Gas leakage detection device for integrated circuit plant gas pipeline
The leak detection device for integrated circuit factory gas pipes addresses the issue of improper sealing by using a sealing mechanism to ensure accurate leak detection through a sealed channel and pressure monitoring, enhancing the reliability of leak detection.
Patent Information
- Application Number
- CN202422133311.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-30
- Publication Date
- 2025-07-15
- Estimated Expiration
- 2034-08-30
AI Technical Summary
The existing gas pipeline leak detection device cannot effectively confirm the sealing between the detection cylinder and the gas pipeline, which affects the accuracy of the detection results.
An air leakage detection device for gas pipelines in integrated circuit plants is designed, including a sealing cylinder, an air conducting device and an air leakage detection device. Through the air conducting device, gas is introduced into the gas chamber and pressure gauge is used to detect the pressure in the chamber to ensure the sealing between the sealing cylinder and the gas pipeline.
The sealing detection is realized, which avoids insufficient sealing affecting the detection results, ensures the accuracy of the detection results, and is compact in structure and convenient to use.
Smart Images
Figure CN223107164U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of pipeline air leakage detection, and particularly relates to an air leakage detection device for gas pipelines in an integrated circuit workshop. Background Art
[0002] When a compressed air station or an outdoor gas station transports high-purity gas, stainless steel pipelines are usually used. During the long-term use of the gas pipelines, due to reasons such as long pipeline length, many welds, many valve parts, many use points, and the use of pneumatic valves, the problem of pipeline air leakage will inevitably occur, which not only wastes energy but also poses a safety hazard in the case of special gases. Therefore, in order to ensure the energy conservation of the gas station and the safe transportation of gas, it is very necessary to detect the air leakage of the gas pipelines. The existing air leakage detection devices for gas pipelines usually sleeve a detection cylinder on the gas pipeline, seal the contact between the detection cylinder and the gas pipeline, and then detect whether there is gas leakage. In the actual use process, it is found that when the above method is used to detect the air leakage of the gas pipeline, the tightness between the detection cylinder and the gas pipeline cannot be confirmed. Once the tightness between the detection cylinder and the gas pipeline is insufficient, it will directly affect the air leakage detection result of the gas pipeline. Summary of the Utility Model
[0003] In view of this, the purpose of the utility model is to provide an air leakage detection device for gas pipelines in an integrated circuit workshop to solve the deficiencies in the prior art.
[0004] To achieve the above purpose, the utility model is realized through the following technical solutions:
[0005] Provide an air leakage detection device for gas pipelines in an integrated circuit workshop, which includes a sealing cylinder. The sealing cylinder has a sealing channel for temporarily accommodating the gas pipeline to be tested. After the gas pipeline to be tested enters the sealing channel, a gas cavity is formed between the sealing cylinder and the gas pipeline to be tested. The sealing cylinder is provided with a gas guiding device installation port and an air leakage detection device. A gas guiding device is arranged at the gas guiding device installation port, and gas is introduced into the gas cavity through the gas guiding device. The air leakage detection device detects the pressure in the gas cavity.
[0006] As described in the air leakage detection device for gas pipelines in an integrated circuit factory building, wherein the air guiding device includes a mounting seat, a connecting pipe, a plugging head and an elastic pressing member. The mounting seat is fixedly sealed at the air guiding device installation port. The mounting seat is provided with an air guiding port. The connecting pipe is fixed above the air guiding port. The inner diameter of the connecting pipe is adapted to the outer diameter of the external gas pipeline. A sealing ring is provided inside the connecting pipe. The elastic pressing member is arranged below the air guiding port. The plugging head is temporarily plugged in the air guiding port and can move downward. After the external gas pipeline enters the connecting pipe and pushes the plugging head downward, the external gas pipeline enters the sealing cylinder. After inflation is completed, the external gas pipeline retracts, and the plugging head returns to the air guiding port under the push of the elastic pressing member.
[0007] As described in the air leakage detection device for gas pipelines in an integrated circuit factory building, wherein the elastic pressing member includes a moving plate, a limiting plate, a plurality of connecting rods and a pressing spring. The upper end of the connecting rod is fixed to the bottom of the mounting seat, and the lower end is fixedly connected to the limiting plate. The pressing spring is sleeved on the connecting rod. The moving plate is located between the upper end of the pressing spring and the plugging head and can slide up and down along the connecting rod.
[0008] As described in the air leakage detection device for gas pipelines in an integrated circuit factory building, wherein the longitudinal cross-sections of the air guiding port and the plugging head are both isosceles trapezoids that are narrow at the top and wide at the bottom.
[0009] As described in the air leakage detection device for gas pipelines in an integrated circuit factory building, wherein the air leakage detection device includes a detection seat, a detection pipe and a pressure gauge. The detection seat is fixedly sealed to the sealing cylinder. The detection pipe extends into the gas cavity. The detection pipe is connected to the pressure gauge.
[0010] As described in the air leakage detection device for gas pipelines in an integrated circuit factory building, wherein the sealing cylinder includes an arc-shaped main board, an arc-shaped clamping board and end plates. The end plates are respectively arranged at the ends of the arc-shaped main board. The arc-shaped clamping board is fixedly connected to the end plates. The inner diameter of the arc-shaped clamping board is adapted to the outer diameter of the gas pipeline to be detected.
[0011] The beneficial effects of the technical solution of the present utility model are:
[0012] It can first detect the sealing performance between the sealing cylinder and the gas pipeline, avoid the influence of insufficient sealing performance between the sealing cylinder and the gas pipeline on the subsequent air leakage detection result of the gas pipeline, ensure the accuracy of the result, and has a compact structure and is convenient to use. Description of the Drawings
[0013] To further illustrate the above-mentioned objects, structural features and effects of the present utility model, the present utility model will be described in detail below with reference to the drawings.
[0014] Figure 1 Structural schematic diagram of a preferred embodiment of the present utility model;
[0015] Figure 2 is Figure 1 Partial enlarged view of area A in
[0016] In the figure: 0, pipeline for gas to be measured; 1, sealing cylinder; 101, gas cavity; 102, installation opening for gas guiding device; 103, arc-shaped main board; 104, arc-shaped clamping plate; 105, end plate; 2, air leakage detection device; 201, detection seat; 202, detection tube; 203, pressure gauge; 3, gas guiding device; 301, mounting seat; 302, connecting pipe; 303, plugging head; 304, elastic pressing member; 3041, moving plate; 3042, limiting plate; 3043, connecting rod; 3044, pressing spring; 305, gas guiding port; 306, sealing ring. Specific implementation manner
[0017] The terms "utility model" and "the present utility model" used in this specification are intended to generally refer to all the subject matters of this specification and any following patent claims. Statements containing these terms should not be construed as limiting the subject matter described herein or the meaning or scope of any following patent claims. In addition, this specification does not attempt to describe or limit the subject matter covered by any specific component, paragraph, statement, or claim of this application. The subject matter should be understood with reference to the entire specification, all the drawings, and any following claims. The present utility model may have other embodiments and be practiced or implemented in other ways. Moreover, it should be understood that the wording and terms adopted herein are for the purpose of illustration and should not be considered restrictive.
[0018] Details of the present utility model will now be discussed with reference to the drawings of the present utility model, which are provided by way of example only. In the drawings, similar features or components may be labeled with the same reference numerals.
[0019] The use of the terms "comprising", "having", and "including" and their variants herein means including the items listed hereinafter, their equivalents, and additional items. Although directions such as above, below, upward, downward, backward, bottom, top, front, and back may be referred to in the description of the drawings for convenience, they are referred to with respect to the drawings. These directions are not intended to be literally accepted or limit the present utility model in any form. In addition, terms such as "first", "second", "third", etc. are used herein for the purpose of illustration and are not intended to indicate or imply importance or significance.
[0020] Refer to Figure 1 、 Figure 2As shown in the figure, the leakage detection device for gas pipelines in the integrated circuit plant of the present utility model includes a sealing cylinder 1. The sealing cylinder 1 has a sealing channel for temporarily accommodating the gas pipeline 0 to be tested. After the gas pipeline 0 to be tested enters the sealing channel, a gas cavity 101 is formed between the sealing cylinder 1 and the gas pipeline 0 to be tested. The sealing cylinder 1 is provided with a gas guiding device installation port 102 and a leakage detection device 2. A gas guiding device 3 is provided at the gas guiding device installation port 102. Gas is introduced into the gas cavity 101 through the gas guiding device 3, and the leakage detection device 2 detects the pressure in the gas cavity 101.
[0021] See Figure 2 As shown in the figure, the gas guiding device 3 includes a mounting seat 301, a connecting pipe 302, a plugging head 303 and an elastic pressing member 304. The mounting seat 301 is hermetically fixed to the gas guiding device installation port 102 by bolts. The mounting seat 301 is provided with a gas guiding port 305. The connecting pipe 302 is fixed above the gas guiding port 305. The inner diameter of the connecting pipe 302 is adapted to the outer diameter of the external gas pipeline. A sealing ring 306 is provided inside the connecting pipe 302. The elastic pressing member 304 is arranged below the gas guiding port 305. The plugging head 303 is temporarily plugged in the gas guiding port 305 and can move downward. After the external gas pipeline enters the connecting pipe 302 and pushes the plugging head 303 downward, the external gas pipeline enters the sealing cylinder 1. After the inflation is completed, the external gas pipeline retracts, and the plugging head 303 returns to the gas guiding port 305 under the push of the elastic pressing member 304.
[0022] Continue to see Figure 2 As shown in the figure, the elastic pressing member 304 includes a moving plate 3041, a limiting plate 3042, a plurality of connecting rods 3043 and a pressing spring 3044. The upper end of the connecting rod 3043 is fixed to the bottom of the mounting seat 301, and the lower end is fixedly connected to the limiting plate 3042. The pressing spring 3044 is sleeved on the connecting rod 3043. The moving plate 3041 is located between the upper end of the pressing spring 3044 and the plugging head 303 and can slide up and down along the connecting rod 3043. It is easy to understand that the moving plate 3041 is arranged at the bottom of the plugging head 303.
[0023] The longitudinal cross-sections of the gas guiding port 305 and the plugging head 303 are both isosceles trapezoids that are narrow at the top and wide at the bottom, so that the plugging head 303 can only move downward when it is temporarily plugged in the gas guiding port 305.
[0024] See Figure 1 As shown in the figure, the leakage detection device 2 includes a detection seat 201, a detection pipe 202 and a pressure gauge 203. The detection seat 201 is hermetically fixed to the sealing cylinder 1 by bolts. The detection pipe 202 extends into the gas cavity 101. The detection pipe 202 is connected to the pressure gauge 203. The pressure gauge 203 uses a high-precision digital pressure gauge with a measuring range of (-0.1 to 1.0) Mpa and an accuracy of 0.02% F.S.
[0025] The sealing cylinder 1 includes an arc-shaped main board 103, arc-shaped clamping boards 104 and end plates 105. The end plates 105 are respectively arranged at the ends of the arc-shaped main board 103. The arc-shaped clamping boards 104 are fixedly connected to the end plates 105, and the inner diameter of the arc-shaped clamping boards 104 is adapted to the outer diameter of the gas pipeline 0 to be measured.
[0026] The gas pipeline 0 to be measured is made of stainless steel SUS304 or SUS316L, and the sealing cylinder 1 is made of stainless steel SUS304.
[0027] A sealing gasket is arranged between the mounting seat 301 and the air guiding device mounting port 102, a sealing gasket is arranged between the detection seat 201 of the air leakage detection device 2 and the sealing cylinder 1, and a sealing gasket is also arranged at the contact position between the arc-shaped clamping board 104 and the gas pipeline 0 to be measured. The sealing gasket is made of EPDM ethylene propylene diene monomer rubber, and the plugging head 303 is made of EPDM ethylene propylene diene monomer rubber.
[0028] During use, first, the sealing cylinder 1 is hermetically installed on the gas pipeline 0 to be measured. Then, an external air duct is inserted vertically into the connecting pipe 302 and the air guiding port 305, and the external air duct is moved downward, thereby pushing the plugging head 303 downward until it reaches the limiting position of the limiting plate 3042. At this time, the lower end of the external air duct is located inside the sealing cylinder 1, so that a certain amount of gas can be input into the sealing cylinder 1 through the external air duct. During the process of inputting gas, the sealing ring 306 can seal the junction of the connecting pipe 302 and the external air duct, thereby preventing the gas in the sealing cylinder 1 from leaking. Then, the external air duct is slowly withdrawn, and the plugging head 303 can return to the air guiding port 305 under the action of the elastic pressing member 304 to block the air guiding port 305.
[0029] After a period of time, check whether the pressure gauge 203 has changed to determine the sealing performance between the sealing cylinder 1 and the gas pipeline 0 to be measured. If the seal between the sealing cylinder 1 and the gas pipeline 0 to be measured is okay, the initial value of the pressure gauge 203 can be recorded at this time. During subsequent use, it is possible to confirm whether the gas pipeline 0 to be measured leaks through the value of the pressure gauge 203. If the value of the pressure gauge 203 is higher than the initial value, it means that the gas pipeline 0 to be measured leaks; if the value of the pressure gauge 203 is lower than the initial value, it means that the sealing performance between the sealing cylinder 1 and the gas pipeline 0 to be measured is insufficient.
[0030] The above is only a preferred embodiment of the present invention, and it does not limit the implementation manners and protection scope of the present invention. For those skilled in the art, it should be able to realize that all equivalent replacements and obvious changes made by using the description and illustrations of the present invention should be included in the protection scope of the present invention.
Claims
1. A leakage detection device for gas pipelines in an integrated circuit factory building, characterized in that, It includes a sealing cylinder which has a sealing channel for temporarily accommodating the pipeline of the gas to be measured. After the pipeline of the gas to be measured enters the sealing channel, a gas cavity is formed between the sealing cylinder and the pipeline of the gas to be measured. The sealing cylinder is provided with an air guiding device installation port and a leakage detection device. An air guiding device is arranged at the air guiding device installation port, and gas is introduced into the gas cavity through the air guiding device. The leakage detection device detects the pressure in the gas cavity.
2. The air leakage detection device for gas pipelines in an integrated circuit factory building according to claim 1, characterized in that, The air guiding device includes a mounting seat, a connecting pipe, a plugging head and an elastic pressing member. The mounting seat is sealed and fixed at the air guiding device installation port. The mounting seat is provided with an air guiding port. The connecting pipe is fixed above the air guiding port. The inner diameter of the connecting pipe is suitable for the outer diameter of the external air duct. A sealing ring is arranged inside the connecting pipe. The elastic pressing member is arranged below the air guiding port. The plugging head temporarily plugs the air guiding port and can move downward. After the external air duct enters the connecting pipe and pushes the plugging head downward, the external air duct enters the sealing cylinder. After the inflation is completed, the external air duct retracts, and the plugging head returns to the air guiding port under the push of the elastic pressing member.
3. The leak detection device for gas pipelines in an integrated circuit factory building according to claim 2, wherein The elastic pressing member includes a moving plate, a limiting plate, a plurality of connecting rods and a pressing spring. The upper end of the connecting rod is fixed to the bottom of the mounting seat, and the lower end is fixedly connected to the limiting plate. The pressing spring is sleeved on the connecting rod. The moving plate is located between the upper end of the pressing spring and the plugging head and can slide up and down along the connecting rod.
4. The air leakage detection device for gas pipelines in an integrated circuit plant according to claim 2 or 3, characterized in that, The longitudinal sections of the air guiding port and the plugging head are both isosceles trapezoids that are narrow at the top and wide at the bottom.
5. The leak detection device for gas pipelines in an integrated circuit factory building according to claim 1, characterized in that, The leakage detection device includes a detection seat, a detection pipe and a pressure gauge. The detection seat is sealed and fixed to the sealing cylinder. The detection pipe extends into the gas cavity, and the detection pipe is connected to the pressure gauge.
6. The air leakage detection device for gas pipelines in an integrated circuit factory building according to claim 1 or 5, characterized in that, The sealing cylinder includes an arc-shaped main board, an arc-shaped clamping board and end plates. The end plates are respectively arranged at the ends of the arc-shaped main board. The arc-shaped clamping board is fixedly connected to the end plates. The inner diameter of the arc-shaped clamping board is suitable for the outer diameter of the pipeline of the gas to be measured.