Functional silane tail gas treatment device

Abstract

The utility model relates to the technical field of tail gas treatment, and discloses a functional silane tail gas treatment device which comprises a pressurized oil removal part and a liquid nitrogen condensation part which are communicated in sequence, the liquid nitrogen condensation part comprises a liquid nitrogen cooling tank, the liquid nitrogen cooling tank comprises a tank body and a condensation pipe arranged in the tank body, the condensation pipe is sleeved with a liquid scraping piece, and the liquid scraping piece is connected with the pressurized oil removal part. The liquid scraping piece comprises a scraping disc arranged on the condensation pipe in a sleeving mode, a chain connected with the outer edge of the scraping disc and a gear fixed to the tank body and rotationally connected with the chain. The functional silane tail gas is compressed in the pressurized oil removal part and then subjected to water cooling, the cooled functional silane tail gas enters the liquid nitrogen cooling part, functional silane and organic matter in the functional silane tail gas are completely condensed at the temperature of-50 DEG C to-70 DEG C, and then the functional silane tail gas is recycled, so that the recovery rate of the functional silane tail gas is increased; the efficiency is high.

Description

Technical Field

[0001] The present invention relates to the technical field of tail gas treatment, and in particular to a functional silane tail gas treatment device. Background Art

[0002] Functional silane is a high-tech material widely used in the industries of photovoltaic, new energy, rail transit, and aerospace. The domestic output of functional silane is hundreds of thousands of tons. In the production of functional silane, hydrocarbons are often used as solvents. Hydrocarbons are flammable, explosive, and volatile. During the purification process of functional silane, some functional silane and hydrocarbons will enter the tail gas system. In order to achieve the goals of environmental protection up-to-standard discharge, resource recycling, energy conservation and emission reduction, it is necessary to treat and recycle the functional silane tail gas.

[0003] In the prior art, the recovery and treatment of functional silane tail gas mainly adopt cold brine condensation at -10°C to -30°C and then activated carbon adsorption or incineration treatment. For example, a method for treating silane tail gas containing chlorosilane disclosed in the publication number CN108261883B, but the cold brine condensation temperature is not low enough, and the recovery rate of functional silane is low. When activated carbon adsorbs functional silane, functional silane will hydrolyze to form powder, which will block the pores of activated carbon, resulting in easy inactivation of activated carbon. Moreover, heat generation during the activated carbon adsorption process often causes spontaneous combustion accidents, and it is difficult to recover the functional silane in the activated carbon. Incomplete recovery of functional silane will lead to environmental pollution and resource waste. Summary of the Invention

[0004] In order to overcome the problems existing in the recovery and treatment of functional silane tail gas in the prior art, the present utility model provides a functional silane tail gas treatment device, which includes a pressurization and oil removal part and a liquid nitrogen condensation part. In the pressurization and oil removal part, the functional silane tail gas is compressed and then cooled by water, and the cooled functional silane tail gas then enters the liquid nitrogen cooling part, where it is completely condensed into a liquid at a temperature of -50°C to -70°C for recovery. In addition, in order to improve the condensation efficiency of the condensation tube, a liquid scraping member is provided on the liquid nitrogen condensation tube, and the liquid on the condensation tube is scraped in time by the liquid scraping member to ensure the condensation effect of the condensation tube.

[0005] The specific technical solution of the present invention is as follows:

[0006] A functional silane tail gas treatment device, including a pressurization and oil removal part and a liquid nitrogen condensation part connected in sequence. The liquid nitrogen condensation part includes a liquid nitrogen cooling tank, and the liquid nitrogen cooling tank includes a tank body and a condensation tube arranged in the tank body. A liquid scraping member is sleeved on the condensation tube, and the liquid scraping member includes a scraping disc sleeved on the condensation tube, a chain connected to the outer edge of the scraping disc, and a gear fixed on the tank body and rotatably connected to the chain.

[0007] The utility model provides a functional silane tail gas treatment device, which consists of a pressurized oil removal part and a liquid nitrogen cooling part. The functional silane tail gas is compressed and cooled by water in the pressurized oil removal part for preliminary cooling to remove the oil phase in the functional tail gas, and then the functional silane tail gas is introduced into the liquid nitrogen cooling part. The functional silane tail gas is completely condensed into a liquid at a temperature of -50 to -70 °C by the liquid nitrogen cooling tank and then recycled for use, while the tail gas enters the subsequent treatment process. The liquid nitrogen condensation of this device can make the functional silane tail gas meet the emission standards, and the VOC in the tail gas is lower than 100 mg / m 3 , which is significantly higher than the technical solution using cold brine for condensation.

[0008] In addition, in this application, a liquid scraping part is arranged on the condensing pipe to improve the condensation efficiency of the condensing pipe. Excessive accumulation of condensed liquid on the surface of the condensing pipe will cause a significant reduction in the cold area surface of the condensing pipe. Therefore, by periodically scraping the condensed liquid on the surface of the condensing pipe, the condensation efficiency of the condensing pipe can be improved first; the liquid scraping part consists of a scraping disc, a chain and a gear. The chain is arranged on the outer edge of the scraping disc, and the gear is rotationally connected with the chain. The chain moves by the rotation of the gear, thereby driving the scraping disc to move. The moving scraping disc can scrape the liquid on the surface of the condensing pipe.

[0009] Preferably, a plurality of through holes sleeved on the condensing pipe are arranged on the scraping disc, and rolling parts rotationally connected with the condensing pipe are arranged in the through holes; in the use of this utility model, it is found that when the scraping disc scrapes the surface of the condensing pipe, it will cause scraping on the surface of the condensing pipe, resulting in damage to the surface of the condensing pipe. Therefore, to solve the above problems, the utility model arranges rolling parts on the through holes of the scraping disc. The rolling parts are rotationally connected with the condensing pipe, significantly reducing the scraping damage of the scraping disc to the surface of the condensing pipe, protecting the surface of the condensing pipe and increasing the durability of the scraping part.

[0010] Preferably, the rolling part is a low-temperature resistant rubber.

[0011] Preferably, the surface of the scraping disc is a convex surface. When the moving direction of the scraping disc is up and down, the surface of the scraping disc needs to be set as a convex surface, so that when the scraping disc scrapes the condensed liquid upward, the condensed liquid can flow downward along the surface of the scraping disc, preventing the condensed liquid from accumulating on the surface of the scraping disc and affecting the scraping efficiency of the scraping disc.

[0012] Preferably, a plurality of drainage grooves are arranged on the surface of the scraping disc. Drainage grooves are arranged on the surface of the scraping disc, and the drainage grooves can make the condensed liquid flow into the condensation tank and flow to the bottom of the liquid nitrogen condensation tank.

[0013] Preferably, the pressurized oil removal part includes a compression device and a water cooling device, and the water cooling device is communicated with the compression device and the liquid nitrogen cooling tank.

[0014] Preferably, the liquid nitrogen condensation part further includes a liquid nitrogen tank, a buffer tank and a liquid storage tank communicating with the tank body. The tank body is provided with a liquid outlet, a gas outlet and a liquid nitrogen port.

[0015] Preferably, a temperature control valve is provided on the liquid nitrogen port, and the temperature control valve communicates the liquid nitrogen port and the liquid nitrogen tank.

[0016] Preferably, a control valve is provided on the liquid outlet, a liquid level gauge is provided in the liquid storage tank, and the liquid level gauge is electrically connected to the control valve.

[0017] Preferably, a pressure control valve is provided on the liquid outlet, and the pressure control valve communicates the liquid outlet and the buffer tank.

[0018] Compared with the prior art, the present application has the following technical effects:

[0019] The utility model provides a functional silane tail gas treatment device, which includes a pressurizing and oil removal part and a liquid nitrogen condensation part. In the pressurizing and oil removal part, the functional silane tail gas is compressed and then cooled by water cooling. After cooling, the functional silane tail gas enters the liquid nitrogen cooling part, where the functional silane is completely condensed into liquid at a temperature of -50 to -70 °C and then recovered. In addition, in order to improve the condensation efficiency of the condensation tube, a liquid scraping member is provided on the liquid nitrogen condensation tube, and the liquid on the condensation tube is scraped in time by the liquid scraping member to ensure the condensation effect of the condensation tube. In the present application, a rolling member that is in rolling connection with the condensation tube is provided in the through hole of the liquid scraping member. The liquid on the surface of the condensation tube is separated from the condensation tube by the rolling extrusion of the rolling member, and at the same time, the friction between the scraping disc and the condensation tube is reduced by rolling, ensuring that the scraping disc does not damage the surface of the condensation tube when scraping the condensation tube for a long time and increasing the durability. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a process schematic diagram of the utility model.

[0021] Figure 2 It is a cross-sectional view of the liquid nitrogen cooling tank of the utility model.

[0022] Figure 3 It is a cross-sectional view of the scraping disc of the utility model.

[0023] Figure 4 It is a top view of the scraping disc of the utility model.

[0024] In the figure, the pressurizing and oil removal part 1, the compression device 101, the water cooling device 102, the liquid nitrogen condensation part 2, the liquid nitrogen cooling tank 201, the tank body 211, the condensation tube 212, the liquid scraping member 213, the scraping disc 2131, the chain 2132, the gear 2133, the through hole 2134, the rolling member 2135, the drainage groove 2136, the liquid outlet 214, the gas outlet 215, the liquid nitrogen tank 202, the buffer tank 203 and the liquid storage tank 204. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0025] The present invention will be further described below in conjunction with embodiments.

[0026] Embodiment 1:

[0027] As Figure 1 shown, a functional silane tail gas treatment device includes a pressure and oil removal section and a liquid nitrogen condensation section connected in sequence. The pressure and oil removal section includes a compression device 101 and a water-cooling device 102 connected to the compression device. The compression device is an air compressor, and the water-cooling device is a water-cooled heat exchanger. The liquid nitrogen condensation section includes a liquid nitrogen condensation tank 201 connected to the water-cooling device, as well as a liquid nitrogen tank 202, a buffer tank 203, and a liquid storage tank 204 connected to the liquid nitrogen condensation pipe;

[0028] As Figure 2 shown, the liquid nitrogen cooling tank includes a tank body 211 and a number of parallel condensation pipes 212 arranged inside the tank body. The condensation pipes are connected to the liquid nitrogen tank through a temperature control valve. The tank body is provided with a liquid outlet 214 and a gas outlet 215. The liquid outlet is connected to the liquid storage tank through a control valve, and the gas outlet is connected to the buffer tank through a pressure control valve. A liquid scraping member 213 is sleeved on the condensation pipe. The liquid hanging member includes a scraping disc 2131 sleeved on the condensation pipe, a chain 2132 arranged on the outer edge of the scraping disc, and a gear 2133 rotatably connected to the chain. The gear includes two pulleys fixed to the top and bottom of the tank body respectively. The chain connects the two pulleys, and the rotation of the pulleys drives the movement of the chain. The scraping disc is a convex disc, and the disc is provided with through holes 2134, and the through holes are sleeved on the condensation pipes.

[0029] Embodiment 2:

[0030] As Figure 1 shown, a functional silane tail gas treatment device includes a pressure and oil removal section and a liquid nitrogen condensation section connected in sequence. The pressure and oil removal section includes a compression device 101 and a water-cooling device 102 connected to the compression device. The compression device is an air compressor, and the water-cooling device is a water-cooled heat exchanger. The liquid nitrogen condensation section includes a liquid nitrogen condensation tank 201 connected to the water-cooling device, as well as a liquid nitrogen tank 202, a buffer tank 203, and a liquid storage tank 204 connected to the liquid nitrogen condensation pipe;

[0031] As Figure 2 and Figure 3As shown in the figure, the liquid nitrogen cooling tank includes a tank body 211 and a number of parallel condensation pipes 212 arranged inside the tank. The condensation pipes are connected to the liquid nitrogen tank through a temperature control valve. The tank body is provided with a liquid outlet 214 and a gas outlet 215. The liquid outlet is connected to the liquid storage tank through a control valve, and the gas outlet is connected to the buffer tank through a pressure control valve. A liquid scraping member 213 is sleeved on the condensation pipe. The liquid hanging member includes a scraping disc 2131 sleeved on the condensation pipe, a chain 2132 arranged on the outer edge of the scraping disc, and a gear 2133 rotatably connected to the chain. The gear includes two pulleys respectively fixed at the top and bottom of the tank body. The chain connects the two pulleys, and the rotation of the pulleys drives the chain to move. The scraping disc is a convex disc, and the disc is provided with through holes 2134. The through holes are sleeved on the condensation pipe, and rolling members 2135 are arranged inside the through holes. The rolling members are balls made of low-temperature resistant rubber, and the balls are arranged in the grooves inside the through holes.

[0032] Embodiment 3:

[0033] As Figure 1 shown in the figure, a functional silane tail gas treatment device includes a pressure boosting and oil removal part and a liquid nitrogen condensation part connected in sequence. The pressure boosting and oil removal part includes a compression device 101 and a water cooling device 102 connected to the compression device. The compression device is an air compressor, and the water cooling device is a water cooling heat exchanger. The liquid nitrogen condensation part includes a liquid nitrogen condensation tank 201 connected to the water cooling device, a liquid nitrogen tank 202, a buffer tank 203, and a liquid storage tank 204 connected to the liquid nitrogen condensation pipe;

[0034] As Figure 2 and Figure 3 shown in the figure, the liquid nitrogen cooling tank includes a tank body 211 and a number of parallel condensation pipes 212 arranged inside the tank. The condensation pipes are connected to the liquid nitrogen tank through a temperature control valve. The tank body is provided with a liquid outlet 214 and a gas outlet 215. The liquid outlet is connected to the liquid storage tank through a control valve, and the gas outlet is connected to the buffer tank through a pressure control valve. A liquid scraping member 213 is sleeved on the condensation pipe. The liquid hanging member includes a scraping disc 2131 sleeved on the condensation pipe, a chain 2132 arranged on the outer edge of the scraping disc, and a gear 2133 rotatably connected to the chain. The gear includes two pulleys respectively fixed at the top and bottom of the tank body. The chain connects the two pulleys, and the rotation of the pulleys drives the chain to move. The scraping disc is a convex disc, and the disc is provided with through holes 2134. The through holes are sleeved on the condensation pipe. The surface of the scraping disc is provided with a number of diversion grooves 2136 reflecting from the center of the turntable to the outer edge of the turntable. The diversion grooves are connected to the through holes, and rolling members 2135 are arranged inside the through holes. The rolling members are balls made of low-temperature resistant rubber, and the balls are arranged in the grooves inside the through holes.

[0035] Embodiment 4:

[0036] As Figure 1As shown in the figure, a functional silane tail gas treatment device includes a pressurized oil removal section and a liquid nitrogen condensation section connected in sequence. The pressurized oil removal section includes a compression device 101 and a water-cooling device 102 connected to the compression device. The compression device is an air compressor, and the water-cooling device is a water-cooled heat exchanger. The liquid nitrogen condensation section includes a liquid nitrogen condensation tank 201 connected to the water-cooling device, as well as a liquid nitrogen tank 202, a buffer tank 203, and a liquid storage tank 204 connected to the liquid nitrogen condensation pipe;

[0037] As Figure 2 and Figure 3 shown in the figure, the liquid nitrogen cooling tank includes a tank body 211 and a number of parallel condensation pipes 212 arranged inside the tank body. The condensation pipes are connected to the liquid nitrogen tank through a temperature control valve. An outlet 214 and an air outlet 215 are provided on the tank body. The outlet is connected to the liquid storage tank through a control valve, and the air outlet is connected to the buffer tank through a pressure control valve. A liquid scraping member 213 is sleeved on the condensation pipe. The liquid hanging member includes a scraping disc 2131 sleeved on the condensation pipe, a chain 2132 arranged on the outer edge of the scraping disc, and a gear 2133 rotatably connected to the chain. The gear includes two pulleys fixed to the top and bottom of the tank body respectively. The chain connects the two pulleys, and the rotation of the pulleys drives the chain to move. The scraping disc is a convex disc, and through holes 2134 are provided on the disc. The through holes are sleeved on the condensation pipe. A number of drainage grooves 2136 are provided on the surface of the scraping disc, which reflect from the center of the disc to the outer edge of the disc. The drainage grooves are connected to the through holes, and rolling members 2135 are arranged in the through holes. The rolling members are rubber rollers made of low-temperature resistant rubber, and the balls are arranged in the grooves in the through holes and are in contact with the surface of the condensation pipe.

[0038] Example 5:

[0039] As Figure 1 shown in the figure, a functional silane tail gas treatment device includes a pressurized oil removal section and a liquid nitrogen condensation section connected in sequence. The pressurized oil removal section includes a compression device 101 and a water-cooling device 102 connected to the compression device. The compression device is an air compressor, and the water-cooling device is a water-cooled heat exchanger. The liquid nitrogen condensation section includes a liquid nitrogen condensation tank 201 connected to the water-cooling device, as well as a liquid nitrogen tank 202, a buffer tank 203, and a liquid storage tank 204 connected to the liquid nitrogen condensation pipe;

[0040] As Figure 2 and Figure 3As shown in the figure, the liquid nitrogen cooling tank includes a tank body 211 and a number of parallel condensation tubes 212 arranged inside the tank. The condensation tubes are connected to the liquid nitrogen tank through a temperature control valve. The tank body is provided with a liquid outlet 214 and a gas outlet 215. The liquid outlet is connected to the liquid storage tank through a control valve, and the gas outlet is connected to the buffer tank through a pressure control valve. A liquid scraping member 213 is sleeved on the condensation tube. The liquid hanging member includes a scraping disc 2131 sleeved on the condensation tube, a chain 2132 arranged on the outer edge of the scraping disc, and a gear 2133 rotatably connected to the chain. The gear includes two pulleys respectively fixed at the top and bottom of the tank body. The chain connects the two pulleys, and the rotation of the pulleys drives the chain to move. The scraping disc is a convex disc, and the disc is provided with through holes 2134. The through holes are sleeved on the condensation tube. The surface of the scraping disc is provided with a number of drainage grooves 2136 that reflect from the center of the disc to the outer edge of the disc. The drainage grooves are connected to the through holes. The depth of the drainage grooves is 1 mm. A rolling member 2135 is arranged in the through hole. The rolling member is a ball made of low-temperature resistant rubber, and the ball is arranged in the groove in the through hole.

[0041] Example 6:

[0042] As Figure 1 shown, a functional silane tail gas treatment device includes a pressure increasing and oil removing part and a liquid nitrogen condensation part connected in sequence. The pressure increasing and oil removing part includes a compression device 101 and a water cooling device 102 connected to the compression device. The compression device is an air compressor, and the water cooling device is a water cooling heat exchanger. The liquid nitrogen condensation part includes a liquid nitrogen condensation tank 201 connected to the water cooling device, a liquid nitrogen tank 202, a buffer tank 203, and a liquid storage tank 204 connected to the liquid nitrogen condensation tube;

[0043] As Figure 2 and Figure 3 shown, the liquid nitrogen cooling tank includes a tank body 211 and a number of parallel condensation tubes 212 arranged inside the tank. The condensation tubes are connected to the liquid nitrogen tank through a temperature control valve. The tank body is provided with a liquid outlet 214 and a gas outlet 215. The liquid outlet is connected to the liquid storage tank through a control valve, and the gas outlet is connected to the buffer tank through a pressure control valve. A liquid scraping member 213 is sleeved on the condensation tube. The liquid hanging member includes a scraping disc 2131 sleeved on the condensation tube, a chain 2132 arranged on the outer edge of the scraping disc, and a gear 2133 rotatably connected to the chain. The gear includes two pulleys respectively fixed at the top and bottom of the tank body. The chain connects the two pulleys, and the rotation of the pulleys drives the chain to move. The scraping disc is a convex disc, and the disc is provided with through holes 2134. The through holes are sleeved on the condensation tube. The surface of the scraping disc is provided with a number of drainage grooves 2136 that reflect from the center of the disc to the outer edge of the disc. The drainage grooves are connected to the through holes. The depth of the drainage grooves is 5 mm. A rolling member 2135 is arranged in the through hole. The rolling member is a ball made of low-temperature resistant rubber, and the ball is arranged in the groove in the through hole.

[0044] Example 7:

[0045] As Figure 1As shown in the figure, a functional silane tail gas treatment device includes a pressure oil removal section and a liquid nitrogen condensation section connected in sequence. The pressure oil removal section includes a compression device 101 and a water-cooling device 102 connected to the compression device. The compression device is an air compressor, and the water-cooling device is a water-cooled heat exchanger. The liquid nitrogen condensation section includes a liquid nitrogen condensation tank 201 connected to the water-cooling device, as well as a liquid nitrogen tank 202, a buffer tank 203, and a liquid storage tank 204 connected to the liquid nitrogen condensation pipe;

[0046] As Figure 2 and Figure 3 shown in the figure, the liquid nitrogen cooling tank includes a tank body 211 and a number of parallel condensation pipes 212 arranged in the tank body. The condensation pipes are connected to the liquid nitrogen tank through a temperature control valve. The tank body is provided with a liquid outlet 214 and a gas outlet 215. The liquid outlet is connected to the liquid storage tank through a control valve, and the gas outlet is connected to the buffer tank through a pressure control valve. A liquid scraping member 213 is sleeved on the condensation pipe. The liquid hanging member includes a scraping disc 2131 sleeved on the condensation pipe, a chain 2132 arranged on the outer edge of the scraping disc, and a gear 2133 rotatably connected to the chain. The gear includes two pulleys fixed to the top and bottom of the tank body respectively. The chain connects the two pulleys, and the rotation of the pulleys drives the chain to move. The scraping disc is a convex disc, and the disc is provided with through holes 2134. The through holes are sleeved on the condensation pipes. The surface of the scraping disc is provided with a number of drainage grooves 2136 that reflect from the center of the turntable to the outer edge of the turntable. The drainage grooves are connected to the through holes. The depth of the drainage grooves is 3 mm. A rolling member 2135 is arranged in the through hole. The rolling member is a ball made of low-temperature resistant rubber, and the ball is arranged in a groove in the through hole.

[0047] Example 8:

[0048] As Figure 1 shown in the figure, a functional silane tail gas treatment device includes a pressure oil removal section and a liquid nitrogen condensation section connected in sequence. The pressure oil removal section includes a compression device 101 and a water-cooling device 102 connected to the compression device. The compression device is an air compressor, and the water-cooling device is a water-cooled heat exchanger. The liquid nitrogen condensation section includes a liquid nitrogen condensation tank 201 connected to the water-cooling device, as well as a liquid nitrogen tank 202, a buffer tank 203, and a liquid storage tank 204 connected to the liquid nitrogen condensation pipe;

[0049] As Figure 2 and Figure 3As shown in the figure, the liquid nitrogen cooling tank includes a tank body 211 and a number of parallel condensing pipes 212 arranged inside the tank. The condensing pipes are connected to the liquid nitrogen tank through a temperature control valve. An outlet 214 and an air outlet 215 are provided on the tank body. The outlet is connected to the liquid storage tank through a control valve, and the air outlet is connected to the buffer tank through a pressure control valve. A liquid scraping member 213 is sleeved on the condensing pipe. The liquid hanging member includes a scraping disc 2131 sleeved on the condensing pipe, a chain 2132 provided on the outer edge of the scraping disc, and a gear 2133 rotatably connected to the chain. The gear includes two pulleys fixed to the top and bottom of the tank body respectively. The chain connects the two pulleys, and the rotation of the pulleys drives the chain to move. The scraping disc is a convex disc, and a through hole 2134 is provided on the disc. The through hole is sleeved on the condensing pipe. A number of drainage grooves 2136 are provided on the surface of the scraping disc that reflect from the center of the disc to the outer edge of the disc. The drainage grooves are connected to the through hole, and the depth of the drainage grooves is 8 mm.

[0050] The application of the functional silane tail gas treatment device in the above-mentioned Embodiments 1 to 3 for treating functional silane tail gas includes the following steps: The tail gas from the functional silane production device first enters a compressor for compression so that the pressure of the compressed tail gas reaches 0.2 - 0.6 Mpa; then the compressed tail gas is first passed into a water-cooled heat exchanger for cooling and oil removal, and then passed into a liquid nitrogen condensation tank for cooling. Liquid nitrogen enters the condensing pipes in the liquid nitrogen condensation tank from the liquid nitrogen tank. The temperature control valve on the liquid nitrogen condensation tank controls the liquid nitrogen tank to supply liquid nitrogen to the condensing pipes to ensure that the temperature inside the tank is between -50 and -70 °C. The surface of the condensing pipes serves as a cooling surface to cool the functional silane in the tail gas. The liquid condensation on the surface of the condensing pipes is periodically cleaned under the action of the chain and the gear on the condensing pipes to ensure the condensation effect on the surface of the condensing pipes and improve the condensation efficiency of the functional tail gas. The pressure control valve on the air outlet at the top of the liquid nitrogen condensation tank controls the pressure of the liquid nitrogen condensation tank to be maintained between 0.2 and 0.6 Mpa. The treated tail gas enters the buffer tank from the air outlet for subsequent treatment. The control valve on the liquid outlet at the bottom of the liquid nitrogen condensation tank controls the condensed and recovered liquid to flow into the liquid storage tank. A liquid level gauge is provided in the liquid storage tank. When the liquid level gauge reaches 80%, the control valve will be closed and the recovered liquid in the liquid storage tank will be transported to the recovery system. When the value of the liquid level gauge is lower than 20%, the transportation will stop and the control valve will be opened to continue recovering the condensed liquid.

[0051] The above are only the preferred embodiments of the present invention, and do not impose any limitations on the present invention. Any simple modifications, changes, and equivalent transformations made to the above embodiments according to the technical essence of the present invention still fall within the protection scope of the technical solution of the present invention.

Claims

1. A functional silane tail gas treatment device, characterized in that, It includes a pressurized oil removal part (1) and a liquid nitrogen condensation part (2) connected in sequence. The liquid nitrogen condensation part includes a liquid nitrogen cooling tank (201). The liquid nitrogen cooling tank includes a tank body (211) and a condensation pipe (212) arranged in the tank body. A liquid scraping part (213) is sleeved on the condensation pipe. The liquid scraping part includes a scraping disc (2131) sleeved on the condensation pipe, a chain (2132) connected to the outer edge of the scraping disc, and a gear (2133) fixed on the tank body and rotatably connected to the chain.

2. The functional silane tail gas treatment device according to claim 1, characterized in that, A number of through holes (2134) sleeved on the condensation pipe are provided on the scraping disc, and rolling parts (2135) rollingly connected to the condensation pipe are arranged in the through holes.

3. The functional silane tail gas treatment device according to claim 2, characterized in that, The rolling parts are made of low-temperature resistant rubber.

4. The functional silane tail gas treatment device according to claim 1 or 2, characterized in that, The surface of the scraping disc is a convex surface.

5. The functional silane tail gas treatment device according to claim 1 or 2, characterized in that, A number of drainage grooves (2136) are provided on the surface of the scraping disc.

6. The functional silane tail gas treatment device according to claim 1, characterized in that, The pressurized oil removal part includes a compression device (101) and a water cooling device (102), and the water cooling device is connected to the compression device and the liquid nitrogen cooling tank.

7. The functional silane tail gas treatment device according to claim 1, characterized in that, The liquid nitrogen condensation part further includes a liquid nitrogen tank (202), a buffer tank (203) and a liquid storage tank (204) connected to the tank body. An outlet (214), an air outlet (215) and a liquid nitrogen port are provided on the tank body.

8. The functional silane tail gas treatment device according to claim 7, characterized in that, A temperature control valve is provided on the liquid nitrogen port, and the temperature control valve is connected to the liquid nitrogen port and the liquid nitrogen tank.

9. The functional silane tail gas treatment device according to claim 7, characterized in that, A control valve is provided on the outlet. A liquid level gauge is arranged in the liquid storage tank, and the liquid level gauge is electrically connected to the control valve.

10. The functional silane tail gas treatment device according to claim 7, characterized in that, A pressure control valve is provided on the outlet, and the pressure control valve is connected to the outlet and the buffer tank.

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