Connecting rod opening and closing type turnover device for ceramic plates for semiconductor loading

Abstract

The utility model discloses a connecting rod opening and closing type turnover device of a ceramic plate for semiconductor loading, which comprises a device frame, a connecting rod, a connecting rod and a connecting rod, the mounting side plate is positioned on the inner side of the device frame, and a plurality of supporting rods for supporting and positioning the ceramic plate are arranged on the inner side of the mounting side plate; the connecting rod structure comprises a rotating shaft rotationally arranged on the edge of the device frame, a connecting piece positioned on the side face of the rotating shaft, a pull rod and a push rod, the pull rod and the push rod are positioned at the end of the connecting piece, the connecting piece comprises a first connecting plate connected with the rotating shaft and a second connecting plate elastically hinged to the first connecting plate, and the pull rod is connected to the first connecting plate; the push rod is connected with the second connecting plate and located on the inner side of the device frame, and during loading, the ceramic plate is located between the pull rod and the push rod. The utility model can solve the problems that the manual loading and moving efficiency of ceramic plates on a common turnover device is low, the positioning stability is insufficient, and the turnover device is easy to shake under the action of inertia when moving.

Description

Technical Field

[0001] The utility model relates to the technical field of turnover devices, and specifically relates to a link opening and closing type turnover device for a ceramic tray used for semiconductor loading. Background Art

[0002] Semiconductor objects, such as ceramic trays, are heavy and fragile. When loading and removing them on common turnover devices, it is necessary to manually push them one by one, resulting in low efficiency and insufficient positioning stability. When the turnover device moves, they are prone to shaking under the action of inertia. Summary of the Utility Model

[0003] The purpose of the utility model is to provide a link opening and closing type turnover device for a ceramic tray used for semiconductor loading to solve the problems of low efficiency of manual loading and removing of ceramic trays on common turnover devices, insufficient positioning stability, and easy shaking under the action of inertia when the turnover device moves.

[0004] To achieve the above purpose, the utility model adopts the following technical scheme: A link opening and closing type turnover device for a ceramic tray used for semiconductor loading, comprising:

[0005] A device frame, with moving wheels arranged at its bottom;

[0006] Mounting side plates, positioned inside the device frame, with several support rods arranged inside them. The support rods at the same height support and position the ceramic tray.

[0007] A link structure, including a rotating shaft rotatably arranged at the edge of the device frame, a connecting piece positioned on the side of the rotating shaft, a pull rod and a push rod positioned at the end of the connecting piece. The connecting piece includes a first connecting plate connecting the rotating shaft and a second connecting plate elastically hinged on the first connecting plate. The pull rod is connected to the first connecting plate and is located at the inlet and outlet of the device frame. The push rod is connected to the second connecting plate and is located inside the device frame. During loading, the ceramic tray is located between the pull rod and the push rod.

[0008] As a further description of the above technical scheme:

[0009] Several of the support rods are arranged in a matrix on the mounting side plates.

[0010] As a further description of the above technical scheme:

[0011] A first socket is arranged inside the device frame and is sleeved on the rotating shaft for axial positioning.

[0012] As a further description of the above technical scheme:

[0013] The first connecting plate is U-shaped, and the second connecting plate is connected to the first connecting plate by a tension spring or a torsion spring.

[0014] As a further description of the above technical solution:

[0015] The top of the rotating shaft is arranged on the second socket on the top surface of the device frame, and its top end is positioned on the swing plate. A positioning member is arranged on the swing plate. The positioning member is a pin or a bolt, and a positioning plate for docking and positioning with the positioning member is arranged on the top surface of the device frame.

[0016] As a further description of the above technical solution:

[0017] A U-shaped backing plate for supporting and positioning the end of the push rod is arranged on the inner plate inside the device frame.

[0018] In summary, due to the adoption of the above technical solution, the present utility model has the following

[0019] Beneficial effects:

[0020] The turnover device of the present utility model adopts a link opening and closing design. Through the link structure, the opening and closing of the ceramic disk placement area inside the turnover device, the full pushing out and pushing in of the ceramic disk can be realized, improving its loading, removal and use efficiency, and the clamping and positioning of the ceramic disk inside the turnover device is stable. Description of the Drawings

[0021] In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the following will briefly introduce the drawings required to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the present utility model, and therefore should not be regarded as limiting the scope. For those of ordinary skill in the art, without creative efforts, other relevant drawings can also be obtained based on these drawings.

[0022] Figure 1 It is a schematic structural diagram of a link opening and closing turnover device for a ceramic disk used in semiconductor loading.

[0023] Figure 2 It is a top view of the link structure in the first use state of a link opening and closing turnover device for a ceramic disk used in semiconductor loading.

[0024] Figure 3 It is a top view of the link structure in the second use state of a link opening and closing turnover device for a ceramic disk used in semiconductor loading.

[0025] Legend Explanation:

[0026] 1. Device frame; 2. Movable wheels; 3. Installation side plates; 4. Support rods; 5. Rotating shafts; 6. Connecting parts; 61. First connecting plates; 62. Second connecting plates; 63. Tension springs; 7. Tie rods; 8. Push rods; 9. First socket seats; 10. Ceramic plates; 11. Second socket seats; 12. Swing plates; 13. Positioning parts; 14. Positioning plates; 15. Inner plates; 16. U-shaped backing plates. Detailed implementation manners

[0027] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0028] In the description of the present invention, it should be understood that the orientation or positional relationships indicated by the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc. are based on the orientation or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention.

[0029] Please refer to Figures 1-3 , the present invention provides a technical solution: a connecting rod opening and closing turnover device for a ceramic plate used in semiconductor loading, including:

[0030] A device frame 1, with movable wheels 2 provided at its bottom;

[0031] Installation side plates 3, positioned inside the device frame 1, and several support rods 4 are provided inside them. The support rods 4 at the same height support and position the ceramic plate 10.

[0032] A connecting rod structure, including a rotating shaft 5 rotatably provided at the edge of the device frame 1, a connecting part 6 positioned on the side of the rotating shaft 5, a tie rod 7 and a push rod 8 positioned at the end of the connecting part 6. The connecting part 6 includes a first connecting plate 61 connecting the rotating shaft 5 and a second connecting plate 62 elastically hinged on the first connecting plate 61. The tie rod 7 is connected to the first connecting plate 61 and is located at the inlet and outlet of the device frame 1. The push rod 8 is connected to the second connecting plate 62 and is located inside the device frame 1. During loading, the ceramic plate 10 is located between the tie rod 7 and the push rod 8. Through the above design of the connecting rod structure, when the tie rod 7 is pulled, the push rod 8 can push all the ceramic plates 10 in the turnover device out, improving the transfer and placement efficiency of the ceramic plates 10.

[0033] A plurality of the support rods 4 are arranged on the mounting side plate 3 in a matrix shape, improving the support and positioning stability during the loading of the ceramic disc 10.

[0034] A first socket 9 sleeved with and axially positioned with the rotating shaft 5 is arranged in the device frame 1, improving the rotation stability of the rotating shaft 5 to ensure the stability of the use of the connecting rod structure.

[0035] The first connecting plate 61 is U-shaped, and the second connecting plate 62 is connected to the first connecting plate 61 through a tension spring 63 or a torsion spring.

[0036] To avoid the shaking of the ceramic disc 10 on the turnover device during loading, the top of the rotating shaft 5 penetrates through a second socket 11 on the top surface of the device frame 1, and its top end is positioned on the swing plate 12. A positioning member 13 is arranged on the swing plate 12. The positioning member 13 is a pin or a bolt, and a positioning plate 14 for docking and positioning with the positioning member 13 is arranged on the top surface of the device frame 1. The above structure is used for the positioning of the rotating shaft 5 after the connecting rod structure is pressed in and the ceramic disc 10 is loaded, thereby realizing the overall positioning of the connecting rod structure.

[0037] A U-shaped backing plate 16 for supporting and positioning the end of the push rod 8 is arranged on the inner plate 15 inside the device frame 1 to support and position the push rod 8 after the connecting rod structure is pressed in.

[0038] The working principle of a connecting rod opening and closing type turnover device for a semiconductor loading ceramic disc in this embodiment includes: when it is necessary to remove the ceramic disc 10 in the turnover device, pull the pull rod 7, which synchronously drives the connecting member 6 to rotate. The connecting member 6 synchronously pulls the push rod 8, and the push rod 8 pushes the ceramic disc 10 outwards. The support rod 4 guides it. During this period, the connecting member 6 undergoes structural self-adaptation synchronous with the pushing process of the ceramic disc 10 through an elastic hinge design. Thus, by pulling the pull rod 7, the overall removal of the ceramic disc 10 in the turnover device is realized. When there is no obstruction for the pull rod 7 to remove the ceramic disc 10, position the positioning member 13 on the positioning plate 14 to realize the positioning of the connecting rod structure. Then, the ceramic disc 10 can be removed and placed. When the connecting rod structure is closed, loosen the positioning member 13 and push the pull rod 7 inwards, so that the connecting member 6 is linked. The pull rod 7 and the push rod 8 elastically clamp the ceramic disc 10, and the pull rod 7 pushes it into the turnover device. The push rod 8 moves inwards and abuts and is positioned on the U-shaped backing plate 16, and re-position the positioning member 13, that is, complete the locking of the connecting rod structure.

[0039] In summary, due to the adoption of the above technical solutions, a connecting rod opening and closing type turnover device for a semiconductor loading ceramic disc in this embodiment has the following beneficial effects compared with the prior art:

[0040] The turnover device of the present utility model adopts a connecting rod opening and closing design. Through the connecting rod structure, the opening and closing of the ceramic plate placement area inside the turnover device, as well as the full pushing out and pushing in of the ceramic plate, can be realized, improving its loading, removal and use efficiency, and the clamping and positioning of the ceramic plate inside the turnover device is stable.

[0041] The above are only the preferred specific embodiments of the present utility model, but the protection scope of the present utility model is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present utility model, according to the technical solution and the inventive concept of the present utility model, makes equivalent substitutions or changes, and should be covered within the protection scope of the present utility model.

Claims

1. A connecting rod opening and closing type turnover device for a ceramic disk used for semiconductor loading, characterized in that, Comprising: A device frame with moving wheels provided at its bottom; Mounting side plates positioned inside the device frame, with several support rods provided on the inner side thereof, and the support rods at the same height support and position the ceramic plates; A connecting rod structure, including a rotating shaft rotatably provided at the edge of the device frame, a connecting member positioned on the side of the rotating shaft, a pull rod and a push rod positioned at the end of the connecting member, the connecting member includes a first connecting plate connecting the rotating shaft and a second connecting plate elastically hinged to the first connecting plate, the pull rod is connected to the first connecting plate and is located at the inlet and outlet of the device frame, the push rod is connected to the second connecting plate and is located inside the device frame, and during loading, the ceramic plate is located between the pull rod and the push rod.

2. The link opening and closing turnover device for a ceramic disk used in semiconductor loading according to claim 1, wherein, Several of the support rods are arranged in a matrix on the mounting side plates.

3. The link-opening and closing turnover device for a ceramic disk used in semiconductor loading according to claim 1, wherein, A first socket sleeved with and axially positioned with the rotating shaft is provided inside the device frame.

4. The link opening and closing turnover device for a ceramic disc used in semiconductor loading according to claim 1, characterized in that, The first connecting plate is U-shaped, and the second connecting plate is connected to the first connecting plate by a tension spring or a torsion spring.

5. A link-opening and closing type turnover device for a ceramic disk used in semiconductor loading, characterized in that, The top of the rotating shaft penetrates through a second socket on the top surface of the device frame, and its top end is positioned on a swing plate, a positioning member is provided on the swing plate, the positioning member is a pin or a bolt, and a positioning plate for docking and positioning with the positioning member is provided on the top surface of the device frame.

6. The link opening and closing type turnover device for a ceramic disk used in semiconductor loading according to claim 1, characterized in that, A U-shaped backing plate for supporting and positioning the end of the push rod is provided on the inner plate inside the device frame.

Images