Carrier and coating equipment

Abstract

The utility model discloses a carrier and coating equipment, comprising a plurality of cross beam units which are arranged in parallel at intervals along a first direction; the two lateral guide rails are arranged side by side in a spaced mode in the second direction, one lateral guide rail is connected to one ends of the multiple cross beam units, the other lateral guide rail is connected to the other ends of the multiple cross beam units, and the second direction is perpendicular to the first direction; and the at least one roller unit is arranged in an area between the two lateral guide rails and is used for supporting the plurality of cross beam units. The carrier can solve the problem that after the size of the carrier is increased, the boundary dimension and the thickness of the cross beam need to be increased in order to reduce deformation of the cross beam, and the weight of the whole carrier can be greatly increased.

Description

Technical Field

[0001] The utility model relates to the technical field of coating equipment, in particular to a carrier and coating equipment. Background Art

[0002] With the continuous development of the photovoltaic industry, especially the increasing application amount of coating equipment, the production capacity requirements for coating equipment are getting higher and higher. Among them, as a major factor affecting production capacity, the carrier is constantly developing in the direction of larger size.

[0003] In the related art, the driving mode of the carrier is mainly driven by driving wheels arranged on both sides thereof. The gravity of the carrier is distributed on the guide rails on both sides, and then distributed to the driving wheels in contact therewith by the guide rails. When designing the carrier, when the width of the carrier becomes wider, the span of the driving wheels also becomes larger. At this time, when calculating the deformation of the carrier, in order to maintain a low deformation amount, it is necessary to increase the outer dimension and thickness of the cross beam, and perform some anti-deformation treatments, or increase the number of cross beams to distribute the load. At this time, the weight of the entire carrier will increase greatly and the cost will be high. Summary of the Utility Model

[0004] The utility model aims to solve at least one of the technical problems existing in the prior art. For this reason, the utility model provides a carrier, which can improve the problem that when the size is increased, in order to reduce the deformation of the cross beam, it is necessary to increase the outer dimension and thickness of the cross beam, and the weight of the entire carrier will increase greatly.

[0005] The utility model also provides a coating equipment having the above carrier.

[0006] The carrier according to the first aspect embodiment of the utility model includes: a plurality of cross beam units, the plurality of cross beam units are arranged at intervals and in parallel along a first direction; two lateral guide rails, the two lateral guide rails are arranged at intervals and in parallel along a second direction, one of the lateral guide rails is connected to one end of the plurality of cross beam units, and the other lateral guide rail is connected to the other end of the plurality of cross beam units, wherein the second direction is perpendicular to the first direction; at least one roller unit, at least one roller unit is arranged in the area between the two lateral guide rails and is used to support the plurality of cross beam units.

[0007] The carrier according to the embodiment of the utility model has at least the following beneficial effects:

[0008] When the vehicle of the present utility model is in use, two lateral guide rails are used for two rows of driving wheels respectively arranged on both sides of the vehicle to extend into. The driving wheels can play a driving role to drive the vehicle to move in the first direction; during the process that the driving wheels drive the vehicle to move in the first direction, the roller unit is supported on the support guide rail, so as to support the middle positions of multiple cross beam units. In this way, by increasing the support of the roller unit, more support points can be provided for the vehicle, so that when both ends of the cross beam unit are supported, the middle part is also supported. Thus, the cross-sectional strength of the cross beam unit can be correspondingly made smaller (corresponding to reducing parameters such as the thickness and material strength of the cross beam unit), achieving the effects of reducing the weight of the entire vehicle and reducing costs. At the same time, it can also reduce the load borne by the driving wheels on both sides.

[0009] According to some embodiments of the present utility model, an assembly groove is provided at the bottom of the cross beam unit, and the roller unit is arranged in the assembly groove and the bottom of the roller unit extends out of the assembly groove.

[0010] According to some embodiments of the present utility model, the vehicle further includes a longitudinal beam unit. The longitudinal beam unit is arranged between the two lateral guide rails and is arranged at intervals and in parallel with the lateral guide rails in the second direction. The longitudinal beam unit is connected to multiple cross beam units, and at least one roller unit is supported on the cross beam unit and the longitudinal beam unit.

[0011] According to some embodiments of the present utility model, the cross beam unit includes multiple cross beams arranged in the second direction. The length direction of each cross beam is parallel to the second direction, and a connecting piece is arranged between every two adjacent cross beams. The longitudinal beam unit passes through the connecting piece.

[0012] According to some embodiments of the present utility model, an assembly groove is provided at the bottom of the connecting piece, and the roller unit is arranged in the assembly groove and the bottom of the roller unit extends out of the assembly groove.

[0013] According to some embodiments of the present utility model, the longitudinal beam unit is of a hollow structure. The longitudinal beam unit is located above the assembly groove and a communication port communicating with the assembly groove is provided at the lower side part of the longitudinal beam unit. The top of the roller unit extends into the longitudinal beam unit through the communication port.

[0014] According to some embodiments of the present utility model, the roller unit includes a support assembly arranged in the assembly groove and a roller rotatably arranged on the support assembly. The bottom of the roller extends out of the assembly groove.

[0015] According to some embodiments of the present utility model, the support assembly includes a support member fixed to the assembly groove and a support shaft disposed on the support member. The support shaft is located within the assembly groove, and the roller is rotatably sleeved on the support shaft;

[0016] The support shaft is further connected with a first covering portion and a second covering portion. The first covering portion and the second covering portion are sleeved outside the support shaft and are respectively located on two sides of the roller along the axial direction of the roller, and both the first covering portion and the second covering portion are located within the assembly groove.

[0017] According to some embodiments of the present utility model, both of the two lateral guide rails include an end fixing portion connected to a plurality of the cross beam units and a support portion connected to the fixing portion. An avoidance space is formed below the support portion;

[0018] Wherein, the support portion is supported by a driving wheel extending into the avoidance space, and the carrier can be lifted from bottom to top to be separated from the driving wheel.

[0019] According to some embodiments of the present utility model, at least one end of a plurality of the cross beam units is connected to a connecting plate, and the lateral guide rail is connected to a side of the connecting plate away from the cross beam units.

[0020] According to some embodiments of the present utility model, the connecting plate is provided with ventilation holes penetrating through its upper and lower sides.

[0021] According to the coating device of the second aspect embodiment of the present utility model, it includes: the above-mentioned carrier; two rows of lateral driving wheels, the two rows of lateral driving wheels are arranged at intervals along the second direction, and the two rows of lateral driving wheels are used to respectively support the two lateral guide rails and drive the carrier to move along the first direction; a support guide rail, the support guide rail is arranged on the moving path of the roller unit and is used to support the roller unit.

[0022] According to the coating device of the embodiment of the present utility model, it has at least the following beneficial effects:

[0023] When the coating equipment of the present utility model is in use, two lateral guide rails are used for two rows of driving wheels respectively arranged on both sides of the carrier to extend into. The driving wheels can play a driving role and drive the carrier to move in the first direction. During the process that the driving wheels drive the carrier to move in the first direction, the roller unit is supported on the support guide rail, so as to support the middle positions of multiple cross beam units. In this way, by increasing the support of the roller unit, more support points can be provided for the carrier, so that when both ends of the cross beam unit are supported, the middle part is also supported. Thus, the cross-sectional strength of the cross beam unit can be correspondingly made smaller (corresponding to reducing parameters such as the thickness and material strength of the cross beam unit), achieving the effect of reducing the weight of the entire carrier and reducing costs. At the same time, it can also reduce the load borne by the driving wheels on both sides.

[0024] According to some embodiments of the present utility model, the interior of the coating equipment has sputtering regions and non-sputtering regions arranged alternately with each other. The number of the support guide rails is multiple, and the multiple support guide rails are arranged in each of the non-sputtering regions and avoid the sputtering regions.

[0025] Additional aspects and advantages of the present utility model will be given in part in the following description, become apparent in part from the following description, or be understood through the practice of the present utility model. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] The following further describes the present utility model in conjunction with the drawings and embodiments, where:

[0027] Figure 1 is a schematic structural view of a carrier according to an embodiment of the present utility model;

[0028] Figure 2 is a schematic partial structural view of a carrier according to an embodiment of the present utility model;

[0029] Figure 3 is a schematic partial exploded structural view of a carrier according to an embodiment of the present utility model;

[0030] Figure 4 is a schematic partial sectional structural view of a carrier according to an embodiment of the present utility model;

[0031] Figure 5 is a schematic structural view of a connector according to an embodiment of the present utility model;

[0032] Figure 6 is a schematic structural view of the connector from another perspective according to an embodiment of the present utility model;

[0033] Figure 7 is a schematic structural view of a roller unit according to an embodiment of the present utility model;

[0034] Figure 8Schematic cross-sectional structure diagram of a roller unit according to an embodiment of the present utility model;

[0035] Figure 9 Schematic structure diagram of a vehicle according to another embodiment of the utility model;

[0036] Figure 10 Schematic diagram of a coating device according to an embodiment of the present utility model.

[0037] Reference numerals in the drawings:

[0038] 100, vehicle; 110, crossbeam unit; 111, crossbeam; 1111, first assembly hole; 1112, first clearance groove; 112, connecting member; 1121, installation cavity; 1122, positioning portion; 11221, second assembly hole; 1123, third assembly hole; 1124, sixth assembly hole; 1125, second clearance groove; 1126, assembly groove; 120, lateral guide rail; 121, fixing portion; 122, supporting portion; 123, anti-deviation portion; 124, avoidance space; 130, longitudinal beam unit; 131, fourth assembly hole; 132, communication port; 133, socket; 140, roller unit; 141, support assembly; 1411, support member; 14111, fifth assembly hole; 1412, support shaft; 14121, first covering portion; 1413, bushing; 142, roller; 143, second covering portion; 150, pin; 160, connecting plate; 161, ventilation hole;

[0039] 200, tray;

[0040] 300, support guide rail. Detailed implementation manners

[0041] The embodiments of the present utility model will be described in detail below. The examples of the embodiments are shown in the drawings, wherein the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions from beginning to end. The embodiments described below with reference to the drawings are exemplary and are only used to explain the present utility model and should not be construed as a limitation of the present utility model.

[0042] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model. In addition, the features defined as "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present utility model, unless otherwise specified, the meaning of "a plurality" is two or more.

[0043] In the description of the present utility model, it should be noted that unless otherwise clearly specified and defined, the terms "installation", "connection", and "coupling" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0044] As Figure 1 shown, a vehicle 100 provided by an embodiment of the present utility model can be used to carry a product to be coated. Among them, the product to be coated can be a silicon wafer, glass, etc.

[0045] Combined Figure 1 with Figure 2 , the vehicle 100 includes a crossbeam unit 110, side guides 120, and a roller unit 140.

[0046] As Figure 1 shown, specifically, the number of crossbeam units 110 is multiple, and the multiple crossbeam units 110 are arranged at intervals and in parallel along the first direction.

[0047] It can be understood that the length direction of the crossbeam unit 110 is transverse, the first direction is longitudinal and perpendicular to the transverse, and the multiple crossbeam units 110 are arranged at intervals and in parallel along the first direction.

[0048] The number of side guides 120 is two, and the two side guides 120 are arranged at intervals and in parallel along the second direction. One of the side guides 120 is connected to one end of the multiple crossbeam units 110, and the other side guide 120 is connected to the other end of the multiple crossbeam units 110, where the second direction is perpendicular to the first direction.

[0049] It can be understood that the longitudinal direction of the lateral guide rails 120 is the longitudinal direction, that is, the first direction; the second direction is perpendicular to the first direction, and the second direction is the transverse direction. The two lateral guide rails 120 are arranged at intervals in the second direction, and one of the lateral guide rails 120 connects all the ends of the multiple cross beam units 110, and the other lateral guide rail 120 connects all the other ends of the multiple cross beam units 110.

[0050] It can be understood that the two lateral guide rails 120 can connect the multiple cross beam units 110 into a whole, and in the area between every two adjacent cross beam units 110, a tray 200 for carrying the product to be coated can be arranged so that the product to be coated can be coated from top to bottom and / or from bottom to top.

[0051] Furthermore, the two lateral guide rails 120 are used for two rows of driving wheels respectively arranged on both sides of the carrier 100 in the second direction to extend into. The driving wheels can drive the carrier 100 to move in the first direction, and when the driving wheels extend into the lateral guide rails 120, they also play a supporting role on the lateral guide rails 120.

[0052] Combined with Figure 1 and Figure 2 , the number of the roller units 140 is at least one, and at least one roller unit 140 is arranged in the area between the two lateral guide rails 120 and is used for supporting the multiple cross beam units 110.

[0053] It should be noted that at least one roller unit 140 is arranged in the area between the two lateral guide rails 120 to support the position in the middle range of the cross beam unit 110.

[0054] Specifically, a support guide rail 300 is arranged between the two rows of driving wheels. During the process of the driving wheels driving the carrier 100 to move in the first direction, the roller unit 140 is supported on the support guide rail 300 to support the position in the middle range of the cross beam unit 110.

[0055] When the vehicle 100 of the present utility model is in use, two lateral guide rails 120 are used for two rows of driving wheels respectively arranged on both sides of the vehicle 100 to extend into. The driving wheels can play a driving role to drive the vehicle 100 to move in the first direction; during the process that the driving wheels drive the vehicle to move in the first direction, the roller unit 140 is supported on the support guide rail 300, so as to support the middle positions of multiple cross beam units 110. In this way, by increasing the support of the roller unit 140, more support points can be provided for the vehicle 100, so that when both ends of the cross beam unit 110 are supported, the middle part is also supported. Thus, the cross-sectional strength of the cross beam unit 110 can be correspondingly made smaller (corresponding to reducing parameters such as the thickness and material strength of the cross beam unit 110), achieving the effects of reducing the weight of the entire vehicle 100 and reducing costs. At the same time, it can also reduce the loads borne by the driving wheels on both sides.

[0056] It can be understood that if a support point is not added in the middle of the cross beam unit 110, once the vehicle 100 is made larger, for example, the original width of the vehicle 100 is 2 meters and now it is to be made 3 meters, it will cause the vehicle 100 to deform (mainly the cross beam unit 110 deforms); to solve this deformation, the traditional method is to make the cross beam unit 110 thicker and use materials with higher strength, but this will not only cause large coating shadows, but also increase the overall weight of the vehicle 100, increase the support burden of the driving wheels on both sides, and the material cost is also higher.

[0057] It should be noted that the number of roller units 140 can be set to multiple, and the multiple roller units 140 are respectively and correspondingly supported on the middle parts of multiple cross beam units 110; in this way, the multiple roller units 140 can respectively support the middle parts of the multiple cross beam units 110.

[0058] In some embodiments, an assembly groove 1126 is provided at the bottom of the cross beam unit 110, and the roller unit 140 is arranged in the assembly groove 1126, and the bottom of the roller unit 140 extends out of the assembly groove 1126.

[0059] It can be understood that the roller unit 140 is arranged in the assembly groove 1126, the roller unit 140 is supported on the cross beam unit 110, most of the roller unit 140 is hidden in the cross beam unit 110, and only the bottom of the roller unit 140 extends out of the assembly groove 1126 to be used for contacting the support guide rail 300. In this way, during the coating process, the area of the roller unit 140 coated with coating dust can be reduced, thereby reducing the risk of slag falling caused by friction between the roller unit 140 and other parts during subsequent rolling.

[0060] Combined with Figure 1 and Figure 2, in other embodiments, a longitudinal beam unit 130 connected to a plurality of cross beam units 110 may also be provided in the area between two lateral guide rails 120, and the roller unit 140 supports the longitudinal beam unit 130, so as to realize the common support for the plurality of cross beam units 110. Alternatively, the roller unit 140 may support one or more of the cross beam units 110, so as to transmit the supporting force to all the cross beam units 110 through the longitudinal beam unit 130.

[0061] Combined with Figure 3 and Figure 4 , specifically, each cross beam unit 110 is provided with an installation cavity 1121, and the installation cavities 1121 on the plurality of cross beam units 110 are arranged at intervals and oppositely in the first direction. The longitudinal beam unit 130 is disposed in the installation cavities 1121 on the plurality of cross beam units 110. In this way, the connection between the longitudinal beam unit 130 and the plurality of cross beam units 110 can be realized.

[0062] Combined with Figure 1 and Figure 2 , specifically, the cross beam unit 110 includes a plurality of cross beams 111 arranged in the second direction. The length direction of each cross beam 111 is parallel to the second direction. A connecting member 112 is provided between every two adjacent cross beams 111. The installation cavity 1121 is disposed in the connecting member 112, and the longitudinal beam unit 130 is disposed in the installation cavity 1121 of the connecting member 112.

[0063] It can be understood that the plurality of cross beams 111 are connected by the connecting member 112 to form the cross beam unit 110. Compared with the method of making the cross beam unit 110 with a single cross beam 111, a single cross beam 111 can be made shorter. In this way, the form and position tolerance of a single cross beam 111 is easy to control.

[0064] Combined with Figure 4 and Figure 5 , specifically, positioning portions 1122 are provided at both ends of the connecting member 112. For the connecting member 112 and the two cross beams 111 located at its both ends, the positioning portion 1122 at one end of the connecting member 112 penetrates into one of the cross beams 111, and the positioning portion 1122 at the other end penetrates into the other cross beam 111.

[0065] Wherein, after the positioning portion 1122 penetrates into the cross beam 111, it is further fixed by a first fastener.

[0066] Specifically, the cross beam 111 is provided with a first assembly hole 1111 penetrating through its side portion. The positioning portion 1122 is provided with a second assembly hole 11221 opposite to the first assembly hole 1111. The first fastener penetrates through the first assembly hole 1111 and the second assembly hole 11221, so as to realize the fixation of the cross beam 111 and the connecting member 112.

[0067] Among them, the first fastener can be a pin, and the first assembly hole 1111 and the second assembly hole 11221 are pin holes.

[0068] Furthermore, as Figure 3 , a first clearance groove 1112 is provided on the inner wall of the cross beam 111. The first clearance groove 1112 can allow burrs on the positioning portion 1122 to enter, facilitating the smooth assembly of the positioning portion 1122 into the cross beam 111.

[0069] Combined with Figure 4 and Figure 5 , it should be noted that the longitudinal beam unit 130 passes through the installation cavity 1121 of the connecting member 112 on multiple cross beam units 110 and is also fixed by a second fastener.

[0070] Specifically, the connecting member 112 is provided with a third assembly hole 1123 penetrating its side and communicating with the installation cavity 1121. The longitudinal beam unit 130 is provided with a fourth assembly hole 131 opposite to the third assembly hole 1123. The second fastener passes through the third assembly hole 1123 and the fourth assembly hole 131, thereby realizing the fixation of the longitudinal beam unit 130 and the connecting member 112.

[0071] Among them, the second fastener can be a pin, and the third assembly hole 1123 and the fourth assembly hole 131 are pin holes. Or, the second fastener is a screw, the third assembly hole 1123 is a through hole, and the fourth assembly hole 131 is a threaded hole.

[0072] Furthermore, the cavity wall of the installation cavity 1121 is provided with a second clearance groove 1125. The second clearance groove 1125 can allow burrs on the longitudinal beam unit 130 to enter, facilitating the smooth penetration of the longitudinal beam unit 130 into the connecting member 112.

[0073] Combined with Figure 4 and Figure 6 , furthermore, an assembly groove 1126 is formed at the bottom of the connecting member 112. The roller unit 140 is arranged in the assembly groove 1126. Most of the roller unit 140 is hidden inside the connecting member 112, and only the bottom of the roller unit 140 extends out of the assembly groove 1126 for contacting the support guide rail 300. In this way, during the coating process, the area of the roller unit 140 coated with coating dust can be reduced, thereby reducing the phenomenon of slag falling caused by friction between the roller unit 140 and other parts during subsequent rolling.

[0074] It should be noted that the assembly groove 1126 can be formed at the bottom of the connecting member 112 of each cross beam unit 110 to install the roller unit 140, or the assembly groove 1126 can be formed at the bottom of the connecting member 112 of one or more cross beam units 110 to respectively install different roller units 140.

[0075] It can be understood that by providing an assembly groove 1126 at the bottom of the connecting member 112 for installing the roller unit 140, the roller unit 140 can not only directly support the crossbeam unit 110, but also support multiple crossbeam units 110 through the longitudinal beam unit 130.

[0076] Combined with Figure 3 and Figure 4 , further, the longitudinal beam unit 130 is of a hollow structure. The longitudinal beam unit 130 is located above the assembly groove 1126, and a communication port 132 communicating with the assembly groove 1126 is provided at the lower side of the longitudinal beam unit 130. The top of the roller unit 140 extends into the longitudinal beam unit 130 through the communication port 132.

[0077] It can be understood that the longitudinal beam unit 130 being of a hollow structure is beneficial to weight reduction. Moreover, by extending the top of the roller unit 140 into the longitudinal beam unit 130 through the communication port 132, the space inside the longitudinal beam unit 130 can be utilized for installing the roller unit 140, thereby reducing the space occupied by the entire vehicle 100 in the vertical space.

[0078] It can be understood that if the space inside the longitudinal beam unit 130 is not utilized, the entire roller unit 140 will inevitably move downward, resulting in an increase in the space occupied by the entire vehicle 100 in the vertical space.

[0079] Please refer to Figure 4 , Figure 7 and Figure 8 , in some embodiments, the roller unit 140 includes a support assembly 141 disposed in the assembly groove 1126 and a roller 142 rotatably disposed on the support assembly 141. The bottom of the roller 142 extends out of the assembly groove 1126.

[0080] Specifically, the bottom of the roller 142 extends out of the assembly groove 1126 for contacting the support guide rail 300, so as to support the connecting member 112 through the support assembly 141, and then support the crossbeam unit 110 and the longitudinal beam unit 130.

[0081] It should be noted that the assembly groove 1126 is provided in the connecting member 112 rather than the crossbeam 111, which can avoid the problem that the crossbeam 111 has a reduced stiffness and is prone to deformation due to the provision of the assembly groove 1126 on the crossbeam 111.

[0082] Please refer to Figure 3 , Figure 4 , Figure 6 , Figure 7 and Figure 8, Further, the support component 141 includes a support member 1411 fixed to the assembly groove 1126 and a support shaft 1412 disposed on the support member 1411. The support shaft 1412 is located within the assembly groove 1126, and the roller 142 is rotatably sleeved on the support shaft 1412.

[0083] Specifically, the support member 1411 is provided with a fifth assembly hole 14111, and the connecting member 112 is provided with a sixth assembly hole 1124 corresponding to the fifth assembly hole 14111. By inserting a pin 150 through the fifth assembly hole 14111 and the sixth assembly hole 1124, the connection between the support member 1411 and the connecting member 112 is realized. Among them, the pin 150 can be an R-shaped pin.

[0084] Among them, the support shaft 1412 is further connected with a first covering portion 14121 and a second covering portion 143. The first covering portion 14121 and the second covering portion 143 are sleeved outside the support shaft 1412 and are respectively located on both sides of the roller 142 along the axial direction of the roller 142, and both the first covering portion 14121 and the second covering portion 143 are located within the assembly groove 1126.

[0085] It can be understood that the first covering portion 14121 and the second covering portion 143 can reduce the risk of coating dust entering the gap between the roller 142 and the support shaft 1412, thereby reducing the phenomenon of slag falling caused by friction between the roller 142 and other parts when the roller 142 rolls.

[0086] It should be noted that a bushing 1413 is further provided between the roller 142 and the support shaft 1412.

[0087] As Figure 9 shown, in some embodiments, both lateral guide rails 120 include an end fixing portion 121 connected to a plurality of cross beam units 110 and a support portion 122 connected to the fixing portion 121. An avoidance space 124 is formed below the support portion 122.

[0088] Specifically, the length direction of the fixing portion 121 is parallel to the first direction, and the fixing portion 121 is connected to the ends of a plurality of cross beam units 110. The support portion 122 is connected to the upper side portion of the fixing portion 121, and the length direction of the support portion 122 is parallel to the first direction. And, the lower part of the support portion 122 is the avoidance space 124, that is, no other entity is provided below the support portion 122 of the lateral guide rail 120. When the driving wheel 200 supports the support portion 122, the driving wheel 200 is located within the avoidance space 124. Since no other part is provided below the support portion 122 of the lateral guide rail 120, the lateral guide rail 120 will not affect the lifting of the vehicle 100 from bottom to top and separation from the driving wheel 200. Thus, it is convenient to remove the vehicle 100.

[0089] It should be noted that the support portion 122 can also be connected to the middle or the lower side portion of the fixing portion 121.

[0090] Among them, the thickness of the support portion 122 can be set between 8 mm and 15 mm. This thickness is thicker than that of the support portion of the traditional lateral guide rail, which is beneficial to reducing the risk of deformation when the support portion 122 is supported.

[0091] Furthermore, at least one lateral guide rail 120 further includes an anti-deviation portion 123 connected to the side of the support portion 122 away from the fixing portion 121, and the upper end of the anti-deviation portion 123 is connected to the support portion 122. In this way, when the driving wheel 200 supports the support portion 122 and drives the vehicle 100 to move in the first direction, the anti-deviation portion 123 can prevent the vehicle 100 from deviating in the second direction.

[0092] In some embodiments, at least one end of multiple cross beam units 110 is connected to a connection plate 160. Specifically, in this embodiment, both ends of multiple cross beam units 110 are connected to a connection plate 160. Among them, the connection plate 160 and the longitudinal beam unit 130 are arranged at intervals and side by side in the second direction, and the lateral guide rail 120 is connected to the side of the connection plate 160 away from the cross beam unit 110.

[0093] It can be understood that after the span of the two rows of driving wheels 200 on both sides of the vehicle 100 is set, by arranging the connection plate 160 at the end of the cross beam unit 110, the length of the cross beam 111 can be reduced, thereby reducing the risk of deformation of the cross beam 111.

[0094] Among them, the connection plate 160 and the cross beam unit 110 can be connected by screws or buckles.

[0095] Furthermore, the connection plate 160 is provided with ventilation holes 161 penetrating through its upper and lower sides.

[0096] It can be understood that when the vehicle 100 is placed in the coating equipment, the inside of the coating equipment needs to be evacuated and the vacuum needs to be broken. In this way, a pressure difference will be generated above and below the vehicle 100. At this time, the gas can pass through the ventilation holes 151, thereby further balancing the pressure above and below the vehicle 100.

[0097] It can be understood that during the process of evacuating or breaking the vacuum, if the pressure below the vehicle 100 is relatively high, the gas can flow to the upper part of the vehicle 100 faster through the ventilation holes 151, thereby further balancing the pressure above and below the vehicle 100. In this way, the pressure on the upper and lower sides of the coating member (silicon wafer or glass) on the vehicle 100 can be made closer, thereby reducing the risk of the coating member being displaced or broken by the blowing air. In addition, especially the gas flowing from bottom to top can reduce the upward pressure on the connecting plate 150 because the gas can pass through the connecting plate 150 from bottom to top through the ventilation holes 151, thereby reducing the risk of the vehicle 100 being lifted by the blowing air.

[0098] Combined with Figure 1 and Figure 3 , the longitudinal beam unit 130 is further provided with a socket 133 for inserting the plug on the tray to connect the tray with the longitudinal beam unit 130.

[0099] An embodiment of the present invention further provides a coating device, including: the above-mentioned vehicle 100, two rows of lateral driving wheels and a support rail 300.

[0100] Among them, the two rows of lateral driving wheels are arranged at intervals in the second direction. The two rows of lateral driving wheels are used to support two lateral guide rails 120 respectively and drive the vehicle 100 to move in the first direction; the support rail 300 is arranged on the moving path of the roller unit 140 to support the roller unit 140.

[0101] When the coating device of the present invention is in use, the two lateral guide rails 120 are used for the two rows of driving wheels respectively arranged on both sides of the vehicle 100 to extend into. The driving wheels can play a driving role and drive the vehicle 100 to move in the first direction; during the process of the driving wheels driving the vehicle to move in the first direction, the roller unit 140 is supported on the support rail 300, so as to support the middle position of multiple cross beam units 110. In this way, by increasing the support of the roller unit 140, more support points can be provided for the vehicle 100, so that when the two ends of the cross beam unit 110 are supported, the middle part is also supported. In this way, the cross-sectional strength of the cross beam unit 110 can be correspondingly reduced (corresponding to reducing parameters such as the thickness and material strength of the cross beam unit 110), achieving the effect of reducing the weight of the entire vehicle 100 and reducing costs. At the same time, it can also reduce the load on the two side driving wheels.

[0102] Such as Figure 10As shown, further, the interior of the coating device has alternately arranged sputtering areas and non-sputtering areas. The number of support guide rails 300 is multiple, and the multiple support guide rails 300 are arranged in rows and disposed within each non-sputtering area and avoid the sputtering areas. In this way, there are no support guide rails 300 in the sputtering area to affect coating. At the same time, the friction between the roller unit 140 and the support guide rail 300 occurs in the non-sputtering area and does not affect the coating in the sputtering area.

[0103] In the description of this specification, the description with reference to terms such as "one embodiment", "some embodiments", "schematic embodiments", "examples", "specific examples", or "some examples" etc. means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.

[0104] Although the embodiments of the present invention have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the claims and their equivalents.

Claims

1. A vehicle, characterized in that, Comprising: Multiple crossbeam units, with multiple said crossbeam units arranged at intervals and in parallel along a first direction; Two lateral guide rails, with two said lateral guide rails arranged at intervals and in parallel along a second direction, one of said lateral guide rails being connected to one end of multiple said crossbeam units, and the other said lateral guide rail being connected to the other end of multiple said crossbeam units, wherein the second direction is perpendicular to the first direction; At least one roller unit, with at least one said roller unit arranged in the area between two said lateral guide rails and used for supporting multiple said crossbeam units.

2. The vehicle according to claim 1, characterized in that, An assembly groove is provided at the bottom of the crossbeam unit, and the roller unit is arranged in the assembly groove and the bottom of the roller unit extends out of the assembly groove.

3. The vehicle according to claim 1, characterized in that, It further includes a longitudinal beam unit, the longitudinal beam unit is arranged between two said lateral guide rails and is arranged at intervals and in parallel with the lateral guide rails along the second direction, the longitudinal beam unit is connected to multiple said crossbeam units, and at least one said roller unit supports the crossbeam unit and the longitudinal beam unit.

4. The vehicle according to claim 3, characterized in that, The crossbeam unit includes multiple crossbeams arranged along the second direction, the length direction of each crossbeam is parallel to the second direction, and a connecting piece is arranged between every two adjacent crossbeams, and the longitudinal beam unit passes through the connecting piece.

5. The vehicle according to claim 4, characterized in that, An assembly groove is provided at the bottom of the connecting piece, and the roller unit is arranged in the assembly groove and the bottom of the roller unit extends out of the assembly groove.

6. The vehicle according to claim 5, characterized in that, The longitudinal beam unit is of a hollow structure, the longitudinal beam unit is located above the assembly groove and a communication port communicating with the assembly groove is provided at the lower side part of the longitudinal beam unit, and the top of the roller unit extends into the longitudinal beam unit through the communication port.

7. The vehicle according to claim 5, characterized in that The roller unit includes a support assembly arranged in the assembly groove and a roller rotatably arranged on the support assembly, and the bottom of the roller extends out of the assembly groove.

8. The vehicle according to claim 7, wherein The support assembly includes a support piece fixed to the assembly groove and a support shaft arranged on the support piece, the support shaft is located in the assembly groove, and the roller is rotatably sleeved on the support shaft; The support shaft is further connected with a first covering part and a second covering part, the first covering part and the second covering part are sleeved outside the support shaft and are respectively located on both sides of the roller along the axial direction of the roller, and both the first covering part and the second covering part are located in the assembly groove.

9. The vehicle according to claim 1, characterized in that, Both of the two lateral guide rails include an end fixing part connected to the ends of multiple said crossbeam units and a support part connected to the fixing part, and an avoidance space is formed below the support part; Wherein, the support part is used to be supported by a driving wheel extending into the avoidance space, and the vehicle can be lifted from bottom to top to be separated from the driving wheel.

10. The vehicle according to claim 1, characterized in that, At least one end of multiple said crossbeam units is connected to a connecting plate, and the lateral guide rail is connected to the side of the connecting plate away from the crossbeam unit.

11. The vehicle according to claim 10, wherein, The connecting plate is provided with ventilation holes penetrating through its upper and lower sides.

12. A coating device, characterized in that, Comprising: The vehicle according to any one of claims 1 to 11 above; Two rows of lateral driving wheels, the two rows of the lateral driving wheels are arranged at intervals along the second direction, and the two rows of the lateral driving wheels are used to respectively support the two lateral guide rails and drive the vehicle to move along the first direction; Support guide rail, the support guide rail is arranged on the moving path of the roller unit and is used to support the roller unit.

13. The coating device according to claim 12, wherein The interior of the coating device has alternately arranged sputtering areas and non-sputtering areas, the number of the support guide rails is multiple, and the multiple support guide rails are arranged in each non-sputtering area and avoid the sputtering areas.

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