Hard shaft seed crystal lifting device

By adopting a water-cooled structure with built-in lifting rods in the hard shaft seed crystal lifting device, the problem of poor cooling effect of the existing device is solved, and the volume reduction and cooling efficiency are improved, and the service life is extended.

CN223103132UActive Publication Date: 2025-07-15ZHEJIANG JINGTAI SEMICON CO LTD
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Patent Information

Application Number
CN202422362540.6
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-09-27
Publication Date
2025-07-15
Estimated Expiration
2034-09-27

AI Technical Summary

Technical Problem

The existing hard shaft seed crystal lifting device has poor cooling effect. The unreasonable design leads to a large volume. The contact time and area of cooling water and the seed crystal lifting rod are short, and the temperature cannot be quickly taken away.

Method used

The water cooling device designed with built-in lifting rod is designed. The lifting rod is equipped with a water pipe. The water pipe is in full contact with the inner wall of the lifting rod. The effective circulation of cooling water is ensured through the rotary joint and sealing structure, and the sealing and connection tightness are enhanced.

Benefits of technology

It effectively reduces the device volume, improves the cooling effect and efficiency, achieves the expected cooling effect in a short time, and extends the product service life.

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Patent Text Reader

Abstract

The utility model relates to a hard shaft seed crystal lifting device. The technical problem to be solved by the utility model is to provide the hard shaft seed crystal lifting device. According to the technical scheme, the seed crystal lifting device comprises a seed crystal lifting rod assembly, a lifting rod rotating device and a lifting rod water cooling device, the seed crystal lifting rod assembly comprises a lifting rod and a water pipe, a lifting rod water flowing cavity is formed in the lifting rod, the water pipe comprises a water pipe body, a water pipe boss and a water pipe end sealing part, and a water pipe inner butt joint cavity is formed in the water pipe. A water pipe water inlet hole penetrating front and back is formed in the bottom of the water pipe inner butt joint cavity, a water pipe drainage hole is formed in the outer wall of the water pipe boss, and a drainage gap is formed between the outer wall of the water pipe and the lifting rod water flowing cavity. Compared with the prior art, the lifting rod water cooling device has the advantages that the structural design that the lifting rod is arranged inside is adopted, the overall size is effectively reduced, cooling water can make full contact with the inner wall of the lifting rod through the water pipe, and therefore the cooling effect and efficiency are effectively improved, and the cooling expectation is achieved in a short time.
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Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnaces, and particularly relates to a hard-axis seed crystal lifting device. Background Art

[0002] A seed crystal is a small crystal having the same crystal orientation as the desired crystal and is often used as a seed for growing single crystals. The lifting mechanism of the seed crystal is an important part of the single crystal furnace to ensure that the seed crystal can be stably lifted and rotated in the furnace body, thereby guiding the growth of single crystals. To ensure the stability and reliability of hard-axis seed crystal lifting, water cooling treatment is generally required for the seed crystal rod. The water cooling structure of the existing hard-axis seed crystal lifting device has poor cooling effect, and the unreasonable design results in a large volume. The contact time and area between the cooling water and the seed crystal lifting rod are both short, and the temperature cannot be quickly taken away. Therefore, improvements and optimizations are made. Summary of the Utility Model

[0003] To solve the above problems, the technical problem to be solved by the utility model is to provide a hard-axis seed crystal lifting device.

[0004] The technical solution adopted by the hard-axis seed crystal lifting device of the utility model: It includes a seed crystal lifting rod assembly, a lifting rod rotating device for driving the seed crystal lifting rod assembly to rotate, and a lifting rod water cooling device docked with the seed crystal lifting rod assembly. It is characterized in that the seed crystal lifting rod assembly includes a lifting rod and a water pipe. A lifting rod water passage cavity is provided inside the lifting rod. The water pipe includes a water pipe main body inserted into the lifting rod water passage cavity, a water pipe boss docked with the lifting rod water passage cavity, and a water pipe end seal part welded to the end of the lifting rod. A water pipe inner docking cavity is provided inside the water pipe. A water pipe water inlet hole penetrating through the front and back is provided at the bottom of the water pipe inner docking cavity. A water pipe drain hole communicated with the water pipe inner docking cavity is provided on the outer wall of the water pipe boss. A drainage gap communicated with the water pipe drain hole is formed between the outer wall of the water pipe and the lifting rod water passage cavity;

[0005] The lifting rod water cooling device includes a water inlet pipe, a rotary joint shaft sleeved on the water inlet pipe, a rotary outer shell covering the rotary joint shaft, a water inlet joint, and a water outlet joint. One end of the water inlet pipe is docked with the water inlet joint and the other end abuts against the water pipe inner docking cavity. The water inlet pipe is provided with a water inlet pipe through hole communicated with the water inlet joint and the water pipe water inlet hole. A shell docking cavity communicated with the water outlet joint is provided inside the rotary outer shell. A joint shaft water passage hole communicated with the shell docking cavity is provided inside the rotary joint shaft. A second drainage gap communicated with the water pipe drain hole is formed between the joint shaft water passage hole and the outer wall of the rotary joint shaft.

[0006] The seed crystal lifting rod assembly further includes a lifting rod sealing ring and fastening screws. Between the water pipe drainage hole and the water pipe end sealing part of the water pipe boss, there are a water pipe anti-displacement groove and a lifting rod sealing ring limiting groove for limiting the lifting rod sealing ring. Inside the end of the lifting rod, there is a lifting rod inner boss corresponding to the water pipe anti-displacement groove. Around the lifting rod inner boss, the lifting rod is provided with screw mounting holes at intervals around an arc for mounting the fastening screws.

[0007] At one end of the water pipe body away from the water pipe boss, there are water pipe strengthening blocks arranged at intervals around an arc and fitting with the lifting rod water passage cavity.

[0008] At one end of the water pipe body away from the water pipe boss, there is a water pipe transition cut.

[0009] At the end of the water inlet pipe, there is a water inlet pipe docking part corresponding to the inner docking cavity of the water pipe. Between the inner docking cavity of the water pipe and the water pipe water inlet hole, there is a water pipe inner conical surface. Between the water inlet pipe docking part and the water pipe inner conical surface, there is a conical seal. A water pipe end sealing ring is sleeved on the water inlet pipe docking part.

[0010] Inside the water pipe end sealing part, there is a threaded connection with the end of the rotary joint shaft. The lifting rod water cooling device further includes a compression spring placed in the housing docking cavity. One end of the compression spring abuts against the side part of the housing docking cavity and the other end abuts against the end of the rotary joint shaft.

[0011] The advantages of the hard shaft seed crystal lifting device of the present invention are as follows: The lifting rod water cooling device adopts a structural design with the lifting rod built-in, effectively reducing the overall volume and enabling the cooling water to fully contact the inner wall of the lifting rod via the water pipe, thereby effectively improving the cooling effect and efficiency and achieving the cooling expectation in a short time. Brief Description of the Drawings

[0012] The present invention will be further described in detail below in conjunction with the drawings and specific embodiments.

[0013] Figure 1 is the structural schematic diagram of the hard shaft seed crystal lifting device of the present invention;

[0014] Figure 2 is the exploded view of the seed crystal lifting rod assembly of the present invention;

[0015] Figure 3 is the structural schematic diagram of the lifting rod of the present invention;

[0016] Figure 4 is Figure 3 the enlarged view of;

[0017] Figure 5 is a structural schematic diagram of a water pipe of the present invention;

[0018] Figure 6 is Figure 5 an enlarged view of;

[0019] Figure 7 is a schematic structural view of the water-cooling device for the lifting rod of the present utility model;

[0020] Figure 8 is a half-sectional view of the water-cooling device for the lifting rod of the present utility model;

[0021] Figure 9 is another schematic structural view of the water pipe of the present utility model;

[0022] Figure 10 is a schematic structural view of the water inlet pipe of the present utility model. Specific embodiments

[0023] As Figure 1-10 shown, the hard-axis seed crystal lifting device involved in the present utility model includes a seed crystal lifting rod assembly 1, a lifting rod rotating device 2 for driving the seed crystal lifting rod assembly 1 to rotate, and a lifting rod water-cooling device 3 docked with the seed crystal lifting rod assembly 1. The seed crystal lifting rod assembly 1 includes a lifting rod 5 and a water pipe 6. A lifting rod water passage 10 is provided inside the lifting rod 5. The water pipe 6 includes a water pipe main body 11 inserted into the lifting rod water passage 10, a water pipe boss 12 docked with the lifting rod water passage 10, and a water pipe end seal part 13 welded to the end of the lifting rod 5. A water pipe inner docking cavity 15 is provided inside the water pipe 6. A water pipe water inlet hole 16 penetrating through the front and back is provided at the bottom of the water pipe inner docking cavity 15. A water pipe drain hole 17 communicating with the water pipe inner docking cavity 15 is provided on the outer wall of the water pipe boss 12. A drainage gap communicating with the water pipe drain hole 17 is formed between the outer wall of the water pipe 6 and the lifting rod water passage 10. The lifting rod water-cooling device 3 includes a water inlet pipe 20, a rotary joint shaft 21 sleeved on the water inlet pipe 20, a rotary housing 22 covering the rotary joint shaft 21, a water inlet joint 23, and a water outlet joint 24. One end of the water inlet pipe 20 is docked with the water inlet joint 23 and the other end abuts against the water pipe inner docking cavity 15. The water inlet pipe 20 is provided with a water inlet pipe through hole 30 communicating with the water inlet joint 23 and the water pipe water inlet hole 16. An outer housing docking cavity 31 communicating with the water outlet joint 24 is provided inside the rotary housing 22. A joint shaft water passage 32 communicating with the outer housing docking cavity 31 is provided inside the rotary joint shaft 21. A second drainage gap communicating with the water pipe drain hole 17 is formed between the joint shaft water passage 32 and the outer wall of the rotary joint shaft 21. The lifting rod water-cooling device 3 adopts a structural design of being built into the lifting rod 5, effectively reducing the overall volume and enabling the cooling water to fully contact the inner wall of the lifting rod 5 via the water pipe, thereby effectively improving the cooling effect and efficiency and achieving the cooling expectation in a short time.

[0024] The seed crystal lifting rod assembly 1 further includes a lifting rod sealing ring 7 and fastening screws 8. Between the water pipe boss 12 and the water pipe end sealing part 13 of the water pipe drainage hole 17, the water pipe anti-displacement groove 34 and the lifting rod sealing ring limiting groove 35 for limiting the lifting rod sealing ring 7 are provided. Inside the end of the lifting rod 5, a lifting rod inner boss 36 corresponding to the water pipe anti-displacement groove 34 is provided. At the lifting rod inner boss 36 of the lifting rod 5, screw mounting holes 37 for mounting the fastening screws 8 are arranged at intervals around an arc, strengthening the connection tightness between the water pipe 6 and the lifting rod 5, effectively preventing displacement caused by frequent water flow impacts, thereby reducing the sealing performance.

[0025] At one end of the water pipe main body 11 away from the water pipe boss 12, water pipe reinforcement blocks 39 that fit the lifting rod water flow cavity 10 are arranged at intervals around an arc, strengthening the overall strength of the water pipe 6 and preventing the lack of support at its inner end from affecting water flow cooling.

[0026] At one end of the water pipe main body 11 away from the water pipe boss 12, a water pipe transition notch 40 is provided, which plays a buffering role and prevents damage to the lifting rod caused by excessive impact when the water pipe flows out.

[0027] At the end of the water inlet pipe 20, a water inlet pipe docking part 41 corresponding to the water pipe inner docking cavity 15 is provided. A water pipe inner conical surface 42 is formed between the water pipe inner docking cavity 15 and the water pipe water inlet hole 16. A conical seal is formed between the water inlet pipe docking part 41 and the water pipe inner conical surface 42. A water pipe end sealing ring 25 is sleeved on the water inlet pipe docking part 41, and the sealing effect is good.

[0028] Inside the water pipe end sealing part 13, it is threadedly connected to the end of the rotary joint shaft 21. The lifting rod water cooling device 3 further includes a compression spring 26 placed in the housing docking cavity 31. One end of the compression spring 26 abuts against the side of the housing docking cavity 31 and the other end abuts against the end of the rotary joint shaft 21, further improving the overall waterproof sealing performance and enhancing the service life of the product.

[0029] The above are only the preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements, and improvements made within the spirit and principles of the present invention are all included in the protection scope of the present invention.

Claims

1. A hard-axis seed crystal lifting device, comprising a seed crystal lifting rod assembly (1), a lifting rod rotating device (2) for driving the rotation of the seed crystal lifting rod assembly (1), and a lifting rod water cooling device (3) docked with the seed crystal lifting rod assembly (1), characterized in that: The seed crystal lifting rod assembly (1) comprises a lifting rod (5) and a water pipe (6), wherein a lifting rod water flow cavity (10) is provided in the lifting rod (5), and the water pipe (6) comprises a water pipe body (11) penetrating the lifting rod water flow cavity (10), a water pipe boss (12) connected to the lifting rod water flow cavity (10), and a water pipe end seal (13) welded to the end of the lifting rod (5), wherein a water pipe inner docking cavity (15) is provided in the water pipe (6), and a water pipe water inlet hole (16) penetrating the front and rear of the water pipe inner docking cavity (15) is provided at the bottom, and a water pipe drainage hole (17) communicating with the water pipe inner docking cavity (15) is provided on the outer wall of the water pipe boss (12), and a drainage gap communicating with the water pipe drainage hole (17) is formed between the outer wall of the water pipe (6) and the lifting rod water flow cavity (10); The lifting rod water cooling device (3) comprises a water inlet pipe (20), a rotary joint shaft (21) sleeved on the water inlet pipe (20), a rotary shell (22) covered outside the rotary joint shaft (21), a water inlet joint (23), and a water outlet joint (24); one end of the water inlet pipe (20) is butted against the water inlet joint (23) and the other end thereof is butted against a butting cavity (15) in the water pipe; the water inlet pipe (20) is provided with a water inlet pipe through hole (30) communicating with the water inlet joint (23) and the water inlet hole (16) of the water pipe; the rotary shell (22) is provided with a shell butting cavity (31) communicating with the water outlet joint (24); the rotary joint shaft (21) is provided with a joint shaft water discharge hole (32) communicating with the shell butting cavity (31); a second drainage gap communicating with the water pipe drainage hole (17) is formed between the joint shaft water discharge hole (32) and the outer wall of the rotary joint shaft (21).

2. The hard-axis seed crystal lifting device according to claim 1, wherein: The seed crystal lifting rod assembly (1) also includes a lifting rod sealing ring (7) and a fastening screw (8); the water pipe boss (12) is provided with a water pipe anti-displacement groove (34) and a lifting rod sealing ring limiting groove (35) for limiting the position of the lifting rod sealing ring (7) between the water pipe drainage hole (17) and the water pipe end sealing portion (13); a lifting rod inner boss (36) corresponding to the water pipe anti-displacement groove (34) is provided in the end of the lifting rod (5); and the lifting rod (5) is provided with screw mounting holes (37) for mounting the fastening screw (8) at intervals around a circular arc at the lifting rod inner boss (36).

3. The hard-axis seed crystal lifting device according to claim 1, characterized in that: One end of the water pipe body (11) away from the water pipe boss (12) is provided with water pipe reinforcement blocks (39) that fit in the lifting rod water cavity (10) at intervals around a circular arc.

4. The hard axis seed crystal lifting device according to claim 1, characterized in that: A water pipe transition cutout (40) is provided at one end of the water pipe body (11) away from the water pipe boss (12).

5. The hard-axis seed crystal lifting device according to claim 1, characterized in that: The end of the water inlet pipe (20) is provided with a water inlet pipe docking part (41) corresponding to the inner docking cavity (15) of the water pipe. A water pipe inner conical surface (42) is formed between the inner docking cavity (15) of the water pipe and the water inlet hole (16) of the water pipe. A conical seal is formed between the water inlet pipe docking part (41) and the water pipe inner conical surface (42). A water pipe end sealing ring (25) is sleeved on the water inlet pipe docking part (41).

6. The hard-axis seed crystal lifting device according to claim 1, wherein: Inside the water pipe end sealing part (13), there is a threaded connection with the end of the rotary joint shaft (21). The lifting rod water cooling device (3) further includes a compression spring (26) placed inside the housing docking cavity (31). One end of the compression spring (26) abuts against the side of the housing docking cavity (31), and the other end abuts against the end of the rotary joint shaft (21).