Gas chemical supply cabinet

Abstract

The utility model belongs to the technical field of gas supply cabinets, and discloses a gas chemical supply cabinet which comprises a supply cabinet body, and stock solution cabinets are arranged on the two sides of the supply cabinet body; cabinet doors are symmetrically arranged on the stock solution cabinet; a platform scale vacancy is arranged on the inner bottom surface of the stock solution cabinet, and a precise platform scale is arranged in the platform scale vacancy; a dustproof shutter and explosion-proof glass are arranged on the cabinet door; an overflow port is formed in one side, far away from the supply cabinet, of the stock solution cabinet; an anti-explosion electric air valve is arranged at the top of the stock solution cabinet and is connected to an automatic supply program in the supply cabinet in an electric control manner; the stock solution tank is separated from the operation disc surface, so that the operation space for replacing the tank is enlarged; according to the technical scheme, more sufficient safety measures can be taken, the stock solution tank can be disassembled and assembled more conveniently, the stock solution tank also meets the requirements of safety specifications, the cabinet body can play a role in protection even if leakage danger occurs, and TMA is led into a combustion chamber to react, so that harm and loss caused by leakage are further reduced.

Description

Technical Field

[0001] This application relates to the technical field of gas supply cabinets, and more specifically, to a gas chemical supply cabinet. Background Art

[0002] At present, the TMA supply cabinets in use generally place the TMA stock solution tank and the gas cabinet panel together in an integrated cabinet. Although it meets the specification requirements, the space inside the supply cabinet is limited, and the TMA is a large-capacity tank body, resulting in particularly laborious replacement and installation of the stock solution tank and difficult operation of the panel.

[0003] The physical and chemical properties of TMA belong to flammable and explosive chemical substances, and the installation and operation are relatively dangerous with strict protective measures. The limitation in a narrow space is too great.

[0004] The operation panel is generally behind the stock solution tank, and the tank body is large. After the stock solution tank enters, it is simply impossible to operate or replace the panel valve parts; forced replacement is likely to touch the stock solution tank; during the supply process, if the stock solution tank is touched, a major accident is likely to occur.

[0005] Therefore, this application proposes a gas chemical supply cabinet to solve the above existing problems. Utility Model Content

[0006] To solve the above problems, this application provides a gas chemical supply cabinet.

[0007] The gas chemical supply cabinet provided by this application adopts the following technical solutions:

[0008] A gas chemical supply cabinet, comprising:

[0009] A supply cabinet, with stock solution cabinets provided on both sides of the supply cabinet;

[0010] The stock solution cabinets are symmetrically provided with cabinet doors; a weighing scale vacancy is provided on the inner bottom surface of the stock solution cabinets, and a precision weighing scale is provided in the weighing scale vacancy;

[0011] The cabinet doors are provided with dust-proof louvers and explosion-proof glass, an overflow port is provided on the side of the stock solution cabinet away from the supply cabinet; an explosion-proof electric air valve is provided at the top of the stock solution cabinet and is electrically connected to the automatic supply program inside the supply cabinet.

[0012] Further, the surface of the stock solution cabinet is coated with an anti-static and fire-proof coating, and a fire-resistant sealing strip is provided on the door frame of the cabinet door.

[0013] Through the above technical solutions, the fire-proof and anti-static performance of the cabinet body is improved, and the safety is increased.

[0014] Furthermore, a flame detector, a temperature sensor, and a smoke sensor are provided on the bottom surface of the top of the stock solution cabinet inside the cabinet body.

[0015] Through the above technical solution, the internal environment of the cabinet body can be monitored in real time, and dangers can be detected in a timely manner.

[0016] Furthermore, the model of the overflow port is DN50 and it is connected to the combustion chamber through a pipeline.

[0017] Through the above technical solution, the overflow situation can be effectively handled, and dangers can be reduced.

[0018] Furthermore, a pigtail hole is reserved on one side of the stock solution cabinet close to the supply cabinet. The model of the pigtail hole is DN20. The pipelines for accessing the supply cabinet through the pigtail hole are respectively connected to the stock solution tank and the corresponding valves.

[0019] Through the above technical solution, it is convenient to connect the pipelines of the supply cabinet to the stock solution tank and the valves, and the connection is made more standardized.

[0020] In summary, the present application includes at least the following beneficial technical effects:

[0021] (1) Separating the supply cabinet from the stock solution cabinet expands the operation space, facilitating operations such as the replacement of the stock solution tank, the opening and closing of valves, pressure regulation, and the replacement of components.

[0022] (2) The anti-static, fire-proof, and fire-resistant designs of the cabinet body, the setting of various sensors, and the treatment method of the overflow port, etc., reduce the risks during the use of highly flammable and explosive trimethylaluminum, and reduce the hazards and losses caused by leakage. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 is a schematic structural diagram of the present application;

[0024] Figure 2 is a schematic diagram of the working state of the present application;

[0025] Figure 3 is a schematic structural diagram of the stock solution cabinet of the present application.

[0026] Explanation of the reference numerals in the drawings: 1. Supply cabinet; 2. Stock solution cabinet; 3. Cabinet door; 4. Precision weighing scale; 5. Dust-proof louvers; 6. Explosion-proof glass; 7. Overflow port; 8. Explosion-proof electric air valve; 9. Flame detector; 10. Temperature sensor; 11. Smoke sensor; 12. Pigtail hole. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0027] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative efforts shall fall within the protection scope of the present application.

[0028] In the description of the present application, it should be noted that the orientation or positional relationship indicated by the terms "upper", "lower", "inner", "outer", "top / bottom end", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present application. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0029] In the description of the present application, it should be noted that unless otherwise clearly specified and limited, the terms "installed", "provided with", "sheathed / connected", "connected", etc. should be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific situations.

[0030] Embodiment:

[0031] The following further elaborates on the present application with reference to Figure 1 -3.

[0032] The embodiment of the present application discloses a gas chemical supply cabinet 1, including:

[0033] A supply cabinet 1, with stock solution cabinets 2 arranged on both sides of the supply cabinet 1;

[0034] The stock solution cabinets 2 are symmetrically provided with cabinet doors 3; a weighing scale vacancy is arranged on the inner bottom surface of the stock solution cabinets 2, and a precision weighing scale 4 is arranged in the weighing scale vacancy;

[0035] Dust-proof louvers 5 and explosion-proof glass 6 are arranged on the cabinet doors 3, an overflow port 7 is arranged on the side of the stock solution cabinets 2 away from the supply cabinet 1; an explosion-proof electric air valve 8 is arranged on the top of the stock solution cabinets 2 and is electrically connected to the automatic supply program inside the supply cabinet 1.

[0036] See Figure 1 , an anti-static and fire-proof coating is applied on the surface of the stock solution cabinets 2, and a fire-resistant sealing strip is arranged on the door frame of the cabinet doors 3; improving the fire-proof and anti-static performance of the cabinet body and increasing the safety.

[0037] See Figure 3 , a flame detector 9, a temperature sensor 10 and a smoke sensor 11 are also arranged on the bottom surface of the top of the stock solution cabinet 2 inside the cabinet body; the internal environment of the cabinet body can be monitored in real time to detect dangers in time.

[0038] See Figure 1 and Figure 3 , the overflow port 7 is of the model DN50 and is connected to the combustion chamber through a pipeline; the overflow situation can be effectively handled to reduce dangers.

[0039] See Figure 2 , a pigtail hole 12 is reserved on one side of the stock solution cabinet 2 close to the supply cabinet 1. The pigtail hole 12 is of the model DN20. The pipelines for accessing the supply cabinet 1 through the pigtail hole 12 are respectively connected to the stock solution tank and the corresponding valves; it is convenient to connect the pipelines of the supply cabinet 1 to the stock solution tank and the valves, and makes the connection more standardized.

[0040] The implementation principle of a gas chemical supply cabinet 1 in an embodiment of the present application is as follows:

[0041] The trimethylaluminum stock solution tanks are placed in the stock solution cabinets 2 on both sides, and the pipelines accessing the supply cabinet 1 through the pigtail holes are respectively connected to the stock solution tanks and the corresponding valves.

[0042] The supply cabinet 1 performs a pressing and supplying operation, and its automatic supply program is electrically connected to the explosion-proof electric air valve 8 of the stock solution cabinet 2.

[0043] The precision weighing scale 4 in the stock solution cabinet 2 performs weight detection, and the flame detector 9, the temperature sensor 10 and the smoke sensor 11 monitor the internal environment of the cabinet body in real time.

[0044] If an overflow situation occurs, the overflow port 7 of the stock solution cabinet 2 conveys the overflow through a pipeline to the combustion chamber for treatment.

[0045] During the operation process, safety designs such as the anti-static and fire-proof coating of the cabinet body and the fire-resistant sealing strip of the door frame of the cabinet door 3 ensure the safety of the system.

[0046] The stock solution tank is separated from the operation panel, and the operation space for changing the tank becomes larger. For the operators, more sufficient safety measures can be taken, and the stock solution tank can be disassembled and assembled more conveniently. Moreover, the stock solution tank also meets the safety specification requirements. Even if a leakage danger occurs, the cabinet body can play a protective role and lead the TMA to the combustion chamber to react, further reducing the harm and loss caused by the leakage. The supply panel can be normally operated during the supply period without affecting the valve switching and component replacement. This technology can better consider the actual operability and safety of the system.

[0047] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereby. Therefore, all equivalent changes made according to the structure, shape, and principle of the present application shall be covered within the protection scope of the present application.

Claims

1. A gas chemical supply cabinet, characterized in that, Including: A supply cabinet (1), with stock solution cabinets (2) arranged on both sides of the supply cabinet (1); The stock solution cabinets (2) are symmetrically provided with cabinet doors (3); on the inner bottom surface of the stock solution cabinets (2), there are weighing scale vacancies, and precision weighing scales (4) are arranged in the weighing scale vacancies; Dust-proof louvers (5) and explosion-proof glass (6) are arranged on the cabinet doors (3), and an overflow port (7) is arranged on the side of the stock solution cabinet (2) away from the supply cabinet (1); an explosion-proof electric air valve (8) is arranged on the top of the stock solution cabinet (2) and is electrically connected to the automatic supply program inside the supply cabinet (1).

2. The gas chemical supply cabinet according to claim 1, wherein: The surface of the stock solution cabinet (2) is coated with an anti-static and fire-proof coating, and a fire-resistant sealing strip is arranged on the door frame of the cabinet door (3).

3. The gas chemical supply cabinet according to claim 1, characterized in that: Flame detectors (9), temperature sensors (10), and smoke sensors (11) are also arranged on the top and bottom surfaces inside the stock solution cabinet (2).

4. A gas chemical supply cabinet according to claim 1, characterized in that: The overflow port (7) is of the DN50 model and is connected to the combustion chamber through a pipeline.

5. The gas chemical supply cabinet according to claim 1, wherein: A pigtail hole (12) is reserved on the side of the stock solution cabinet (2) close to the supply cabinet (1). The pigtail hole (12) is of the DN20 model. The pipelines for accessing the supply cabinet (1) through the pigtail hole (12) are respectively connected to the stock solution tank and the corresponding valves.

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