Single-swing-rod air floatation vibration isolation platform supporting leg
Through the flexible double cavity and ultra-small hole laminar flow damping design of the single-swish rod air-floating vibration isolation platform outrigger, the stability of the air-floating vibration isolation platform outrigger in complex vibration environments is solved, and higher measurement accuracy and stability are achieved, and are suitable for high-precision instruments and equipment.
Patent Information
- Application Number
- CN202422141430.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-02
- Publication Date
- 2025-07-18
- Estimated Expiration
- 2034-09-02
AI Technical Summary
The existing air-floating vibration isolation platform legs have reduced stability in environments where vibration interference is complex and variable or frequent, affecting the measurement accuracy of high-precision instruments.
The single pendulum rod air-floating vibration isolation platform legs are adopted, combined with flexible double cavity and ultra-small hole laminar flow damping design, and the adjustment screw and ultra-small hole laminar flow damping are used to absorb vibration energy and enhance stability.
It improves the stability of the legs and reduces the natural frequency in the horizontal direction. It is suitable for high-precision instruments and equipment such as microscopes, medical biology, optical path testing, optical measurement and precision detection.
Smart Images
Figure CN223120495U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of vibration isolators, in particular to a single pendulum rod air-floating vibration isolation platform leg. Background Art
[0002] In recent years, with the continuous progress of precision machining technology, especially in the fields of semiconductor nano manufacturing process, microelectromechanical systems, nanocomposites, ultra-precision machining, etc., there is an urgent need for related technologies and measuring instruments for surface microtopography measurement. During the process of measuring the surface microtopography, it must be carried out on a measuring workbench with good vibration isolation performance, otherwise any tiny vibration will have a great impact on its measurement results. Therefore, there is an urgent need for a workbench with excellent vibration isolation performance and capable of effectively absorbing vibration energy.
[0003] In the prior art, generally, an air-floating vibration isolation platform is used for support, and the external disturbance is reduced or absorbed by using gas (usually air) as the isolation medium. The air-floating vibration isolation leg on the air-floating vibration isolation platform is an important vibration reduction component. In the occasion where the vibration interference is complex and changeable or the vibration is frequent, the legs of some air-floating platforms may have a decrease in stability, affecting the measurement accuracy of precision equipment on the platform.
[0004] In view of the above problems, the utility model proposes a single pendulum rod air-floating vibration isolation platform leg. Content of the Utility Model
[0005] The purpose of the utility model is to provide a single pendulum rod air-floating vibration isolation platform leg with good stability, which can be applied to high-precision instrument measurement.
[0006] To achieve the above purpose, the utility model provides a single pendulum rod air-floating vibration isolation platform leg, which includes a leg housing and a gas regulating valve. An adjusting screw is arranged inside the leg housing. A support disk is connected to one side of the outer end of the adjusting screw outside the leg housing. A partition is arranged inside the leg housing, and the partition divides the inside of the leg housing into an inner cavity and an outer cavity. An air inlet hole for delivering gas into the outer cavity is opened on the side wall of the leg housing, and a super-small hole laminar flow damper for delivering gas into the inner cavity is opened on the partition.
[0007] Preferably, the adjusting range of the adjusting screw is ±15 mm.
[0008] Preferably, a limiting tray is sleeved on the outer periphery of one side of the outer end of the adjusting screw outside the leg housing.
[0009] Preferably, an airbag protective cover is arranged at the top of the leg housing.
[0010] Preferably, a base is arranged below the leg housing.
[0011] Preferably, casters are provided at the bottom end of the base.
[0012] Therefore, compared with the prior art, the legs of the single pendulum rod air-floating vibration isolation platform of the present utility model have the following specific beneficial effects:
[0013] (1) The present utility model uses the single pendulum rod structure design of the adjusting screw. When external vibration occurs, the internal screw moves to effectively cancel the external vibration. Combined with the hybrid double-chamber structure, the working stability of the legs is improved;
[0014] (2) The present utility model uses ultra-small hole laminar flow damping, which can ensure the smoothness of the air flow and the uniformity of air intake and exhaust, making the floating state of the platform better;
[0015] (3) The present utility model is provided with an airbag protective cover to protect key components from the external environment.
[0016] The technical solution of the present utility model will be further described in detail below with reference to the drawings and embodiments. Description of the Drawings
[0017] Figure 1 is a three-dimensional structural schematic diagram of the legs of a single pendulum rod air-floating vibration isolation platform of the present utility model;
[0018] Figure 2 is a cross-sectional structural schematic diagram of the legs of a single pendulum rod air-floating vibration isolation platform of the present utility model;
[0019] Reference Numerals
[0020] 1. Leg housing; 2. Adjusting screw; 3. Support disc; 4. Partition board; 5. Inner cavity body; 6. Outer cavity body; 7. Air inlet hole; 8. Ultra-small hole laminar flow damping; 9. Limit tray; 10. Airbag protective cover; 11. Base; 12. Gas regulating valve; 13. Caster. Detailed Embodiments
[0021] The technical solution of the present utility model will be further described below with reference to the drawings and embodiments.
[0022] Unless otherwise defined, the technical terms or scientific terms used in this utility model shall have the ordinary meanings understood by those with ordinary skills in the field to which this utility model belongs. The "first", "second" and similar words used in this utility model do not denote any order, quantity or importance, but are only used to distinguish different components. Words such as "including" or "comprising" mean that the elements or objects appearing before this word cover the elements or objects listed after this word and their equivalents, without excluding other elements or objects. Words such as "connected" or "linked" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right", etc. are only used to represent relative positional relationships. When the absolute position of the object being described changes, the relative positional relationship may also change accordingly.
[0023] For the specific connection methods of each part, conventional means such as bolts, rivets, welding, etc. that are mature in the prior art are adopted. For machinery, parts and equipment, conventional models in the prior art are used, and for circuit connections, conventional connection methods in the prior art are adopted, which will not be elaborated here.
[0024] Embodiment
[0025] As Figure 1-2 shown, this utility model discloses a leg of a single pendulum rod air-floating vibration isolation platform, which includes a leg housing 1 and a gas regulating valve 12 for adjusting the pressure inside the leg housing 1; an adjusting screw rod 2 is arranged inside the leg housing 1, and one end of the adjusting screw rod 2 passes through and is connected to a support plate 3 located in the leg housing 1 for placing a measurement workbench. Among them, the adjustment range of the adjusting screw rod 2 is ±15 mm.
[0026] A limit tray 9 is sleeved on the outer periphery of one side of the outer end of the adjusting screw rod 2 in the leg housing 1 to limit the support plate 3 and prevent the support plate 3 from falling significantly. An airbag protective cover 10 is arranged at the top of the leg housing 1 to protect key components from the influence of the external environment.
[0027] A partition plate 4 is arranged inside the leg housing 1. The partition plate 4 divides the inside of the leg housing 1 into an inner cavity 5 and an outer cavity 6. An air inlet hole 7 for delivering gas into the outer cavity 6 is opened on the side wall of the leg housing 1, and a super-small hole laminar flow damper 8 for delivering gas into the inner cavity 5 is opened on the partition plate 4.
[0028] A base 11 is arranged below the leg housing 1 to improve stability, and casters 13 are arranged at the bottom end of the base 11 for convenient position movement.
[0029] Therefore, the single pendulum rod air-floating vibration isolation platform leg with the above structure is adopted in the present utility model. The internal part of the single pendulum rod air-floating vibration isolation platform adopts a flexible double cavity and a super-small hole laminar flow damping design, combined with the single pendulum rod structure design of the internal central adjusting screw. When external vibration occurs, the movement of the internal screw can effectively eliminate the external vibration. The single pendulum rod structure of the central adjusting screw is a further upgrade based on the ordinary air-floating, enhancing the stability of the air-floating platform leg, making the natural frequency in the horizontal direction lower, and the whole more stable. It can be applied to instrument and equipment with very high vibration requirements, such as microscopes, medical biology, optical path testing, optical measurement, spectral use, precision detection, etc.
[0030] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present utility model and are not intended to limit them. Although the present utility model has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that they can still modify or equivalently replace the technical solutions of the present utility model, and these modifications or equivalent replacements cannot make the modified technical solutions deviate from the spirit and scope of the technical solutions of the present utility model.
Claims
1. A leg of a simple pendulum rod air-floating vibration isolation platform, characterized in that: It includes a leg housing and a gas regulating valve. An adjusting screw is arranged inside the leg housing, and a support disc is connected to one side of the outer end of the adjusting screw outside the leg housing. A partition is arranged inside the leg housing, and the partition divides the inside of the leg housing into an inner cavity and an outer cavity. An air inlet hole for conveying gas into the outer cavity is opened on the side wall of the leg housing, and a super-small hole laminar flow damper for conveying gas into the inner cavity is opened on the partition.
2. The leg of a simple pendulum rod air-floating vibration isolation platform according to claim 1, characterized in that: The adjusting range of the adjusting screw is ±15 mm.
3. The leg of a single pendulum rod air-floating vibration isolation platform according to claim 2, characterized in that: A limiting tray is sleeved on the outer periphery of one side of the outer end of the adjusting screw outside the leg housing.
4. The leg of a simple pendulum rod air-floating vibration isolation platform according to claim 3, characterized in that: An airbag protective cover is arranged at the top of the leg housing.
5. A leg of a single pendulum rod air-floating vibration isolation platform according to claim 4, characterized in that: A base is arranged below the leg housing.
6. The leg of the single pendulum rod air-floating vibration isolation platform according to claim 5, characterized in that: Foot wheels are arranged at the bottom end of the base.