Wear-resistant basket storage jig

Abstract

The utility model relates to the technical field of semiconductor processing equipment, in particular to an anti-abrasion basket storage jig which comprises a basket body, a plurality of fixing grooves are formed in the left side wall and the right side wall in the basket body, and partition plates are installed in the fixing grooves. Two threaded grooves which are distributed front and back are formed in the sides, close to the fixing grooves, of the partition plates, mounting grooves corresponding to the multiple fixing grooves are formed in the left side wall and the right side wall of the lifting basket body correspondingly, and two threaded holes which are distributed front and back and communicate with the fixing grooves are formed in the inner side walls of the mounting grooves in a penetrating mode correspondingly. The wafers can be respectively inserted and placed between the upper and lower adjacent partition plates, and the partition plates are made of ceramic materials, smooth in surface, good in wear resistance, capable of preventing dust (particulate matters) from being generated, capable of effectively achieving an anti-wear effect, capable of avoiding product damage and convenient to install.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing equipment, and specifically relates to a wear-resistant basket storage fixture. Background Art

[0002] The uses of a wafer basket mainly include the transportation and storage of wafers. A wafer basket, also known as a wafer cassette or wafer frame, is a special tool used for transporting and storing wafers in the semiconductor manufacturing industry. These baskets are usually used in processes such as wafer cutting, scribing, die bonding, and thinning lapping to ensure the safety and protection of wafers during processing. The design of the wafer basket takes into account the protection and fixation of wafers to prevent slipping or damage during processing.

[0003] Currently, the structure of the basket is made of metal. Usually, when inserting a wafer into the slot of the basket, during the process of taking out and inserting the wafer multiple times, the wafer is likely to rub against the slot on the inner wall of the basket, generating dust (metal particles). The dust (metal particles) is likely to fall on the wafers stored in the basket, resulting in damage to the products. Content of the Utility Model

[0004] The purpose of the utility model is to provide a wear-resistant basket storage fixture, which has the characteristics that when placing wafers, the wafers can be respectively inserted and placed between two adjacent upper and lower partitions. Since the partitions are made of ceramic material, the surface is smooth and has good wear resistance, preventing the generation of dust (particles), effectively achieving the wear-resistant effect, avoiding damage to the products, and facilitating the installation of the partitions.

[0005] To achieve the above purpose, the utility model provides the following technical solution: a wear-resistant basket storage fixture, including a basket body. On both the left and right side walls inside the basket body, a plurality of fixing grooves are opened. Inside the fixing grooves, partitions are installed. On one side of the partition close to the fixing groove, two threaded grooves are opened in the front and back distribution.

[0006] On both the left and right side walls of the basket body, installation grooves corresponding to the plurality of fixing grooves are opened respectively. On the inner side walls of the installation grooves, two threaded holes are penetrated and opened in the front and back distribution and communicated with the fixing grooves.

[0007] In order to facilitate fixing the partition inside the fixing groove, as a preferred embodiment of the wear-resistant basket storage fixture of the utility model, bolts are installed inside the threaded holes.

[0008] In order to facilitate screwing the bolts into the threaded grooves, as a preferred embodiment of the wear-resistant basket storage fixture of the utility model, the positions of the threaded grooves and the threaded holes correspond to each other.

[0009] For the convenience of placing the processed articles between two adjacent upper and lower partitions, as an optimized anti-wear basket storage fixture of the present utility model, the partition is made of ceramic material and is in an "L" shape.

[0010] For the convenience of picking up the basket body, as an optimized anti-wear basket storage fixture of the present utility model, a handle is installed at the top of the basket body.

[0011] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0012] When the present utility model is in use, by installing the partition in the fixing groove, and then screwing the bolt into the corresponding threaded hole and threaded groove, the partition can be fixed in the fixing groove, so that the partition can be installed in sequence. When placing the wafers, the wafers can be inserted and placed between two adjacent upper and lower partitions respectively. Since the partition is made of ceramic material, the surface is smooth and has good wear resistance, which can prevent the generation of dust (particles), effectively achieve the anti-wear effect, and avoid damaging the products. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 is the overall structure diagram of the present utility model;

[0014] Figure 2 is the sectional structure diagram of the present utility model;

[0015] Figure 3 is the Figure 2 split structure diagram of the present utility model.

[0016] In the figure: 1. Basket body; 101. Handle; 2. Fixing groove; 3. Partition; 301. Threaded groove; 4. Installation groove; 5. Threaded hole; 6. Bolt. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0017] Please refer to Figures 1 to 3 , an anti-wear basket storage fixture, including a basket body 1. A plurality of fixing grooves 2 are provided on the left and right side walls inside the basket body 1. A partition 3 is installed inside the fixing groove 2. Two front and rear distributed threaded grooves 301 are provided on the side of the partition 3 close to the fixing groove 2;

[0018] Installation grooves 4 corresponding to a plurality of fixing grooves 2 are provided on the left and right side walls of the basket body 1 respectively. Two front and rear distributed threaded holes 5 communicating with the fixing grooves 2 are penetrated through the inner side walls of the installation grooves 4.

[0019] In this embodiment: When in use, by installing the partition plate 3 inside the fixing groove 2, and then screwing the bolt 6 into the corresponding threaded hole 5 and threaded groove 301, the partition plate 3 can be fixed inside the fixing groove 2, thereby facilitating the installation of the partition plate 3 in sequence. When placing the wafer, the wafer can be inserted and placed between two adjacent upper and lower partition plates 3 respectively. Since the partition plate 3 is made of ceramic material, the surface is smooth and has good wear resistance, preventing the generation of dust (particulates), and can effectively play the role of anti-wear and avoid damaging the product.

[0020] As a technical optimization scheme of the present utility model, a bolt 6 is installed inside the threaded hole 5.

[0021] In this embodiment: Through the bolt 6, it is convenient to fix the partition plate 3 inside the fixing groove 2.

[0022] As a technical optimization scheme of the present utility model, the position of the threaded groove 301 corresponds to that of the threaded hole 5.

[0023] In this embodiment: By setting the positions of the threaded groove 301 and the threaded hole 5 to correspond to each other, it is convenient to screw the bolt 6 into the inside of the threaded groove 301.

[0024] As a technical optimization scheme of the present utility model, the partition plate 3 is made of ceramic material and is in an "L" shape.

[0025] In this embodiment: By setting the partition plate 3 to be made of ceramic material and in an "L" shape, the wear resistance of the partition plate 3 is increased, and it is convenient to place the processed items between the upper and lower partition plates 3.

[0026] As a technical optimization scheme of the present utility model, a handle 101 is installed on the top of the basket body 1.

[0027] In this embodiment: By setting the handle 101, it is convenient to pick up the basket body 1.

[0028] Working principle: First, when using this device, install multiple partition plates 3 in sequence. The specific operation is to install the partition plate 3 inside the fixing groove 2, and then screw the bolt 6 into the corresponding threaded hole 5 and threaded groove 301 to fix the partition plate 3 inside the fixing groove 2. Then install the other partition plates 3 in sequence according to the above steps. When placing the wafer, the wafer can be inserted and placed between two adjacent upper and lower partition plates 3 respectively. Since the partition plate 3 is made of ceramic material, the surface is smooth and has good wear resistance, which can effectively play the role of anti-wear, prevent the generation of dust (particulates), avoid damaging the product, and the partition plate 3 is fixed by the bolt 6, which is convenient for the installation and disassembly of the partition plate 3.

[0029] The above are only the preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. A wear-resistant basket storage fixture, comprising a basket body (1), characterized in that: A plurality of fixing grooves (2) are formed in the left and right side walls inside the basket body (1). A partition plate (3) is installed inside the fixing groove (2). Two threaded grooves (301) distributed front and back are formed on the side of the partition plate (3) close to the fixing groove (2). Mounting grooves (4) corresponding to the plurality of fixing grooves (2) are formed in the left and right side walls of the basket body (1). Two threaded holes (5) distributed front and back and communicating with the fixing groove (2) are formed through the inner side walls of the mounting grooves (4).

2. The anti-wear basket storage fixture according to claim 1, wherein: A bolt (6) is installed inside the threaded hole (5).

3. The anti-wear basket storage fixture according to claim 1, characterized in that: The positions of the threaded groove (301) and the threaded hole (5) correspond to each other.

4. The anti-wear basket storage fixture according to claim 1, characterized in that: The partition plate (3) is made of ceramic material and is in an "L" shape.

5. The anti-wear basket storage fixture according to claim 1, wherein: A handle (101) is installed at the top of the basket body (1).

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