Molecular pump with split type stationary blade array

Abstract

The utility model relates to the technical field of molecular pumps, and discloses a molecular pump with a split type stationary blade array, the molecular pump comprises a shell, a driving part, a movable impeller and the stationary blade array, the driving part is arranged in the shell, the driving part is provided with a rotating shaft, the movable impeller is connected to one end of the rotating shaft in the axial direction, and the stationary blade array is arranged in the shell. The movable impeller comprises a movable impeller body and movable blades arranged on the movable impeller body, the static blade array is arranged in the shell and comprises a first static blade array and a second static blade array, the first static blade array and the second static blade array are of a split structure, and the first static blade array and the second static blade array are arranged in the radial direction of the rotating shaft. The outer end of the first stationary blade row and the outer end of the second stationary blade row are both fixedly connected to the shell, and the inner end of the first stationary blade row and the inner end of the second stationary blade row are connected through a connecting piece and are separated from the movable impeller body. The molecular pump has the beneficial effect that the operation stability of the molecular pump is improved.

Description

Technical Field

[0001] The present application relates to the technical field of molecular pumps, and in particular, to a molecular pump with a split stator vane row. Background Art

[0002] As an essential key device in vacuum technology, the continuous innovation of the performance and technology of molecular pumps is of great significance for promoting the development of vacuum science and related application fields. The stator vane row arranged on the molecular pump is usually assembled at intervals with the impeller. The quality of the stator vane row of the molecular pump has a great influence on the performance of the molecular pump. However, in the related art, after the stator vane row is produced, it is necessary to cut the stator vane row into two parts by wire cutting, and then install the stator vane row on the impeller. However, after the stator vane row is wire cut, the inner ring of the stator vane row will be warped to a certain extent, which may cause rubbing with the impeller, thereby reducing the overall operation quality of the molecular pump. Summary of the Utility Model

[0003] The present application provides a molecular pump with a split stator vane row, which solves the technical problem that the inner ring of the split stator vane row is warped, thereby reducing the running stability of the molecular pump, and achieves the technical effect of improving the running stability of the molecular pump.

[0004] To achieve the above object, the main technical solutions adopted in the present application include:

[0005] An embodiment of the present application provides a molecular pump with a split stator vane row, including a housing, a driving member, an impeller, and a stator vane row. The driving member is arranged in the housing. The driving member has a rotating shaft. The impeller is connected to one end of the rotating shaft in the axial direction. The impeller includes an impeller body and impeller blades arranged on the impeller body. The stator vane row is arranged in the housing. The stator vane row includes a first stator vane row and a second stator vane row. The first stator vane row and the second stator vane row are of a split structure. Wherein, along the radial direction of the rotating shaft, the outer ends of the first stator vane row and the second stator vane row are both fixedly connected to the housing, and the inner ends of the first stator vane row and the second stator vane row are connected by a connecting member and are respectively spaced apart from the impeller body.

[0006] In the molecular pump with a split stator vane row proposed by the embodiment of the present application, the inner ends of the first stator vane row and the second stator vane row are connected together by a connecting member. The first stator vane row and the second stator vane row are connected by a rigid connecting member. The inner ends of the first stator vane row and the second stator vane row are clamped with each other, which can effectively reduce the warping of the inner ends of the first stator vane row and the second stator vane row, so that the same-side side surfaces of the first stator vane row and the second stator vane row in the thickness direction are substantially kept in the same plane, reducing the probability of friction between the first stator vane row and the second stator vane row and the impeller, and improving the running stability of the molecular pump.

[0007] Optionally, the connecting member is detachably connected to the first stationary vane row, and / or the connecting member is detachably connected to the second stationary vane row.

[0008] When the connecting member, the first stationary vane row or the second stationary vane row fails and needs to be repaired or replaced, the detachable connection enables maintenance personnel to quickly locate and replace the damaged components without disassembling the entire component for repair, which greatly improves the maintenance efficiency and reduces the maintenance cost. Moreover, when the connecting member, the first stationary vane row or the second stationary vane row ages and needs to be replaced, the aging components can also be accurately replaced, reducing the usage cost of the molecular pump.

[0009] Optionally, the first stationary vane row includes a first body and first stationary vanes, and the second stationary vane row includes a second body and second stationary vanes. Along the radial direction of the rotating shaft, the first body is arranged at the inner end of the first stationary vanes, the second body is arranged at the inner end of the second stationary vanes, the first body and the second body are connected by a connecting member and are respectively spaced apart from the impeller body.

[0010] The first body is arranged at the inner end of the first stationary vanes, the second body is arranged at the inner end of the second stationary vanes, the first body and the second body are connected by a connecting member and are respectively spaced apart from the impeller body, which can make the overall mechanism of the molecular pump more compact and reduce the space occupancy rate of the impeller and the stationary vane row in the molecular pump.

[0011] Optionally, the first body and the second body form an annular structure sleeved on the impeller body.

[0012] On the one hand, the annular structure can more tightly wrap the impeller body, reduce the space occupancy, improve the compactness of the molecular pump structure and the space utilization rate inside the molecular pump. On the other hand, the cross-section of the rotating shaft is usually designed as a circle, and the cross-section of the impeller body is also correspondingly designed as an annular shape. Sleeving the first body and the second body into an annular structure can make the first body and the second body more adaptable to the impeller body.

[0013] Optionally, the connecting member includes a first pin and a second pin. Along the circumferential direction of the rotating shaft, the first pin and the second pin are respectively arranged at both ends of the first body; along the circumferential direction of the rotating shaft, first holes and second holes for cooperating with the first pin and the second pin are respectively arranged at both ends of the second body.

[0014] The plug can ensure the tightness and firmness of the connection between the first body and the second body, can withstand large tensile and compressive forces, keep the same-side sides of the first stationary blade row and the second stationary blade row in the thickness direction substantially in the same plane, reduce the probability of warping of the first stationary blade row and the second stationary blade row, decrease the possibility of friction and rubbing between the first stationary blade row and the second stationary blade row and the moving impeller, and improve the stability and reliability of the operation of the molecular pump. The price of the plug is usually relatively low. Using the plug as a connecting piece to connect the first body and the second body has a high cost performance and reduces the production cost of the molecular pump.

[0015] Optionally, both ends of the first body have a first end face and a second end face, both the first end face and the second end face are parallel to the axis of the rotating shaft, the first plug is arranged on the first end face, and the second plug is arranged on the second end face.

[0016] The first plug is arranged on the first end face and the second plug is arranged on the second end face, which can connect the first stationary blade row and the second stationary blade row, be adaptively installed on the molecular pump, reduce the probability of warping of the stationary blade row, and decrease the probability of friction between the stationary blade row and the moving impeller.

[0017] Optionally, there are multiple first stationary blades, and the multiple first stationary blades are arranged at intervals along the circumferential direction of the rotating shaft. There are multiple second stationary blades, and the multiple second stationary blades are arranged at intervals along the circumferential direction of the rotating shaft.

[0018] The multiple first stationary blades and the multiple second stationary blades can more effectively guide gas molecules to flow along a predetermined path, reduce the backflow and collision of gas molecules, thereby improving the pumping efficiency of the molecular pump. Along the circumferential direction of the rotating shaft, the multiple first stationary blades and the multiple second stationary blades are arranged at intervals, which can also help disperse the stress borne by the first body and the second body, and reduce the vibration and noise caused by stress concentration.

[0019] Optionally, the moving impeller is constructed as multiple groups spaced apart, and there is a stationary blade row between any two adjacent moving impellers, and the stationary blade row is spaced apart from the adjacent moving impellers respectively.

[0020] Spacing the stationary blade row apart from the adjacent moving impellers respectively can improve the pumping performance of the molecular pump and reduce the backflow of gas molecules. The stationary blade row can play a guiding role. During the operation of the molecular pump, the first stationary blades and the second stationary blades on the stationary blade row can guide the gas molecules moving disorderly on the surfaces of the first stationary blades and the second stationary blades to move along a specific direction, reducing the probability of gas backflow inside the molecular pump. Moreover, since there may be liquids or other impurities in the gas, the cross-distribution of multiple stationary blade rows and multiple moving impellers helps to homogenize the multiphase flow in the gas, reduce the probability of gas-liquid separation, and improve the operation stability and reliability of the molecular pump.

[0021] Optionally, each set of moving blades includes a plurality of sub-moving blades, which are arranged at intervals in the circumferential direction of the rotating shaft.

[0022] When the moving blades rotate at high speed, momentum is transferred to the gas molecules through collisions with the gas molecules, enabling the gas molecules to obtain a directional movement speed. By arranging a plurality of sub-moving blades on the moving blades, the number of collisions between the moving blades and the gas molecules can be increased, improving the operating efficiency of the molecular pump. Moreover, the plurality of sub-moving blades are evenly spaced, which can reduce the probability of stress concentration occurring in the moving impeller body, reduce the generation of vibration and noise, and improve the stability and reliability of the molecular pump operation.

[0023] Optionally, the molecular pump further includes a stationary ring, which is adapted to press the outer ends of the first stationary blade row and the second stationary blade row in the radial direction of the rotating shaft against the housing.

[0024] The stationary ring presses the outer ends of the corresponding first stationary blade row and the second stationary blade row in the radial direction of the rotating shaft, reducing the probability of warping of the first stationary blade row and the second stationary blade row, and reducing the probability of friction and rubbing between the first stationary blade row and the second stationary blade row and the moving impeller, thereby improving the operating stability and reliability of the molecular pump. Description of the Drawings

[0025] In order to more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the following will briefly introduce the drawings required for use in the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0026] Figure 1 Structural schematic diagram of the molecular pump provided by the embodiment of the present application;

[0027] Figure 2 For Figure 1 Top view;

[0028] Figure 3 For Figure 1 Cross-sectional view in the B-B direction;

[0029] Figure 4 Structural schematic diagram of the stationary blade row provided by the embodiment of the present application;

[0030] Figure 5 Exploded structural schematic diagram of the stationary blade row provided by the embodiment of the present application;

[0031] Figure 6 For Figure 5 Top view;

[0032] Figure 7Schematic diagram of the structure of the first stator vane row provided by the embodiment of the present application;

[0033] Figure 8 is Figure 7 top view of;

[0034] Figure 9 Exploded structure diagram of the first stator vane row provided by the embodiment of the present application;

[0035] Figure 10 Schematic diagram of the structure of the second stator vane row provided by the embodiment of the present application;

[0036] Figure 11 is Figure 10 side view of.

[0037]

Description of the reference numerals

[0038] Molecular pump 100;

[0039] Housing 110;

[0040] Drive member 120;

[0041] Rotating shaft 121

[0042] Rotating impeller 130;

[0043] Rotating impeller body 131;

[0044] Rotating blade 132;

[0045] Sub-rotating blade 132a

[0046] Stator vane row 140;

[0047] First stator vane row 141;

[0048] First surface 1410;

[0049] First body 141a;

[0050] First stator vane 141b;

[0051] Second stator vane row 142;

[0052] Second surface 1420;

[0053] Second body 142a;

[0054] Second stator vane 142b;

[0055] Connecting member 150;

[0056] First pin 151;

[0057] Second pin 152;

[0058] The first hole 160;

[0059] The second hole 161;

[0060] The third hole 162;

[0061] The fourth hole 163;

[0062] The first end face 1310;

[0063] The second end face 1311;

[0064] The third end face 1312;

[0065] The fourth end face 1313;

[0066] The stationary ring 170. Specific embodiments

[0067] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the following will clearly and completely describe the technical solutions in the embodiments of this application with reference to the accompanying drawings in the embodiments of this application. Obviously, the described embodiments are some, but not all, of the embodiments of this application. Based on the embodiments in this application, all other embodiments obtained by those of ordinary skill in the art without making creative efforts fall within the scope of protection of this application.

[0068] Unless otherwise defined, all technical and scientific terms used in this application have the same meaning as commonly understood by those of ordinary skill in the technical field to which this application belongs; the terms used in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application; the terms "including" and "having" and any variations thereof in the specification, claims, and drawings of this application are intended to cover non-exclusive inclusion. The terms "first", "second", etc. in the specification, claims, or drawings of this application are used to distinguish different objects and not to describe a specific order or primary-secondary relationship.

[0069] Referring to "embodiments" in this application means that specific features, structures, or characteristics described in connection with the embodiments can be included in at least one embodiment of this application. The phrase appears in various places in the specification and does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment mutually exclusive with other embodiments. Those of ordinary skill in the art explicitly and implicitly understand that the embodiments described in this application can be combined with other embodiments.

[0070] In the description of the present application, it should be noted that, unless otherwise clearly specified and defined, the terms "installed", "connected", "joined", and "attached" shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a direct connection or an indirect connection through an intermediate medium, and it may be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0071] In the present application, the term "and / or" is merely an association relationship describing associated objects, indicating that three relationships may exist. For example, A and / or B may represent three situations: A exists alone, A and B exist simultaneously, and B exists alone. In addition, the character " / " in the present application generally represents an "or" relationship between the front and rear associated objects.

[0072] The term "a plurality of" appearing in the present application refers to two or more (including two). Similarly, "a plurality of groups" refers to two or more groups (including two groups), and "a plurality of sheets" refers to two or more sheets (including two sheets).

[0073] As an indispensable key device in vacuum technology, the continuous innovation of the performance and technology of the molecular pump is of great significance for promoting the development of vacuum science and related application fields. The stationary blade rows provided on the molecular pump are usually arranged at intervals with the rotating impellers, that is, arranged in the form of stationary blade row - rotating impeller - stationary blade row. The shaft structure rotates, and the rotating impeller rotates to provide power for gas molecules. The rotating impeller and the stationary blade row structure cross-match to achieve the layer-by-layer transmission of molecules. The gas to be pumped is directionally compressed and unidirectionally transmitted, and finally the gas molecules are discharged from the gas outlet on the molecular pump housing. The quality of the stationary blade row of the molecular pump has a great influence on the performance of the molecular pump.

[0074] However, in the related art, the stationary blade row is integrally formed and produced, and then the stationary blade row is cut into two parts by wire cutting, and then the stationary blade row and the rotating impeller are assembled at intervals. However, after the stationary blade row is cut by wire cutting, the inner and outer circles of the stationary blade row may be warped to a certain extent, resulting in rubbing against the rotating impeller, thereby reducing the overall operation quality of the molecular pump.

[0075] In view of this, the present application provides a molecular pump with a split stator vane row, which includes a housing, a driving member, a rotating impeller, and a stator vane row. The driving member is disposed inside the housing and has a rotating shaft. The rotating impeller is connected to one axial end of the rotating shaft. The rotating impeller includes a rotating impeller body and rotating vanes disposed on the rotating impeller body. The stator vane row is disposed inside the housing and includes a first stator vane row and a second stator vane row. The first stator vane row and the second stator vane row are of a split structure. Wherein, along the radial direction of the rotating shaft, the outer ends of both the first stator vane row and the second stator vane row are fixedly connected to the housing, and the inner ends of the first stator vane row and the second stator vane row are connected by a connecting member and are respectively spaced apart from the rotating impeller body. This can connect the inner ends of the first stator vane row and the second stator vane row, reduce the probability of warping of the inner rings of the first stator vane row and the second stator vane row, and improve the stability and reliability of the operation of the molecular pump.

[0076] For the convenience of description in the following embodiments, a molecular pump 100 with a split stator vane row according to an embodiment of the present application is taken as an example for description.

[0077] Please refer to Figures 1 to 6 , Figure 1 which is a schematic structural diagram of the molecular pump 100 provided by the embodiment of the present application; Figure 2 is Figure 1 a top view of Figure 3 is Figure 1 a sectional view taken along the B-B direction; Figure 4 is a schematic structural diagram of the stator vane row 140 provided by the embodiment of the present application; Figure 5 is an exploded structural diagram of the stator vane row 140 provided by the embodiment of the present application; Figure 6 is Figure 5 a top view of

[0078] In this embodiment, the molecular pump 100 includes a housing 110, a driving member 120, a rotating impeller 130, and a stator vane row 140. The driving member 120 is disposed inside the housing 110. The driving member 120 has a rotating shaft 121. The rotating impeller 130 is connected to one axial end of the rotating shaft 121. The rotating impeller 130 includes a rotating impeller body 131 and rotating vanes 132 disposed on the rotating impeller body 131. The stator vane row 140 is disposed inside the housing 110. The stator vane row 140 includes a first stator vane row 141 and a second stator vane row 142. The first stator vane row 141 and the second stator vane row 142 are of a split structure. Wherein, along the radial direction of the rotating shaft 121, the outer ends of both the first stator vane row 141 and the second stator vane row 142 are fixedly connected to the housing 110, and the inner ends of the first stator vane row 141 and the second stator vane row 142 are connected by a connecting member 150 and are respectively spaced apart from the rotating impeller body 131.

[0079] The impeller 130 is connected to the rotating shaft 121. When the molecular pump 100 operates, the rotating shaft 121 rotates, and then the impeller 130 rotates. The stationary blade row 140 does not rotate. The stationary blade row 140 is arranged below the impeller 130, and multiple stationary blade rows 140 and multiple impellers 130 are assembled at intervals. The impeller 130 is provided with an impeller body 131 and moving blades 132 arranged on the impeller body 131. When the impeller 130 rotates, the moving blades 132 rotate. According to the principles of fluid mechanics, aerodynamics, and the pre-set shape of the moving blades 132, the moving blades 132 will act on the surrounding air, thereby causing the air to flow in a preset direction. Through the cross-matching connection of the impeller 130 and the stationary blade row 140, the step-by-step transmission of air molecules can be realized, and the gas to be pumped can be directionally compressed and unidirectionally transmitted. The gap between the impeller 130 and the stationary blade row 140 has a great influence on the pumping speed and compression ratio of the molecular pump 100. On the premise of ensuring work reliability, the gap between the impeller 130 and the stationary blade row 140 should be as small as possible. Exemplarily, the gap between the impeller 130 and the stationary blade row 140 can be set between 1 mm and 1.2 mm.

[0080] The stationary blade row 140 further includes a first stationary blade row 141 and a second stationary blade row 142. The first stationary blade row 141 and the second stationary blade row 142 are of a split structure, that is to say, the first stationary blade row 141 and the second stationary blade row 142 are separated. Along the radial direction of the rotating shaft 121, the outer end of the first stationary blade row 141 (the direction away from the axis of the rotating shaft 121) is fixedly connected to the housing 110. The housing 110 presses and fixes the outer end of the first stationary blade row 141, so that the first stationary blade row 141 is fixed in the axial direction of the rotating shaft 121.

[0081] The inner ends of the first stationary blade row 141 and the second stationary blade row 142 are connected together by a connecting member 150. Exemplarily, the connecting member 150 can be rigid, such as bolt connection and rivet connection. By using the rigid connecting member 150 to connect the first stationary blade row 141 and the second stationary blade row 142, the inner ends of the first stationary blade row and the second stationary blade row are clamped to each other, which can effectively reduce the warping of the inner ends of the first stationary blade row 141 and the second stationary blade row 142, and keep the same-side sides of the first stationary blade row 141 and the second stationary blade row 142 in the same flatness in the thickness direction, reducing the probability of friction between the first stationary blade row 141 and the second stationary blade row 142 and the impeller 130, and improving the operating stability of the molecular pump 100.

[0082] Please refer to Figures 1 to 6 , in this embodiment, the connecting member 150 is detachably connected to the first stationary blade row 141, and / or the connecting member 150 is detachably connected to the second stationary blade row 142.

[0083] Specifically, the connecting member 150 can be installed on the first stationary vane row 141 and the second stationary vane row 142. The first stationary vane row 141 and the second stationary vane row 142 are connected by the connecting member 150, so that the same-side side surfaces of the first stationary vane row 141 and the second stationary vane row 142 in the thickness direction are kept in the same plane. For example, the first surface 1410 of the first stationary vane row 141 and the second surface 1420 of the second stationary vane row 142 are substantially kept in the same plane, reducing the warping between the first stationary vane row 141 and the second stationary vane row 142, and reducing the probability of friction between the first stationary vane row 141 and the second stationary vane row 142 and the impeller 130, thereby improving the operation stability and reliability of the molecular pump 100.

[0084] When the connecting member 150, the first stationary vane row 141 or the second stationary vane row 142 fails and needs to be repaired or replaced, the detachable connection enables maintenance personnel to quickly locate and replace the damaged parts without disassembling and repairing the entire component, which greatly improves the maintenance efficiency and reduces the maintenance cost. Moreover, when the connecting member 150, the first stationary vane row 141 or the second stationary vane row 142 ages and needs to be replaced, the aging parts can also be accurately replaced, reducing the usage cost of the molecular pump 100.

[0085] Please refer to Figures 1 to 6 , in this embodiment, the first stationary vane row 141 includes a first body 141a and first stationary vanes 141b, and the second stationary vane row 142 includes a second body 142a and second stationary vanes 142b. Along the radial direction of the rotating shaft 121, the first body 141a is arranged at the inner end of the first stationary vanes 141b, the second body 142a is arranged at the inner end of the second stationary vanes 142b, and the first body 141a and the second body 142a are connected by the connecting member 150 and are respectively spaced apart from the impeller body 131.

[0086] Specifically, in the radial direction of the rotating shaft 121, the first body 141a is disposed at the inner end (the end close to the axis of the rotating shaft 121) of the first stationary blade 141b, and the first stationary blade 141b is disposed at the outer end (the end far from the axis of the rotating shaft 121) of the first body 141a. The second body 142a is disposed at the inner end of the second stationary blade 142b, and the second stationary blade 142b is disposed at the outer end of the second body 142a. In the axial direction of the rotating shaft 121, there is a certain gap between the inner ends of the first body 141a and the second body 142a and the impeller 130. The outer ends of the first stationary blade 141b and the second stationary blade 142b are fixedly connected to the rotating shaft 121. The first body 141a is fixedly connected to the first stationary blade 141b, and the second body 142a is fixedly connected to the second stationary blade 142b. Therefore, in the axial direction of the rotating shaft 121, the positions of the first body 141a and the second body 142a are fixed. The first body 141a is disposed at the inner end of the first stationary blade 141b, the second body 142a is disposed at the inner end of the second stationary blade 142b, and the first body 141a and the second body 142a are connected by a connecting member 150 and are respectively spaced apart from the impeller body 131, which can make the overall mechanism of the molecular pump 100 more compact and reduce the space occupancy rate of the impeller 130 and the stationary blade row 140 in the molecular pump 100.

[0087] Please refer to Figures 1 to 6 , in this embodiment, the first body 141a and the second body 142a form an annular structure sleeved on the impeller body 131.

[0088] Specifically, the inner end of the first body 141a is connected to the inner end of the second body 142a to form an annular structure sleeved on the impeller body 131. That is to say, the first body 141a and the second body 142a are in the shape of a ring in order to be connected to form an annular structure.

[0089] On the one hand, the annular structure can more tightly wrap the impeller body 131, reduce the space occupancy, improve the compactness of the structure of the molecular pump 100 and the space utilization rate inside the molecular pump 100. On the other hand, the cross-section of the rotating shaft 121 is usually designed as a circle, and the cross-section of the impeller body 131 is also correspondingly designed as an annulus. Sleeving the first body 141a and the second body 142a into an annular structure can make the first body 141a and the second body 142a more adapted to the impeller body 131.

[0090] Please refer to Figures 1 to 11 , Figure 7 is a schematic structural diagram of the first stationary blade row 141 provided by the embodiment of the present application; Figure 8 is Figure 7 the top view of Figure 9 is an exploded structural diagram of the first stationary blade row 141 provided by the embodiment of the present application; Figure 10Schematic diagram of the structure of the second stator vane row 142 provided by the embodiments of the present application; Figure 11 is Figure 10 side view of.

[0091] In this embodiment, the connecting member 150 includes a first pin 151 and a second pin 152. Along the circumferential direction of the rotating shaft 121, the first pin 151 and the second pin 152 are respectively arranged at both ends of the first body 141a; along the circumferential direction of the rotating shaft 121, first holes 160 and second holes 161 that cooperate with the first pin 151 and the second pin 152 are respectively arranged at both ends of the second body 142a.

[0092] Specifically, third holes 162 and fourth holes 163 can be arranged at both ends of the first body 141a, and the first pin 151 and the second pin 152 can be respectively inserted into the third holes 162 and the fourth holes 163, so that the first pin 151 and the second pin 152 are connected to both ends of the first body 141a. The first pin 151 can be connected in cooperation with the first hole 160, and the second pin 152 is connected in cooperation with the second hole 161, so that the first pin 151 and the second pin 152 serve as the connecting member 150 connecting the first stator vane row 141 and the second stator vane row 142.

[0093] The material of the pins can be selected from high-quality aluminum alloys, stainless steels, and high-strength alloys, etc., which have characteristics such as high strength, high toughness, and corrosion resistance, so that the pins can withstand the high-temperature environment inside the molecular pump 100 during operation, ensuring the durability and stability in harsh working environments. Moreover, since the pins are produced through precise design and manufacturing processes, the tightness and firmness of the connection between the first body 141a and the second body 142a can be ensured, and they can withstand large tensile and compressive forces, so that the first surface 1410 of the first stator vane row 141 and the second surface 1420 of the second stator vane row 142 are generally kept in the same plane, reducing the probability of warping of the first stator vane row 141 and the second stator vane row 142, and reducing the possibility of friction and rubbing between the first stator vane row 141 and the second stator vane row 142 and the impeller 130, improving the stability and reliability of the operation of the molecular pump 100. The price of the pins is usually relatively low. Using the pins as the connecting member 150 to connect the first body 141a and the second body 142a has a high cost performance and reduces the production cost of the molecular pump 100.

[0094] Please refer to Figures 1 to 11 , in this embodiment, along the circumferential direction of the rotating shaft 121, both ends of the first body 141a have a first end face 1310 and a second end face 1311. The first end face 1310 and the second end face 1311 are both parallel to the axis of the rotating shaft 121. The first pin 151 is arranged on the first end face 1310, and the second pin 152 is arranged on the second end face 1311.

[0095] Specifically, along the circumferential direction of the rotating shaft 121, both ends of the second body 142a have a third end face 1312 and a fourth end face 1313. The third end face 1312 and the fourth end face 1313 are both parallel to the axis of the rotating shaft 121. The first hole 160 and the second hole 161 are respectively arranged on the third end face 1312 and the fourth end face 1313. The first plug 151 arranged on the first end face 1310 and the second plug 152 arranged on the second end face 1311 are respectively inserted into the first hole 160 and the second hole 161. In this way, the first end face 1310 and the second end face 1311 can respectively coincide with the third end face 1312 and the fourth end face 1313, thereby connecting the first stationary blade row 141 and the second stationary blade row 142, fitting and installing them on the molecular pump 100, reducing the probability of warping of the stationary blade row 140, and reducing the probability of friction between the stationary blade row 140 and the moving impeller 130.

[0096] Please refer to Figures 1 to 11 , there are multiple first stationary blades 141b, and the multiple first stationary blades 141b are arranged at intervals along the circumferential direction of the rotating shaft 121. There are multiple second stationary blades 142b, and the multiple second stationary blades 142b are arranged at intervals along the circumferential direction of the rotating shaft 121.

[0097] Specifically, multiple first stationary blades 141b are arranged on the first stationary blade row 141, and multiple second stationary blades 142b are arranged on the second stationary blade row 142. The multiple first stationary blades 141b and the multiple second stationary blades 142b can more effectively guide gas molecules to flow along a predetermined path, reduce the backflow and collision of gas molecules, and thus improve the pumping efficiency of the molecular pump 100. Along the circumferential direction of the rotating shaft 121, the multiple first stationary blades 141b and the multiple second stationary blades 142b are arranged at intervals, which can also help to disperse the stress borne by the first body 141a and the second body 142a, and reduce the vibration and noise generated by stress concentration.

[0098] Please refer to Figures 1 to 11 , along the axial direction of the rotating shaft 121, the moving impeller 130 is configured as multiple sets spaced apart. A stationary blade row 140 is arranged between any two adjacent moving impellers 130, and the stationary blade row 140 is spaced apart from the adjacent moving impellers 130 respectively.

[0099] Specifically, along the axial direction of the rotating shaft 121, the molecular pump 100 is provided with multiple stator blade rows 140 and multiple impellers 130. The multiple stator blade rows 140 and the multiple impellers 130 are arranged in a cross-distributed manner. One stator blade row 140 is provided between any two adjacent impellers 130, and an impeller 130 is provided between any two adjacent stator blade rows 140. This can improve the pumping performance of the molecular pump 100 and reduce the backflow of gas molecules. The stator blade row 140 can play a guiding role. During the operation of the molecular pump 100, the first stator blades 141b and the second stator blades 142b on the stator blade row 140 can guide the gas molecules moving disorderly on the surfaces of the first stator blades 141b and the second stator blades 142b to move along a specific direction, reducing the probability of gas backflow occurring inside the molecular pump 100. Moreover, since there may be liquids or other impurities in the gas, the cross-distribution of the multiple stator blade rows 140 and the multiple impellers 130 helps to homogenize the multiphase flow in the gas, reducing the probability of gas-liquid separation occurring and improving the operation stability and reliability of the molecular pump 100.

[0100] Please refer to Figures 1 to 11 , in this embodiment, each set of moving blades 132 includes multiple sub-moving blades 132a, and the multiple sub-moving blades 132a are arranged at intervals along the circumferential direction of the rotating shaft 121.

[0101] When the moving blades 132 rotate at high speed, by colliding with gas molecules, the momentum is transferred to the gas molecules, enabling the gas molecules to obtain a directional movement speed. Arranging multiple sub-moving blades 132a on the moving blades 132 can increase the number of collisions between the moving blades 132 and the gas molecules, improving the operation efficiency of the molecular pump 100. Moreover, the multiple sub-moving blades 132a are evenly distributed at intervals, which can reduce the probability of stress concentration occurring in the impeller body 131, reduce the generation of vibration and noise, and improve the operation stability and reliability of the molecular pump 100.

[0102] Please refer to Figures 1 to 11 , in this embodiment, the molecular pump 100 further includes a stationary ring 170, and the stationary ring 170 is adapted to press the outer ends of the first stator blade row 141 and the second stator blade row 142 in the radial direction of the rotating shaft 121 against the housing 110.

[0103] Specifically, the molecular pump 100 is provided with multiple stationary rings 170. Along the axial direction of the rotating shaft 121, each stationary ring 170 presses the outer ends of the corresponding first stator blade row 141 and the second stator blade row 142 in the radial direction of the rotating shaft 121, reducing the probability of warping of the first stator blade row 141 and the second stator blade row 142, and reducing the probability of friction and rubbing between the first stator blade row 141 and the second stator blade row 142 and the impeller 130, improving the operation stability and reliability of the molecular pump 100.

[0104] The molecular pump 100 with a split stator vane row includes a housing 110, a driving member 120, an impeller 130, and a stator vane row 140. The driving member 120 is disposed within the housing 110. The driving member 120 has a rotating shaft 121. The impeller 130 is connected to one axial end of the rotating shaft 121. The impeller 130 includes an impeller body 131 and impeller blades 132 disposed on the impeller body 131. The stator vane row 140 is disposed within the housing 110. The stator vane row 140 includes a first stator vane row 141 and a second stator vane row 142. The first stator vane row 141 and the second stator vane row 142 are of a split structure. Wherein, along the radial direction of the rotating shaft 121, the outer ends of both the first stator vane row 141 and the second stator vane row 142 are fixedly connected to the housing 110. The inner ends of the first stator vane row 141 and the second stator vane row 142 are connected by a connecting member 150 and are respectively spaced apart from the impeller body 131. The first stator vane row 141 includes a first body 141a and first stator vanes 141b. The second stator vane row 142 includes a second body 142a and second stator vanes 142b. Along the radial direction of the rotating shaft 121, the first body 141a is disposed at the inner end of the first stator vanes 141b. The second body 142a is disposed at the inner end of the second stator vanes 142b. The first body 141a and the second body 142a are connected by a pin and are respectively spaced apart from the impeller body 131. The pin includes a first pin 151 and a second pin 152. Along the circumferential direction of the rotating shaft 121, the first pin 151 and the second pin 152 are respectively disposed at two ends of the first body 141a. Along the circumferential direction of the rotating shaft 121, first holes 160 and second holes 161 that cooperate with the first pin 151 and the second pin 152 are respectively disposed at two ends of the second body 142a. There are multiple first stator vanes 141b, and the multiple first stator vanes 141b are spaced apart along the circumferential direction of the rotating shaft 121. There are multiple second stator vanes 142b, and the multiple second stator vanes 142b are spaced apart along the circumferential direction of the rotating shaft 121. Along the axial direction of the rotating shaft 121, the impeller blades 132 are configured as multiple sets spaced apart. A stator vane row 140 is disposed between any two adjacent impeller blades 132, and the stator vane row 140 is respectively spaced apart from the adjacent impeller 130. Each set of impeller blades 132 includes multiple sub-impeller blades 132a, and the multiple sub-impeller blades 132a are spaced apart along the circumferential direction of the rotating shaft 121. The molecular pump 100 further includes a stationary ring 170. The stationary ring 170 is adapted to press the outer ends of the first stator vane row 141 in the radial direction of the rotating shaft 121 and the outer ends of the second stator vane row 142 in the radial direction of the rotating shaft 121 against the housing 110.

[0105] It should also be noted that the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, commodity or device comprising a series of elements not only includes those elements but also includes other elements not expressly listed, or further includes elements inherent to such process, method, commodity or device. Without further limitation, an element defined by the statement "comprising an..." does not exclude the presence of additional identical elements in the process, method, commodity or device comprising said element.

[0106] Each embodiment in this specification is described in a progressive manner. For the same or similar parts among the embodiments, reference can be made to each other, and the differences between each embodiment and other embodiments are emphasized. In particular, for system embodiments, since they are basically similar to method embodiments, they are described relatively simply, and the relevant parts can be referred to the partial description of method embodiments.

[0107] The above description is only for the embodiments of the present application and is not intended to limit the present application. For those skilled in the art, various changes and modifications can be made to the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included within the scope of the claims of the present application.

[0108] Although the embodiments of the present application have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present application, and such modifications and variations fall within the scope defined by the appended claims.

Claims

1. A molecular pump with a split stator vane row, characterized in that, Comprising: A housing; A driving member disposed within the housing, the driving member having a rotating shaft; A moving impeller connected to one axial end of the rotating shaft, the moving impeller including a moving impeller body and moving blades disposed on the moving impeller body; A stationary blade row disposed within the housing, the stationary blade row including a first stationary blade row and a second stationary blade row, the first stationary blade row and the second stationary blade row being a split structure; Wherein, along the radial direction of the rotating shaft, the outer ends of the first stationary blade row and the second stationary blade row are both fixedly connected to the housing, and the inner ends of the first stationary blade row and the second stationary blade row are connected by a connecting member and are respectively spaced apart from the moving impeller body.

2. The molecular pump according to claim 1, wherein, The connecting member is detachably connected to the first stationary blade row, and / or the connecting member is detachably connected to the second stationary blade row.

3. The molecular pump according to claim 1, characterized in that, The first stationary blade row includes a first body and first stationary blades, and the second stationary blade row includes a second body and second stationary blades; Along the radial direction of the rotating shaft, the first body is disposed at the inner end of the first stationary blades, the second body is disposed at the inner end of the second stationary blades, the first body and the second body are connected by the connecting member and are respectively spaced apart from the moving impeller body.

4. The molecular pump according to claim 3, characterized in that, The first body and the second body form an annular structure sleeved on the moving impeller body.

5. The molecular pump according to claim 3, characterized in that, The connecting member includes a first pin and a second pin, and along the circumferential direction of the rotating shaft, the first pin and the second pin are respectively disposed at two ends of the first body; Along the circumferential direction of the rotating shaft, first holes and second holes adapted to the first pin and the second pin are respectively disposed at two ends of the second body.

6. The molecular pump according to claim 5, characterized in that, Along the circumferential direction of the rotating shaft, two ends of the second body have a first end face and a second end face, and both the first end face and the second end face are parallel to the axis of the rotating shaft; The first pin is disposed on the first end face, and the second pin is disposed on the second end face.

7. The molecular pump according to claim 3, characterized in that, There are multiple first stationary blades, and the multiple first stationary blades are spaced apart along the circumferential direction of the rotating shaft; There are multiple second stationary blades, and the multiple second stationary blades are spaced apart along the circumferential direction of the rotating shaft.

8. The molecular pump according to claim 1, characterized in that, Along the axial direction of the rotating shaft, the moving blades are configured as multiple groups spaced apart, and the stationary blade row is disposed between any two adjacent moving blades, and the stationary blade row is respectively spaced apart from the adjacent moving impellers.

9. The molecular pump according to claim 1, wherein, Each group of moving blades includes multiple sub-moving blades, and the multiple sub-moving blades are spaced apart along the circumferential direction of the rotating shaft.

10. The molecular pump according to claim 1, characterized in that, The molecular pump further includes a stationary ring, and the stationary ring is adapted to press the outer ends of the first stationary blade row and the second stationary blade row in the radial direction of the rotating shaft against the housing.

Images