Material box carrying device and feeding and discharging equipment

Abstract

The utility model relates to the technical field of semiconductors and photovoltaics, in particular to a material box carrying device and feeding and discharging equipment, and solves the problem that a material box with a box body and a cover plate cannot be conveniently and rapidly carried in the related technology. The material box carrying device comprises a fixing frame. The material box carrying mechanism is connected to the fixing frame in a sliding mode and is configured to carry material boxes; the first driving mechanism can drive the material box carrying mechanism to act so as to carry at least one of the raw material box, the clinker box and the empty material box to the first work station or the second work station, and the cover plate carrying mechanism is slidably connected to the fixing frame and is configured to carry a cover plate; and the second driving mechanism can drive the cover plate carrying mechanism to act so as to cover the cover plate on the box body or carry the cover plate away from the box body. According to the material box carrying device and the feeding and discharging equipment, the raw material box, the clinker box and the empty material box can be conveniently and rapidly carried in a crossed mode, and the carrying efficiency is improved.

Description

Technical Field

[0001] The present disclosure relates to the fields of semiconductor and photovoltaic technologies, and particularly to a cassette handling device and a loading and unloading device. Background Art

[0002] Currently, during the production of solar cells, the laser scribing method is used to divide the solar cells into two halves. The cross-section is the cross-section of an unpassivated silicon wafer. Due to the increased recombination at the cross-section edge of the half-cell, the conversion efficiency will be reduced by 0.2 - 0.3%. After laser scribing, the efficiency will be reduced even more. The reduction in the efficiency of the solar cells caused by the above cutting will directly lead to a reduction in the power of the modules made from the sliced cells. Therefore, it is necessary to perform passivation coating on the cut part. In the passivation coating process, the sliced silicon wafers need to be loaded into a cassette and then enter the passivation equipment. For the sliced silicon wafers, the conventional cassette will be adjusted to a drawer-type cassette with a box body and a cover plate. The existing manipulators for handling cassettes cannot meet the requirements of convenient and fast handling. Summary of the Utility Model

[0003] In view of this, embodiments of the present disclosure provide a cassette handling device and a loading and unloading device to solve the problem in the related art that it is impossible to conveniently and quickly handle a cassette with a box body and a cover plate.

[0004] In a first aspect, an embodiment of the present disclosure provides a cassette handling device applied to a loading and unloading device. The loading and unloading device has at least a first working position and a second working position arranged along a first direction. The cassette handling device is configured to at least be able to handle a cassette between the first working position and the second working position. Among them, the cassette includes a green cassette loaded with sheets before the process, a baked cassette loaded with sheets after the process, and an empty cassette not loaded with sheets, and the cassette has a box body and a cover plate. The cassette handling device includes: a fixed frame arranged along the first direction; a cassette handling mechanism slidably connected to the fixed frame, and the cassette handling mechanism is configured to handle the cassette; a first driving mechanism connected to the cassette handling mechanism, and the first driving mechanism can drive the cassette handling mechanism to act to handle at least one of the green cassette, the baked cassette, and the empty cassette to the first working position or the second working position; a cover plate handling mechanism slidably connected to the fixed frame, and the cover plate handling mechanism is configured to handle the cover plate; a second driving mechanism connected to the cover plate handling mechanism, and the second driving mechanism can drive the cover plate handling mechanism to act to cover the cover plate on the box body, or to remove the cover plate from the box body.

[0005] In some embodiments, the cartridge handling mechanism includes: a first sub-handling mechanism slidably connected to one side of the fixed frame, the first sub-handling mechanism being configured to handle the cooked material cartridge or the raw material cartridge; a second sub-handling mechanism slidably connected to one side of the fixed frame, and the first sub-handling mechanism and the second sub-handling mechanism are oppositely arranged in the second direction, the second direction being perpendicular to the first direction, the second sub-handling mechanism being configured to handle the empty cartridge, the cooked material cartridge or the raw material cartridge; a first driving mechanism respectively connected to the first sub-handling mechanism and the second sub-handling mechanism, the first driving mechanism being capable of driving the first sub-handling mechanism and the second sub-handling mechanism to act, so that the second sub-handling mechanism can handle the empty cartridge without a cover plate to the second working position, or remove the cooked material cartridge without a cover plate from the second working position, or handle the raw material cartridge without a cover plate to the second working position; the first sub-handling mechanism can handle the cooked material cartridge with a cover plate to the second working position, or remove the raw material cartridge with a cover plate from the second working position, or remove the cooked material cartridge without a cover plate from the second working position.

[0006] In some embodiments, the cover plate handling mechanism is located between the first sub-handling mechanism and the second sub-handling mechanism in the second direction. The cartridge handling device further includes: a first buffer mechanism located on one side of the cover plate handling mechanism in the first direction, the first buffer mechanism being configured to buffer the cover plates, and the cover plate handling mechanism can handle the cover plates from the first buffer mechanism to the second working position to cover the raw material cartridge, or handle the cover plate covering the cooked material cartridge in the second working position to the first buffer mechanism for buffering.

[0007] In some embodiments, the loading and unloading device further includes a third working position, and in the first direction, the third working position is located between the first working position and the second working position. The cartridge handling device includes: a second buffer mechanism located at the third working position and disposed on one side of the fixed frame, the second buffer mechanism being configured to buffer the raw material cartridge with a cover plate, and the first sub-handling mechanism can handle the raw material cartridge with a cover plate from the second working position to the second buffer mechanism for buffering; and / or, the second buffer mechanism is configured to buffer the cooked material cartridge with a cover plate, and the first sub-handling mechanism can handle the cooked material cartridge with a cover plate from the second buffer mechanism to the second working position.

[0008] In some embodiments, the fixing frame is provided with a first slide rail and a second slide rail extending in a first direction, and the first slide rail and the second slide rail are disposed on both sides of the fixing frame in a second direction. The first sub-carrying mechanism includes: a first slide table slidably connected to the first slide rail; a first lifting assembly connected to the first slide table; and a first clamping assembly connected to the first lifting assembly, the first clamping assembly being configured to clamp the box body. The second sub-carrying mechanism includes: a second slide table slidably connected to the second slide rail, and the second slide table and the first slide table are arranged in a staggered manner in the first direction; a second lifting assembly connected to the second slide table; and a second clamping assembly connected to the second lifting assembly, the second clamping assembly being configured to clamp the box body. The first driving mechanism includes: a first driving member respectively connected to the first slide table and the second slide table, the first driving member being configured to drive the first slide table and the second slide table to move in the first direction respectively, so as to actuate the first sub-carrying mechanism and the second sub-carrying mechanism; a second driving member connected to the first lifting assembly, the second driving member being configured to drive the first lifting assembly to actuate to drive the first clamping assembly to move in the vertical direction; and a third driving member connected to the second lifting assembly, the third driving member being configured to drive the second lifting assembly to actuate to drive the second clamping assembly to move in the vertical direction.

[0009] In some embodiments, a first rack and a second rack extending in the first direction are respectively provided on both sides of the fixing frame in the second direction. The first driving member includes: a first gear rotatably connected to the first slide table, the first gear meshing with the first rack; a first driving portion connected to the first slide table, an output end of the first driving portion being connected to the first gear, the first driving portion being capable of driving the first gear to rotate so as to drive the first slide table to move along the extending direction of the first rack; a second gear rotatably connected to the second slide table, the second gear meshing with the second rack; and a second driving portion connected to the second slide table, an output end of the second driving portion being connected to the second gear, the second driving portion being capable of driving the second gear to rotate so as to drive the second slide table to move along the extending direction of the second rack.

[0010] In some embodiments, the first slide table is provided with a third slide rail extending in the vertical direction. The first lifting assembly includes: a third slide table slidably connected to the third slide rail, the third slide table being connected to the second driving member; a first mounting seat fixedly connected to the third slide table, a side of the first mounting seat away from the fixing frame being connected to the first clamping assembly, and the second driving member being capable of driving the third slide table to move along the third slide rail; and / or, the second slide table is provided with a fourth slide rail extending in the vertical direction. The second lifting assembly includes: a fourth slide table slidably connected to the fourth slide rail, the fourth slide table being connected to the third driving member; a second mounting seat fixedly connected to the fourth slide table, a side of the second mounting seat away from the fixing frame being connected to the second clamping assembly, and the third driving member being capable of driving the fourth slide table to move along the fourth slide rail.

[0011] In some embodiments, the first clamping assembly includes: a first jaw disposed on a first mounting base; a second jaw disposed on the first mounting base, and the first jaw and the second jaw are spaced apart in a first direction; a first clamping driving member respectively connected to the first jaw and the second jaw, and the first clamping driving member is configured to drive at least one of the first jaw and the second jaw to move, so as to increase or decrease the distance between the first jaw and the second jaw; and / or, the second clamping assembly includes: a third jaw disposed on a second mounting base; a fourth jaw disposed on the second mounting base, and the third jaw and the fourth jaw are spaced apart in the first direction; a second clamping driving member respectively connected to the third jaw and the fourth jaw, and the second clamping driving member is configured to drive at least one of the third jaw and the fourth jaw to move, so as to increase or decrease the distance between the third jaw and the fourth jaw.

[0012] In some embodiments, the fixing frame is provided with a fifth slide rail extending in the first direction, and the cover plate handling mechanism includes: a fifth slide table slidably connected to the fifth slide rail; a third lifting assembly connected to the fifth slide table; a suction member connected to the third lifting assembly, and the suction member is configured to suck the cover plate; the second driving mechanism includes: a fourth driving member connected to the fifth slide table, and the fourth driving member is configured to drive the fifth slide table to slide relative to the fifth slide rail in the first direction; a fifth driving member connected to the third lifting assembly, and the fifth driving member is configured to drive the third lifting assembly to act to drive the suction member to move in the vertical direction.

[0013] In some embodiments, the fifth slide table is provided with a sixth slide rail extending in the vertical direction, and the third lifting assembly includes: a sixth slide table slidably connected to the sixth slide rail, and the sixth slide table is connected to the fifth driving member; a fixing plate fixedly connected to the sixth slide table, and the suction member is connected to a side of the fixing plate away from the fixing frame, and the fifth driving member can drive the sixth slide table to slide along the sixth slide rail to drive the suction member to move in the vertical direction.

[0014] In a second aspect, an embodiment of the present disclosure further provides a loading and unloading device, a cartridge loading and unloading device configured to carry a cartridge, the cartridge including at least one of an empty cartridge without loaded sheets, a green cartridge loaded with sheets before a process, and a fired cartridge loaded with sheets after a process, the cartridge loading and unloading device having a first working position; a carrying device disposed on one side of the cartridge loading and unloading device along the first direction, the carrying device being configured to carry at least one of a green cartridge, a fired cartridge, and an empty cartridge, the carrying device having a second working position; the cartridge handling device described in the above embodiments, configured to transport at least one of a green cartridge, a fired cartridge, and an empty cartridge to the first working position or the second working position.

[0015] A cartridge handling device and a loading and unloading device provided by an embodiment of the present disclosure drive a cartridge handling mechanism to act through a first driving mechanism provided, so as to transport a cartridge to a first working position or a second working position, and drive a cover plate handling mechanism to act through a second driving mechanism provided, so as to transport a cover plate to a corresponding working position to cover the box body of a green material cartridge or the box body of a clinker cartridge. Such a matching structure enables the cartridge handling mechanism and the cover plate handling mechanism to work independently of each other, so that the cartridge and the cover plate can be transported separately to meet the handling requirements under different conditions.

[0016] In addition, the first driving mechanism and the second driving mechanism can work separately, so that the cover plate can be transported while the cartridge is being transported, improving the handling efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] By describing the embodiments of the present disclosure in more detail in conjunction with the drawings, the above and other objects, features, and advantages of the present disclosure will become more obvious. The drawings are used to provide a further understanding of the embodiments of the present disclosure, and constitute a part of the specification. Together with the embodiments of the present disclosure, they are used to explain the present disclosure and do not constitute a limitation to the present disclosure. In the drawings, the same reference numerals generally represent the same components or steps.

[0018] Figure 1 The figure shows a schematic diagram of a loading and unloading device provided by an embodiment of the present disclosure.

[0019] Figure 2 The figure shows a schematic diagram of a loading and unloading device provided by another embodiment of the present disclosure.

[0020] Figure 3 The figure shows a schematic diagram of a loading and unloading device provided by another embodiment of the present disclosure.

[0021] Figure 4 The figure shows a schematic diagram of a cartridge handling device provided by an embodiment of the present disclosure.

[0022] Figure 5 The figure shows a schematic diagram of the cartridge handling device provided by an embodiment of the present disclosure transporting a cartridge.

[0023] Figure 6 The figure shows Figure 5 a partial enlarged view of area A in

[0024] Figure 7 The figure shows a schematic diagram of a second sub-handling mechanism in the cartridge handling device provided by an embodiment of the present disclosure.

[0025] Figure 8 The figure shows a schematic diagram of a first sub-handling mechanism in the cartridge handling device provided by an embodiment of the present disclosure.

[0026] Figure 9 The figure showsFigure 5 Partial enlarged view of area B.

[0027] Reference numerals:

[0028] 100, Loading and unloading equipment; 10a, First working position; 10b, Second working position; 10c, Third working position; 10, Magazine handling device; 101, First buffer mechanism; 102, Second buffer mechanism; 1, Fixed frame; 11, First slide rail; 12, Second slide rail; 13, Second rack; 14, First rack; 2, Magazine handling mechanism; 21, First sub-handling mechanism; 211, First slide table; 212, First lifting assembly; 213, First clamping assembly; 2131, First jaw; 2132, Second jaw; 2133, First clamping drive; 22, Second sub-handling mechanism; 221, Second slide table; 2211, Fourth slide rail; 222, Second lifting assembly; 2221, Fourth slide table; 2222, Second mounting seat; 223, Second clamping assembly; 2231, Third jaw; 2232, Second clamping drive; 3, Cover plate handling mechanism; 31, Third lifting assembly; 32, Suction attachment; 4, First drive mechanism; 41, First drive; 411, First gear; 412, First drive part; 42, Second drive; 43, Third drive; 5, Second drive mechanism; 51, Fourth drive; 20, Magazine loading and unloading device; 201, Magazine transport line; 202, Loading and unloading bearing mechanism; 30, Bearing device; 40, Pick-and-place device; 50, Magazine; 501, Box body; 502, Cover plate; X, First direction; Y, Second direction. Detailed implementation manners

[0029] Next, the technical solutions in the embodiments of the present disclosure will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present disclosure. Obviously, the described embodiments are only a part of the embodiments of the present disclosure, rather than all the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present disclosure.

[0030] Figure 1 The figure shows a schematic diagram of a loading and unloading equipment provided by an embodiment of the present disclosure. Figure 2 The figure shows a schematic diagram of a loading and unloading equipment provided by another embodiment of the present disclosure. Figure 3 The figure shows a schematic diagram of a loading and unloading equipment provided by another embodiment of the present disclosure. Figure 4 The figure shows a schematic diagram of a magazine handling device provided by an embodiment of the present disclosure. Among them, the direction indicated by arrow X is the first direction, and the direction indicated by arrow Y is the second direction. The first direction X and the second direction Y are perpendicular to each other in the horizontal plane.

[0031] The embodiments of the present disclosure provide a magazine handling device, asFigures 1 to 4 It is applied to the loading and unloading device 100. The loading and unloading device 100 has at least a first working position 10a and a second working position 10b arranged along the first direction X. The cassette handling device 10 is configured to be able to carry the cassette 50 between the first working position 10a and the second working position 10b.

[0032] The loading and unloading device 100 is used for loading and unloading to the passivation device so that the passivation device passivates and coats the process surface of the sheet. Specifically, the cassette 50 may include a green cassette loaded with sheets before the process, a fired cassette loaded with sheets after the process, and an empty cassette not loaded with sheets. The loading and unloading device 100 may have a first working position 10a and a second working position 10b arranged along the first direction X. The cassette handling device 10 is used to carry at least one of the empty cassette, the green cassette, and the fired cassette to the first working position 10a or the second working position 10b, so that the empty cassette can be loaded with sheets, or the green cassette can wait to be loaded and transported to the passivation device for the process, or the fired cassette after the process can be unloaded to the next process.

[0033] It can be understood that the passivation device can be used for passivating the cross-section of the sheet. Specifically, the sheet can be a solar cell wafer, and the solar cell wafer needs to be processed through different processes and finally become a usable solar cell product. The processing process of the solar cell wafer may include a laser scribing process. The laser scribing process is to use a laser scribing method to divide the solar cell wafer into two halves, forming two half-wafers. The cross-section of the half-wafer scribed by the laser is an unpassivated surface. At this time, the passivation device is required to passivate the cross-section of the half-wafer, so as to improve the field passivation effect and reduce the reflectivity. It should be emphasized that for the convenience of description, the half-wafer will be uniformly referred to as the "substrate" later, and will not be emphasized separately.

[0034] Based on the passivation of the substrate cross-section, the cassette 50 includes a cassette body 501 and a cover plate 502. The cover plate 502 covers the upper end of the cassette body 501, so that the cassette body 501 and the cover plate 502 enclose a receiving cavity for carrying the substrate, which is used to carry the substrate and expose the cross-section of the substrate from the receiving cavity for passivation coating.

[0035] The loading and unloading device 100 may further include a cassette loading and unloading device 20, a carrying device 30, and a pick-and-place device 40. The cassette loading and unloading device 20 is configured to carry at least one of an empty cassette, a green cassette, and a fired cassette. The cassette loading and unloading device 20 has a first working position 10a. The carrying device 30 is arranged on one side of the cassette loading and unloading device 20 along the first direction X and is configured to carry at least one of a green cassette, a fired cassette, and an empty cassette. The carrying device 30 has a second working position 10b. The pick-and-place device 40 may be located on one side of the carrying device 30 and is configured to load an unprocessed substrate into an empty cassette located at the second working position 10b to obtain a green cassette. Alternatively, the pick-and-place device 40 may be located on one side of the cassette loading and unloading device 20 and is configured to load an unprocessed substrate into an empty cassette at the first working position 10a.

[0036] The cassette loading and unloading device 20 may include a plurality of cassette transport lines 201 and a loading and unloading carrying mechanism 202 located on one side. The cassette transport line is used to input an empty cassette to the loading and unloading carrying mechanism 202, or to output a fired cassette from the loading and unloading carrying mechanism 202, or to input a green cassette to the loading and unloading carrying mechanism 202. The loading and unloading carrying mechanism 202 is configured to carry at least one of an empty cassette, a green cassette, and a fired cassette. The carrying device 30 and the loading and unloading carrying mechanism 202 are arranged along the first direction X. The cassette handling device 10 extends at least above the carrying device 30 and the loading and unloading carrying mechanism 202 at both ends in the first direction X. The cassette handling device 10 is configured to handle at least one of a green cassette, a fired cassette, and an empty cassette to the first working position 10a or the second working position 10b.

[0037] Among them, the cassette handling device 10 includes a fixed frame 1, a cassette handling mechanism 2, a first driving mechanism 4, a cover handling mechanism 3, and a second driving mechanism 5. The fixed frame 1 is arranged along the first direction X, and both ends of the fixed frame 1 extend at least above the loading and unloading carrying mechanism 202 and the carrying device 30 respectively. The cassette handling mechanism 2 is slidably connected to the fixed frame 1. The cassette handling mechanism 2 is configured to handle a cassette 50. The first driving mechanism 4 is connected to the cassette handling mechanism 2. The first driving mechanism 4 can drive the cassette handling mechanism 2 to move so as to handle at least one of a green cassette, a fired cassette, and an empty cassette to the first working position 10a or the second working position 10b. The cover handling mechanism 3 is slidably connected to the fixed frame 1. The cover handling mechanism 3 is configured to handle a cover 502. The second driving mechanism 5 is connected to the cover handling mechanism 3. The second driving mechanism 5 can drive the cover handling mechanism 3 to move so as to cover the cover 502 on the box body 501, or to remove the cover 502 from the box body 501.

[0038] It should be emphasized that the first driving mechanism 4 and the second driving mechanism 5 can work simultaneously, so that the cartridge handling mechanism 2 and the cover handling mechanism 3 can reciprocate between the first working position 10a and the second working position 10b along the first direction X simultaneously.

[0039] It can be understood that the fixing frame 1 can be, for example, a gantry structure formed by welding. The gantry has a transverse bracket extending along the first direction X so as to be able to span above the loading and unloading carrier mechanism 202 and the carrying device 30. The cartridge handling mechanism 2 and the cover handling mechanism 3 can slide along the first direction X to above the corresponding working positions to handle the cartridge 50 and the cover 502 respectively. The specific cooperation structure of the gantry can be adjusted adaptively according to the actual situation and is not specifically limited.

[0040] The cartridge handling device 10 provided by the embodiment of the present disclosure drives the cartridge handling mechanism 2 to act through the provided first driving mechanism 4 to transport the cartridge 50 to the first working position 10a or the second working position 10b, and drives the cover handling mechanism 3 to act through the provided second driving mechanism 5 to transport the cover 502 to the corresponding working position to cover the box body 501 of the raw material cartridge and the box body 501 of the clinker cartridge. Such a cooperation structure enables the cartridge handling mechanism 2 and the cover handling mechanism 3 to work independently of each other, so that the cartridge 50 and the cover 502 can be transported respectively to meet the handling requirements under different conditions.

[0041] In addition, the first driving mechanism 4 and the second driving mechanism 5 can work separately, so that the cover 502 can be transported while the cartridge 50 is being transported, improving the handling efficiency.

[0042] In some embodiments, the cartridge handling mechanism 2 includes a first sub-handling mechanism 21 and a second sub-handling mechanism 22. The first sub-handling mechanism 21 is slidably connected to one side of the fixed frame 1 and is configured to handle the cooked material cartridge or the raw material cartridge. The second sub-handling mechanism 22 is slidably connected to one side of the fixed frame 1, and the first sub-handling mechanism 21 and the second sub-handling mechanism 22 are disposed opposite to each other in the second direction Y, where the second direction Y is perpendicular to the first direction X. The second sub-handling mechanism 22 is configured to handle the empty cartridge, the cooked material cartridge or the raw material cartridge. The first driving mechanism 4 is respectively connected to the first sub-handling mechanism 21 and the second sub-handling mechanism 22. The first driving mechanism 4 can drive the first sub-handling mechanism 21 and the second sub-handling mechanism 22 to act, so that the second sub-handling mechanism 22 can handle the empty cartridge without the cover plate 502 to the second working position 10b, or remove the cooked material cartridge without the cover plate 502 from the second working position 10b, or handle the raw material cartridge without the cover plate 502 to the second working position 10b. The first sub-handling mechanism 21 can handle the cooked material cartridge with the cover plate 502 to the second working position 10b, or remove the raw material cartridge with the cover plate 502 from the second working position 10b, or remove the cooked material cartridge without the cover plate 502 from the second working position 10b. By providing the first sub-handling mechanism 21 and the second sub-handling mechanism 22, the cross-handling of the raw material cartridge, the cooked material cartridge and the empty cartridge can be realized, further improving the handling efficiency.

[0043] In an alternative embodiment, as Figure 1, the pick-and-place device 40 is arranged on one side of the carrying device 30. The empty cassette is transported to the second working position 10b to load the unprocessed substrate, and the green cassette covered with the cover plate 502 is transported from the first working position 10b to the carrying boat and then enters the passivation equipment for processing or directly placed into the passivation equipment for processing. Specifically, the cassette transport line 201 is used to transport the empty cassette without the cover plate 502 to the loading and unloading carrying mechanism 202. The first driving mechanism 4 can drive the second sub-carrying mechanism 22 to move above the loading and unloading carrying mechanism 202 at the first working position 10a, so that the second sub-carrying mechanism 22 transports the empty cassette without the cover plate 502 to the carrying device 30 at the second working position 10b. The pick-and-place device 40 can place the unprocessed substrate into the empty cassette without the cover plate 502 carried by the carrying device 30 to obtain the green cassette without the cover plate 502. Moreover, the second driving mechanism 5 can drive the cover plate carrying mechanism 3 to carry the cover plate 502 to the second working position 10b so that the cassette body 501 loaded with the unprocessed substrate is covered with the cover plate 502. The first sub-carrying mechanism 21 transports the green cassette covered with the cover plate 502 to the loading and unloading carrying mechanism 202 at the first working position 10a. The green cassette covered with the cover plate 502 waits at the loading and unloading carrying mechanism 202 to be transported into the passivation equipment for passivation coating. After passivation coating, the cooked cassette covered with the cover plate 502 is transported to the loading and unloading carrying mechanism 202. The first sub-carrying mechanism 21 transports the cooked cassette covered with the cover plate 502 to the carrying device 30 at the second working position 10b. The cover plate carrying mechanism 3 moves to the second working position 10b to remove the cover plate 502 from the cooked cassette, and then the second sub-carrying mechanism 22 transports the cooked cassette without the cover plate 502 from the second working position 10b to the loading and unloading carrying mechanism 202 at the first working position 10a, and then outputs the cooked cassette without the cover plate 502 through the cassette conveying line 201.

[0044] Optionally, when transporting the cooked cassette without the cover plate 502 from the second working position 10b to the loading and unloading carrying mechanism 202 at the first working position 10a, the transportation of the second sub-carrying mechanism 22 can also be replaced by the transportation of the first sub-carrying mechanism 21, and it can be adaptively adjusted according to actual needs without specific limitation.

[0045] In an alternative embodiment, as Figure 2, the wafer loading and unloading device 40 is arranged on one side of the loading and unloading carrier mechanism 202. The empty cassette is directly loaded with the process wafers at the first working position 10a, and the green cassette covered with the cover plate 502 is transported from the first working position 10b to the carrier boat and then enters the passivation equipment for processing or is directly placed into the passivation equipment for processing. Specifically, the cassette transport line 201 is used to transport the empty cassette without the cover plate 502 to the loading and unloading carrier mechanism 202. The wafer loading and unloading device 40 loads the wafers into the empty cassette without the cover plate 502 to obtain the green cassette without the cover plate 502. The first driving mechanism 4 can drive the second sub-carrying mechanism 22 to move above the loading and unloading carrier mechanism 202 at the first working position 10a, so that the second sub-carrying mechanism 22 transports the green cassette without the cover plate 502 to the carrying device 30 at the second working position 10b. Moreover, the second driving mechanism 5 can drive the cover plate carrying mechanism 3 to transport the cover plate 502 to the second working position 10b so that the cassette body 501 loaded with the process wafers is covered with the cover plate 502 to obtain the green cassette covered with the cover plate 502. The first sub-carrying mechanism 21 transports the green cassette covered with the cover plate 502 to the loading and unloading carrier mechanism 202 at the first working position 10a. The green cassette covered with the cover plate 502 waits at the loading and unloading carrier mechanism 202 to be transported into the passivation equipment for passivation coating. After passivation coating, the baked cassette covered with the cover plate 502 is transported to the loading and unloading carrier mechanism 202. The first sub-carrying mechanism 21 transports the baked cassette covered with the cover plate 502 to the carrying device 30 at the second working position 10b. The cover plate carrying mechanism 3 moves to the second working position 10b to remove the cover plate 502 from the baked cassette, and then the second sub-carrying mechanism 22 transports the baked cassette without the cover plate 502 from the second working position 10b to the loading and unloading carrier mechanism 202 at the first working position 10a, and then outputs the baked cassette without the cover plate 502 through the cassette transport line 201.

[0046] Similarly, when transporting the baked cassette without the cover plate 502 from the second working position 10b to the loading and unloading carrier mechanism 202 at the first working position 10a, the transportation of the second sub-carrying mechanism 22 can also be replaced by the transportation of the first sub-carrying mechanism 21, and it can be adjusted adaptively according to actual needs without specific limitation.

[0047] In some embodiments, the cover plate handling mechanism 3 is located between the first sub-handling mechanism 21 and the second sub-handling mechanism 22 in the second direction Y. The cover plate handling mechanism 3 can at least move the cover plate 502 to the second working position 10b to cover the box body 501 of the raw material box, or can move the cover plate 502 of the clinker box at the second working position 10b away. Specifically, the cartridge handling device 10 further includes a first buffer mechanism 101. The first buffer mechanism 101 is located on one side of the cover plate handling mechanism 3 along the first direction X. The first buffer mechanism 101 is configured to buffer the cover plate 502. The cover plate handling mechanism 3 can move the cover plate 502 from the first buffer mechanism 101 to the second working position 10b to cover the raw material box, or move the cover plate 502 covering the clinker box at the second working position 10b to the first buffer mechanism 101 for buffering, so as to facilitate the picking and placing of the cover plate 502 and avoid the accumulation of cover plates at the second working position 10b.

[0048] Optionally, multiple cover plates can be pre-buffered in the first buffer mechanism. The multiple cover plates can be stacked in the vertical direction in the first buffer mechanism. The cover plate handling mechanism 3 can move along the first direction to move the cover plate 502 between the first buffer mechanism 101 and the second working position 10b.

[0049] In some embodiments, such as Figure 3 and Figure 4 , the loading and unloading device 100 may further include a third working position 10c. The third working position 10c is located between the first working position 10a and the second working position 10b along the first direction X. The cartridge handling mechanism includes a second buffer mechanism 102, which is located at the third working position 10c and is disposed on one side of the fixing frame 1. The second buffer mechanism 102 is configured to buffer the raw material box covered with the cover plate 502. The first sub-handling mechanism 21 can move the raw material box covered with the cover plate 502 from the second working position 10b to the second buffer mechanism 102 for buffering; and / or, the second buffer mechanism 102 is configured to buffer the clinker box covered with the cover plate 502. The first sub-handling mechanism 21 can move the clinker box covered with the cover plate 502 from the second buffer mechanism 102 to the second working position 10b. The third working position is used to dock with the passivation device. The provided second buffer mechanism 102 is used to carry and buffer the raw material box covered with the cover plate 502 and the clinker box covered with the cover plate 502, so that the raw material box can be moved from the third working position to the passivation device for processing, and the processed clinker box can be moved to the third working position.

[0050] Specifically, the first driving mechanism 4 drives the second sub-carrying mechanism 22 to carry the empty cartridge without the cover plate 502 at the first working position 10a to the carrying device 30 at the second working position 10b. After the pick-and-place device 40 loads the unprocessed substrate, the second driving mechanism 5 can drive the cover plate carrying mechanism 3 to carry the cover plate 502 cached in the first buffer mechanism 101 to the second working position 10b to cover the cartridge body 501, obtaining a green cartridge with the cover plate 502. Then, the green cartridge with the cover plate 502 is carried to the second buffer mechanism 102 at the third working position 10c, waiting to be carried into the passivation equipment for processing. After the process is completed, the cured cartridge with the cover plate 502 is carried to the second buffer mechanism 102 at the third working position 10c. The cured cartridge in the second buffer mechanism 102 is carried to the carrying device 30 at the second working position 10b. The cover plate carrying mechanism 3 moves to the second working position 10b to carry the cover plate 502 covering the cured cartridge to the first buffer mechanism 101 for caching. The second sub-carrying mechanism 22 carries the cured cartridge without the cover plate 502 from the second working position 10b to the first working position 10a, and then discharges it through the cartridge conveying line 201.

[0051] Optionally, during the process of carrying the cured cartridge and the green cartridge between the second working position 10b and the third working position 10c, it can be carried by the first sub-carrying mechanism 21, or can be carried by an additionally provided manipulator or carrying mechanism, without specific limitation.

[0052] It can be understood that during the process of carrying the cartridge 50 and the cover plate 502, different carrying routes and different carrying methods can be designed according to the sequence of carrying, the positions of the devices in the loading and unloading equipment 100, the specific position of the passivation equipment docking the loading and unloading equipment 100, etc. Under different designs, the loading and unloading equipment 100 may also include a fourth working position, a fifth working position, etc., and the cartridge 50 can be selected to be carried by the first sub-carrying mechanism 21 or the second sub-carrying mechanism 22 according to different requirements, without specific limitation.

[0053] The following introduces the specific structure of the cartridge carrying device 10.

[0054] Figure 5 The figure shows a schematic diagram of the cartridge carrying device provided by an embodiment of the present disclosure for carrying a cartridge. Figure 6 Shown as Figure 5 The partial enlarged view of area A in Figure 7 The figure shows a schematic diagram of the second sub-carrying mechanism in the cartridge carrying device provided by an embodiment of the present disclosure. Figure 8 The figure shows a schematic diagram of the first sub-carrying mechanism in the cartridge carrying device provided by an embodiment of the present disclosure. Figure 9 Shown as Figure 5 The partial enlarged view of area B in

[0055] As shown in Figures 5 to 9 , the fixing frame 1 is provided with a first slide rail 11 and a second slide rail 12 extending along the first direction X, and the first slide rail 11 and the second slide rail 12 are arranged on both sides of the fixing frame 1 in the second direction Y. The first sub-carrying mechanism 21 includes a first slide table 211, a first lifting assembly 212 and a first clamping assembly 213. The first slide table 211 is slidably connected to the first slide rail 11, the first lifting assembly 212 is connected to the first slide table 211, and the first clamping assembly 213 is connected to the first lifting assembly 212. The first clamping assembly 213 is used for clamping the box body 501. The second sub-carrying mechanism 22 includes a second slide table 221, a second lifting assembly 222 and a second clamping assembly 223. The second slide table 221 is slidably connected to the second slide rail 12, and the second slide table 221 and the first slide table 211 are arranged in a staggered manner in the first direction X. The second lifting assembly 222 is connected to the second slide table 221. The second clamping assembly 223 is connected to the second lifting assembly 222. The second clamping assembly 223 is used for clamping the box body 501. The first driving mechanism 4 includes a first driving member 41, a second driving member 42 and a third driving member 43. The first driving member 41 is respectively connected to the first slide table 211 and the second slide table 221. The first driving member 41 is configured to drive the first slide table 211 and the second slide table 221 to move along the first direction X, so that the first sub-carrying mechanism 21 and the second sub-carrying mechanism 22 act. The second driving member 42 is connected to the first lifting assembly 212. The second driving member 42 is configured to drive the first lifting assembly 212 to act to drive the first clamping assembly 213 to move in the vertical direction. The third driving member 43 is connected to the second lifting assembly 222. The third driving member 43 is configured to drive the second lifting assembly 222 to act to drive the second clamping assembly 223 to move in the vertical direction, so that the box body 501 or the entire material box 50 can be smoothly carried to different working positions.

[0056] It can be understood that the first driving member 41 may include a driving motor, and the driving motor may have a mating structure including a mover and a stator. The mover may further include a first mover and a second mover, which are respectively connected to the first sliding table 211 and the second sliding table 221 to drive the first sliding table 211 and the second sliding table 221 to move independently of each other, and the control accuracy of the first sliding table 211 and the second sliding table 221 is relatively high. It should be emphasized that the first driving member 41 may also include two motors, and the output ends of the two motors respectively realize the independent sliding of the first sliding table 211 and the second sliding table 221 through a lead screw-nut pair structure, which will not be elaborated here. In an alternative embodiment, the fixing frame 1 is respectively provided with a first rack 14 and a second rack 13 extending along the first direction X on both sides in the second direction Y. The first driving member 41 further includes a first gear 411, a second gear, a first driving part 412 and a second driving part. The first gear 411 is rotatably connected to the first sliding table 211, and the first gear 411 meshes with the first rack 14; the second gear is rotatably connected to the second sliding table 221, and the second gear meshes with the second rack 13; the output ends of the first driving part 412 and the second driving part are respectively connected to the first gear 411 and the second gear, and the driving parts can respectively drive the first gear 411 and the second gear to rotate to drive the first sliding table 211 and the second sliding table 221 to move along the first direction X. The cooperation of the meshing gears and racks can improve the movement accuracy of the first sub-carrying mechanism 21 and the second sub-carrying mechanism 22 along the first direction X, so as to more conveniently and quickly position the carrying mechanism to the corresponding working position.

[0057] Optionally, the mating first slide rail 11 and the first sliding table 211 may be set as a group, or may be set as multiple groups, and the multiple groups may be arranged in parallel in the vertical direction, without specific limitation. In the embodiments of the present disclosure, the first slide rail 11 and the first sliding table 211 are set as two groups parallel to each other.

[0058] Optionally, the first driving member 41 may further include a drag chain to improve the silent effect of the first sub-carrying mechanism 21 and the second sub-carrying mechanism 22 moving along the first direction X, which will not be elaborated here.

[0059] In some embodiments, the first sliding table 211 is provided with a third slide rail extending in the vertical direction. The first lifting assembly 212 includes a third sliding table and a first mounting seat. The third sliding table is slidably connected to the third slide rail, and the third sliding table is connected to the second driving member 42; the first mounting seat is fixedly connected to the third sliding table, and a first clamping assembly 213 is connected to one side of the first mounting seat away from the fixing frame 1, and the second driving member 42 can drive the third sliding table to move along the third slide rail.

[0060] In some embodiments, the second sliding table 221 is provided with a fourth slide rail 2211 extending in the vertical direction. The second lifting assembly 222 includes a fourth sliding table 2221 and a second mounting seat 2222. The fourth sliding table 2221 is slidably connected to the fourth slide rail 2211, and the fourth sliding table 2221 is connected to the third driving member 43. The second mounting seat 2222 is fixedly connected to the fourth sliding table 2221. A second clamping assembly 223 is connected to a side of the second mounting seat 2222 away from the fixed frame 1. The third driving member 43 is capable of driving the fourth sliding table 2221 to move along the fourth slide rail 2211.

[0061] Optionally, the second driving member 42 and the third driving member 43 may be driving motors. The driving motors are capable of driving the sliding tables to reciprocate in the vertical direction relative to the slide rails, so as to be able to approach or move away from the corresponding box body 501 or the entire magazine 50 when the first sliding table 211 and the second sliding table 221 move to the corresponding working positions for picking and placing.

[0062] In some embodiments, the first clamping assembly 213 includes a first jaw 2131, a second jaw 2132, and a first clamping driving member 2133. The first jaw 2131 and the second jaw 2132 are disposed on the first mounting seat, and the first jaw 2131 and the second jaw 2132 are arranged at intervals in the first direction X. The first clamping driving member 2133 is respectively connected to the first jaw 2131 and the second jaw 2132. The first clamping driving member 2133 is configured to drive at least one of the first jaw 2131 and the second jaw 2132 to act, so that the distance between the first jaw 2131 and the second jaw 2132 increases or decreases. By providing the cooperating first jaw 2131 and second jaw 2132, it is convenient to stably grasp the entire box body 501 or the magazine 50, and the stability of the movement process of the box body 501 or the magazine 50 is improved.

[0063] In some embodiments, the second clamping assembly 223 includes a third jaw 2231, a fourth jaw, and a second clamping driving member 2232. The third jaw 2231 and the fourth jaw are disposed on the second mounting seat 2222, and the third jaw 2231 and the fourth jaw are arranged at intervals in the first direction X. The second clamping driving member 2232 is respectively connected to the third jaw 2231 and the fourth jaw. The second clamping driving member 2232 is configured to drive at least one of the third jaw 2231 and the fourth jaw to act, so that the distance between the third jaw 2231 and the fourth jaw increases or decreases. By providing the clamping driving member, while ensuring relatively high clamping stability, it can meet the requirements of convenient and rapid picking and placing of the box body 501 or the magazine 50.

[0064] It can be understood that the two clamping jaws provided on the mounting base can be arranged at intervals along the first direction X, or can be arranged at intervals along the second direction Y, and can be adaptively adjusted according to the position of the side opening for passivation coating on the box body 501. In other examples, the first clamping assembly 213 and the second clamping assembly 223 can also be set to other structures capable of grasping the box body 501 or the cassette 50 as a whole, without specific limitation.

[0065] Optionally, the first clamping driving member 2133 and the second clamping driving member 2232 can be set to the same structure. Taking the first clamping driving member 2133 as an example, the first clamping driving member 2133 can include a first air cylinder and a second air cylinder fixedly connected to the first mounting base. The ejector rod of the first air cylinder is connected to the first clamping jaw 2131, and the ejector rod of the second air cylinder is connected to the second clamping jaw 2132. The first air cylinder can drive the first clamping jaw 2131 to reciprocate along the first direction X, and the second air cylinder can drive the second clamping jaw 2132 to reciprocate along the first direction X. When the first clamping assembly 213 moves above the corresponding working position, the first lifting assembly 212 drives the first clamping jaw 2131 and the second clamping jaw 2132 to descend, so that the first clamping jaw 2131 and the second clamping jaw 2132 descend to correspond to the side wall of the box body 501. The first air cylinder and the second air cylinder drive the distance between the first clamping jaw 2131 and the second clamping jaw 2132 to decrease, so that the first clamping jaw 2131 and the second clamping jaw 2132 respectively abut against the side wall of the box body 501, thereby realizing the clamping of the box body 501 or the cassette 50 as a whole. The first lifting assembly 212 rises to drive the clamped box body 501 or the cassette 50 as a whole to rise therewith, and the first driving member 41 drives to move the box body 501 or the cassette 50 to another working position.

[0066] In some embodiments, the fixed frame 1 is provided with a fifth slide rail extending along the first direction X, the cover plate transport mechanism 3 includes a fifth slide, a third lifting assembly 31 and an adsorption member 32, the fifth slide is slidably connected to the fifth slide rail; the third lifting assembly 31 is connected to the fifth slide; the adsorption member 32 is connected to the third lifting assembly 31, and the adsorption member 32 is configured to adsorb the cover plate 502, the second driving mechanism 5 includes a fourth driving member 51 and a fifth driving member, the fourth driving member 51 is connected to the fifth slide, and the fourth driving member 51 is configured to drive the fifth slide to slide relative to the fifth slide rail along the first direction X; the fifth driving member is connected to the third lifting assembly 31, and the fifth driving member is configured to drive the third lifting assembly 31 to move to drive the adsorption member 32 to move in the vertical direction. The fourth driving member 51 can drive the adsorption member 32 to move to above the corresponding working position, the second lifting assembly 222 can drive the adsorption member 32 to move in the vertical direction so that the adsorption member 32 can move downward to contact the cover plate 502 below the working position and adsorb the cover plate 502, and can drive the adsorption member 32 adsorbed with the cover plate 502 to move upward, so that the fifth driving member can drive the adsorption member 32 adsorbed with the cover plate 502 to move between the second working position 10b and the first cache mechanism 10, thereby realizing the transportation of the cover plate 502.

[0067] It is understandable that the adsorption component 32 may include, for example, a suction cup and a plurality of adjustment bolts for leveling the suction cup. The suction cup may be provided as one or as a plurality of suction cups arranged at intervals. The suction cup may be adaptively adjusted according to requirements without specific limitation.

[0068] Optionally, the fourth driving member 51 can be set as a motor, and the mover and stator of the motor are respectively connected to the fifth slide rail and the fifth slide table, or the fourth driving member 51 can also include a motor, a meshing gear and a rack, without specific limitation. In addition, the matching fifth slide table and fifth slide rail can be set as a group, or can be set as two or more parallel groups, without specific limitation.

[0069] In some embodiments, the fifth slide is provided with a sixth slide rail extending in the vertical direction, the third lifting assembly 31 includes a sixth slide and a fixed plate, the sixth slide is slidably connected to the sixth slide rail, and the sixth slide is connected to the fifth driving member; the fixed plate is fixedly connected to the sixth slide, and the side of the fixed plate away from the fixed frame 1 is connected to the adsorption member 32, and the fifth driving member can drive the sixth slide to slide along the sixth slide rail to drive the adsorption member 32 to move in the vertical direction. The sixth slide is driven to reciprocate in the vertical direction along the sixth slide rail by the fifth driving member, so as to realize the taking and placing of the cover plate 502, with high control accuracy and convenient and quick.

[0070] The disclosed embodiment also includes a loading and unloading device, such as Figure 1 and Figure 2, the loading and unloading device 100 at least includes a cassette loading and unloading device 20, a carrying device 30, and a cassette handling device 10. The cassette loading and unloading device 20 is configured to carry a cassette 50. The cassette 50 includes an empty cassette without loaded sheets, a green cassette loaded with sheets before the process, and a fired cassette loaded with sheets after the process. The cassette loading and unloading device 20 has a first working position 10a. The carrying device 30 is arranged on one side of the cassette loading and unloading device 20 along the first direction X and is configured to carry at least one of the green cassette, the empty cassette, and the fired cassette. The carrying device 30 has a second working position 10b. The cassette handling device 10 can refer to the descriptions of the above embodiments and is configured to move at least one of the green cassette and the fired cassette to the first working position 10a or the second working position 10b, which will not be elaborated herein.

[0071] In the embodiments of the present disclosure, if not clearly defined, the connection form can be a detachable connection by means of bolts and nuts, screws, snaps, magnetic attraction, etc. In some connections, if there is no special requirement for the form of detachable cooperation, an irreversible connection can be made by welding, bonding, etc.

[0072] The basic principles of the present disclosure have been described above in conjunction with specific embodiments. However, it should be noted that the advantages, benefits, effects, etc. mentioned in the present disclosure are only examples and not limitations. It cannot be considered that these advantages, benefits, effects, etc. are essential for each embodiment of the present disclosure. In addition, the above disclosed specific details are only for the purposes of illustration and easy understanding, rather than limitations. The above details do not limit the present disclosure to necessarily adopt the above specific details to be implemented.

[0073] The block diagrams of the devices, apparatuses, equipment, and systems involved in the present disclosure are only exemplary examples and do not intend to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any way. Words such as "including", "comprising", "having", etc. are open-ended words, meaning "including but not limited to", and can be used interchangeably with each other. The words "or" and "and" used herein refer to the word "and / or" and can be used interchangeably with each other, unless the context clearly indicates otherwise. The word "such as" used herein refers to the phrase "such as but not limited to" and can be used interchangeably with each other.

[0074] It should also be noted that in the devices, equipment, and methods of the present disclosure, each component or each step can be decomposed and / or recombined. These decompositions and / or recombinations should be regarded as equivalent solutions of the present disclosure.

[0075] The foregoing description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present disclosure. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present disclosure. Thus, the present disclosure is not intended to be limited to the aspects shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0076] The foregoing description has been presented for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of the present disclosure to the forms disclosed herein. Although several example aspects and embodiments have been discussed above, those skilled in the art will recognize some of their variations, modifications, alterations, additions, and subcombinations.

Claims

1. A cartridge handling device, characterized in that, Applied to the loading and unloading equipment, the loading and unloading equipment at least has a first working position and a second working position arranged along a first direction. The cartridge handling device is configured to be able to handle the cartridge between the first working position and the second working position. Wherein, the cartridge includes a green cartridge loaded with sheets before the process, a baked cartridge loaded with the sheets after the process, and an empty cartridge not loaded with the sheets. And the cartridge has a box body and a cover plate. The cartridge handling device includes: A fixed frame arranged along the first direction; A cartridge handling mechanism slidably connected to the fixed frame, and the cartridge handling mechanism is configured to handle the cartridge; A first driving mechanism connected to the cartridge handling mechanism, and the first driving mechanism can drive the cartridge handling mechanism to move at least one of the green cartridge, the baked cartridge, and the empty cartridge to the first working position or the second working position; A cover plate handling mechanism slidably connected to the fixed frame, and the cover plate handling mechanism is configured to handle the cover plate; A second driving mechanism connected to the cover plate handling mechanism, and the second driving mechanism can drive the cover plate handling mechanism to move to cover the cover plate on the box body, or to move the cover plate away from the box body.

2. The cartridge handling device according to claim 1, wherein The cartridge handling mechanism includes: A first sub-handling mechanism slidably connected to one side of the fixed frame, and the first sub-handling mechanism is configured to handle the baked cartridge or the green cartridge; A second sub-handling mechanism slidably connected to one side of the fixed frame, and the first sub-handling mechanism and the second sub-handling mechanism are oppositely arranged in a second direction perpendicular to the first direction. The second sub-handling mechanism is configured to handle the empty cartridge, the baked cartridge, or the green cartridge; The first driving mechanism is respectively connected to the first sub-handling mechanism and the second sub-handling mechanism. The first driving mechanism can drive the first sub-handling mechanism and the second sub-handling mechanism to move, so that the second sub-handling mechanism can handle the empty cartridge without the cover plate to the second working position, or move the baked cartridge without the cover plate away from the second working position, or handle the green cartridge without the cover plate to the second working position; The first sub-handling mechanism can handle the baked cartridge with the cover plate to the second working position, or move the green cartridge with the cover plate away from the second working position, or move the baked cartridge without the cover plate away from the second working position.

3. The cartridge handling device according to claim 2, wherein The cover plate handling mechanism is located between the first sub-handling mechanism and the second sub-handling mechanism in the second direction. The cartridge handling device further includes: A first buffer mechanism located on one side of the cover plate handling mechanism along the first direction. The first buffer mechanism is configured to buffer the cover plate. The cover plate handling mechanism can handle the cover plate from the first buffer mechanism to the second working position to cover the green cartridge, or handle the cover plate covering the baked cartridge in the second working position to the first buffer mechanism for buffering.

4. The cartridge handling device according to claim 2, wherein, The loading and unloading device further includes a third working position, which is located between the first working position and the second working position in the first direction. The cartridge handling device includes: A second buffer mechanism, which is located at the third working position and is arranged on one side of the fixed frame. The second buffer mechanism is configured to buffer the green material cartridge covered with the cover plate. The first sub-handling mechanism can handle the green material cartridge covered with the cover plate from the second working position to the second buffer mechanism for buffering; and / or, The second buffer mechanism is configured to buffer the clinker cartridge covered with the cover plate. The first sub-handling mechanism can handle the clinker cartridge covered with the cover plate from the second buffer mechanism to the second working position.

5. The cartridge handling device according to claim 2, wherein, The fixed frame is provided with a first slide rail and a second slide rail extending in the first direction, and the first slide rail and the second slide rail are arranged on both sides of the fixed frame in the second direction. The first sub-handling mechanism includes: A first slide table, which is slidably connected to the first slide rail; A first lifting assembly, which is connected to the first slide table; A first clamping assembly, which is connected to the first lifting assembly, and the first clamping assembly is used to clamp the box body; The second sub-handling mechanism includes: A second slide table, which is slidably connected to the second slide rail, and the second slide table and the first slide table are arranged in a staggered manner in the first direction; A second lifting assembly, which is connected to the second slide table; A second clamping assembly, which is connected to the second lifting assembly, and the second clamping assembly is used to clamp the box body; The first driving mechanism includes: A first driving member, which is respectively connected to the first slide table and the second slide table. The first driving member is configured to drive the first slide table and the second slide table to move along the first direction respectively, so that the first sub-handling mechanism and the second sub-handling mechanism act; A second driving member, which is connected to the first lifting assembly. The second driving member is configured to drive the first lifting assembly to act to drive the first clamping assembly to move in the vertical direction; A third driving member, which is connected to the second lifting assembly. The third driving member is configured to drive the second lifting assembly to act to drive the second clamping assembly to move in the vertical direction.

6. The cartridge handling device according to claim 5, wherein, The fixed frame is respectively provided with a first rack and a second rack extending in the first direction on both sides in the second direction. The first driving member includes: A first gear, which is rotatably connected to the first slide table, and the first gear meshes with the first rack; A first driving part, which is connected to the first slide table, and the output end of the first driving part is connected to the first gear. The first driving part can drive the first gear to rotate to drive the first slide table to move along the extending direction of the first rack; A second gear, which is rotatably connected to the second slide table, and the second gear meshes with the second rack; A second driving part, which is connected to the second slide table, and the output end of the second driving part is connected to the second gear. The second driving part can drive the second gear to rotate to drive the second slide table to move along the extending direction of the second rack.

7. The cartridge handling device according to claim 5, wherein, The first sliding table is provided with a third sliding rail extending in the vertical direction. The first lifting assembly includes: A third sliding table, slidably connected to the third sliding rail, and the third sliding table is connected to the second driving member; A first mounting seat, fixedly connected to the third sliding table. One side of the first mounting seat away from the fixed frame is connected to the first clamping assembly, and the second driving member can drive the third sliding table to move along the third sliding rail; and / or, The second sliding table is provided with a fourth sliding rail extending in the vertical direction. The second lifting assembly includes: A fourth sliding table, slidably connected to the fourth sliding rail, and the fourth sliding table is connected to the third driving member; A second mounting seat, fixedly connected to the fourth sliding table. One side of the second mounting seat away from the fixed frame is connected to the second clamping assembly, and the third driving member can drive the fourth sliding table to move along the fourth sliding rail.

8. The cartridge handling device according to claim 7, wherein The first clamping assembly includes: A first clamping jaw, disposed on the first mounting seat; A second clamping jaw, disposed on the first mounting seat, and the first clamping jaw and the second clamping jaw are arranged at intervals in the first direction; A first clamping driving member, respectively connected to the first clamping jaw and the second clamping jaw. The first clamping driving member is configured to drive at least one of the first clamping jaw and the second clamping jaw to act, so that the distance between the first clamping jaw and the second clamping jaw increases or decreases; and / or, The second clamping assembly includes: A third clamping jaw, disposed on the second mounting seat; A fourth clamping jaw, disposed on the second mounting seat, and the third clamping jaw and the fourth clamping jaw are arranged at intervals in the first direction; A second clamping driving member, respectively connected to the third clamping jaw and the fourth clamping jaw. The second clamping driving member is configured to drive at least one of the third clamping jaw and the fourth clamping jaw to act, so that the distance between the third clamping jaw and the fourth clamping jaw increases or decreases.

9. The cartridge handling device according to claim 2, wherein The fixed frame is provided with a fifth sliding rail extending in the first direction. The cover plate handling mechanism includes: A fifth sliding table, slidably connected to the fifth sliding rail; A third lifting assembly, connected to the fifth sliding table; An adsorbing member, connected to the third lifting assembly, and the adsorbing member is configured to adsorb the cover plate; The second driving mechanism includes: A fourth driving member, connected to the fifth sliding table, and the fourth driving member is configured to drive the fifth sliding table to slide relative to the fifth sliding rail in the first direction; A fifth driving member, connected to the third lifting assembly, and the fifth driving member is configured to drive the third lifting assembly to act to drive the adsorbing member to move in the vertical direction.

10. The cartridge handling device according to claim 9, characterized in that, The fifth sliding table is provided with a sixth sliding rail extending in the vertical direction. The third lifting assembly includes: A sixth sliding table, slidably connected to the sixth sliding rail, and the sixth sliding table is connected to the fifth driving member; A fixing plate, fixedly connected to the sixth sliding table. One side of the fixing plate away from the fixed frame is connected to the adsorbing member, and the fifth driving member can drive the sixth sliding table to slide along the sixth sliding rail to drive the adsorbing member to move in the vertical direction.

11. A loading and unloading device, characterized in that, Includes: The cassette loading and unloading device is configured to carry a cassette, and the cassette includes at least one of an empty cassette without loaded sheets, a green cassette loaded with the sheets before the process, and a fired cassette loaded with the sheets after the process. The cassette loading and unloading device has a first working position; The carrying device is arranged on one side of the cassette loading and unloading device along a first direction. The carrying device is configured to carry at least one of the green cassette, the fired cassette, and the empty cassette. The carrying device has a second working position; The cassette handling device according to any one of claims 1 to 10 is configured to handle at least one of the green cassette, the fired cassette, and the empty cassette to the first working position or the second working position.

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