Tail gas impurity removal device and hydrogen recovery system

Abstract

The utility model provides a tail gas impurity removal device and a hydrogen recovery system, relates to the technical field of hydrogen treatment, and is used for solving the technical problems that an existing tail gas recovery device is poor in adsorption effect on impurities in tail gas and relatively pure hydrogen cannot be obtained. The tail gas impurity removal device comprises a tower body and a vacuum pump; a pressure swing adsorption assembly is installed in a cavity of the tower body, the tower body is provided with a pressure swing element, and the pressure swing element is at least used for adjusting the adsorption pressure of the pressure swing adsorption assembly; the outlet of the tower body is connected with a hydrogen discharge pipeline; an air suction port of the vacuum pump communicates with the cavity. Through cooperation of the pressure swing adsorption assembly and the pressure swing element, different impurities can be directionally adsorbed, and the adsorption effect of the impurities in the tail gas is improved, so that relatively pure hydrogen is obtained; the pressure swing adsorption assembly is vacuumized through the vacuum pump, so that impurities adsorbed by the pressure swing adsorption assembly are separated from the pressure swing adsorption assembly, purification of the pressure swing adsorption assembly can be achieved, and the pressure swing adsorption assembly can be reused.

Description

Technical Field

[0001] This application relates to the technical field of hydrogen treatment, and particularly to an exhaust gas impurity removal device and a hydrogen recovery system. Background Art

[0002] During the production process of polysilicon, tail gas mainly containing components such as hydrogen, hydrogen chloride, chlorosilane, and nitrogen is generated. The tail gas generated during the polysilicon production process can be purified through a tail gas recovery device to obtain relatively pure hydrogen, enabling the recycling of hydrogen. However, the existing tail gas recovery devices have poor adsorption effects on the impurities in the tail gas and cannot obtain relatively pure hydrogen. Summary of the Utility Model

[0003] In view of the above problems, the embodiments of this application provide an exhaust gas impurity removal device and a hydrogen recovery system, which can well adsorb the impurities in the tail gas and obtain relatively pure hydrogen.

[0004] To achieve the above object, the embodiments of this application provide the following technical solutions:

[0005] In a first aspect, the embodiments of this application provide an exhaust gas impurity removal device, including: a tower body and a vacuum pump;

[0006] The tower body has a cavity, a pressure swing adsorption assembly is installed in the cavity, the tower body is provided with a pressure variation element, the pressure variation element is communicated with the cavity, and the pressure variation element is at least used to adjust the adsorption pressure of the pressure swing adsorption assembly;

[0007] The outlet of the tower body is connected to a hydrogen discharge pipeline;

[0008] The suction port of the vacuum pump is communicated with the cavity.

[0009] In some embodiments of this application, the number of tower bodies is multiple, the multiple tower bodies are connected in sequence, and the cavities of the multiple tower bodies are all communicated with the suction port of the vacuum pump.

[0010] In some embodiments of this application, the suction port of the vacuum pump is connected with a control member, the control member has multiple connection ports, and the control member is communicated with the cavities of the multiple tower bodies through the multiple connection ports.

[0011] In some embodiments of this application, the outlet of the last-stage tower body is connected to the hydrogen discharge pipeline.

[0012] In some embodiments of this application, a sampling device is provided on the hydrogen discharge pipeline.

[0013] In some embodiments of this application, the outlet of the vacuum pump is connected to an exhaust gas storage tank.

[0014] In some embodiments of this application, the pressure swing adsorption assembly includes an adsorbent bed layer and an adsorbent, the adsorbent is arranged in the adsorbent bed layer, and the adsorbent bed layer is installed in the cavity.

[0015] In some embodiments of the present application, the adsorbent bed includes a first bed layer, a second bed layer, and a third bed layer arranged in sequence;

[0016] And / or, the adsorbent is set to be one of silica gel, activated carbon, and molecular sieve.

[0017] In some embodiments of the present application, the adsorbent provided in the first bed layer is set to be silica gel; the adsorbent provided in the second bed layer is set to be activated carbon; the adsorbent provided in the third bed layer is set to be molecular sieve.

[0018] In a second aspect, an embodiment of the present application provides a hydrogen recovery system, including the above-mentioned tail gas purification device and a hydrogen storage tank, and the hydrogen discharge pipeline of the tail gas purification device is connected to the inlet of the hydrogen storage tank.

[0019] The present application provides a tail gas purification device and a hydrogen recovery system, including a tower body and a vacuum pump. The tower body has a cavity, and a pressure swing adsorption assembly is installed in the cavity. The tower body is provided with a pressure changing element, and the pressure changing element is communicated with the cavity. The pressure changing element is at least used to adjust the adsorption pressure of the pressure swing adsorption assembly; the outlet of the tower body is connected to a hydrogen discharge pipeline; the suction port of the vacuum pump is communicated with the cavity. Through the cooperation of the pressure swing adsorption assembly and the pressure changing element, targeted adsorption can be carried out for different impurities, improving the adsorption effect of impurities in the tail gas to obtain relatively pure hydrogen; by using the vacuum pump to perform vacuum treatment on the pressure swing adsorption assembly, the impurities adsorbed by the pressure swing adsorption assembly can be separated from the pressure swing adsorption assembly, realizing the purification of the pressure swing adsorption assembly and enabling the pressure swing adsorption assembly to be reused, improving the adsorption effect.

[0020] In addition to the technical problems solved by the embodiments of the present application described above, the technical features constituting the technical solutions, and the beneficial effects brought by these technical features of the technical solutions, other technical problems that can be solved by the tail gas purification device and the hydrogen recovery system provided by the embodiments of the present application, other technical features included in the technical solutions, and the beneficial effects brought by these technical features will be further described in detail in the specific implementation manner. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0022] Figure 1 It is a schematic structural diagram of a tail gas purification device provided by an embodiment of the present application;

[0023] Figure 2 Another structural schematic diagram of the tail gas purification device provided by the embodiment of the present application.

[0024] Reference numerals:

[0025] 100 - Tower body;

[0026] 200 - Vacuum pump;

[0027] 300 - Pressure - varying element;

[0028] 400 - Control part;

[0029] 500 - Hydrogen discharge pipeline;

[0030] 501 - Sampling device;

[0031] 600 - Waste gas storage tank;

[0032] 700 - Adsorbent bed layer;

[0033] 701 - First bed layer;

[0034] 702 - Second bed layer;

[0035] 703 - Third bed layer;

[0036] 800 - Hydrogen storage tank;

[0037] 900 - Tail gas input pipeline. Detailed implementation manners

[0038] In the related art, a tail gas recovery device is used to purify the tail gas generated in the polysilicon production process to obtain relatively pure hydrogen, so that the hydrogen can be recycled. However, there are many components in the tail gas, mainly including components such as hydrogen, hydrogen chloride, chlorosilane, and nitrogen. The existing tail gas recovery devices cannot perform directional adsorption on different impurities, resulting in poor adsorption effect of the tail gas recovery device on the impurities in the tail gas and unable to obtain relatively pure hydrogen.

[0039] To solve the above problems, the present application provides a tail gas purification device, including: a tower body and a vacuum pump; the tower body has a cavity, and a pressure - swing adsorption assembly is installed in the cavity. The tower body is provided with a pressure - varying element, and the pressure - varying element is communicated with the cavity. The pressure - varying element is at least used to adjust the adsorption pressure of the pressure - swing adsorption assembly; the outlet of the tower body is connected to the hydrogen discharge pipeline; the suction port of the vacuum pump is communicated with the cavity. Through the cooperation of the pressure - swing adsorption assembly and the pressure - varying element, directional adsorption can be performed on different impurities, improving the adsorption effect of the impurities in the tail gas to obtain relatively pure hydrogen; by using the vacuum pump to perform vacuum treatment on the pressure - swing adsorption assembly, the impurities adsorbed by the pressure - swing adsorption assembly can be separated from the pressure - swing adsorption assembly, realizing the purification of the pressure - swing adsorption assembly and enabling the pressure - swing adsorption assembly to be reused, improving the adsorption effect.

[0040] In order to make the above objects, features, and advantages of the embodiments of the present application more obvious and understandable, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all of the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative efforts shall fall within the scope of protection of the present application.

[0041] Please refer to Figure 1 - Figure 2 , the present application provides a tail gas purification device, including a tower body 100 and a vacuum pump 200. The tower body 100 can be set as a hollow structure, and the tower body 100 can be connected to the suction port of the vacuum pump 200.

[0042] In some embodiments of the present application, the tower body 100 has a cavity, a pressure swing adsorption component is installed in the cavity, the tower body 100 is provided with a pressure change element 300, the pressure change element 300 is communicated with the cavity, and the pressure change element 300 is at least used to adjust the adsorption pressure of the pressure swing adsorption component.

[0043] In some embodiments of the present application, the tail gas mainly containing components such as hydrogen, hydrogen chloride, chlorosilane, and nitrogen can enter the cavity of the tower body 100 through the tail gas input pipeline 900.

[0044] In some embodiments of the present application, the pressure swing adsorption component is installed in the cavity of the tower body 100 and is used to adsorb impurities in the tail gas.

[0045] Through the cooperation of the pressure swing adsorption component and the pressure change element 300, directional adsorption can be carried out for different impurities, improving the adsorption effect of impurities in the tail gas to obtain relatively pure hydrogen. The setting of the pressure change element 300 enables the adsorption pressure to be flexibly adjusted, adapting to changes in different tail gas components and concentrations, and improving the applicability of the device.

[0046] In some embodiments of the present application, the pressure change element 300 may include an adsorption regulator, a pressure equalization regulator, and a desorption regulator. The desorption regulator may include a flushing operation switch and a evacuation switch. The pressure change element 300 can adjust the adsorption pressure of the pressure swing adsorption component, thereby optimizing the adsorption effect.

[0047] In some embodiments of the present application, the outlet of the tower body 100 is connected to a hydrogen discharge pipeline 500. The hydrogen discharge pipeline 500 is communicated with the outlet of the tower body 100 and is used to discharge the purified hydrogen after impurity removal.

[0048] In some embodiments of the present application, the suction port of the vacuum pump 200 is communicated with the cavity. After the adsorption process is completed, the vacuum pump 200 is started, and the cavity of the tower body 100 is evacuated through the vacuum pump 200.

[0049] The pressure swing adsorption assembly is evacuated by a vacuum pump 200, so that the adsorbed impurities in the pressure swing adsorption assembly are separated from the pressure swing adsorption assembly, which can purify the pressure swing adsorption assembly and enable the pressure swing adsorption assembly to be reused, improve the adsorption effect, extend the service life of the adsorbent, and reduce the operation cost of the device.

[0050] In some embodiments of the present application, the number of the towers 100 is multiple, the multiple towers 100 are connected in sequence, and the cavities of the multiple towers 100 are all communicated with the suction port of the vacuum pump 200. Through multiple pressure swing adsorption processes of the pressure swing adsorption assemblies in the multiple towers 100, relatively pure hydrogen can be obtained, and the recovery rate of hydrogen is improved.

[0051] In some embodiments of the present application, the multiple towers 100 all have cavities, pressure swing adsorption assemblies are installed in the cavities of the multiple towers 100, and pressure swing elements 300 are provided on the multiple towers 100. The tower 100 closest to the tail gas input pipeline 900 can be the first-stage tower, the tower 100 farthest from the tail gas input pipeline 900 can be the last-stage tower 100, and the other towers 100 can be intermediate-stage towers.

[0052] In some embodiments of the present application, after the tail gas is preliminarily purified by the first-stage tower, it can enter the next tower in sequence, repeat the pressure swing adsorption process, and gradually remove more impurities.

[0053] The pressure swing element 300 of each tower 100 can independently adjust the adsorption pressure, flexibly respond to the changes in the composition and concentration of the tail gas, and improve the applicability of the device.

[0054] Please refer to Figure 2 , in some embodiments of the present application, the number of the towers 100 can be three. The three towers 100 are connected in sequence. The tail gas mainly containing components such as hydrogen, hydrogen chloride, chlorosilane and nitrogen passes through the first-stage tower, the intermediate-stage tower and the last-stage tower 100 in sequence. The outlet of the last-stage tower 100 is connected to the hydrogen discharge pipeline 500, and the relatively pure hydrogen obtained is discharged through the hydrogen discharge pipeline 500. Through multiple pressure swing adsorption processes of the pressure swing adsorption assemblies in the three towers 100, the processing capacity of the device is improved, relatively pure hydrogen can be obtained, and the recovery rate of hydrogen is improved.

[0055] Please refer to Figure 1 , in some embodiments of the present application, the number of the towers 100 can be two. The two towers 100 are connected in sequence. Through multiple pressure swing adsorption processes of the pressure swing adsorption assemblies in the two towers 100, the processing capacity of the device is improved, relatively pure hydrogen can be obtained, and the recovery rate of hydrogen is improved.

[0056] Please refer to Figure 1 - Figure 2, in some embodiments of the present application, a control member 400 is connected to the suction port of the vacuum pump 200. The control member 400 has a plurality of connection ports, and the control member 400 is communicated with the cavities of a plurality of towers 100 through the plurality of connection ports.

[0057] In some embodiments of the present application, the control member 400 can be used to control the connection or disconnection between the plurality of towers 100 and the suction port of the vacuum pump 200.

[0058] After the adsorption process of the plurality of towers 100 ends, close the inlet valve of the first-stage tower 100 and stop inputting the tail gas. By adjusting the control member 400, the plurality of towers 100 are not communicated with the hydrogen discharge pipeline 500, and the plurality of towers 100 and the vacuum pump 200 are communicated. Start the vacuum pump 200, and through the control member 400, the cavities of the respective towers 100 are communicated with the suction port of the vacuum pump 200, so that the vacuum pump 200 simultaneously performs vacuum pumping on the cavities of the plurality of towers 100.

[0059] Through the control member 400, the vacuum pump 200 can simultaneously perform vacuum pumping on the plurality of towers 100, improving the vacuum pumping efficiency and reducing the energy consumption. It can realize the efficient purification of the pressure swing adsorption assembly and enable the pressure swing adsorption assembly to be reused, improving the adsorption effect, prolonging the service life of the adsorbent, and reducing the operation cost of the device.

[0060] In some embodiments of the present application, the control member 400 can be a manual valve or a solenoid valve. The control member 400 can flexibly control the connection state between the vacuum pump 200 and each tower 100 to realize vacuum pumping on the plurality of towers 100.

[0061] In some embodiments of the present application, the outlet of the last-stage tower 100 is connected to the hydrogen discharge pipeline 500.

[0062] Please refer to Figure 2 , in some embodiments of the present application, when the number of towers 100 is three, the tower 100 farthest from the tail gas input pipeline 900 is the third tower, and the third tower can be the last-stage tower 100. The hydrogen purified by the last-stage tower 100 is output through the hydrogen discharge pipeline 500.

[0063] Please refer to Figure 1 , in some embodiments of the present application, when the number of towers 100 is two, the tower 100 farthest from the tail gas input pipeline 900 is the second tower, and the second tower can be the last-stage tower 100. The hydrogen purified by the last-stage tower 100 is output through the hydrogen discharge pipeline 500.

[0064] In some embodiments of the present application, a sampling device 501 is provided on the hydrogen discharge pipeline 500. Through the sampling device 501, a hydrogen sample discharged from the hydrogen discharge pipeline 500 can be taken out.

[0065] After a period of pressure swing adsorption, a certain amount of hydrogen sample is taken out through the sampling device 501. By detecting the purity of the hydrogen sample, it is judged whether the adsorption capacity of the pressure swing adsorption component in the tower body 100 can meet the requirements.

[0066] If the purity of the hydrogen sample taken out through the sampling device 501 does not meet the requirements, the input of the tail gas into the tower body 100 is stopped. Then the vacuum pump 200 is started, and the pressure swing adsorption component is evacuated through the vacuum pump 200, so that the adsorbed impurities of the pressure swing adsorption component are separated from the pressure swing adsorption component, realizing the purification of the pressure swing adsorption component and enabling the pressure swing adsorption component to be reused.

[0067] If the purity of the hydrogen sample taken out through the sampling device 501 can meet the requirements, the pressure swing adsorption continues.

[0068] The hydrogen discharged from the hydrogen discharge pipeline 500 can be regularly taken out through the sampling device 501. By frequently detecting the purity of the hydrogen discharged from the hydrogen discharge pipeline 500, it is ensured that the quality of the discharged hydrogen meets the requirements.

[0069] In some embodiments of the present application, the sampling device 501 can be a manual valve or a solenoid valve. The hydrogen discharged from the hydrogen discharge pipeline 500 can be taken out through the manual valve or the solenoid valve, which is convenient for subsequent detection.

[0070] In some embodiments of the present application, the outlet of the vacuum pump 200 is connected to the waste gas storage tank 600.

[0071] After the vacuum pump 200 is started, the pressure swing adsorption component is evacuated through the vacuum pump 200, so that the adsorbed impurities of the pressure swing adsorption component are separated from the pressure swing adsorption component, and the impurities separated from the pressure swing adsorption component are stored in the waste gas storage tank 600, which is convenient for subsequent impurity treatment and reduces environmental pollution.

[0072] In some embodiments of the present application, the pressure swing adsorption component includes an adsorbent bed layer 700 and an adsorbent. The adsorbent is arranged in the adsorbent bed layer 700, and the adsorbent bed layer 700 is installed in the cavity.

[0073] In some embodiments of the present application, the adsorbent bed layer 700 can be fixedly installed in the cavity. The adsorbent bed layer 700 can be fixedly installed in the cavity by means of clamping and bolt connection.

[0074] In some embodiments of the present application, the pressure swing adsorption component can include a plurality of adsorbent bed layers 700, and a gap is provided between adjacent adsorbent bed layers 700, so that different adsorbent bed layers 700 are spaced apart, improving the adsorption effect of the adsorbent.

[0075] In some embodiments of the present application, the adsorbent bed layer 700 includes a first bed layer 701, a second bed layer 702, and a third bed layer 703 arranged in sequence. The same or different adsorbents can be provided on different bed layers. Different adsorbents can adsorb different impurity gases.

[0076] In some embodiments of the present application, the adsorbent is set as one of silica gel, activated carbon, and molecular sieve.

[0077] Silica gel can adsorb most of the hydrogen chloride and chlorosilane in the tail gas, activated carbon deeply adsorbs hydrogen chloride and chlorosilane, and molecular sieve adsorbs nitrogen.

[0078] Each adsorbent only needs to treat specific impurities, reducing the load of the adsorbent, extending the service life of the adsorbent, and reducing the operating cost.

[0079] In some embodiments of the present application, the adsorbent provided on the first bed layer 701 is set as silica gel; the adsorbent provided on the second bed layer 702 is set as activated carbon; the adsorbent provided on the third bed layer 703 is set as molecular sieve.

[0080] The tail gas generated in the polysilicon production process sequentially passes through the first bed layer 701, the second bed layer 702, and the third bed layer 703, and the adsorbents on the first bed layer 701, the second bed layer 702, and the third bed layer 703 adsorb hydrogen chloride, chlorosilane, nitrogen, etc. to obtain relatively pure hydrogen.

[0081] It should be noted that the inlet of the tower body 100 can be located at the bottom of the tower body 100; the outlet of the tower body 100 can be located at the top of the tower body 100.

[0082] In the pressure swing adsorption stage, the tail gas is input through the tail gas input pipeline 900, and multiple tower bodies 100 are connected in sequence. The outlet of the upper-stage tower body 100 is connected to the inlet of the lower-stage tower body 100. By adjusting the control member 400, the multiple tower bodies 100 and the vacuum pump 200 are not connected, and the outlet of the last-stage tower body 100 is connected to the hydrogen discharge pipeline 500. The vacuum pump 200 is not started, and by adjusting the valves on the outlet pipelines of the multiple tower bodies 100, the outlet of the first-stage tower body 100 and the outlet of the intermediate-stage tower body 100 are not connected to the hydrogen discharge pipeline 500.

[0083] In the vacuum pumping stage, the inlet valve of the first-stage tower body 100 is closed to stop inputting the tail gas. The valves between adjacent two tower bodies 100 are closed so that the adjacent two tower bodies 100 are not connected. By adjusting the control member 400, the multiple tower bodies 100 are not connected to the hydrogen discharge pipeline 500, and the multiple tower bodies 100 and the vacuum pump 200 are connected. The vacuum pump 200 is started, and the multiple tower bodies 100 are evacuated by the vacuum pump 200.

[0084] Please refer to Figure 1 - Figure 2 , the present application provides a hydrogen recovery system, including the above-mentioned tail gas purification device and a hydrogen storage tank 800. The hydrogen discharge pipeline 500 of the tail gas purification device is connected to the inlet of the hydrogen storage tank 800.

[0085] The hydrogen from which impurities have been removed and discharged through the hydrogen discharge pipeline 500 enters and is stored in the hydrogen storage tank 800, and the stored hydrogen can be reused.

[0086] The specific structure of the tail gas purification device has been described in detail above and will not be elaborated here.

[0087] In this specification, the embodiments or implementation manners are described in a progressive manner. Each embodiment focuses on the differences from other embodiments. For the same or similar parts among the various embodiments, reference can be made to each other.

[0088] In the description of this specification, the description with reference to terms such as "one implementation manner", "some implementation manners", "illustrative implementation manner", "example", "specific example", or "some examples" means that the specific features, structures, materials, or characteristics described in connection with the implementation manner or example are included in at least one implementation manner or example of the present application. In this specification, the schematic descriptions of the above terms do not necessarily refer to the same implementation manner or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more implementation manners or examples.

[0089] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the various embodiments of the present application.

Claims

1. An exhaust gas purification device, characterized in that, It includes a tower body (100) and a vacuum pump (200); The tower body (100) has a cavity, a pressure swing adsorption assembly is installed in the cavity, the tower body (100) is provided with a pressure changing element (300), the pressure changing element (300) is communicated with the cavity, and the pressure changing element (300) is at least used to adjust the adsorption pressure of the pressure swing adsorption assembly; The outlet of the tower body (100) is connected to a hydrogen discharge pipeline (500); The suction port of the vacuum pump (200) is communicated with the cavity.

2. The tail gas purification device according to claim 1, characterized in that The number of the tower bodies (100) is multiple, the multiple tower bodies (100) are connected in sequence, and the cavities of the multiple tower bodies (100) are all communicated with the suction port of the vacuum pump (200).

3. The tail gas purification device according to claim 2, characterized in that, The suction port of the vacuum pump (200) is connected with a control part (400), the control part (400) has multiple connection ports, and the control part (400) is communicated with the cavities of the multiple tower bodies (100) through the multiple connection ports.

4. The tail gas purification device according to claim 2, wherein, The outlet of the last-stage tower body (100) is connected to a hydrogen discharge pipeline (500).

5. The tail gas purification device according to claim 3, wherein, A sampling device (501) is arranged on the hydrogen discharge pipeline (500).

6. The tail gas purification device according to claim 2, characterized in that The outlet of the vacuum pump (200) is connected to an exhaust gas storage tank (600).

7. The tail gas purification device according to any one of claims 1-6, characterized in that, The pressure swing adsorption assembly includes an adsorbent bed layer (700) and an adsorbent, the adsorbent is arranged in the adsorbent bed layer (700), and the adsorbent bed layer (700) is installed in the cavity.

8. The tail gas purification device according to claim 7, characterized in that, The adsorbent bed layer (700) includes a first bed layer (701), a second bed layer (702) and a third bed layer (703) arranged in sequence; And / or, the adsorbent is set as one of silica gel, activated carbon and molecular sieve.

9. The tail gas purification device according to claim 8, wherein, The adsorbent arranged in the first bed layer (701) is set as silica gel; the adsorbent arranged in the second bed layer (702) is set as activated carbon; the adsorbent arranged in the third bed layer (703) is set as molecular sieve.

10. A hydrogen recovery system, characterized in that, It includes the tail gas purification device according to any one of claims 1-9 and a hydrogen storage tank (800), and the hydrogen discharge pipeline (500) of the tail gas purification device is connected to the inlet of the hydrogen storage tank (800).

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