Large two-dimensional scanning galvanometer

Abstract

The utility model provides a large-scale two-dimensional scanning galvanometer, and relates to the technical field of laser devices. Comprising a U-shaped plate which is connected to a front panel, a rear panel and a water cooling cover plate in an embedded mode, and a heat conduction supporting piece is arranged in the U-shaped plate; the rear panel is connected with the front panel and the water-cooling cover plate through screws, the water-cooling cover plate is connected with the front panel through screws, and the heat conduction supporting piece is connected with the front panel in an attached mode through screws. The upper end of the heat conduction supporting piece is attached to the water cooling cover plate, and a first laser input port in the water cooling cover plate is aligned with a second laser input port in the heat conduction supporting piece. An installation position used for installing the galvanometer assembly is arranged in the heat conduction supporting piece. Through introduction of an efficient water cooling heat dissipation system, modular design, application of a heat conduction supporting piece and optimization of an optical path, the problems that an existing large two-dimensional scanning galvanometer is insufficient in heat dissipation and difficult to repair and maintain are effectively solved, and the reliability and use convenience of equipment are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of laser devices, and particularly to a large two-dimensional scanning galvanometer. Background Art

[0002] With the development of industry and the continuous progress of laser technology, it has been applied in many fields. For example, in the surveying and mapping field, such as level gauges, laser welding in the welding field, and other applications such as laser cutting and laser engraving, which provide assistance for production and development.

[0003] In the application of lasers, in addition to the laser head, many other components are also required, such as a scanning galvanometer, which changes the optical path of the laser emitted by the laser head to achieve the purpose of controlling the laser output, and is commonly used in engraving and welding, etc.

[0004] For the current large two-dimensional scanning galvanometer, on the one hand, it dissipates heat through air cooling, and its heat dissipation effect is not good, unable to support the laser output of large spots. Moreover, since the galvanometer is a vulnerable part and the overall structural design is not ideal, it is difficult to disassemble and replace the vulnerable parts, which is not convenient for maintenance and repair work. Therefore, the utility model proposes a large two-dimensional scanning galvanometer to at least partially solve the problems that may exist in the prior art. Summary of the Utility Model

[0005] The purpose of the utility model is to provide a large two-dimensional scanning galvanometer, which can propose a solution to the deficiencies of the prior art and solve the problem of poor air-cooling heat dissipation effect of the large two-dimensional scanning galvanometer.

[0006] To solve the above technical problems, the technical solution adopted by the utility model is as follows:

[0007] A large two-dimensional scanning galvanometer, comprising:

[0008] A U-shaped plate, the front end of which is embedded and connected to the front panel, the rear end of which is embedded and connected to the rear panel, the upper end of which is embedded and connected to the water-cooling cover plate, and a heat-conducting support member is arranged inside;

[0009] The rear panel is connected to the front panel and the water-cooling cover plate by screws, the water-cooling cover plate is connected to the front panel by screws, and the heat-conducting support member is adhesively connected to the front panel by screws;

[0010] The upper end of the heat-conducting support member is in contact with the water-cooling cover plate, and the first laser input port on the water-cooling cover plate is aligned with the second laser input port on the heat-conducting support member;

[0011] An installation position for installing a galvanometer assembly is arranged in the heat-conducting support member, forming an optical path from the first laser input port and the second laser input port, passing through the galvanometer assembly, and then passing through the laser output port of the front panel;

[0012] The liquid cooling channel communicating the liquid cooling inlet and the liquid cooling outlet is arranged inside the liquid cooling cover plate.

[0013] Further, in the present utility model, the mounting positions on the heat conducting support member include an X-axis galvanometer mounting position and a Y-axis galvanometer mounting position;

[0014] The galvanometer assembly includes a servo motor located at the X-axis galvanometer mounting position and the Y-axis galvanometer mounting position, and a galvanometer mirror disposed on the servo motor;

[0015] The galvanometer mirror is located inside the laser output port, forming a two-dimensional scanning light path from the first laser input port and the second laser input port, to the galvanometer mirror at the X-axis galvanometer mounting position, then to the galvanometer mirror at the Y-axis galvanometer mounting position, and then to the laser output port.

[0016] Further, in the present utility model, an adjustment hole communicating with the liquid cooling channel is further arranged on the liquid cooling cover plate, and the adjustment hole faces the front panel direction or the rear panel direction.

[0017] Further, in the present utility model, a first groove is arranged on the front panel; a second groove is arranged on the rear panel, and a third groove is arranged on the liquid cooling cover plate, and a heat conducting support member is arranged inside it;

[0018] The first groove, the second groove and the third groove communicate to form a U-shaped groove corresponding to the U-shaped plate, and the U-shaped plate is embedded and connected to the U-shaped groove.

[0019] Further, in the present utility model, the rear panel is a metal plate, and heat dissipation grooves are arranged on its outer side.

[0020] Further, in the present utility model, first alignment holes and second alignment holes are respectively arranged at corresponding positions on the front panel and the liquid cooling cover plate;

[0021] Limit posts are inserted into the first alignment hole and the second alignment hole.

[0022] Further, in the present utility model, an integrated terminal interface is further arranged on the liquid cooling cover plate; for integrating the power supply line and the signal line of the servo motor.

[0023] Further, in the present utility model, a connection block for connecting with the heat conducting support member is further arranged on the outer shell of the servo motor.

[0024] The present utility model has at least the following advantages or beneficial effects:

[0025] Through a U-shaped plate, its front end is embedded and connected to the front panel, its rear end is embedded and connected to the rear panel, its upper end is embedded and connected to the water-cooled cover plate, and a heat-conducting support is provided inside it; the rear panel is connected to the front panel and the water-cooled cover plate by screws, the water-cooled cover plate is connected to the front panel by screws, and the heat-conducting support is attached to the front panel by screws; the upper end of the heat-conducting support is in contact with the water-cooled cover plate, and the first laser input port on the water-cooled cover plate is aligned with the second laser input port on the heat-conducting support; an installation position for installing a galvanometer assembly is provided in the heat-conducting support, forming an optical path from the first laser input port and the second laser input port, passing through the galvanometer assembly, and then passing through the laser output port of the front panel. By introducing an efficient water-cooled heat dissipation system, modular design, the application of a heat-conducting support, and the optimization of the optical path, the problems of insufficient heat dissipation and difficult maintenance of existing large two-dimensional scanning galvanometers are effectively solved, and the reliability and usability of the equipment are improved. Description of the Drawings

[0026] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following will briefly introduce the drawings required for the embodiments. It should be understood that the following drawings only show some embodiments of the present invention, so they should not be regarded as limiting the scope. For those of ordinary skill in the art, without creative efforts, other related drawings can also be obtained based on these drawings.

[0027] Figure 1 Schematic three-dimensional structure diagram of a large two-dimensional scanning galvanometer provided by an embodiment of the present invention;

[0028] Figure 2 Schematic disassembled structure diagram of a large two-dimensional scanning galvanometer without a galvanometer assembly provided by an embodiment of the present invention;

[0029] Figure 3 Schematic inner-side view structure diagram of the water-cooled cover plate of a large two-dimensional scanning galvanometer provided by an embodiment of the present invention;

[0030] Figure 4 Schematic cross-sectional structure diagram of 3;

[0031] Figure 5 Schematic inner-side view structure diagram of the front panel of a large two-dimensional scanning galvanometer provided by an embodiment of the present invention;

[0032] Figure 6 Schematic connection relationship structure diagram of the front panel, rear panel and water-cooled cover plate of a large two-dimensional scanning galvanometer provided by an embodiment of the present invention;

[0033] Figure 7Schematic cross-sectional structure diagram of the connection position between the front panel and the water-cooled cover plate of a large two-dimensional scanning galvanometer provided by an embodiment of the present invention;

[0034] Figure 8 Schematic structure diagram of the galvanometer assembly of a large two-dimensional scanning galvanometer provided by an embodiment of the present invention.

[0035] In the drawings: 101, U-shaped plate; 102, front panel; 103, rear panel; 104, water-cooled cover plate; 105, heat-conducting support; 121, laser output port; 122, first groove; 123, first alignment hole; 131, second groove; 132, heat dissipation groove; 141, liquid cooling inlet; 142, liquid cooling outlet; 143, first laser input port; 144, integrated terminal interface; 145, third groove; 146, liquid cooling channel; 147, adjustment hole; 148, second alignment hole; 151, second laser input port; 152, X-axis galvanometer mounting position 152; 153, Y-axis galvanometer mounting position; 201, servo motor; 202, galvanometer mirror; 203, connecting block. Detailed implementation manners

[0036] In order to make the objectives, features, and advantages of the present invention more obvious and understandable, the present invention will be further described in detail below with reference to the drawings and specific implementation manners. Obviously, the described embodiments are part of the embodiments of the present invention, rather than all of the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0037] Embodiment 1

[0038] Please refer to Figures 1 to 8As shown in the figure, this embodiment provides a large two-dimensional scanning galvanometer, which includes: a U-shaped plate 101, the front end of which is embedded and connected to the front panel 102, the rear end of which is embedded and connected to the rear panel 103, the upper end of which is embedded and connected to the water-cooled cover plate 104, and a heat-conducting support member 105 is provided therein; the rear panel 103 is connected to the front panel 102 and the water-cooled cover plate 104 by screws, the water-cooled cover plate 104 is connected to the front panel 102 by screws, and the heat-conducting support member 105 is adhesively connected to the front panel 102 by screws; the upper end of the heat-conducting support member 105 is in contact with the water-cooled cover plate 104, and the first laser input port 143 on the water-cooled cover plate 104 is aligned with the second laser input port 151 on the heat-conducting support member 105; an installation position for installing the galvanometer assembly is provided in the heat-conducting support member 105, forming an optical path from the first laser input port 143 and the second laser input port 151, passing through the galvanometer assembly, and then passing through the laser output port 121 of the front panel 102; a liquid cooling channel 146 communicating the liquid cooling inlet 141 and the liquid cooling outlet 142 is provided in the water-cooled cover plate 104.

[0039] In this embodiment, through the above large two-dimensional scanning galvanometer, problems such as poor heat dissipation effect and unreasonable structural design of the existing large two-dimensional scanning galvanometer, which lead to difficulties in maintenance and repair, are solved. Specifically, the heat dissipation effect of the traditional air-cooled heat dissipation system is limited when high-power laser is output, while the large two-dimensional scanning galvanometer of the present application adopts a water-cooled heat dissipation system, and the heat dissipation efficiency is improved through the liquid cooling channel in the water-cooled cover plate. The laser with a large spot has an irradiation area. When reflected by the galvanometer mirror 202, compared with the output of a small spot, a relatively large area on the galvanometer mirror 202 will be heated, not only the temperature rises rapidly, but also because the galvanometer mirror 202 is directly connected to the motor, the heat will be directly conducted to the motor. If the heat dissipation is not timely, it is easy to shorten the service life and damage the equipment, and it cannot work continuously for a long time; the water-cooled system has a higher heat conduction efficiency than the air-cooled system and can effectively take away the heat generated by the galvanometer assembly, so as to support the laser output with a larger spot.

[0040] In the present application, the U-shaped plate 101 is used as the core structure of the outer shell, and the front panel 102, the rear panel 103 and the water-cooled cover plate 104 are connected by screws to form a modular structure; it is convenient for disassembly and replacement of vulnerable parts, such as the galvanometer assembly, because each component is fixed by screws, and can be quickly disassembled and reassembled, greatly simplifying the maintenance and repair work; the above heat-conducting support member 105 not only provides an installation position for the galvanometer assembly, but also enhances the heat transfer path by fitting with the water-cooled cover plate 104, so that the heat generated by the galvanometer assembly can be quickly transferred to the water-cooled system, further improving the heat dissipation efficiency.

[0041] By introducing an efficient water-cooling system, modular design, application of heat-conducting supports, and optimization of the optical path, the problems of insufficient heat dissipation and difficult maintenance of existing large two-dimensional scanning galvanometers are effectively solved, and the reliability and usability of the equipment are improved.

[0042] Embodiment 2

[0043] This embodiment provides a large two-dimensional scanning galvanometer, wherein, as Figure 1 and Figure 2 shown, the heat-conducting support 105, the mounting positions thereon include the X-axis galvanometer mounting position 152 and the Y-axis galvanometer mounting position 153; the galvanometer assembly includes a servo motor 201 located at the X-axis galvanometer mounting position 152 and the Y-axis galvanometer mounting position 153, and a galvanometer mirror 202 disposed on the servo motor 201; the galvanometer mirror 202 is located within the laser output port 121, forming a two-dimensional scanning optical path from the first laser input port 143 and the second laser input port 151, to the galvanometer mirror 202 at the X-axis galvanometer mounting position 152, then to the galvanometer mirror 202 at the Y-axis galvanometer mounting position 153, and then to the laser output port 121. Through the galvanometer assembly at the X-axis galvanometer mounting position 152, the position of the laser spot in the X-axis direction can be adjusted, and through the galvanometer assembly at the Y-axis galvanometer mounting position 153, it can move in the Y-axis direction, thereby forming a two-dimensional scanning optical path.

[0044] As a preferred implementation, the water-cooling cover plate 104 is further provided with an adjustment hole 147 communicating with the liquid cooling channel 146, and the adjustment hole 147 faces the front panel 102 direction or the rear panel 103 direction; the adjustment hole 147 connected through the liquid cooling channel 146 can adjust the width in the middle of the channel, thereby controlling the flow rate of the coolant in the channel.

[0045] As a preferred implementation, the front panel 102 is provided with a first groove 122; the rear panel 103 is provided with a second groove 131, and the water-cooling cover plate 104 is provided with a third groove 145, inside which there is a heat-conducting support 105; the first groove 122, the second groove 131, and the third groove 145 communicate to form a U-shaped groove corresponding to the U-shaped plate 101, and the U-shaped plate 101 is embedded and connected to the U-shaped groove.

[0046] As a preferred implementation, the rear panel 103 is a metal plate, and heat dissipation grooves 132 are provided on its outer side to dissipate heat from the internal space of the housing. A fan can also be used in combination at the position of the heat dissipation grooves 132 to further improve the heat dissipation efficiency by means of liquid plus air cooling.

[0047] As a preferred implementation, as Figure 7As shown, corresponding positions on the front panel 102 and the water-cooled cover plate 104 are respectively provided with a first alignment hole 123 and a second alignment hole 148; a limit post is inserted into the first alignment hole 123 and the second alignment hole 148; by providing alignment holes on the front panel 102 and the water-cooled cover plate 104, when installing, the limit post can be inserted into the alignment hole first, and then the alignment hole of the other plate can be connected with the limit post, thus ensuring that the outer shell will not shift, facilitating assembly. At the same time, it can also prevent errors and misalignments in the installation of each part due to the tolerance of the screws. Since the laser output port 121 of the front panel 102 may also install a lens, and the precision requirement for the laser output position is relatively high, the error offset will cause a large error in the laser output position; therefore, through the alignment holes and the limit posts, it can not only play a role in rapid assembly, but also make the offset error lower when connecting.

[0048] As a preferred embodiment, an integrated terminal interface 144 is further provided on the water-cooled cover plate 104; it is used to integrate the power supply line and the signal line of the servo motor 201. It is used to integrate the power supply line and the signal line of the servo motor; through the above integrated terminal interface 204, the power supply and control of two servo motors can be output through one interface, which can simplify the port design and wiring.

[0049] As a preferred embodiment, as Figure 8 shown, a connection block 203 for connecting with the heat-conducting support member 105 is further provided on the outer shell of the servo motor 201. One end of the above connection block 203 is provided with an opening, and a gasket ring with an opening is provided between it and the body of the servo motor 201 to prevent the body from loosening due to thermal expansion and contraction.

[0050] As a preferred embodiment, the U-shaped plate 101 is preferably an insulating plate, such as an epoxy resin insulating plate or a fiberglass plate; the front panel 102, the rear panel 103, the water-cooled cover plate 104, and the heat-conducting support member 105 can be cast from aluminum alloy or stainless steel; it is preferably made of aluminum alloy, which not only makes it have good heat dissipation performance, but also can further reduce the weight of this large two-dimensional scanning galvanometer.

[0051] As a preferred embodiment, a corresponding lens can also be assembled at the position of the laser output port 121, so as to further adjust the emission direction and angle of the laser.

[0052] The above are only the preferred embodiments of the present invention and are not used to limit the present invention. For those skilled in the art, various changes and modifications can be made to the present invention. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

[0053] Each embodiment in this specification is described in a progressive manner. The key point of each embodiment is to illustrate the differences from other embodiments. For the parts that are the same or similar among the embodiments, reference can be made to each other.

[0054] Although the preferred embodiments of the embodiments of the present invention have been described, those skilled in the art can make additional changes and modifications to these embodiments once they know the basic creative concept. Therefore, the appended claims are intended to be construed as including the preferred embodiments and all changes and modifications falling within the scope of the embodiments of the present invention.

[0055] Finally, it should also be noted that in this text, relational terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or terminal device comprising a series of elements not only includes those elements, but also includes other elements not expressly listed, or further includes elements inherent to such process, method, article or terminal device. Without further limitation, an element defined by the statement "comprising an..." does not exclude the presence of additional identical elements in the process, method, article or terminal device comprising the element.

[0056] The above has introduced in detail a large two-dimensional scanning galvanometer provided by the present invention. Specific examples are used in this text to illustrate the principle and implementation manner of the present invention. The description of the above embodiments is only used to help understand the method and its core idea of the present invention; at the same time, for those of ordinary skill in the art, according to the idea of the present invention, there will be changes in the specific implementation manner and application scope. In summary, the content of this specification should not be construed as a limitation to the present invention.

Claims

1. A large two-dimensional scanning galvanometer, characterized in that, Comprising: A U-shaped plate (101), whose front end is embedded and connected to the front panel (102), whose rear end is embedded and connected to the rear panel (103), whose upper end is embedded and connected to the water-cooled cover plate (104), and a heat-conducting support member (105) is provided therein; The rear panel (103) is connected to the front panel (102) and the water-cooled cover plate (104) by screws, the water-cooled cover plate (104) is connected to the front panel (102) by screws, and the heat-conducting support member (105) is adhesively connected to the front panel (102) by screws; The upper end of the heat-conducting support member (105) is in contact with the water-cooled cover plate (104), and the first laser input port (143) on the water-cooled cover plate (104) is aligned with the second laser input port (151) on the heat-conducting support member (105); An installation position for installing a galvanometer assembly is provided in the heat-conducting support member (105), forming an optical path from the first laser input port (143) and the second laser input port (151), passing through the galvanometer assembly, and then passing through the laser output port (121) of the front panel (102); A liquid-cooling channel (146) communicating the liquid-cooling inlet (141) and the liquid-cooling outlet (142) is provided in the water-cooled cover plate (104).

2. The large two-dimensional scanning galvanometer according to claim 1, wherein The heat-conducting support member (105), the installation position thereon includes an X-axis galvanometer installation position (152) and a Y-axis galvanometer installation position (153); The galvanometer assembly includes a servo motor (201) located in the X-axis galvanometer installation position (152) and the Y-axis galvanometer installation position (153), and a galvanometer mirror (202) provided on the servo motor (201); The galvanometer mirror (202) is located in the laser output port (121), forming a two-dimensional scanning optical path from the first laser input port (143) and the second laser input port (151), to the galvanometer mirror (202) in the X-axis galvanometer installation position (152), then to the galvanometer mirror (202) in the Y-axis galvanometer installation position (153), and then to the laser output port (121).

3. The large two-dimensional scanning galvanometer according to claim 1 or 2, characterized in that An adjustment hole (147) communicating with the liquid-cooling channel (146) is further provided on the water-cooled cover plate (104), and the adjustment hole (147) faces the direction of the front panel (102) or the rear panel (103).

4. The large two-dimensional scanning galvanometer according to claim 1, wherein A first groove (122) is provided on the front panel (102); a second groove (131) is provided on the rear panel (103), and a third groove (145) is provided on the water-cooled cover plate (104), and a heat-conducting support member (105) is provided therein; The first groove (122), the second groove (131) and the third groove (145) communicate to form a U-shaped groove corresponding to the U-shaped plate (101), and the U-shaped plate (101) is embedded and connected to the U-shaped groove.

5. The large two-dimensional scanning galvanometer according to claim 1, characterized in that, The rear panel (103) is a metal plate, and heat dissipation grooves (132) are provided on its outer side.

6. The large two-dimensional scanning galvanometer according to claim 1, wherein First alignment holes (123) and second alignment holes (148) are respectively provided at corresponding positions on the front panel (102) and the water-cooled cover plate (104); Limit posts are inserted into the first alignment hole (123) and the second alignment hole (148).

7. The large two-dimensional scanning galvanometer according to claim 2, wherein An integrated terminal interface (144) is further provided on the water-cooled cover plate (104); it is used to integrate the power supply line and signal line of the servo motor (201).

8. The large two-dimensional scanning galvanometer according to claim 7, characterized in that, A connection block (203) for connecting with the heat-conducting support member (105) is further provided on the outer shell of the servo motor (201).

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