Ion beam etching control system
By introducing safety detection, input, control and output modules into the ion beam etching equipment, the power supply safety hazards caused by PLC failure are solved, and the power supply control is realized when the PLC fails, improving the safety and stability of the system.
Patent Information
- Application Number
- CN202422495534.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-15
- Publication Date
- 2025-07-18
- Estimated Expiration
- 2034-10-15
AI Technical Summary
When the PLC control module fails, the existing ion beam etching equipment cannot control the power supply of the ion source power supply and the neutralizer power supply, which poses a working safety hazard.
An ion beam etching control system is designed, including a safety detection module, a PLC control module, a safety input module, a safety control module and a safety output module. The safety detection module detects the safe operation signal of ion beam etching. The PLC control module connects to the external power grid to obtain power, and controls the working status of the safety output module through the safety input module and the safety control module to ensure that the power supply of the ion source power and the neutralizer power supply can still be stopped when the PLC fails.
When the PLC control module fails, through the cooperation of the safety input module, the safety control module and the safety output module, the power supply of the ion source power supply and the neutralizer power supply can be effectively controlled, reducing the operational safety hazards of ion beam etching, and improving the stability and safety of the system.
Smart Images
Figure CN223123386U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of ion beam etching, in particular to an ion beam etching control system. Background Art
[0002] With the development of semiconductor integrated circuits and optoelectronic devices, the process requirements for fine pattern etching are getting higher and higher. The isotropic property of the traditional wet etching process cannot achieve the etching of images with smaller line widths. The dry etching technology is becoming increasingly mature, and its good anisotropic etching characteristics have made dry etching widely used in semiconductors. Ion beam etching is one of the dry etching methods. Moreover, with the popularization of the modularization of PLC (Programmable Logic Controller), the control application of the PLC control module in equipment has become dominant.
[0003] In the related art, in the control system of an ion beam etching device, a PLC control module is used to obtain the detection signals of various sensors in the ion beam etching operation, perform relatively complex logical processing on the detection signals, and then output control signals to control the power supply of the ion source power supply and the neutralizer power supply. For example, the PLC control module obtains the air pressure signal detected by the air pressure sensor, compares the air pressure signal with a preset value to determine whether the air pressure is normal, and outputs a control signal in the case of abnormal air pressure to control the power supply of the ion source power supply and the neutralizer power supply to stop, so as to realize the safety operation control of the ion beam etching device.
[0004] However, in the case of the failure of the PLC control module, it is impossible to control the power supply of the ion source power supply and the neutralizer power supply to stop. Therefore, there are potential safety hazards in the ion beam etching operation. Summary of the Utility Model
[0005] The technical problem to be solved by the embodiments of the utility model is to provide an ion beam etching control system to solve the problem that in the case of the failure of the PLC control module of the existing ion beam etching device, it is impossible to control the power supply of the ion source power supply and the neutralizer power supply to stop, and there are potential safety hazards in the ion beam etching operation.
[0006] The utility model discloses an ion beam etching control system, which includes a safety detection module, a PLC control module, a safety input module, a safety control module, a safety output module, an ion source power supply and a neutralizer power supply. Among them, the safety detection module is used to detect the safety operation signal of ion beam etching. The PLC control module is connected to the external power grid to obtain electric energy, and the PLC control module controls the power supply of the ion source power supply and the neutralizer power supply according to the safety operation signal. The safety input module transmits a corresponding status signal to the safety control module based on the safety operation signal, and the safety control module controls the working state of the safety output module based on the status signal to control the power supply of the ion source power supply and the neutralizer power supply.
[0007] Optionally, the safety detection module includes a first relay, a first power supply and a photoelectric sensor. The photoelectric sensor is used to detect the closing state of the etching machine box cover. The photoelectric sensor is internally provided with a photosensitive triode. The first input end of the first relay is connected to the emitter of the photosensitive triode. The second input end of the first relay is connected to the negative pole of the first power supply. The positive pole of the first power supply is connected to the collector of the photosensitive triode. The photoelectric sensor is also connected to the PLC control module. The safety input module includes a second power supply and a first light-emitting diode. The negative pole of the first light-emitting diode is connected to the first output end of the first relay. The positive pole of the first light-emitting diode is connected to the positive pole of the second power supply. The negative pole of the second power supply is connected to the second output end of the first relay. The safety control module controls the working state of the safety output module according to the status optical signal of the first light-emitting diode.
[0008] Optionally, the safety detection module further includes an emergency stop button. The safety input module further includes a third power supply and a second light-emitting diode. The positive pole of the third power supply is connected to the positive pole of the second light-emitting diode. The negative pole of the third power supply is connected to one end of the emergency stop button. The other end of the emergency stop button is connected to the negative pole of the second light-emitting diode. Both ends of the emergency stop button are also connected to the PLC control module. The safety control module controls the working state of the safety output module according to the status optical signals of the first light-emitting diode and the second light-emitting diode.
[0009] Optionally, the safety output module includes a fourth power supply and a second relay. The ion beam etching control system further includes a power supply switch unit for turning on or off the power supply. The power supply switch unit is connected to the ion source power supply and the neutralizer power supply. The first end of the power supply switch unit is connected to the first output end of the second relay. The second end of the power supply switch unit is connected to the negative pole of the fourth power supply. The second output end of the second relay is connected to the positive pole of the fourth power supply. The first input end and the second input end of the second relay are both connected to the safety control module.
[0010] Optionally, the safety output module further includes a comparison unit and an ammeter. The first end of the ammeter is connected to the positive pole of the fourth power supply. The second end is connected to the second output end of the second relay. The output end of the ammeter is connected to the comparison unit. The comparison unit is configured to compare the current data of the ammeter with a preset current value and transmit the comparison result to the safety control module.
[0011] Optionally, the ion beam etching control system further includes a bus communication module and at least one functional module. The PLC control module is communicatively connected to the functional module through the bus communication module.
[0012] Optionally, the bus communication module includes at least one Devicenet bus and at least one EtherCAT bus. The PLC control module is communicatively connected to one of the functional modules through one of the Devicenet buses or one of the EtherCAT buses.
[0013] Optionally, the functional module includes one of a process gas control unit, a vacuum pressure detection unit, a gas valve control unit, and a servo control unit.
[0014] Optionally, the ion beam etching control system includes a serial communication module. The PLC control module is communicatively connected to the ion source power supply and the neutralizer power supply through the serial communication module.
[0015] Optionally, the ion beam etching control system further includes an uninterruptible power supply for supplying power to the PLC control module.
[0016] Compared with the prior art, the beneficial effect of the ion beam etching control system provided by the embodiment of the present utility model lies in that: by setting a PLC control module to control the power supply of the ion source power supply and the neutralizer power supply according to the safe operation signal detected by the safety detection module, and additionally setting an independently operating safety input module, a safety control module and a safety output module, the safety input module transmits corresponding status signals to the safety control module based on the safe operation signal, and the safety control module controls the working state of the safety output module based on the status signal to control the power supply of the ion source power supply and the neutralizer power supply. Thus, in the case of the failure of the PLC control module, the safety input module, the safety control module and the safety output module can cooperate to control the power supply of the ion source power supply and the neutralizer power supply to stop, reducing the operation safety hazard of the ion beam etching. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] The technical solution of the present utility model will be further described in detail below in conjunction with the drawings and embodiments. In the drawings:
[0018] Figure 1 is a structural block diagram of an embodiment of the ion beam etching control system provided by the present utility model;
[0019] Figure 2 is a structural block diagram of another embodiment of the ion beam etching control system provided by the present utility model;
[0020] Figure 3 is a partial circuit principle schematic diagram of an embodiment of the connection between the safety input module and the safety detection module provided by the present utility model;
[0021] Figure 4 is another partial circuit principle schematic diagram of an embodiment of the connection between the safety input module and the safety detection module provided by the present utility model;
[0022] Figure 5 is a circuit principle schematic diagram of an embodiment of the connection between the safety output module and the power supply switch unit provided by the present utility model.
[0023] Each reference numeral in the figure is:
[0024] 110. Safety detection module; 111. First relay; 112. First power supply; 113. Photoelectric sensor; 1131. Photosensitive triode; 114. Emergency stop button; 120. PLC control module; 130. Safety input module; 131. Second power supply; 132. First light-emitting diode; 133. Third power supply; 134. Second light-emitting diode; 140. Safety control module; 150. Safety output module; 151. Fourth power supply; 152. Second relay; 153. Ammeter; 160. Ion source power supply; 170. Neutralizer power supply; 180. Power supply switch unit; 190. Bus communication module; 210. Function module; 220. Serial communication module; 230. Uninterruptible power supply; 240. Analog module; 250. IO module. Detailed implementation manner
[0025] It should be noted that, without conflict, the embodiments in the present application and the features in the embodiments may be combined with each other. Now, in conjunction with the accompanying drawings, the preferred embodiments of the present invention will be described in detail.
[0026] The embodiment of the present invention provides an ion beam etching control system, as Figure 1 shown. The ion beam etching control system includes a safety detection module 110, a PLC control module 120, a safety input module 130, a safety control module 140, a safety output module 150, an ion source power supply 160, and a neutralizer power supply 170. Among them, the safety detection module 110 is used to detect the safety operation signal of ion beam etching. The PLC control module 120 is connected to the external power grid to obtain electric energy, and the PLC control module 120 controls the power supply of the ion source power supply 160 and the neutralizer power supply 170 according to the safety operation signal. The safety input module 130 transmits the corresponding status signal to the safety control module 140 based on the safety operation signal. The safety control module 140 controls the working state of the safety output module 150 based on the status signal to control the power supply of the ion source power supply 160 and the neutralizer power supply 170.
[0027] In this application, a PLC control module 120 is provided to control the power supply of an ion source power supply 160 and a neutralizer power supply 170 according to the safety operation signal detected by a safety detection module 110. Additionally, an independently operating safety input module 130, a safety control module 140, and a safety output module 150 are provided. The safety input module 130 transmits a corresponding status signal to the safety control module 140 based on the safety operation signal. The safety control module 140 controls the working state of the safety output module 150 based on the status signal to control the power supply of the ion source power supply 160 and the neutralizer power supply 170. Thus, in the event of the failure of the PLC control module 120, the safety input module 130, the safety control module 140, and the safety output module 150 can cooperate to control the power supply of the ion source power supply 160 and the neutralizer power supply 170 to be stopped, reducing the potential safety hazards of ion beam etching operations.
[0028] The PLC control module 120 can also be communicatively connected to the safety control module 140 to obtain the input status of the safety input module 130 and the output status of the safety output module 150. When errors occur in the safety input module 130 and the safety output module 150, it reminds the staff to perform maintenance.
[0029] Reference Figure 1 and Figure 3 In an optional embodiment of this application, the safety detection module 110 includes a first relay 111, a first power supply 112, and a photoelectric sensor 113. The photoelectric sensor 113 is used to detect the closing state of the etching machine case cover. The photoelectric sensor 113 is internally provided with a photosensitive triode 1131. The first input terminal of the first relay 111 is connected to the emitter of the photosensitive triode 1131. The second input terminal of the first relay 111 is connected to the negative pole of the first power supply 112. The positive pole of the first power supply 112 is connected to the collector of the photosensitive triode 1131. The photoelectric sensor 113 is also connected to the PLC control module 120. The safety input module 130 includes a second power supply 131 and a first light-emitting diode 132. The negative pole of the first light-emitting diode 132 is connected to the first output terminal of the first relay 111. The positive pole of the first light-emitting diode 132 is connected to the positive pole of the second power supply 131. The negative pole of the second power supply 131 is connected to the second output terminal of the first relay 111. The safety control module 140 controls the working state of the safety output module 150 according to the status light signal of the first light-emitting diode 132.
[0030] The photoelectric sensor 113 is a sensor that uses the characteristics of light to detect the presence, position, color, distance, or other characteristics of an object. The photoelectric sensor 113 measures through light, without physical contact with the target object, and the photoelectric sensor 113 can respond to changes in light signals within an extremely short time.
[0031] The closing state of the etching machine case cover is detected by the photoelectric sensor 113, with high sensitivity, capable of quickly detecting whether the case cover of the ion beam etching equipment is closed during the ion beam etching process. Specifically, when the case cover is in the closed state, the optical signal emitted by the photoelectric sensor 113 can be reflected by the case cover, and the photosensitive triode 1131 built into the photoelectric sensor 113 can receive the reflected optical signal, thus being in the conducting state. If the case cover is in the open state, the optical signal emitted by the photoelectric sensor 113 cannot be reflected by the case cover, and the photosensitive triode 1131 built into the photoelectric sensor 113 does not receive the reflected optical signal and is in the cut-off state. The photoelectric sensor 113 can transmit the detection signal to the PLC control module 120, and the PLC control module 120 controls the power supply of the ion source power supply 160 and the neutralizer power supply 170 according to the detection signal.
[0032] The photosensitive triode 1131 built into the photoelectric sensor 113 acts as a switch in the safety detection module 110. When the photoelectric sensor 113 emits light and the photosensitive triode 1131 receives the optical signal, the photosensitive triode 1131 conducts, connecting the path between the positive pole of the first power supply 112 and the first input terminal of the first relay 111. The first relay 111 works normally, and then connects the loop of the first light-emitting diode 132 and the second power supply 131, enabling the light-emitting diode to emit light normally. The safety control module 140 receives the optical signal and controls the normal operation of the safety output module 150 to control the normal power supply of the ion source power supply 160 and the neutralizer power supply 170. When the photosensitive triode 1131 does not receive the optical signal, the photosensitive triode 1131 is in the cut-off state, the path between the positive pole of the first power supply 112 and the first input terminal of the first relay 111 is disconnected, the first relay 111 cannot work normally and is in the normally open state, the loop of the first light-emitting diode 132 and the second power supply 131 is disconnected, the light-emitting diode does not work, the safety control module 140 does not receive the optical signal of the first light-emitting diode 132, and controls the safety output module 150 to stop working to control the power supply of the ion source power supply 160 and the neutralizer power supply 170 to be cut off.
[0033] The safety input module 130 and the safety detection module 110 realize the input of the case cover closing signal in the ion beam etching safety operation signal in the form of a relay. The accessed is a passive contact signal, which can play a role in signal isolation. The safety input module 130 relies on its own second power supply 131, and the signal transmission is more stable and accurate.
[0034] Reference Figure 1 and Figure 4, the safety detection module 110 further includes an emergency stop button 114, the safety input module 130 further includes a third power supply 133 and a second light-emitting diode 134. The positive pole of the third power supply 133 is connected to the positive pole of the second light-emitting diode 134, the negative pole of the third power supply 133 is connected to one end of the emergency stop button 114, the other end of the emergency stop button 114 is connected to the negative pole of the second light-emitting diode 134, and both ends of the emergency stop button 114 are also connected to the PLC control module 120. The safety control module 140 also controls the working state of the safety output module 150 according to the status light signals of the first light-emitting diode 132 and the second light-emitting diode 134.
[0035] In an emergency, the operator can press the emergency stop button 114 to immediately stop the ion beam etching operation. When the emergency stop button 114 is not pressed, the third power supply 133 and the second light-emitting diode 134 form a circuit, and the second light-emitting diode 134 works normally. The safety control module 140 can receive the light signal of the second light-emitting diode 134, and the safety control module 140 controls the working state of the safety output module 150 according to the light signals of the first light-emitting diode 132 and the second light-emitting diode 134 to control the power supply of the ion source power supply 160 and the neutralizer power supply 170. When the emergency stop button 114 is pressed, the third power supply 133 and the second light-emitting diode 134 do not form a circuit, the second light-emitting diode 134 does not work, the safety control module 140 does not receive the light signal of the second light-emitting diode 134, and the safety control module 140 controls to stop the power supply of the ion source power supply 160 and the neutralizer power supply 170.
[0036] Among them, when both the first light-emitting diode 132 and the second light-emitting diode 134 are working properly, it indicates that the emergency stop button 114 is not pressed and the chassis cover is in the closed state. Then, the sub-source power supply and the neutralizer power supply 170 can be normally powered. When either the first light-emitting diode 132 or the second light-emitting diode 134 is not working properly, it indicates an abnormal operation, and the power supply of the ion source power supply 160 and the neutralizer power supply 170 needs to be stopped. Therefore, the safety control module 140 can control the power supply of the ion source power supply 160 and the neutralizer power supply 170 according to the status light signals of the first light-emitting diode 132 and the second light-emitting diode 134. Specifically, the safety control module 140 controls the power supply of the ion source power supply 160 and the neutralizer power supply 170 according to the status light signals of the first light-emitting diode 132 and the second light-emitting diode 134. It can be that the safety input module 130 includes a photodiode and a main control chip. The photodiode converts the light signals of the first light-emitting diode 132 and the second light-emitting diode 134 into electrical signals, and the main control chip converts the electrical signals into digital signals. The digital signals are the status light signals. The safety control module 140 performs AND, OR, and NOT logical operations on the status light signals corresponding to the first light-emitting diode 132 and the second light-emitting diode 134, outputs a control signal to the safety output module 150, controls the working state of the safety output module 150, and further controls the power supply of the ion source power supply 160 and the neutralizer power supply 170. The safety control module 140 can use existing chips or a combination of multiple logic gates to implement the AND, OR, and NOT logical operations of the status light signals.
[0037] The emergency stop button 114 is also connected to the PLC control module 120. The PLC control module 120 can also control the power supply of the ion source power supply 160 and the neutralizer power supply 170 to stop according to the pressing signal of the emergency stop button 114.
[0038] In the safety control module 140 and the safety input module 130, the pressing signal of the emergency stop button 114 is transmitted through the light signal of the second light-emitting diode 134 to achieve transmission with a passive contact signal, rather than directly connecting to the safety control module 140 for transmission, which plays a role in signal isolation, and its power supply is provided by the third power supply 133 of the safety input module 130, making the signal more stable and accurate.
[0039] As can be seen from the above, in the case of the failure of the PLC control module 120, the power supply of the ion source power supply 160 and the neutralizer power supply 170 can still be controlled by the cooperation of the safety input module 130, the safety control module 140, and the safety output module 150.
[0040] Further, referring to Figure 1 and Figure 5, the safety output module 150 includes a fourth power supply 151 and a second relay 152. The ion beam etching control system further includes a power supply switch unit 180 for turning on or off the power supply. The power supply switch unit 180 is connected to the ion source power supply 160 and the neutralizer power supply 170. The first end of the power supply switch unit 180 is connected to the first output end of the second relay 152. The second end of the power supply switch unit 180 is connected to the negative pole of the fourth power supply 151. The second output end of the second relay 152 is connected to the positive pole of the fourth power supply 151. The first input end and the second input end of the second relay 152 are both connected to the safety control module 140.
[0041] The power supply switch unit 180 is used to turn on or off the power supply, that is, to turn on or off the power supply of the ion source power supply 160 and the neutralizer power supply 170. The power supply switch unit 180 can specifically adopt switch execution elements such as relays and AC contactors to realize the turning on or off of the power supply of the ion source power supply 160 and the neutralizer power supply 170.
[0042] By setting the second relay 152 and the fourth power supply 151 and connecting them to the power supply switch unit 180, when the second relay 152 works normally, the second relay 152, the power supply switch unit 180 and the fourth power supply 151 form a circuit. The fourth power supply 151 outputs a DC voltage to drive the power supply switch unit 180 to work normally, so that the ion source power supply 160 and the neutralizer power supply 170 are normally powered; when the second relay 152 stops working and is in the normally open state, the second relay 152, the power supply switch unit 180 and the fourth power supply 151 do not form a circuit, and the power supply switch unit 180 has no DC voltage to drive and cannot work normally, so that the ion source power supply 160 and the neutralizer power supply 170 normally stop supplying power.
[0043] By controlling the work of the second relay 152 to indirectly control the work of the power supply switch unit 180, and then controlling the power supply of the ion source power supply 160 and the neutralizer power supply 170, it is possible to quickly cut off or start the power supply when needed, so as to quickly respond in case of failure or dangerous situation and ensure the safety of the equipment and operators. The connection output between the safety output module 150 and the power supply switch unit 180 is a two-wire output, making the controlled power supply switch unit 180 independent of other components. The fourth power supply 151 provides independent power supply for the power supply switch unit 180. When the main power supply of the system fails, the power supply switch unit 180 can still work normally, improving the overall stability of the system.
[0044] Reference Figure 1 and Figure 5, the safety output module 150 further includes a comparison unit and an ammeter 153. The first end of the ammeter 153 is connected to the positive pole of the fourth power supply 151, the second end is connected to the second output end of the second relay 152, and the output end of the ammeter 153 is connected to the comparison unit. The comparison unit is configured to compare the current data of the ammeter 153 with a preset current value and transmit the comparison result to the safety control module 140.
[0045] By providing the ammeter 153 and the comparison unit, the ammeter 153 can detect the current value of the loop formed by the second relay 152, the fourth power supply 151, and the power supply switch unit 180. The comparison unit compares the detected current value with the preset current value to determine whether the loop is faulty. The safety control module 140 can control the operation of the second relay 152 according to the comparison result. Through the ammeter 153 and the comparison unit, the current of the loop can be effectively monitored, further enhancing the safety of the ion beam etching operation.
[0046] In specific implementation, the comparison unit can use an existing chip or comparator circuit to compare the detected current value with the preset current value and output the comparison result.
[0047] Reference Figure 2 , the ion beam etching control system further includes a bus communication module 190 and at least one functional module 210. The PLC control module 120 is communicatively connected to the functional module 210 through the bus communication module 190.
[0048] By providing the bus communication module 190, the PLC control module 120 can communicate with at least one functional module 210 through the bus communication module 190. Especially for multiple functional modules 210, the communication wiring between multiple functional modules 210 and the PLC control module 120 can be centrally managed. The bus communication method provides high scalability and flexibility. The extended functional module 210 can be easily added to the existing bus communication module 190 without large-scale modification of the physical layout of the entire system, which makes system upgrade and maintenance easier and more efficient. Moreover, the bus communication module 190 has a low communication delay, can obtain the data of each functional module 210 in a timely and accurate manner, and improves the yield of the ion beam etching process.
[0049] Specifically, the bus communication module 190 includes at least one Devicenet bus and at least one EtherCAT bus. The PLC control module 120 is communicatively connected to a functional module 210 through one Devicenet bus or one EtherCAT bus.
[0050] DeviceNet is an industrial network protocol based on the CAN (Controller Area Network) bus, mainly used in the field of industrial automation. It uses standard and low-cost cables to transmit data and power, allowing data and power to be transmitted through the same cable, which simplifies the wiring requirements in the industrial field and reduces the need for additional power wiring. Moreover, the DeviceNet bus has strong anti-interference ability, ensuring stable signal transmission, reducing the risk of data errors and communication interruptions; the DeviceNet network can be easily expanded, and adding new functional modules 210 or nodes requires only minor modification of the existing network architecture.
[0051] EtherCAT is a high-performance industrial network protocol based on Ethernet. EtherCAT is designed specifically for real-time industrial applications and uses standard Ethernet hardware to achieve extremely high data transfer speeds and excellent real-time performance, making it one of the fastest industrial Ethernet communication protocols in automation technology. Compared with other industrial Ethernet protocols, the EtherCAT bus provides higher data transfer speeds and lower communication latencies, enabling real-time control of functional module 210. EtherCAT supports multiple network topologies, including linear, tree, and star, and can even be used in combination, providing great design flexibility. Moreover, the EtherCAT network can be relatively easily expanded to large-scale systems with hundreds of nodes without significantly affecting performance, showing good scalability.
[0052] The functional module 210 includes one of a process gas control unit, a vacuum pressure detection unit, a gas valve control unit, and a servo control unit.
[0053] The process gas control unit is used to control the gas flow. The process gas control unit may include three or more process gas controllers, which respectively control the process gas flow of the ion source, the process gas flow of the neutralizer, the gas flow of nitrogen, etc. When there is a process requirement, other process gases can be added. The process gas controller can be implemented using conventional technologies and will not be elaborated here.
[0054] The vacuum pressure detection unit is used to detect the vacuum pressure, such as the low vacuum pressure detection of the cavity, the high vacuum pressure detection, the vacuum pressure detection of the pipeline in front of the molecular pump, and the vacuum pressure detection of the rough pumping pipeline. It can be implemented using conventional technologies and will not be elaborated here.
[0055] The gas valve control unit is used for the gas valves of the ion beam etching equipment, such as controlling the gas valves in the process gas pipeline, the gas valves in the vacuum pumping pipeline, and the water valves of the cooling water. The gas valve control unit can be implemented using conventional technologies and will not be elaborated here.
[0056] The servo control unit is used to control the angle of the fixture, the rotation of the fixture, and the opening and closing of the ion beam in the ion beam etching equipment. The servo control unit includes multiple servo drivers and multiple motors corresponding to the servo drivers. The servo drivers and motors cooperate to control the angle of the fixture, facilitating the loading and unloading of materials, and controlling the angle of the material relative to the ion source during the process, so that the etching rate reaches the optimum; the servo drivers and motors cooperate to control the rotation of the fixture, facilitating the loading and unloading of materials, and controlling the self-rotation of the material during the process, so that the etching uniformity reaches the optimum; the servo drivers and motors cooperate to control the closing and opening of the ion beam, and can quickly open and block the etching of the ion beam on the material at the start and end of the process. The servo control unit can implement the corresponding control operations using conventional technologies, which will not be elaborated here.
[0057] Reference Figure 2 , the ion beam etching control system includes a serial communication module 220, and the PLC control module 120 is communicatively connected to the ion source power supply 160 and the neutralizer power supply 170 through the serial communication module 220.
[0058] The serial communication module 220 allows data exchange between modules through serial communication protocols (such as RS-232, RS-485, etc.), and it provides a simple and reliable way to connect and control each module.
[0059] The hardware and protocol used by the serial communication module 220 are relatively simple, with low cost, and serial communication is very reliable. Especially the RS-485 protocol, which supports long-distance communication and strong anti-interference ability, and only requires very few cables for serial communication. This simplifies the wiring requirements of the system and reduces the maintenance complexity.
[0060] Reference Figure 2 , the ion beam etching control system further includes an uninterruptible power supply 230, and the uninterruptible power supply 230 is used to supply power to the PLC control module 120.
[0061] The uninterruptible power supply 230 (Uninterruptible Power Supply, abbreviated as UPS) is a power device with an energy storage device. Its main function is to provide short-term or medium-term stable power supply when the main power supply is cut off or the power quality is unstable. By setting the uninterruptible power supply 230, it can immediately provide power when the power supply is interrupted, prevent the impact of sudden power outages and power grid fluctuations on the PLC control module 120, and have time to handle the normal shutdown of the equipment in case of sudden power outages.
[0062] Reference Figure 2, the ion beam etching control system further includes an analog module 240 connected to the PLC control module 120. The analog module 240 is used to collect the cooling water temperature and the molecular pump speed signal. Specifically, the analog module 240 can be connected to a temperature sensor for collecting temperature and a speed sensor for collecting the molecular pump speed, convert the temperature signal of the cooling water collected by the temperature sensor and the molecular pump speed signal collected by the speed sensor into corresponding analog signals, and transmit them to the PLC control module 120.
[0063] Furthermore, continuing to refer to Figure 2 , the ion beam etching control system further includes an IO module 250. The IO module 250 is used to transmit position sensor signals, status signals and start / stop control signals of the ion source power supply 160, status signals and start / stop control signals of the neutralizer power supply 170, status signals and start / stop control signals of the molecular pump, and status signals and start / stop control signals of the mechanical pump, etc.
[0064] It should be understood that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than limiting it. For those skilled in the art, the technical solutions recorded in the above embodiments can be modified, or some of the technical features can be equivalently replaced; and all such modifications and replacements should fall within the protection scope of the appended claims of the present invention.
Claims
1. An ion beam etching control system, characterized in that, It includes a safety detection module, a PLC control module, a safety input module, a safety control module, a safety output module, an ion source power supply, and a neutralizer power supply. Among them, the safety detection module is used to detect the safety operation signal of ion beam etching. The PLC control module is connected to the external power grid to obtain electric energy, and the PLC control module controls the power supply of the ion source power supply and the neutralizer power supply according to the safety operation signal. The safety input module transmits the corresponding status signal to the safety control module based on the safety operation signal, and the safety control module controls the working state of the safety output module based on the status signal to control the power supply of the ion source power supply and the neutralizer power supply.
2. The ion beam etching control system according to claim 1, wherein The safety detection module includes a first relay, a first power supply, and a photoelectric sensor. The photoelectric sensor is used to detect the closing state of the etching machine case cover. The photoelectric sensor is internally provided with a photosensitive triode. The first input end of the first relay is connected to the emitter of the photosensitive triode, the second input end of the first relay is connected to the negative pole of the first power supply, and the positive pole of the first power supply is connected to the collector of the photosensitive triode. The photoelectric sensor is also connected to the PLC control module. The safety input module includes a second power supply and a first light-emitting diode. The negative pole of the first light-emitting diode is connected to the first output end of the first relay, the positive pole of the first light-emitting diode is connected to the positive pole of the second power supply, and the negative pole of the second power supply is connected to the second output end of the first relay. The safety control module controls the working state of the safety output module according to the status light signal of the first light-emitting diode.
3. The ion beam etching control system according to claim 2, wherein The safety detection module further includes an emergency stop button. The safety input module further includes a third power supply and a second light-emitting diode. The positive pole of the third power supply is connected to the positive pole of the second light-emitting diode, the negative pole of the third power supply is connected to one end of the emergency stop button, the other end of the emergency stop button is connected to the negative pole of the second light-emitting diode, and both ends of the emergency stop button are also connected to the PLC control module. The safety control module controls the working state of the safety output module according to the status light signals of the first light-emitting diode and the second light-emitting diode.
4. The ion beam etching control system according to claim 2 or 3, characterized in that, The safety output module includes a fourth power supply and a second relay. The ion beam etching control system further includes a power supply switch unit for turning on or off the power supply. The power supply switch unit is connected to the ion source power supply and the neutralizer power supply. The first end of the power supply switch unit is connected to the first output end of the second relay, the second end of the power supply switch unit is connected to the negative pole of the fourth power supply, the second output end of the second relay is connected to the positive pole of the fourth power supply, and the first input end and the second input end of the second relay are both connected to the safety control module.
5. The ion beam etching control system according to claim 4, characterized in that, The safety output module further includes a comparison unit and an ammeter. The first end of the ammeter is connected to the positive electrode of the fourth power supply, the second end is connected to the second output end of the second relay, and the output end of the ammeter is connected to the comparison unit. The comparison unit is configured to compare the current data of the ammeter with a preset current value and transmit the comparison result to the safety control module.
6. The ion beam etching control system according to claim 1, wherein The ion beam etching control system further includes a bus communication module and at least one functional module. The PLC control module is communicatively connected to the functional module through the bus communication module.
7. The ion beam etching control system according to claim 6, wherein The bus communication module includes at least one Devicenet bus and at least one EtherCAT bus. The PLC control module is communicatively connected to one of the functional modules through one of the Devicenet buses or one of the EtherCAT buses.
8. The ion beam etching control system according to claim 6, characterized in that, The functional module includes one of a process gas control unit, a vacuum pressure detection unit, a gas valve control unit, and a servo control unit.
9. The ion beam etching control system according to claim 1, wherein The ion beam etching control system includes a serial communication module. The PLC control module is communicatively connected to the ion source power supply and the neutralizer power supply through the serial communication module.
10. The ion beam etching control system according to claim 1, wherein, The ion beam etching control system further includes an uninterruptible power supply, which is used to supply power to the PLC control module.