Appearance structure of SPINDLE main shaft in semiconductor equipment

Abstract

The utility model discloses an appearance structure of an SPINDLE main shaft in semiconductor equipment, and relates to the technical field of semiconductor equipment. Comprising a corrugated pipe end cover disc which is sleeved on the SPINDLE main shaft; the corrugated pipe assembly is positioned below the corrugated pipe end cover disc and is fixed on the main body frame; cooling water is introduced into the copper pipe, and the copper pipe is located below the corrugated pipe assembly and wound on the main body frame; the upper protective cover is positioned below the copper pipe and is fixed on the main body frame; the lower movable protective cover is positioned below the upper protective cover; and the lower fixed shield is fixed on the main body frame and is connected with the lower movable shield in an opening and closing manner, and the lower fixed shield and the lower movable shield are butted to form a cylindrical structure. The upper protective cover is designed to be of an arc-shaped structure and is tightly attached to the main body frame, and space utilization is further optimized. And the fixed protective cover and the movable protective cover are innovatively combined at the lower part, are semicircular and are connected through the hinge, so that the occupied space is effectively reduced, and the disassembly and maintenance of internal components are also facilitated.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, and particularly relates to an outer shape structure of a SPINDLE main shaft in semiconductor equipment. Background Art

[0002] In view of the challenges of numerous supporting components and limited installation space in the lower cavity of current semiconductor coating equipment, it is urgent to optimize the design of each accessory to ensure that they are both small and compact and easy to disassemble and repair. Among them, the SPINDLE main shaft in semiconductor equipment, as the core component for realizing the lifting and rotating functions, is of self-evident importance. However, the existing outer shape of the SPINDLE main shaft is square, which significantly increases the space occupation. At the same time, the wiring position also occupies additional space after wiring, further exacerbating the tight situation of the installation space. Summary of the Utility Model

[0003] The purpose of the utility model is to provide an outer shape structure of a SPINDLE main shaft, which not only significantly reduces the space occupied by its outer shape, greatly improves the convenience during maintenance, but also effectively reduces the additional space required for wiring.

[0004] To achieve the above object, the present application proposes an outer shape structure of a SPINDLE main shaft, including:

[0005] A bellows end cover disc, sleeved on the SPINDLE main shaft;

[0006] A bellows assembly, located below the bellows end cover disc and fixed on the main body frame;

[0007] A copper pipe, with cooling water flowing through it, located below the bellows assembly and coiled around the main body frame;

[0008] An upper protective cover, located below the copper pipe and fixed on the main body frame;

[0009] A lower movable protective cover, located below the upper protective cover;

[0010] A lower fixed protective cover, fixed on the main body frame and hinged to the lower movable protective cover, and the two form a cylindrical structure after docking;

[0011] A SPINDLE main body base, located below the lower movable protective cover and the lower fixed protective cover, for supporting.

[0012] In one embodiment, a groove is provided on one side of the lower fixed protective cover, and the wiring head is led out from the groove to realize electrical connection.

[0013] In one embodiment, the main body frame is cylindrical.

[0014] In one embodiment, the lower movable shield is hinged to the lower fixed shield.

[0015] In one embodiment, a conductive rubber foot pad is provided under the SPINDLE body base.

[0016] In one embodiment, the upper protective cover is of an arc structure and fits the main body frame.

[0017] In one embodiment, both the lower movable shield and the lower fixed shield are of semi-circular structures and fit the main body frame.

[0018] In one embodiment, the water pipe protective cover is fixed to the main body frame and is arranged on the opposite side of the upper protective cover.

[0019] In one embodiment, the water pipe protective cover is of a flat structure and is used to protect the copper pipe joint.

[0020] In one embodiment, the connecting surface of the lower fixed shield is designed as a plane.

[0021] The above technical solution adopted by the present utility model, compared with the prior art, has the advantages that: a cylindrical main body frame is adopted, which greatly reduces the space occupation. Specifically, its upper protective cover is designed as an arc structure and closely fits the main body frame, further optimizing the space utilization. While the lower part innovatively combines a fixed shield and a movable shield, both of which are semi-circular and are connected by a hinge, effectively reducing the space occupation and facilitating the disassembly and maintenance of internal components. Especially, the wiring head is led out from the groove on one side of the lower fixed shield and connected to the electrical appliance, further compressing the space required for wiring and improving the overall aesthetics. In addition, the connecting surface of the fixing screw is designed as a plane, which not only saves space but also facilitates stable installation.

[0022] In terms of detail treatment, the water pipe protective cover is designed in a flat shape, which not only saves space but also effectively protects the copper pipe joint. A conductive rubber foot pad is fixed at the bottom of the SPINDLE body base, which not only enhances the stability of the device but also has an anti-collision buffering function, improving the safety and durability of use. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a schematic diagram of the external structure of a SPINDLE main shaft;

[0024] Figure 2 It is a side view of the external structure of a SPINDLE main shaft.

[0025] Wherein: 1. SPINDLE main shaft; 2. First hexagon socket flat head screw; 3. Bellows end cover disc; 4. Bellows assembly; 5. Main body frame; 6. Copper pipe; 7. Upper protective cover; 8. Water pipe protective cover; 9. Second hexagon socket flat head screw; 10. Lower fixed protective cover; 11. Lower movable protective cover; 12. Third hexagon socket flat head screw; 13. Hinge; 14. SPINDLE main body base; 15. Conductive rubber foot pad. Detailed implementation manners

[0026] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present application clearer and more understandable, the present application will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0027] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0028] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present application, "a plurality of" means two or more, unless otherwise specifically defined. "Several" means one or more, unless otherwise specifically defined.

[0029] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "center", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be understood as a limitation to the present application.

[0030] In the description of the present application, it should be noted that unless otherwise clearly specified and defined, the terms "installation", "connection", and "coupling" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the communication inside two components or the interaction relationship between two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0031] Please refer to Figure 1-2 , this embodiment provides an external structure of a SPINDLE main shaft, including:

[0032] A bellows assembly, fixed to the main body frame by screws;

[0033] A bellows end cover disc, sleeved on the SPINDLE main shaft; and the bellows end cover disc is fixed to the end face of the tail of the bellows assembly by a first socket head cap screw M4*8.

[0034] A copper pipe, with cooling water flowing inside, located below the bellows assembly and coiled around the main body frame;

[0035] An upper protective cover, located below the copper pipe and fixed to the main body frame by a first socket head cap screw M4*8;

[0036] A water pipe protective cover, arranged on the opposite side of the upper protective cover and fixed to the main body frame by a first socket head cap screw M4*8; the water pipe protective cover is of a flat structure and is used to protect the copper pipe joint;

[0037] A lower movable protective cover, located below the upper protective cover;

[0038] A lower fixed protective cover, fixed to the main body frame by a second socket head cap screw M6×10 and a third socket head cap screw M4×10; one side of the lower fixed protective cover and the lower movable protective cover are connected by a hinge for opening and closing, and the other side is fixed and locked by a third socket head cap screw M4×10. After the two are butted, a cylindrical structure is formed; preferably, a groove is provided on one side of the lower fixed protective cover, and the wiring head is led out from the groove to achieve electrical connection;

[0039] A SPINDLE main body base, located below the lower movable protective cover and the lower fixed protective cover and fixed to the main body frame by screws, playing a supporting role; conductive rubber foot pads are provided below the SPINDLE main body base.

[0040] As a preferred embodiment provided by this embodiment, the main frame is cylindrical; the upper protective cover is an arc-shaped structure and fits the main frame. The lower movable protective cover and the lower fixed protective cover are both semi-circular structures and fit the main frame; the occupied space is minimized.

[0041] As a preferred embodiment provided by this embodiment, the connecting surface of the lower fixed protective cover is designed as a plane, which saves space and is convenient for fixing.

[0042] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements for some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. The external structure of a SPINDLE main shaft, characterized in that, Including: A corrugated pipe end cover disc, sleeved on the SPINDLE main shaft; A corrugated pipe assembly, located below the corrugated pipe end cover disc and fixed on the main body frame; A copper pipe, with cooling water passing through it internally, located below the corrugated pipe assembly and coiled around the main body frame; An upper protective cover, located below the copper pipe and fixed on the main body frame; A lower movable protective cover, located below the upper protective cover; A lower fixed protective cover, fixed on the main body frame and connected to the lower movable protective cover in an opening and closing manner, forming a cylindrical structure after docking; A SPINDLE main body base, located below the lower movable protective cover and the lower fixed protective cover, serving as a support.

2. The external shape structure of a SPINDLE main shaft according to claim 1, characterized in that, A groove is provided on one side of the lower fixed protective cover, and the wiring head is led out from the groove to achieve electrical connection.

3. The external structure of a SPINDLE main shaft according to claim 1, characterized in that, The main body frame is cylindrical.

4. The external shape structure of a SPINDLE main shaft according to claim 1, characterized in that, The lower movable protective cover and the lower fixed protective cover are connected by a hinge.

5. The external shape structure of a SPINDLE main shaft according to claim 1, characterized in that, Conductive rubber feet are provided below the SPINDLE main body base.

6. The external shape structure of a SPINDLE main shaft according to claim 1, characterized in that, The upper protective cover is of an arc-shaped structure and fits the main body frame.

7. The external shape structure of a SPINDLE main shaft according to claim 1, characterized in that, The lower movable protective cover and the lower fixed protective cover are both of a semi-circular structure and fit the main body frame.

8. According to the external shape structure of a SPINDLE main shaft described in claim 1, characterized in that A water pipe protective cover is fixed on the main body frame and is arranged on the opposite side of the upper protective cover.

9. The external shape structure of a SPINDLE main shaft according to claim 8, characterized in that, The water pipe protective cover is of a flat structure and is used to protect the copper pipe joint.

10. The external shape structure of a SPINDLE main shaft according to claim 1, characterized in that, The connecting surface of the lower fixed protective cover is designed as a plane.

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