Optical moving platform of vacuum sample chamber

Abstract

The utility model provides an optical moving platform of a vacuum sample chamber, and belongs to the technical field of optical detection. The device comprises a vacuum sample chamber, a top cover, a gun cover assembly, a high-precision proportional valve and a vacuum exhaust pipe, a movable gland is opened, a detection material is placed in the vacuum sample chamber, a vacuum pump is started, the vacuum pump vacuumizes a vacuum cavity through the exhaust pipe, and a negative pressure state is formed in the vacuum cavity after vacuumizing; therefore, the movable gland is firmly sucked with the vacuum sample chamber. The control unit controls opening or closing of the high-precision proportional valve according to different proportions, so that different vacuum degrees in the vacuum cavity are adjusted, and the technical problems that in the prior art, a vacuum sample chamber can only be used for Dewar test, and the vacuum degree in the vacuum sample chamber cannot be adjusted are solved. And the object placing table can be moved at different positions through the X-axis moving assembly and the Y-axis moving assembly, so that a worker can conveniently observe a detection material in multiple directions.

Description

Technical Field

[0001] The utility model belongs to the technical field of optical detection, and particularly relates to an optical moving platform for a vacuum sample chamber. Background Art

[0002] An optical microscope is a tool widely used in scientific research and industrial fields for observing the details and structures of tiny objects. In geological, petroleum exploration, semiconductor, materials science, and biomedical applications, the cathodoluminescence, ultraviolet, infrared, and X-ray studies of some samples need to place the samples in a sample chamber under the microscope objective lens to evacuate or introduce specific gases, and two-dimensional translation of the samples is also required to locate and observe different regions of the samples. However, only a small part of the sample can be observed under the optical microscope. If the structure and feature distribution of a large range of samples need to be studied, the vacuum must be closed and then the sample is translated. Opening the vacuum chamber to move the sample requires opening and closing the vacuum chamber, resulting in low operation efficiency. Summary of the Utility Model

[0003] An embodiment of the utility model provides an optical moving platform for a vacuum sample chamber, aiming to solve the technical problem that in the prior art, repeatedly opening the vacuum chamber to adjust the position of the placement table is required to study the structure of a large range of samples, resulting in low operation efficiency.

[0004] To achieve the above object, the technical solution adopted by the utility model is: providing an optical moving platform for a vacuum sample chamber, which includes a vacuum sample chamber, an X-axis moving unit, a Y-axis displacement unit, and a placement table. The X-axis displacement unit is arranged in the vacuum chamber. The X-axis displacement unit includes an X-axis lead screw, an X-axis guide rail, an X-axis drive motor, and an X-axis moving table. The X-axis lead screw is rotatably arranged in the vacuum chamber, and the central axis of the X-axis lead screw is arranged in parallel with the horizontal direction of the vacuum chamber. The X-axis guide rail is arranged in parallel with the X-axis lead screw, and both ends of the X-axis guide rail are respectively connected to the bottom inner wall of the vacuum chamber. The power output end of the X-axis drive motor is connected to one end of the X-axis lead screw. The X-axis moving table is connected to the X-axis lead screw. The Y-axis displacement unit is arranged in the vacuum chamber, and the Y-axis displacement unit is arranged on the X-axis moving table. The placement table is arranged on the Y-axis moving unit.

[0005] In a possible implementation manner, the Y-axis displacement assembly includes a Y-axis drive motor, a Y-axis lead screw, and a Y-axis guide rail. The Y-axis drive motor is arranged on the X-axis moving table. The Y-axis lead screw is arranged along the width direction of the vacuum chamber, and one end of the Y-axis lead screw is connected to the power output end of the Y-axis drive motor, and the other end of the Y-axis lead screw is rotatably connected to the X-axis moving table. The central axis of the Y-axis guide rail is arranged in parallel with the central axis of the Y-axis lead screw, and both ends of the Y-axis guide rail are fixedly connected to the X-axis moving table.

[0006] In a possible implementation, the X-axis moving stage is a hollow frame structure.

[0007] In a possible implementation, the bottom of the placement table is slidably engaged with the Y-axis guide rail, and the bottom of the placement table is in rolling engagement with the Y-axis lead screw.

[0008] In a possible implementation, the X-axis moving stage is slidably engaged with the X-axis guide rail.

[0009] In a possible implementation, the vacuum sample chamber is further provided with a top cover, a high-precision proportional valve, an air valve, and a vacuum extraction pipe; the top cover is disposed on the top of the vacuum chamber, the top cover is provided with a movable gland, and the movable gland is provided with an observation window; the air valve is fixedly disposed on the vacuum sample chamber, and the air valve is communicated with the vacuum chamber; the high-precision proportional valve is fixedly disposed on the vacuum sample chamber, and the high-precision proportional valve is connected to the vacuum chamber; the vacuum extraction pipe is fixedly disposed on the vacuum sample chamber, and the vacuum extraction pipe is communicated with the vacuum chamber; wherein, the high-precision proportional valve is electrically connected to an external control unit.

[0010] An optical moving platform for a vacuum sample chamber provided in this embodiment, compared with the prior art, an optical moving platform for a vacuum sample chamber includes an X-axis moving unit, a Y-axis displacement unit, and a placement table. Starting the X-axis drive motor, the X-axis drive motor drives the X-axis lead screw to rotate. Since the X-axis moving stage is engaged with the X-axis lead screw, the X-axis moving stage is driven to move along the X-axis direction of the vacuum chamber. The setting of the X-axis guide rail plays a guiding role for the X-axis moving stage, and at the same time, a Y-axis displacement unit is provided to adjust the Y-axis direction of the placement table. Under the combined action of the X-axis drive motor and the Y-axis drive motor, the placement table can adjust its position in the vacuum chamber according to actual use needs, thereby solving the technical problem in the prior art that repeatedly opening the vacuum chamber to adjust the position of the placement table is required to study the large-range sample structure, resulting in low operation efficiency. Description of the Drawings

[0011] Figure 1 A top view of an optical detection device for a vacuum sample provided by an embodiment of the present invention;

[0012] Figure 2 A front view of an optical detection device for a vacuum sample provided by an embodiment of the present invention;

[0013] Figure 3 A top view of a gun cover assembly provided by an embodiment of the present invention;

[0014] Figure 4 For Figure 3 The cross-sectional view of the gun cover assembly shown;

[0015] Figure 5 ForFigure 4 Partial enlarged view of area A in

[0016] Figure 6 is Figure 4 Partial enlarged view of area B in

[0017] Figure 7 Structural schematic diagram of vacuum sample chamber and moving component;

[0018] Explanation of reference numerals:

[0019] 1. Vacuum sample chamber; 2. Top cover; 3. Air valve; 4. High-precision proportional valve; 5. Vacuum extraction pipe; 6. Gun cover assembly; 61. Movable gland; 62. Adapter; 63. Lead glass; 611. Groove; 81. First sealing ring; 7. Light source adapter; 82. Second sealing ring; 621. First annular protrusion; 622. Second annular protrusion; 91. X-axis lead screw; 92. X-axis guide rail; 93. X-axis drive motor; 94. X-axis moving table; 95. Y-axis drive motor; 96. Y-axis lead screw; 97. Y-axis guide rail; 10. Placing table; 11. Detection material. Specific implementation mode

[0020] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present utility model clearer, the present utility model will be further described in detail below with reference to the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present utility model and are not used to limit the present utility model.

[0021] It should be further noted that the drawings and embodiments of the present utility model mainly describe and explain the concept of the present utility model. On the basis of this concept, the specific forms and settings of some connection relationships, position relationships, power mechanisms, power supply systems, hydraulic systems and control systems may not be fully described. However, on the premise that those skilled in the art understand the concept of the present utility model, those skilled in the art can implement the above specific forms and settings in a well-known manner.

[0022] When an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0023] The orientation or positional relationship indicated by terms such as "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present utility model.

[0024] The terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present utility model, the meaning of "a plurality" is two or more, and the meaning of "several" is one or more, unless otherwise specifically defined.

[0025] Now, a vacuum sample optical detection device provided by the present utility model will be described.

[0026] Please refer to Figure 1 and Figure 2 . A vacuum sample optical detection device includes a vacuum sample chamber 1, a top cover 2, a gun cover assembly 6, a gas valve 3, a high-precision proportional valve 4, and a vacuum extraction pipe 5. The vacuum sample chamber 1 is provided with a vacuum cavity with an opening at the top, and the vacuum cavity is used to accommodate the detection material 11; the top cover 2 is covered on the top of the vacuum cavity, and an observation window is provided on the top cover 2.

[0027] The gun cover assembly 6 is provided on the top cover 2. The gun cover assembly 6 includes a movable gland 61, a swivel joint 62, and a lead glass 63; the movable gland 61 is covered on the top cover 2, the central axis of the swivel joint 62 is arranged at an angle with the top surface of the movable gland 61, one end of the swivel joint 62 is connected to the movable gland 61 and one end of the swivel joint 62 is communicated with the vacuum cavity, and the other end of the swivel joint 62 is connected to a light source adapter 7; the movable gland 61 is provided with an observation hole, and the lead glass 63 is embedded in the movable gland 61, and the lead glass 63 is arranged above the observation window.

[0028] The gas valve 3 is fixedly provided on the vacuum sample chamber 1, and the gas valve 3 is communicated with the vacuum cavity; the high-precision proportional valve 4 is fixedly provided on the vacuum sample chamber 1, and the high-precision proportional valve 4 is communicated with the vacuum cavity; the vacuum extraction pipe 5 is fixedly provided on the vacuum sample chamber 1, and the vacuum extraction pipe 5 is communicated with the vacuum cavity. Among them, the gas valve 3 and the high-precision proportional valve 4 are electrically connected to an external control unit.

[0029] The vacuum extraction pipe 5 is connected to a vacuum pump. The vacuum pump is started, and through the vacuum extraction pipe 5, the vacuum sample chamber 1 is evacuated. The high-precision proportional valve 4 controls the vacuum degree of the vacuum chamber. One end of the air valve 3 is communicated with the vacuum chamber, and the other end of the air valve 3 is communicated with the atmosphere or an air tank. The gas in the atmosphere or the air tank enters the vacuum chamber through the air valve 3. Since the movable gland 61 is embedded with lead glass 63, the microscope or the naked eye can observe the characteristics of the test material 11 in the vacuum chamber through the lead glass 63.

[0030] The high-precision proportional valve 4 is a direct-acting two-way standard proportional solenoid valve. In this application, the high-precision proportional valve 4 adopts the DS2871 type. The DS2871 type direct-acting proportional solenoid valve is used as an actuator in the process control loop. Due to the adoption of an elastic valve seat seal, within the nominal pressure range related to the nominal diameter, the valve is tightly closed (integrated closing function). At the same time, the plunger of the valve adopts a frictionless installation method, which gives it excellent control performance. This valve is especially suitable for high-demand adjustment conditions (wide adjustment range, dry gas, etc.).

[0031] A vacuum sample optical detection device provided in this embodiment, compared with the prior art, a vacuum sample optical detection device includes a vacuum sample chamber 1, a top cover 2, a gun cover assembly 6, a high-precision proportional valve 4, an air valve 3, and a vacuum extraction pipe 5. Open the movable gland 61, place the test material in the vacuum sample chamber 1, start the vacuum pump, and the vacuum pump evacuates the vacuum chamber through the extraction pipe. After evacuation, a negative pressure state is formed in the vacuum chamber, so that the movable gland 61 is firmly attracted to the top cover 2 and the vacuum sample chamber 1. The control unit controls the opening or closing of different proportions of the high-precision proportional valve 4, thereby adjusting different vacuum degrees in the vacuum chamber, which can avoid the influence of air absorption, refraction, and scattering on observation, so as to solve the technical problem that the vacuum sample chamber 1 in the prior art can only be used for Dewar tests and cannot adjust the vacuum degree in the vacuum sample chamber.

[0032] Please refer to Figures 2 to 4 , the adapter 62 is communicated with the light source adapter 7, and the particle beam in the light source adapter 7 finally enters the vacuum chamber through the adapter 62. The particle beam in the light source adapter 7 can be an electron beam, ultraviolet light, infrared light, X-ray, etc. The central axis of the adapter 62 is arranged at an angle with the top surface of the movable gland 61, which is convenient for observing the test material 11. The lead glass 63 is provided to transmit the convergent light of the microscope, which is convenient for the staff to observe the test material 11 in the vacuum chamber. At the same time, the lead glass 63 can effectively prevent the electromagnetic radiation from overflowing while allowing the light to pass through.

[0033] Furthermore, the angle between the adapter 62 and the movable gland 61 can be adjusted. By adjusting the angle between the adapter 62 and the movable gland 61, the irradiation angle of the particle beam on the test material can be adjusted to better observe the test material 11 in the vacuum chamber.

[0034] A groove 611 is provided on the movable gland 61. The provision of the groove 611 can reduce the observation distance between the microscope objective lens and the test material 11 to effectively observe the test material 11.

[0035] The specific structure of the groove 611 is heart-shaped. The heart-shaped structure can effectively reduce the observation distance between the microscope objective lens and the test material 11 on the basis of ensuring the firm connection between the adapter 62 and the movable gland 61. The lead glass 63 is connected to the side wall of the observation hole to prevent the spillage of electromagnetic radiation.

[0036] Please refer to Figure 5 , a first sealing ring 81 is provided between the adapter 62 and the movable gland 61. The provision of the first sealing ring 81 can prevent the leakage of gas molecules and ensure the sealing performance between the adapter 62 and the movable gland 61.

[0037] A second sealing ring 82 is provided at the connection between the adapter 62 and the light source adapter 7. The provision of the second sealing ring 82 can prevent the leakage of gas molecules and ensure the sealing performance between the adapter 62 and the light source adapter 7.

[0038] Please refer to Figure 6 , the other end of the adapter 62 is stepped, and the adapter 62 is further provided with a first annular protrusion 621 and a second annular protrusion 622, and the inner diameter of the second annular protrusion 622 is greater than the inner diameter of the first annular protrusion 621.

[0039] The light source adapter 7 is adapted to the other end of the adapter 62. The adapter 62 is provided with a first annular protrusion and a second annular protrusion, so that the light source adapter 7 and the adapter 62 can be embedded and clamped together, ensuring the firmness and sealing performance of the connection between the light source adapter 7 and the adapter 62.

[0040] Furthermore, the provision of the second sealing ring 82 can prevent the leakage of gas molecules.

[0041] Please refer to Figure 5 , a first receiving groove is provided on the movable gland 61, and a second receiving groove corresponding to the first receiving groove is provided on the adapter 62. The depth of the first receiving groove is less than the height of the first sealing ring 81.

[0042] A first receiving groove is provided on the movable gland 61, and a second receiving groove corresponding to the first receiving groove is provided on the adapter 62. The depth of the first receiving groove is less than the height of the first sealing ring 81, and the first receiving groove and the second receiving groove enclose a cavity for receiving the first sealing ring 81.

[0043] The first sealing ring 81 is arranged in the cavity to strengthen the sealing performance between the adapter 62 and the first receiving groove.

[0044] The top cover 2 and the vacuum sample chamber 1 are connected by bolts. The use of bolt connection facilitates the disassembly and installation between the top cover 2 and the vacuum sample chamber 1.

[0045] Furthermore, a third sealing ring is also provided between the top cover 2 and the vacuum sample chamber 1. The third sealing ring not only improves the vacuum degree of the vacuum chamber but also prevents the escape of gas molecules.

[0046] The top cover 2 and the vacuum sample chamber 1 can also be connected by a snap connection structure.

[0047] The air valve 3 and the high-precision proportional valve 4 are arranged on the side wall of the vacuum sample chamber 1, which does not affect the connection between the light source adapter 7 and the adapter 62.

[0048] On the basis of the above embodiments, O-ring seals are provided at the connections between the air valve 3, the high-precision proportional valve 4, the vacuum extraction pipe 5 and the vacuum sample chamber 1 to improve the sealing performance of the connections.

[0049] On the basis of the above embodiments, a moving assembly and a placement table 10 are further provided in the vacuum chamber. The placement table 10 is placed on the moving assembly, and the moving assembly is used to move the placement table 10 to different positions in the vacuum chamber.

[0050] Furthermore, a control line connector is also provided on the side wall of the vacuum sample chamber 1. One end of the control line is connected to an external control unit, and the other end of the control line is electrically connected to the moving assembly. The control unit is used to control the displacement of the moving assembly in different directions.

[0051] Please refer to Figure 7 , the moving assembly includes an X-axis displacement unit and a Y-axis displacement unit. The X-axis displacement unit includes an X-axis lead screw 91, an X-axis guide rail 92, an X-axis drive motor 93 and an X-axis moving table 94. The X-axis lead screw 91 is rotatably arranged in the vacuum chamber, and the central axis of the X-axis lead screw 91 is arranged in parallel with the horizontal direction of the vacuum chamber. The X-axis guide rail 92 is arranged in parallel with the X-axis lead screw 91, and both ends of the X-axis guide rail 92 are connected to the bottom inner wall of the vacuum chamber. The power output end of the X-axis drive motor 93 is connected to one end of the X-axis lead screw 91. Two sets of sliders are provided at the bottom of the X-axis moving table 94, and the two sets of sliders are respectively meshed with the X-axis lead screw 91 and slidably engaged with the X-axis guide rail 92.

[0052] The Y-axis displacement assembly includes a Y-axis drive motor 95, a Y-axis lead screw 96, and a Y-axis guide rail 97. The Y-axis drive motor 95 is disposed within the X-axis moving stage 94, and the power output end of the Y-axis drive motor 95 is connected to the Y-axis lead screw 96. The Y-axis guide rail 97 is arranged along the width direction of the vacuum sample chamber 1. The bottom of the object stage 10 is in sliding fit with the Y-axis guide rail 97, and the bottom of the object stage 10 meshes with the Y-axis lead screw 96.

[0053] Start the X-axis drive motor 93. The X-axis drive motor 93 drives the X-axis lead screw 91 to rotate. Since the X-axis moving stage 94 meshes with the X-axis lead screw 91, the X-axis moving stage 94 is driven to move along the X-axis direction of the vacuum chamber. The arrangement of the X-axis guide rail 92 guides the X-axis moving stage 94.

[0054] Start the Y-axis drive motor 95. The Y-axis drive motor 95 drives the Y-axis lead screw 96 to rotate. Since the Y-axis lead screw 96 meshes with the rack, the object stage 10 is driven to move along the Y-axis direction of the vacuum chamber under the drive of the Y-axis lead screw 96.

[0055] Furthermore, there are two X-axis guide rails 92, and the two X-axis guide rails 92 are arranged in parallel.

[0056] Specifically, the X-axis moving stage 94 is a hollow frame structure. The object stage 10 can be a hollow frame structure or a groove frame structure.

[0057] By the individual movement or mutual cooperation of the X-axis drive motor 93 and the Y-axis drive motor 95, the position of the object stage 10 in the vacuum chamber is adjusted to facilitate multi-directional observation of the test material 11 on the object stage 10 by a microscope or a worker.

[0058] The above are only the preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements, and improvements made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. An optical moving platform for a vacuum sample chamber, characterized in that, Including: An X-axis displacement unit is arranged in the vacuum chamber. The X-axis displacement unit includes an X-axis lead screw, an X-axis guide rail, an X-axis driving motor, and an X-axis moving table. The X-axis lead screw is rotatably arranged in the vacuum chamber, and the central axis of the X-axis lead screw is arranged in parallel along the horizontal direction of the vacuum chamber. The X-axis guide rail is arranged in parallel with the X-axis lead screw, and both ends of the X-axis guide rail are respectively connected to the bottom inner wall of the vacuum chamber; the power output end of the X-axis driving motor is connected to one end of the X-axis lead screw; the X-axis moving table is connected to the X-axis lead screw; A Y-axis displacement unit is arranged in the vacuum chamber, and the Y-axis displacement unit is arranged on the X-axis moving table; An object placing table is arranged on the Y-axis moving unit.

2. The optical moving platform for a vacuum sample chamber according to claim 1, wherein, The Y-axis displacement assembly includes: A Y-axis driving motor is arranged on the X-axis moving table; A Y-axis lead screw is arranged along the width direction of the vacuum chamber, and one end of the Y-axis lead screw is connected to the power output end of the Y-axis driving motor, and the other end of the Y-axis lead screw is rotatably connected to the X-axis moving table; A Y-axis guide rail, the central axis of the Y-axis guide rail is arranged in parallel with the central axis of the Y-axis lead screw, and both ends of the Y-axis guide rail are fixedly connected to the X-axis moving table.

3. The optical moving platform for a vacuum sample chamber according to claim 2, wherein The X-axis moving table is a hollow frame structure.

4. The optical moving platform for a vacuum sample chamber according to claim 3, wherein The bottom of the object placing table is in sliding fit with the Y-axis guide rail, and the bottom of the object placing table is in rolling engagement with the Y-axis lead screw.

5. The optical moving platform of a vacuum sample chamber according to claim 4, characterized in that The X-axis moving table is in sliding fit with the X-axis guide rail.

6. The optical moving platform for a vacuum sample chamber according to claim 5, characterized in that, The vacuum sample chamber is further provided with a top cover, a high-precision proportional valve, an air valve, and a vacuum suction pipe; the top cover covers the top of the vacuum chamber, an activity pressing cover is arranged on the top cover, and an observation window is arranged on the activity pressing cover; the air valve is fixedly arranged on the vacuum sample chamber, and the air valve is communicated with the vacuum chamber; the high-precision proportional valve is fixedly arranged on the vacuum sample chamber, and the high-precision proportional valve is communicated with the vacuum chamber; the vacuum suction pipe is fixedly arranged on the vacuum sample chamber, and the vacuum suction pipe is communicated with the vacuum chamber; wherein, the high-precision proportional valve is electrically connected to an external control unit.

Images