Automatic liquid medicine supply system

Abstract

The utility model discloses an automatic liquid medicine supply system which comprises a shell, a first liquid supply assembly and a second liquid supply assembly, wherein the first liquid supply assembly and the second liquid supply assembly are arranged in the shell. The first liquid supply assembly and the second liquid supply assembly are both made of nonmetal materials. The first liquid supply assembly comprises a first liquid supply main path and a first exhaust branch path, and the first liquid supply main path comprises a second liquid supply main path and a second exhaust branch path; the first liquid supply main path and the second liquid supply main path provide different liquid medicine; according to the wafer cleaning device, two different kinds of liquid medicine are arranged, the liquid medicine proportion is controlled according to different proportions through the first liquid supply main path and the second liquid supply main path, precise mixing of the two kinds of liquid medicine is achieved, and the wafer cleaning effect is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of liquid supply, and more specifically, to an automatic liquid medicine supply system. Background Art

[0002] During the wafer processing, the wafer needs to be thinned and cleaned. During the wafer cleaning process, cleaning liquid medicine needs to be provided. The existing liquid supply system cannot accurately control the liquid inlet speed and the liquid inlet volume, and cannot accurately mix two or more kinds of liquid medicine, resulting in poor wafer cleaning effect. Summary of the Utility Model

[0003] In order to solve at least one of the above technical problems, the utility model provides an automatic liquid medicine supply system.

[0004] In the first aspect of the utility model, an automatic liquid medicine supply system is provided, including: a housing and a first liquid supply component and a second liquid supply component arranged inside the housing; both the first liquid supply component and the second liquid supply component are made of non-metallic materials;

[0005] The first liquid supply component includes a first main liquid supply path and a first exhaust branch path, and the first main liquid supply path includes a second main liquid supply path and a second exhaust branch path;

[0006] The first main liquid supply path and the second main liquid supply path provide different liquid medicines.

[0007] In a preferred embodiment of the utility model, the first main liquid supply path includes a first liquid medicine barrel and a first spare barrel. The top of the first liquid medicine barrel is connected with a diaphragm pump through a pipeline, and one end of the diaphragm pump is connected with a first buffer tank.

[0008] In a preferred embodiment of the utility model, one side of the first buffer tank is connected with a first flow meter, and one end of the first flow meter is connected with a first hydraulic valve.

[0009] In a preferred embodiment of the utility model, the second main liquid supply path includes a second liquid medicine barrel and a second spare barrel. The top of the second liquid medicine barrel is connected with a diaphragm pump through a pipeline, and one end of the diaphragm pump is connected with a second buffer tank.

[0010] In a preferred embodiment of the utility model, one side of the second buffer tank is connected with a second flow meter, and one end of the second flow meter is connected with a second hydraulic valve.

[0011] In a preferred embodiment of the utility model, hydrofluoric acid is contained in the first liquid medicine barrel and the first spare barrel.

[0012] In a preferred embodiment of the utility model, ammonia water is contained in the second liquid medicine barrel and the second spare barrel.

[0013] In a preferred embodiment of the present utility model, the first exhaust branch is connected to the first liquid medicine barrel. The first exhaust branch includes a first exhaust tank. One end of the first exhaust tank is connected with a first exhaust pump, and the bottom of the first exhaust tank is connected with a first pneumatic control valve.

[0014] In a preferred embodiment of the present utility model, the second exhaust branch is connected to the second liquid medicine barrel. The second exhaust branch includes a second exhaust tank. One side of the second exhaust tank is connected with a second exhaust pump, and the bottom of the second exhaust tank is connected with a second pneumatic control valve.

[0015] The above technical solution of the present utility model has the following advantages compared with the prior art:

[0016] In this application, by setting two different liquid medicines to be respectively controlled according to different ratios through the first main liquid supply path and the second main liquid supply path to achieve the accurate mixing of the two liquid medicines, the cleaning effect of the wafer is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the specific embodiments of the present utility model or the technical solutions in the prior art, the following will briefly introduce the drawings required for the description of the specific embodiments or the prior art. Obviously, some of the following drawings are embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0018] Figure 1 It is a three-dimensional structural schematic diagram of the automatic liquid supply system for liquid medicine in the embodiment of the present utility model;

[0019] Figure 2 It is an internal connection schematic diagram of the automatic liquid supply system for liquid medicine in the embodiment of the present utility model;

[0020] Figure 3 It is a front view of the automatic liquid supply system for liquid medicine in the embodiment of the present utility model.

[0021] In the figure: 1. Housing, 2. Roller, 3. First box door, 4. Second box door, 5. Observation window, 6. First spare barrel, 7. First liquid medicine barrel, 8. Diaphragm pump, 9. First buffer tank, 10. First flowmeter, 11. Pipeline, 12. First exhaust pump, 13. First exhaust tank, 14. Second spare barrel, 15. Second liquid medicine barrel, 16. Second exhaust pump, 17. First hydraulic valve, 18. Second exhaust tank, 19. Second hydraulic valve, 20. Second flowmeter, 21. Second buffer tank. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0022] In order to more clearly understand the above-mentioned objects, features and advantages of the present utility model, the following further describes the present utility model in detail in conjunction with specific embodiments. It should be noted that, without conflict, the embodiments of the present application and the features in the embodiments can be combined with each other.

[0023] In the following description, many specific details are set forth in order to fully understand the present utility model. However, the present utility model can also be implemented in other ways different from those described herein. Therefore, the protection scope of the present utility model is not limited by the specific embodiments disclosed below.

[0024] Embodiment 1

[0025] See Figures 1-3 As shown, the present utility model provides an automatic liquid supply system for liquid medicine, including: a housing 1 and a first liquid supply component and a second liquid supply component arranged inside the housing 1; characterized in that,

[0026] Both the first liquid supply component and the second liquid supply component are made of non-metallic materials;

[0027] The first liquid supply component includes a first main liquid supply path and a first exhaust branch, and the first main liquid supply path includes a second main liquid supply path and a second exhaust branch;

[0028] The first main liquid supply path and the second main liquid supply path provide different liquid medicines.

[0029] According to an embodiment of the present utility model, the first main liquid supply path includes a first liquid medicine barrel 7 and a first spare barrel 6. The top of the first liquid medicine barrel 7 is connected to a diaphragm pump 8 through a pipeline 11, and one end of the diaphragm pump 8 is connected to a first buffer tank 9.

[0030] According to an embodiment of the present utility model, one side of the first buffer tank 9 is connected to a first flow meter 10, and one end of the first flow meter 10 is connected to a first hydraulic valve.

[0031] According to an embodiment of the present utility model, the second main liquid supply path includes a second liquid medicine barrel 15 and a second spare barrel 14. The top of the second liquid medicine barrel 15 is connected to a diaphragm pump 8 through a pipeline 11, and one end of the diaphragm pump 8 is connected to a second buffer tank 21.

[0032] According to an embodiment of the present utility model, one side of the second buffer tank 21 is connected to a second flow meter 20, and one end of the second flow meter 20 is connected to a second hydraulic valve.

[0033] According to an embodiment of the present utility model, the first liquid medicine barrel 7 and the first spare barrel 6 are filled with hydrofluoric acid.

[0034] According to an embodiment of the present utility model, the second liquid medicine barrel 15 and the second spare barrel 14 are filled with ammonia water.

[0035] According to an embodiment of the present utility model, the first exhaust branch is connected to the first liquid medicine barrel 7. The first exhaust branch includes a first exhaust tank 13. One end of the first exhaust tank 13 is connected with a first exhaust pump 12, and the bottom of the first exhaust tank 13 is connected with a first pneumatic control valve.

[0036] According to an embodiment of the present utility model, the second exhaust branch is connected to the second liquid medicine barrel 15. The second exhaust branch includes a second exhaust tank 18. One side of the second exhaust tank 18 is connected with a second exhaust pump 16, and the bottom of the second exhaust tank 18 is connected with a second pneumatic control valve.

[0037] According to an embodiment of the present utility model, rollers 2 are provided at the bottom of the housing 1 to facilitate the movement of the liquid supply system. An observation window 5 is provided on one side of the housing 1. Below the observation window 5, a first box door 3 and a second box door 4 are provided to facilitate the replacement of the first liquid medicine barrel 7 and the second liquid medicine barrel 15.

[0038] In summary, in this application, two different liquid medicines are respectively controlled to be mixed in different proportions through the first main liquid supply path and the second main liquid supply path, so as to achieve the precise mixing of the two liquid medicines and improve the cleaning effect of the wafers.

[0039] The technical features of the above embodiments can be combined arbitrarily. For the sake of concise description, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope described in this specification.

[0040] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present utility model. Various modifications to the above embodiments will be obvious to those skilled in the art. The general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present utility model. Therefore, the present utility model will not be limited to the above embodiments shown herein, but will be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0041] The above is only the specific implementation manner of the present utility model, but the protection scope of the present utility model is not limited thereto. Any person skilled in the art can easily think of changes or substitutions within the technical scope disclosed by the present utility model, and all of them should be covered by the protection scope of the present utility model. Therefore, the protection scope of the present utility model should be subject to the protection scope of the claims.

Claims

1. An automatic liquid supply system for a liquid medicine, comprising: A housing and a first liquid supply assembly and a second liquid supply assembly disposed inside the housing; characterized in that, Both the first liquid supply assembly and the second liquid supply assembly are made of non-metallic materials; The first liquid supply assembly includes a first main liquid supply path and a first exhaust branch, and the first main liquid supply path includes a second main liquid supply path and a second exhaust branch; The first main liquid supply path and the second main liquid supply path provide different liquid medicines.

2. The automatic liquid supply system for liquid medicine according to claim 1, wherein The first main liquid supply path includes a first liquid medicine barrel and a first spare barrel. A diaphragm pump is connected to the top of the first liquid medicine barrel through a pipeline, and one end of the diaphragm pump is connected to a first buffer tank.

3. The automatic liquid supply system for liquid medicine according to claim 2, wherein, A first flow meter is connected to one side of the first buffer tank, and a first hydraulic valve is connected to one end of the first flow meter.

4. The automatic liquid supply system for liquid medicine according to claim 1, characterized in that The second main liquid supply path includes a second liquid medicine barrel and a second spare barrel. A diaphragm pump is connected to the top of the second liquid medicine barrel through a pipeline, and one end of the diaphragm pump is connected to a second buffer tank.

5. The automatic liquid supply system for liquid medicine according to claim 4, characterized in that, A second flow meter is connected to one side of the second buffer tank, and a second hydraulic valve is connected to one end of the second flow meter.

6. The automatic liquid supply system for liquid medicine according to claim 2, characterized in that, Hydrofluoric acid is contained inside the first liquid medicine barrel and the first spare barrel.

7. The automatic liquid supply system for liquid medicine according to claim 4, wherein Ammonia water is contained inside the second liquid medicine barrel and the second spare barrel.

8. An automatic liquid supply system for a liquid medicine according to claim 2, characterized in that, The first exhaust branch is connected to the first liquid medicine barrel. The first exhaust branch includes a first exhaust tank. One end of the first exhaust tank is connected to a first exhaust pump, and the bottom of the first exhaust tank is connected to a first pneumatic control valve.

9. The automatic liquid supply system for liquid medicine according to claim 4, characterized in that, The second exhaust branch is connected to the second liquid medicine barrel. The second exhaust branch includes a second exhaust tank. One side of the second exhaust tank is connected to a second exhaust pump, and the bottom of the second exhaust tank is connected to a second pneumatic control valve.

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