Wafer storage support

Abstract

The utility model discloses a wafer storage support comprising a storage rack; a plurality of supporting plates are uniformly and fixedly connected to the inner wall of the storage rack, a plurality of wafer placement boxes are uniformly placed on the supporting plates, a plurality of sliding plates are movably arranged on the upper surfaces of the supporting plates respectively, and each sliding plate is correspondingly arranged on the lower surface of the corresponding wafer placement box and used for supporting the wafer placement boxes; each guide rod is correspondingly arranged on the inner wall of the corresponding sliding plate, and one end of each guide rod is fixedly connected with the inner wall of the storage rack; the wafer storage rack has the beneficial effects that when a person pulls the sliding plates towards the outer side, the wafer placement boxes can be pulled to the outer side of the storage rack, the person can conveniently take the wafer placement boxes, meanwhile, the situation that the wafer placement boxes falling on the adjacent sliding plates are accidentally touched when the wafer placement boxes are taken can be prevented, and therefore the safety of the wafer storage rack in the using process can be improved; and meanwhile, production loss caused by wafer damage can be reduced.

Description

Technical Field

[0001] The utility model belongs to the technical field of wafer production, and particularly relates to a wafer storage bracket. Background Technique

[0002] A wafer, also known as a silicon wafer or a semiconductor wafer, is a basic material for manufacturing semiconductor devices. Wafers are usually made of high-purity silicon, or other semiconductor materials such as germanium and gallium arsenide. During wafer manufacturing, the raw material of the wafer is first made into a rod shape, and then cut into thin slices. These thin slices go through steps such as polishing, cleaning, and etching to form a smooth and clean surface. Then, the manufactured wafers are placed on a storage bracket for subsequent processing.

[0003] As shown in the patent document with the publication number CN218705481U, multiple wafer brackets are stacked on a wafer bracket placement rack. The inside of each wafer bracket is used to place wafers, and operators can directly take the wafer brackets with wafers placed on them from the wafer bracket placement rack.

[0004] During the process of operators taking the wafer brackets storing wafers, it may accidentally touch adjacent wafer brackets or the wafer brackets below, resulting in the adjacent or lower wafer brackets falling. This may cause the wafers on the wafer brackets to collide or be damaged by impact. The damage to the wafers may lead to production losses, and at the same time, the falling of the wafer brackets may also pose a safety hazard. Therefore, the existing technology requires a storage bracket that can prevent accidentally touching and dropping other wafers when taking wafers. Summary of the Utility Model

[0005] The purpose of the utility model is to provide a wafer storage bracket to solve the technical problem in the above background technique that other wafers may accidentally be touched and dropped when taking wafers.

[0006] The above technical purpose of the utility model is achieved through the following technical solutions:

[0007] A wafer storage bracket includes: a storage rack; a plurality of support plates are evenly and fixedly connected to the inner wall of the storage rack. A plurality of wafer placement boxes are evenly placed on the support plates. A plurality of sliding plates are respectively movably arranged on the upper surfaces of the plurality of support plates. Each sliding plate corresponds to the lower surface of each wafer placement box and is used to support the wafer placement box. A plurality of guide rods, each guide rod corresponds to the inner wall of each sliding plate, and one end of the guide rod is fixedly connected to the inner wall of the storage rack.

[0008] Further: In order to limit the movement position of the sliding plate on the support plate and prevent the support plate from falling off, a limiting block is fixedly connected to the end of the guide rod away from the storage rack, and the limiting block is located inside the sliding plate.

[0009] Further: In order to limit the position of the wafer placement box on the sliding plate and improve the stability of the wafer placement box during placement, a rectangular limiting frame is fixedly connected to the upper surface of the sliding plate, and the wafer placement box is located inside the rectangular limiting frame.

[0010] Further: In order to reduce the friction between the sliding plate and the support plate when the sliding plate moves, a plurality of placement holes are evenly formed on the upper surface of the support plate, balls are arranged inside the placement holes, and one side of the balls away from the placement holes is in contact with the lower surface of the sliding plate.

[0011] Further: In order to prevent the sliding plate from randomly moving on the support plate when supporting the wafer placement box, a plurality of placement grooves are evenly formed inside the end of the support plate away from the storage rack, the number of the plurality of placement grooves matches the number of the plurality of sliding plates, a clamping component is arranged inside the placement grooves, a clamping groove is formed on the lower surface of the sliding plate, and the top end of the clamping component is located inside the clamping groove.

[0012] Further: In order to facilitate controlling the sliding plate to drive the wafer placement box to move outward, a push plate is fixedly connected to one side of the rectangular limiting frame close to the storage rack, and a pop-up component is arranged between the side of the push plate away from the rectangular limiting frame and the inner wall of the storage rack.

[0013] Further: The clamping component includes an L-shaped clamping strip located inside the placement groove, a first spring is elastically connected to the lower surface of the L-shaped clamping strip, the top end of the L-shaped clamping strip is located inside the clamping groove, and a pressing plate is fixedly connected to one end of the L-shaped clamping strip away from the clamping groove.

[0014] Further: The pop-up component includes a limiting tube fixedly connected to the inner wall of the storage rack, a limiting rod is slidably connected to the inner wall of the limiting tube, one end of the limiting rod away from the limiting tube is fixedly connected to one side of the push plate, and a second spring is arranged outside the limiting tube and the limiting rod, and the second spring supports between the inner wall of the storage rack and the push plate.

[0015] In summary, the utility model has the following beneficial effects:

[0016] ① It is possible to separately take the wafer placement box by pulling the slide plate: By installing multiple support plates in layers up and down inside the storage rack, and then sliding multiple slide plates on the upper surface of the support plates. The operator places the wafer placement box containing wafers on the slide plate. When taking the wafer placement box, the slide plate can be pulled outward. While the operator pulls the slide plate, the movement position of the slide plate on the support plate can be restricted by the guide rod. When the slide plate is pulled outward, the wafer placement box can be pulled to the outside of the storage rack, which is convenient for the operator to take the wafer placement box. At the same time, it can also prevent accidentally touching and dropping the wafer placement box on the adjacent slide plate when taking the wafer placement box, thereby improving the safety of this application during use and reducing production losses caused by wafer damage. Description of the Drawings

[0017] Figure 1 is the overall structural schematic diagram of the present utility model;

[0018] Figure 2 is the partial cross-sectional structural schematic diagram of the present utility model;

[0019] Figure 3 is the present utility model Figure 2 The enlarged schematic diagram of the structure at A in;

[0020] Figure 4 is the present utility model Figure 2 The enlarged schematic diagram of the structure at B in;

[0021] In the figure, 1, storage rack; 2, support plate; 3, wafer placement box; 4, slide plate; 5, guide rod; 6, limit block; 7, rectangular limit frame; 8, placement hole; 9, ball; 10, placement groove; 11, clamping component; 1101, L-shaped clamping strip; 1102, first spring; 1103, pressing plate; 12, clamping groove; 13, ejecting component; 1301, limit tube; 1302, limit rod; 1303, second spring; 14, push plate. Detailed Description of the Preferred Embodiment

[0022] The following further details the present utility model with reference to the drawings.

[0023] Please refer to Figures 1-4 , the technical solution provided by the present utility model:

[0024] A wafer storage bracket, comprising: a storage rack 1; a plurality of support plates 2 are uniformly and fixedly connected to the inner wall of the storage rack 1, a plurality of wafer placement boxes 3 are uniformly placed on the support plates 2, a plurality of sliding plates 4 are respectively movably arranged on the upper surfaces of the plurality of support plates 2, and each sliding plate 4 is correspondingly arranged on the lower surface of each wafer placement box 3 for supporting the wafer placement box 3, a plurality of guide rods 5, and each guide rod 5 is respectively correspondingly arranged inside each sliding plate 4, and one end of the guide rod 5 is fixedly connected to the inner wall of the storage rack 1;

[0025] Specifically, the storage rack 1 provided in the wafer storage bracket can limit a plurality of support plates 2, and the plurality of support plates 2 are arranged in upper and lower layers. The plurality of sliding plates 4 can be supported by the support plates 2. The wafer placement boxes 3 are placed on the provided sliding plates 4. A plurality of slots for storing wafers are opened inside the wafer placement boxes 3, so that each wafer can be stored vertically. When an operator takes the wafer placement box 3, the sliding plate 4 can be pulled outward. At the same time when the operator pulls the sliding plate 4, the movement position of the sliding plate 4 on the support plate 2 can be limited by the guide rod 5. When the sliding plate 4 is pulled outward, the wafer placement box 3 can be pulled to the outside of the storage rack 1, which is convenient for the operator to take the wafer placement box 3. At the same time, it can also prevent the wafer placement box 3 located on the adjacent sliding plate 4 from accidentally touching and falling when the wafer placement box 3 is taken, thereby improving the safety during the use of the present application and reducing the production loss caused by wafer damage;

[0026] Furthermore, it should be noted that the storage rack 1 is composed of a U-shaped rack and a plurality of moving wheels fixedly installed on the lower surface of the U-shaped rack. The installation position of the plurality of support plates 2 can be limited by the U-shaped rack, and the plurality of provided moving wheels can facilitate the operator to control the movement of the U-shaped rack, thereby enabling the transportation of the stored wafers.

[0027] In order to limit the movement position of the sliding plate 4 on the support plate 2 and prevent the support plate 2 from falling off, a limit block 6 is fixedly connected to the end of the guide rod 5 away from the storage rack 1, and the limit block 6 is located inside the sliding plate 4.

[0028] In order to limit the position of the wafer placement box 3 on the sliding plate 4 and improve the stability of the wafer placement box 3 when placed, a rectangular limit frame 7 is fixedly connected to the upper surface of the sliding plate 4, and the wafer placement box 3 is located inside the rectangular limit frame 7.

[0029] In order to reduce the friction between the sliding plate 4 and the support plate 2 when the sliding plate 4 moves, a plurality of placement holes 8 are uniformly opened on the upper surface of the support plate 2, a ball 9 is arranged inside the placement hole 8, and the side of the ball 9 away from the placement hole 8 is in contact with the lower surface of the sliding plate 4.

[0030] In order to prevent the slide plate 4 from moving randomly on the support plate 2 when supporting the wafer placement box 3, a plurality of storage grooves 10 are evenly opened inside the end of the support plate 2 away from the storage rack 1. The number of the plurality of storage grooves 10 matches the number of the plurality of slide plates 4. A snap-fit assembly 11 is arranged inside the storage groove 10. A snap-fit groove 12 is opened on the lower surface of the slide plate 4. The top end of the snap-fit assembly 11 is located inside the snap-fit groove 12.

[0031] In order to facilitate the control of the slide plate 4 to drive the wafer placement box 3 to move outward, a push plate 14 is fixedly connected to the side of the rectangular limit frame 7 close to the storage rack 1, and a pop-up component 13 is arranged between the side of the push plate 14 away from the rectangular limit frame 7 and the inner wall of the storage rack 1.

[0032] The clamping assembly 11 includes: an L-shaped clamping strip 1101 located inside the storage slot 10, a first spring 1102 is elastically connected to the lower surface of the L-shaped clamping strip 1101, a top end of the L-shaped clamping strip 1101 is located inside the clamping slot 12, and a pressing plate 1103 is fixedly connected to one end of the L-shaped clamping strip 1101 away from the clamping slot 12;

[0033] Specifically, when the slide plate 4 is pushed into the storage rack 1, the L-shaped card strip 1101 can be controlled to move upward under the elastic force of the first spring 1102, and the top end of the L-shaped card strip 1101 can be inserted into the inside of the clamping groove 12, so as to limit the position between the support plate 2 and the slide plate 4, and prevent the slide plate 4 from moving freely on the support plate 2 when supporting the wafer placement box 3. When it is necessary to control the movement of the slide plate 4, the operator can control the pressing plate 1103 to press downward. When the pressing plate 1103 is pressed, the L-shaped card strip 1101 can be controlled to move downward. When the L-shaped card strip 1101 moves downward, the first spring 1102 can be squeezed to contract, and at the same time, the top end of the L-shaped card strip 1101 can be controlled to disengage from the clamping groove 12.

[0034] The pop-up assembly 13 includes: a limiting tube 1301 fixedly connected to the inner wall of the storage rack 1, a limiting rod 1302 slidably connected to the inner wall of the limiting tube 1301, an end of the limiting rod 1302 away from the limiting tube 1301 is fixedly connected to one side of the push plate 14, and a second spring 1303 is arranged on the outside of the limiting tube 1301 and the limiting rod 1302, and the second spring 1303 is supported between the inner wall of the storage rack 1 and the push plate 14.

[0035] Specifically, when the clamping component 11 is separated from the clamping groove 12, under the elastic force of the second spring 1303, the rectangular limiting frame 7 can drive the sliding plate 4 to slide outward, facilitating the operator to take the wafer placement box 3 placed on the sliding plate 4. Meanwhile, when the rectangular limiting frame 7 moves under the action of the elastic force, the extension tube 1301 and the limiting rod 1302 can extend. Through the cooperation between the extension tube 1301, the limiting rod 1302 and the push plate 14, the movement of the rectangular limiting frame 7 can be guided, enhancing the stability of the rectangular limiting frame 7.

[0036] Brief description of the usage process:

[0037] During use:

[0038] Process step 1, wafer loading: Carefully place the wafers one by one into the wafer placement box 3, and place the multiple wafer placement boxes 3 loaded with wafers into the rectangular limiting frames 7 on different sliding plates 4 respectively, thus completing the wafer loading.

[0039] Process step 2, wafer storage: Push the sliding plate 4 together with the wafer placement box 3 into the storage rack 1. While pushing the sliding plate 4, the rectangular limiting frame 7 can squeeze the ejection component 13 to contract. After the sliding plate 4 is completely pushed in, the L-shaped clamping strip 1101 will move upward under the elastic force of the first spring 1102 and insert into the clamping groove 12, thus fixing the position of the sliding plate 4 and preventing it from moving randomly on the support plate 2, and completing the wafer storage.

[0040] Process step 3, wafer retrieval: The operator presses the pressing plate 1103 to control the L-shaped clamping strip 1101 to move downward and disengage from the clamping groove 12. At this time, the sliding plate 4 is no longer fixed. Under the elastic force of the second spring 1303, the sliding plate 4 can drive the wafer placement box 3 to slide outward and move to the outside of the storage rack 1. The operator can conveniently remove the wafer placement box 3 from the sliding plate 4 without worrying about accidentally touching and causing other wafer placement boxes 3 to fall.

[0041] Through the operations of process step 1, process step 2, and process step 3, the wafers can be well protected during storage and retrieval, reducing production losses caused by wafer damage and improving safety at the same time.

[0042] This specific embodiment is only an explanation of the present invention, and it is not a limitation of the present invention. After reading this specification, those skilled in the art can make modifications to this embodiment without creative contributions as needed, but as long as it is within the scope of the claims of the present invention, it is protected by the patent law.

Claims

1. A wafer storage bracket, comprising: Storage rack (1); characterized in that: a plurality of support plates (2) are uniformly and fixedly connected to the inner wall of the storage rack (1), and a plurality of wafer placement boxes (3) are uniformly placed on the support plates (2); A plurality of sliding plates (4) are respectively movably arranged on the upper surfaces of the plurality of support plates (2), and each sliding plate (4) is correspondingly arranged on the lower surface of each wafer placement box (3) for supporting the wafer placement box (3); and A plurality of guide rods (5), each guide rod (5) is respectively correspondingly arranged inside each sliding plate (4), and one end of the guide rod (5) is fixedly connected to the inner wall of the storage rack (1).

2. The wafer storage bracket according to claim 1, wherein: A limiting block (6) is fixedly connected to the end of the guide rod (5) away from the storage rack (1), and the limiting block (6) is located inside the sliding plate (4).

3. A wafer storage bracket according to claim 1, characterized in that: A rectangular limiting frame (7) is fixedly connected to the upper surface of the sliding plate (4), and the wafer placement box (3) is located inside the rectangular limiting frame (7).

4. The wafer storage bracket according to claim 1, wherein: A plurality of placement holes (8) are uniformly formed in the upper surface of the support plate (2), a ball (9) is arranged inside the placement hole (8), and one side of the ball (9) away from the placement hole (8) is in contact with the lower surface of the sliding plate (4).

5. A wafer storage bracket according to claim 1, characterized in that: A plurality of placement grooves (10) are uniformly formed inside one end of the support plate (2) away from the storage rack (1), the number of the plurality of placement grooves (10) matches the number of the plurality of sliding plates (4), a clamping component (11) is arranged inside the placement groove (10), a clamping groove (12) is formed in the lower surface of the sliding plate (4), and the top end of the clamping component (11) is located inside the clamping groove (12).

6. The wafer storage bracket according to claim 3, wherein: A push plate (14) is fixedly connected to one side of the rectangular limiting frame (7) close to the storage rack (1), and a pop-up component (13) is arranged between one side of the push plate (14) away from the rectangular limiting frame (7) and the inner wall of the storage rack (1).

7. A wafer storage bracket according to claim 5, characterized in that: The clamping component (11) includes: an L-shaped clamping bar (1101) located inside the placement groove (10), a first spring (1102) is elastically connected to the lower surface of the L-shaped clamping bar (1101), the top end of the L-shaped clamping bar (1101) is located inside the clamping groove (12), and one end of the L-shaped clamping bar (1101) away from the clamping groove (12) is fixedly connected to a pressing plate (1103).

8. The wafer storage bracket according to claim 6, wherein: The pop-up component (13) includes: a limiting tube (1301) fixedly connected to the inner wall of the storage rack (1), a limiting rod (1302) is slidably connected to the inner wall of the limiting tube (1301), one end of the limiting rod (1302) away from the limiting tube (1301) is fixedly connected to one side of the push plate (14), and a second spring (1303) is arranged outside the limiting tube (1301) and the limiting rod (1302), and the second spring (1303) supports between the inner wall of the storage rack (1) and the push plate (14).

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