Device for conveying trichlorosilane in rectification system to reduction system

Abstract

The utility model relates to the technical field of polycrystalline silicon production, in particular to a device for conveying trichlorosilane in a rectification system to a reduction system. The evaporator is communicated with a delivery pump I through a pipeline I; the reduction furnace is communicated with the evaporator; one end of the return pipe is communicated with the pipeline I, and the other end is communicated with a return port of the storage tank; a backflow regulating valve is arranged on the backflow pipe; a remote switch valve I is arranged on the pipeline I; a pressure gauge I is arranged on the pipeline I; the pressure gauge I and the backflow regulating valve are in interlocking control; a current monitoring device I is arranged on the conveying pump I; the current control center I is connected with the current monitoring device I; the remote switch valve I and the current monitoring device I are in interlocking control through a current control center I; the second delivery pump is connected with the first delivery pump in parallel. By adopting the system, the risk caused by the high-pressure tank to the operation of the system is solved, the supply stability of the trichlorosilane material is improved, the production safety is guaranteed, and the production cost can be reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of polysilicon production, in particular to a device for transporting trichlorosilane in a rectification system to a reduction system. Background Art

[0002] In the improved Siemens method, high-purity trichlorosilane undergoes a gas-phase deposition reaction in a reduction furnace to produce high-purity polysilicon.

[0003] In the prior art, when transporting high-purity trichlorosilane material to the reduction furnace, the high-purity trichlorosilane in the storage unit of the rectification system is sent to a high-pressure tank in the reduction system through a transfer pump. The outlet of the high-pressure tank and the evaporator are connected by a regulating valve, and the opening of the regulating valve is adjusted to meet the material requirements of the reduction furnace. In order to control the liquid level of the high-pressure tank, a regulating valve is installed at the inlet of the high-pressure tank, and the liquid level gauge of the high-pressure tank and the regulating valve at the inlet are set for single-loop control; when the liquid level of the high-pressure tank is lower than the lower limit of the alarm value, the opening of the regulating valve is increased; when the liquid level of the high-pressure tank is higher than the upper liquid level, the opening of the regulating valve is decreased; by installing a pressure compensation and relief regulating valve device on the high-pressure tank, the pressure of the high-pressure tank is stabilized.

[0004] As a buffer tank, the high-pressure tank has high pressure, great danger, short service life, and high replacement cost during use; moreover, regular inspections are required, and the input of human and material resources is relatively large. Summary of the Utility Model

[0005] In view of this, the utility model provides a device for transporting trichlorosilane in a rectification system to a reduction system, mainly aiming to solve the risks brought by the high-pressure tank to the system operation, improve the stability of the trichlorosilane material supply, ensure production safety, and reduce production costs.

[0006] To achieve the above object, the utility model mainly provides the following technical solutions:

[0007] An embodiment of the utility model provides a device for transporting trichlorosilane in a rectification system to a reduction system, including: a storage tank, a first transfer pump, an evaporator, a reduction furnace, a reflux pipe, a first current control center, a second transfer pump, a second current control center, and a central control system;

[0008] The storage tank is used for storing the trichlorosilane purified by the rectification system;

[0009] The input end of the first transfer pump is communicated with the material outlet of the storage tank;

[0010] The input port of the evaporator is communicated with the output end of the first transfer pump through a first pipeline;

[0011] The reduction furnace is communicated with the output port of the evaporator;

[0012] One end of the reflux pipe is connected to the first pipe, and the other end is connected to the reflux port of the storage tank; the part where the reflux pipe and the first pipe are interconnected has a first connection point; the first connection point is located between the first delivery pump and the evaporator;

[0013] A reflux regulating valve is provided on the reflux pipe;

[0014] A remote on-off valve one is provided on the first pipe; the remote on-off valve one is arranged between the first delivery pump and the first connection point;

[0015] A pressure gauge one is provided on the first pipe; the pressure gauge one is arranged between the first connection point and the evaporator; the pressure gauge one is interlocked and controlled with the reflux regulating valve;

[0016] A pressure gauge two is provided on the first pipe; the pressure gauge two is arranged between the remote on-off valve one and the first delivery pump;

[0017] A current monitoring device one is provided on the first delivery pump;

[0018] The first current control center is connected to the current monitoring device one;

[0019] The remote on-off valve one and the current monitoring device one are interlocked and controlled through the first current control center;

[0020] The input end of the second delivery pump is connected to the material outlet of the storage tank;

[0021] The output end of the second delivery pump is connected to the first pipe through a second pipe; the part where the second pipe and the first pipe are interconnected has a second connection point; the second connection point is located between the first delivery pump and the first connection point;

[0022] A pressure gauge three is provided on the second pipe;

[0023] A remote on-off valve two is provided on the second pipe; the remote on-off valve two is arranged between the second delivery pump and the second connection point;

[0024] A current monitoring device two is provided on the second delivery pump;

[0025] The second current control center is connected to the current monitoring device two;

[0026] The remote on-off valve two and the current monitoring device two are interlocked and controlled through the second current control center;

[0027] A control valve is provided on the first pipe; the control valve is located between the pressure gauge one and the evaporator;

[0028] The central control system is respectively connected to the first current control center, the second current control center, the reflux regulating valve, the first delivery pump and the second delivery pump to collect current information and control the reflux regulating valve, the first delivery pump and the second delivery pump.

[0029] Further, the first delivery pump can be remotely started;

[0030] The second delivery pump can be remotely started.

[0031] Further, the central control system is provided with a display screen for displaying status parameters.

[0032] By means of the above technical solutions, the device for transporting trichlorosilane in the rectification system to the reduction system of the present utility model has at least the following advantages:

[0033] It solves the risks brought by the high-pressure tank to the system operation, improves the stability of the trichlorosilane material supply, ensures production safety, and can reduce production costs.

[0034] The above description is only an overview of the technical solutions of the present utility model. In order to be able to understand the technical means of the present utility model more clearly and implement it according to the content of the specification, the following takes the preferred embodiments of the present utility model and combines with the drawings to describe in detail as follows. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 It is a schematic diagram of a device for transporting trichlorosilane in the rectification system to the reduction system provided by an embodiment of the present utility model.

[0036] As shown in the figure:

[0037] 1 is a storage tank, 2 is the first delivery pump, 3 is an evaporator, 4 is a reduction furnace, 5 is a reflux pipe, 6 is the first current control center, 7 is the first current monitoring device, 8 is the second pressure gauge, 9 is the first remote switching valve, 10 is the first pressure gauge, 11 is the reflux regulating valve, 12 is a control valve, 13 is the second current control center, 14 is the second current monitoring device, 15 is the second delivery pump, 16 is the third pressure gauge, 17 is the second remote switching valve, 18 is pipe two. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0038] To further elaborate on the technical means and effects adopted by the present utility model to achieve the intended utility model purpose, the following combines with the drawings and preferred embodiments to describe in detail the specific implementation manners, structures, features and their effects according to the present utility model application. In the following description, different "one embodiment" or "embodiment" do not necessarily refer to the same embodiment. In addition, the specific features, structures, or characteristics in one or more embodiments can be combined in any suitable form.

[0039] As shown Figure 1 in the figure, a device for transporting trichlorosilane in a rectification system to a reduction system proposed by an embodiment of the present utility model includes: a storage tank 1, a first transfer pump 2, an evaporator 3, a reduction furnace 4, a reflux pipe 5, a first current control center 6, a second transfer pump 15, a second current control center 13, and a central control system; the storage tank 1 is used to store the trichlorosilane purified by the rectification system; the input end of the first transfer pump 2 is communicated with the material outlet of the storage tank 1; preferably, the first transfer pump 2 can be remotely started to facilitate remote control. The input port of the evaporator 3 is communicated with the output end of the first transfer pump 2 through a first pipeline; the reduction furnace 4 is communicated with the output port of the evaporator 3. The first transfer pump 2 transports trichlorosilane material to the reduction furnace 4 through the first pipeline. One end of the reflux pipe 5 is communicated with the first pipeline, and the other end is communicated with the reflux port of the storage tank 1 so that part of the material can flow back. The connection part of the reflux pipe 5 and the first pipeline has a first connection point; the first connection point is located between the first transfer pump 2 and the evaporator 3 to control the supply amount according to the material demand. A reflux regulating valve 11 is arranged on the reflux pipe 5 to regulate the material flow of the reflux pipe 5. A remote switch valve 9 is arranged on the first pipeline; the remote switch valve 9 is arranged between the first transfer pump 2 and the first connection point to control the on-off of the first pipeline; a first pressure gauge 10 is arranged on the first pipeline; the first pressure gauge 10 is arranged between the first connection point and the evaporator 3; the first pressure gauge 10 and the reflux regulating valve 11 are interlocked to regulate the reflux regulating valve 11 according to the pressure to maintain the stability of the material supply to the reduction furnace 4.

[0040] A second pressure gauge 8 is arranged on the first pipeline to monitor the outlet pressure of the first transfer pump 2; the second pressure gauge 8 is arranged between the remote switch valve 9 and the first transfer pump 2; a first current monitoring device 7 is arranged on the first transfer pump 2 to monitor the current of the first transfer pump 2; the first current control center 6 is connected to the first current monitoring device 7; the remote switch valve 9 and the first current monitoring device 7 are interlocked through the first current control center 6.

[0041] The input end of the second transfer pump 15 is communicated with the material outlet of the storage tank 1; preferably, the second transfer pump 15 can be remotely started to facilitate remote control. The output end of the second transfer pump 15 is communicated with the first pipeline through the second pipeline 18; the part where the second pipeline 18 is communicated with the first pipeline has a second connection point; the second connection point is located between the first transfer pump 2 and the first connection point; a third pressure gauge 16 is arranged on the second pipeline 18 for monitoring the outlet pressure of the second transfer pump 15; a second remote switch valve 17 is arranged on the second pipeline 18 for controlling the on-off of the second pipeline 18; the second remote switch valve 17 is arranged between the second transfer pump 15 and the second connection point; a second current monitoring device 14 is arranged on the second transfer pump 15 for monitoring the current of the second transfer pump 15; the second current control center 13 is connected with the second current monitoring device 14; the second remote switch valve 17 and the second current monitoring device 14 are interlocked and controlled through the second current control center 13; a control valve 12 is arranged on the first pipeline; the control valve 12 is located between the first pressure gauge 10 and the evaporator 3.

[0042] The central control system is respectively connected with the first current control center 6, the second current control center 13, the reflux regulating valve 11, the first transfer pump 2 and the second transfer pump 15 to collect current information and control the reflux regulating valve 11, the first transfer pump 2 and the second transfer pump 15. Preferably, a display screen is provided on the central control system for displaying status parameters.

[0043] An apparatus for transporting trichlorosilane in a rectification system to a reduction system proposed by an embodiment of the present utility model solves the risks brought by the high-pressure tank to the system operation; improves the stability of the trichlorosilane material supply, ensures production safety, and can reduce production costs.

[0044] Further explanation: In the operating state, when the amount of high-purity trichlorosilane required by the evaporator 3 is satisfied, the operating current of the first transfer pump 2 is within the set current range; the outlet pressure of the first transfer pump 2 is stable within a predetermined range, the first remote switch valve 9 is opened, and by adjusting the opening of the reflux regulating valve 11, the pressure of the first pressure gauge 10 in front of the evaporator 3 is stabilized within the set interval. The first pressure gauge 10 and the reflux regulating valve 11 form a single-loop control. As the reduction system operates, if the number of opened reduction furnaces 4 increases, the required flow rate will also increase, and the pressure of the first pressure gauge 10 in front of the evaporator 3 will decrease accordingly; at this time, when the pressure of the first pressure gauge 10 is lower than the lower limit of the predetermined range, the valve position of the reflux regulating valve 11 is controlled to gradually contract until the pressure of the first pressure gauge 10 in front of the evaporator 3 is higher than the lower limit of the predetermined range; if the number of opened reduction furnaces 4 decreases, the required flow rate also decreases, and the pressure of the first pressure gauge 10 in front of the evaporator 3 increases; at this time, when the pressure of the first pressure gauge 10 is higher than the upper limit of the predetermined range, the valve position of the reflux regulating valve 11 is controlled to gradually increase until the pressure of the first pressure gauge 10 is within the upper limit of the predetermined range.

[0045] The outlet remote switch valve 9 of the transfer pump 2 is interlocked with the current monitoring device 7. If the transfer pump 2 malfunctions and stops running, the current of the transfer pump 2 will immediately drop to 0. The current data of the transfer pump 2 is transmitted to the current control center 6 through the current monitoring device 7. After receiving the information, the current control center 6 immediately closes the remote switch valve 9 and simultaneously closes the reflux regulating valve 11. The stop signal of the transfer pump 2, the current information of the transfer pump 2, and the closing information of the remote switch valve 9 are synchronously transmitted to the central control system. The central control system will immediately control the transfer pump 2 to start, open the remote switch valve 17, reset the reflux regulating valve 11, and the reflux regulating valve 11 will automatically act according to the pressure display of the pressure gauge 10 in front of the evaporator 3 to stabilize the pressure in front of the evaporator 3 within a predetermined range for operation.

[0046] During this period, the transfer pump 2 can be repaired. After the repair is completed, the remote switch valve 9 is reset to make the transfer pump 2 enter the standby state. Similarly, if the transfer pump 2 malfunctions, it will be switched to the transfer pump 15 for operation according to the above scheme.

[0047] Further explanation, although terms such as first and second can be used in this article to describe various elements, these terms should not limit these elements. These terms are only used to distinguish one element from another. For example, the first element can be called the second element, and similarly, the second element can be called the first element. These terms are only used to distinguish one element from another. This does not deviate from the scope of the exemplary embodiments. Similarly, element 1 and element 2 do not represent the order of the elements. These terms are only used to distinguish one element from another. As used herein, the term "and / or" includes any combination and all combinations of one or more related listed items.

[0048] In the description of the present invention, unless otherwise clearly specified and limited, the terms "installation", "connection", "connection", and "fixation" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. It can be the internal communication of two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0049] The standard parts used in the present invention can all be purchased from the market. The special-shaped parts can be customized according to the description of the specification and the drawings. The specific connection methods of each part all adopt conventional means such as bolts, rivets, and welding in the existing technology. The machines, parts, and equipment all adopt conventional models in the existing technology. Coupled with the circuit connection adopting the conventional connection method in the existing technology, it will not be elaborated here.

[0050] The above are only the preferred embodiments of the present utility model, and do not impose any formal restrictions on the present utility model. Any simple modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present utility model still fall within the scope of the technical solution of the present utility model.

Claims

1. A device for transporting trichlorosilane in a rectification system to a reduction system, characterized in that, Including: a storage tank, a first transfer pump, an evaporator, a reduction furnace, a reflux pipe, a first current control center, a second transfer pump, a second current control center, and a central control system; The storage tank is used to store trichlorosilane purified by a rectification system; The input end of the first transfer pump is communicated with the material outlet of the storage tank; The input port of the evaporator is communicated with the output end of the first transfer pump through a first pipeline; The reduction furnace is communicated with the output port of the evaporator; One end of the reflux pipe is communicated with the first pipeline, and the other end is communicated with the reflux port of the storage tank; the part where the reflux pipe is interconnected with the first pipeline has a first connection point; the first connection point is located between the first transfer pump and the evaporator; A reflux regulating valve is arranged on the reflux pipe; A remote switch valve one is arranged on the first pipeline; the remote switch valve one is arranged between the first transfer pump and the first connection point; A first pressure gauge is arranged on the first pipeline; the first pressure gauge is arranged between the first connection point and the evaporator; the first pressure gauge is interlocked and controlled with the reflux regulating valve; A second pressure gauge is arranged on the first pipeline; the second pressure gauge is arranged between the remote switch valve one and the first transfer pump; A first current monitoring device is arranged on the first transfer pump; The first current control center is connected with the first current monitoring device; The remote switch valve one and the first current monitoring device are interlocked and controlled through the first current control center; The input end of the second transfer pump is communicated with the material outlet of the storage tank; The output end of the second transfer pump is communicated with the first pipeline through a second pipeline; the part where the second pipeline is interconnected with the first pipeline has a second connection point; the second connection point is located between the first transfer pump and the first connection point; A third pressure gauge is arranged on the second pipeline; A remote switch valve two is arranged on the second pipeline; the remote switch valve two is arranged between the second transfer pump and the second connection point; A second current monitoring device is arranged on the second transfer pump; The second current control center is connected with the second current monitoring device; The remote switch valve two and the second current monitoring device are interlocked and controlled through the second current control center; A control valve is arranged on the first pipeline; the control valve is located between the first pressure gauge and the evaporator; The central control system is respectively connected with the first current control center, the second current control center, the reflux regulating valve, the first transfer pump, and the second transfer pump to collect current information and control the reflux regulating valve, the first transfer pump, and the second transfer pump.

2. The device for transporting trichlorosilane in a rectification system to a reduction system according to claim 1, wherein The first transfer pump can be remotely started; The second transfer pump can be remotely started.

3. The device for transporting trichlorosilane in a rectification system to a reduction system according to claim 1, wherein The central control system is provided with a display screen for displaying status parameters.

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