exemplarily, the adjusting member can be a control valve, such as: ball valve, butterfly valve, needle valve, etc.
[0081] As an implementable embodiment, the reduction furnace further includes a flow rate detection member, which is arranged on the connecting pipe 600, and the flow rate detection member is configured to detect the flow rate of the material in the connecting pipe 600.
[0082] Exemplarily, by arranging a flow rate detection member on the connecting pipe 600, data on the material flow rate can be obtained in real time, thereby providing a basis for system control and adjustment.
[0083] Exemplarily, the flow rate detection member can be a turbine flowmeter, electromagnetic flowmeter, ultrasonic flowmeter, mass flowmeter, etc.
[0084] Considering adding a flow rate detection member and an adjusting member on the connecting pipe 600 respectively, fixed-point adjustment of the flow rate and ratio of the feed hydrogen and trichlorosilane at each nozzle in the furnace can be achieved, significantly improving the effective conversion rate of trichlorosilane in the reduction furnace and suppressing the occurrence of side reactions.
[0085] Figure 5Schematically show the structural schematic diagram of the reduction furnace provided by the fourth embodiment of the present application.
[0086] As an achievable implementation manner, there is a first gap between adjacent first pipe segments 311. There is a second gap between adjacent second pipe segments 321.
[0087] When the first feed pipe 310 and the second feed pipe 320 are in the first plane, the first plane is parallel to the plane where the chassis 200 is located. Along the direction from the center of the chassis 200 to the outer periphery of the chassis 200, the projection of the first gap on the second feed pipe 320 covers at least part of the second gap.
[0088] In some embodiments, referring to Figure 4 As shown, when the first feed pipe 310 and the second feed pipe 320 are in the first plane, along the center of the chassis 200 to the outer periphery of the chassis 200, the first feed pipe 310 and the second feed pipe 320 are arranged at intervals in sequence. A first gap is formed between adjacent two first pipe segments 311. Along the direction from the center of the chassis 200 to the outer periphery of the chassis 200, the projection of the first gap on the second feed pipe 320 covers at least part of the second gap. In this way, the positions of the first gap and the second gap below the chassis 200 are arranged correspondingly, which helps the feed main pipe 500 to convey materials to the first pipe segments 311 through the first gap, and helps the feed main pipe 500 to convey materials to the second pipe segments 321 through the second gap, simplifying the structure of the feed main pipe 500 for conveying materials to the first feed pipe 310 and the second feed pipe 320.
[0089] In other embodiments, referring to Figure 5 As shown, when the first feed pipe 310 and the second feed pipe 320 are in the first plane, along the center of the chassis 200 to the outer periphery of the chassis 200, the first feed pipe 310 and the second feed pipe 320 are arranged at intervals in sequence. A first gap is formed between adjacent two first pipe segments 311. Along the direction from the center of the chassis 200 to the outer periphery of the chassis 200, the projection of the first gap on the second feed pipe 320 covers at least part of the second pipe segment 321. Referring to Figure 5 As shown, in this way, the first pipe segments 311 and the second pipe segments 321 are arranged in a cross shape. The cross-shaped arrangement helps to reduce the dead zone in the chassis 200, ensure that the materials can enter the furnace from any position on the chassis 200, and improve the uniformity of material conveyance.
[0090] Figure 6 Schematically show the structural schematic diagram of the first pipe segment 311 of the reduction furnace provided by the embodiment of the present application. Figure 7 Schematically show the structural schematic diagram of the second pipe segment 321 of the reduction furnace provided by the embodiment of the present application. Figure 8 Schematically show the structural schematic diagram of the chassis 200 of the reduction furnace provided by the embodiment of the present application.
[0091] As an implementable embodiment, referring to Figure 6 and Figure 8 As shown, a plurality of first nozzles 311a are provided on the first pipe section 311. Along the extending direction of the first pipe section 311, the plurality of first nozzles 311a are arranged at intervals in sequence. A plurality of first feed ports 210 are provided on the chassis 200. The plurality of first nozzles 311a communicate with the plurality of first feed ports 210 through the feed branch pipes 400 one by one. By providing a plurality of first nozzles 311a on the first pipe section 311 and communicating with the first feed ports 210 on the chassis 200 through the feed branch pipes 400, the feed pipe 300 can convey materials into the furnace, realizing the uniform distribution and precise control of the materials in the furnace.
[0092] As an implementable embodiment, referring to Figure 7 As shown, a plurality of second nozzles 321a are provided on the second pipe section 321. Along the extending direction of the second pipe section 321, the plurality of second nozzles 321a are arranged at intervals in sequence.
[0093] A plurality of second feed ports 220 are provided on the chassis 200. The plurality of second nozzles 321a communicate with the plurality of second feed ports 220 through the feed branch pipes 400 one by one. By providing a plurality of second nozzles 321a on the second pipe section 321 and communicating with the second feed ports 220 on the chassis 200 through the feed branch pipes 400, the feed pipe 300 can convey materials into the furnace, realizing the uniform distribution and precise control of the materials in the furnace.
[0094] Exemplarily, on the chassis 200, the first feed ports 210 and the second feed ports 220 are evenly distributed on the reduction furnace chassis 200 to ensure that the materials enter the furnace evenly over the entire chassis 200. In this way, it is possible to avoid excessive or too small material flow rates in some areas of the furnace and avoid uneven material distribution.
[0095] As an implementable embodiment, the first pipe section 311 and / or the second pipe section 321 is a ring-shaped pipe. The ring-shaped pipe with a ring structure helps to balance the pressure distribution in the pipeline, reduce pressure fluctuations and non-uniformity. The ring-shaped pipe can reduce flow resistance and turbulence, optimize the material dynamics performance, thereby improving the conveying efficiency. At the same time, considering that the space under the reduction furnace chassis 200 is limited itself and needs to accommodate various equipment and pipelines, including the feed pipe 300, the exhaust pipe, the cooling system, etc. Too many feed pipes 300 will occupy valuable space and affect the layout and operation of other systems. The ring-shaped pipe can be arranged around the outer periphery of the chassis 200, so that the central area of the chassis 200 can be used for other purposes, thus reasonably utilizing the space under the reduction furnace chassis 200.
[0096] As an implementable embodiment, the diameters of the first pipe segment 311 and the second pipe segment 321 are not equal.
[0097] Exemplarily, considering that the space under the reduction furnace chassis 200 is limited per se and needs to accommodate various devices and pipelines, in some embodiments of the present application, the first feed pipe 310 and the second feed pipe are arranged in upper and lower layers. The first feed pipe 310 includes at least two first pipe segments 311. The second feed pipe 320 includes at least two second pipe segments 321. At the same time, the diameters of the first pipe segment 311 and the second pipe segment 321 are set to be unequal to reasonably utilize the limited space under the reduction furnace chassis 200.
[0098] In some embodiments, the diameter of the first pipe segment 311 is greater than the diameter of the second pipe segment 321.
[0099] In other embodiments, the diameter of the first pipe segment 311 is less than the diameter of the second pipe segment 321.
[0100] As an implementable embodiment, the diameters of both the first pipe segment 311 and the second pipe segment 321 are greater than or equal to 80 mm and less than or equal to 150 mm.
[0101] Exemplarily, when the diameters of both the first pipe segment 311 and the second pipe segment 321 are greater than 150 mm, since the diameters of the first pipe segment 311 and the second pipe segment 321 are too large, the first pipe segment 311 and the second pipe segment 321 cannot be accommodated under the reduction furnace chassis 200. The first feed pipe 310 and the second feed pipe 320 cannot be arranged in upper and lower layers in a stacked manner, nor can they be arranged at intervals on the same plane. The larger feed pipe 300 occupies more space, which may affect the layout and installation of other devices. At the same time, the larger feed pipe 300 requires a stronger support and fixing system, increasing the complexity of design and construction.
[0102] When the diameters of both the first pipe segment 311 and the second pipe segment 321 are less than 80 mm, the smaller pipe diameter will limit the flow rate of the material passing through the pipeline, resulting in a relatively small material flow rate. Furthermore, the material supplied by the feed pipe 300 to the reduction furnace will be insufficient. In addition, since the frictional resistance of the material flowing in the smaller pipe diameter is large, this will reduce the pressure of the material, causing material pressure loss and reducing the flow rate of the material.
[0103] Therefore, in the present application, the diameters of the first pipe segment 311 and the second pipe segment 321 are set to be both greater than or equal to 80 mm and less than or equal to 150 mm to ensure that the material flows smoothly through the feed pipe 300 into the furnace chamber, while reducing the occupation of the space under the reduction furnace chassis 200.
[0104] In some embodiments, when the number of the first pipe segments 311 is three and the number of the second pipe segments 321 is three, the diameter of the first pipe segments 311 can be 80 mm, and the diameter of the second pipe segments 321 can be 100 mm.
[0105] Those skilled in the art will readily conceive of other embodiments of the present application after considering the specification and practicing the application disclosed herein. The present application is intended to cover any variations, uses, or adaptations of the present application, which follow the general principles of the present application and include common general knowledge or conventional technical means in the technical field not disclosed in the present application. The specification and examples are only regarded as exemplary, and the true scope and spirit of the present application are pointed out by the following claims.
[0106] It should be understood that the present application is not limited to the exact structures described above and shown in the drawings, and various modifications and changes can be made without departing from its scope. The scope of the present application is only limited by the appended claims.
Claims
1. A reduction furnace, characterized in that, include: furnace body; A chassis, wherein the chassis is connected to the furnace body, and the chassis and the furnace body surround to form a furnace; A feed pipe is arranged on a side of the bottom plate away from the furnace body; the feed pipe is connected to the furnace; the feed pipe is arranged close to the outer periphery of the bottom plate; The feed pipe comprises at least two feed pipe sections, and along the circumference of the chassis, at least two feed pipe sections are sequentially spaced apart.
2. The reduction furnace according to claim 1, wherein The feed pipe comprises a first feed pipe and a second feed pipe; the first feed pipe and the second feed pipe are sequentially spaced apart along the height direction of the furnace body; And / or, the feed pipe includes a first feed pipe and a second feed pipe; the first feed pipe and the second feed pipe are arranged in sequence and spaced apart from the center of the chassis to the periphery of the chassis.
3. The reduction furnace according to claim 2, characterized in that, The first feed pipe includes at least two first pipe sections, and at least two of the first pipe sections are arranged in sequence at intervals along the circumference of the chassis; the second feed pipe includes at least two second pipe sections, and at least two of the second pipe sections are arranged in sequence at intervals along the circumference of the chassis.
4. The reduction furnace according to claim 3, characterized in that, There is a first gap between adjacent first pipe sections, and there is a second gap between adjacent second pipe sections; When the first feeding pipe and the second feeding pipe are in a first plane, the first plane is parallel to the plane where the bottom plate is located; Along the direction from the center of the bottom plate to the periphery of the bottom plate, the projection of the first gap on the second feeding pipe covers at least a part of the second gap.
5. The reduction furnace according to claim 3, characterized in that, The first pipe section is provided with a plurality of first nozzles, and the plurality of first nozzles are sequentially spaced apart along the extending direction of the first pipe section; The chassis is provided with a plurality of first feed ports, and the plurality of first nozzles are connected to the plurality of first feed ports through feed branch pipes in a one-to-one correspondence.
6. The reduction furnace according to claim 3, characterized in that, The second pipe section is provided with a plurality of second nozzles, and the plurality of second nozzles are sequentially spaced apart along the extending direction of the second pipe section; The chassis is provided with a plurality of second feed ports, and the plurality of second nozzles are connected to the plurality of second feed ports through feed branch pipes in a one-to-one correspondence.
7. The reduction furnace according to any one of claims 3-6, characterized in that, The first pipe section and / or the second pipe section is an annular pipe; and / or, the diameter of the first pipe section is not equal to the diameter of the second pipe section; And / or, the diameters of the first pipe section and the second pipe section are both greater than or equal to 80 mm and less than or equal to 150 mm.
8. The reduction furnace according to claim 7, wherein It also includes a feed main pipe and a pressure detection component, and the first pipe section and the second pipe section are connected to the feed main pipe through a connecting pipe; The pressure detection component is connected to the feed main pipe, and the pressure detection component is configured to detect the pressure of the material in the feed main pipe.
9. The reduction furnace according to claim 8, wherein The pressure of the feed main pipe is greater than or equal to 0.6 MPa and less than or equal to 0.7 MPa.
10. The reduction furnace according to claim 8, wherein, Also included is a regulating member, the regulating member is disposed on the connecting pipe, and the regulating member is configured to regulate the flow of the material in the connecting pipe; And / or, the reduction furnace further comprises a flow detection component, wherein the flow detection component is disposed on the connecting pipe, and the flow detection component is configured to detect the flow of the material in the connecting pipe.