Graphite boat supporting structure and PECVD coating equipment

Abstract

The utility model provides a graphite boat supporting structure and PECVD (Plasma Enhanced Chemical Vapor Deposition) coating equipment. The graphite boat supporting structure comprises a first electrode holder and a first bearing rod, the first electrode holder is provided with a first hole, is suitable for supporting the graphite boat and is electrically connected with the graphite boat. The first bearing rod is arranged in the first hole in a penetrating mode. A first groove body is arranged on the periphery of one of the first electrode holder and the first bearing rod, a first protrusion is arranged on the periphery of the other one of the first electrode holder and the first bearing rod, and the first protrusion extends into the first groove body to limit relative rotation between the first electrode holder and the first bearing rod. According to the scheme, the anti-rotation effect is achieved by adopting the first groove body and the first bulge which are matched with each other, so that a connecting structure between the first bearing rod and other bearing rods can be omitted while the anti-rotation structure is simplified, and the working difficulty of the graphite boat supporting structure during mounting, dismounting and maintenance can be further reduced. Therefore, the graphite boat supporting structure is convenient to mount, dismount and maintain.

Description

Technical Field

[0001] The utility model relates to the technical field of solar wafer coating, and particularly relates to a graphite boat support structure and a PECVD coating device. Background Art

[0002] With the increasingly fierce competition of tube PECVD equipment, customers have higher and higher requirements for equipment performance, wafer coating effect, yield and process problems. In related technologies, the graphite boat introduces the electrode rod from the furnace mouth position, the electrode rod is connected with the electrode seat, and the state of the electrode seat on the supporting rod is not easy to be fixed, and it is easy to rotate, resulting in poor contact between the electrode seat and the graphite boat foot, thus affecting the wafer coating effect. And because the electrode assembly is relatively close to the boat foot, it is very easy to occur arc striking and high-frequency phenomena between the front boat foot and the electrode, resulting in process failure; if the left and right adjacent electrode seats are connected together by an electrode connection block, although the self-rotation problem of the electrode seat is solved to a certain extent, there are problems such as complex assembly, high difficulty in later maintenance and cumbersome procedures. Summary of the Utility Model

[0003] The main purpose of the utility model is to propose a graphite boat support structure and a PECVD coating device, which can facilitate installation, disassembly and maintenance.

[0004] The graphite boat support structure includes:

[0005] A first electrode seat having a first hole, the first electrode seat being adapted to support the graphite boat and being electrically connected to the graphite boat;

[0006] A first supporting rod passing through the first hole;

[0007] Wherein, a first groove is provided on the outer periphery of one of the first electrode seat and the first supporting rod, and a first protrusion is provided on the outer periphery of the other, and the first protrusion extends into the first groove to limit the relative rotation between the first electrode seat and the first supporting rod.

[0008] In some embodiments, the first supporting rod extends along the axial direction. Along the circumferential direction around the axis, one end of the first protrusion has a first side wall and the other end has a second side wall. The wall surface defining one side of the first groove is a third side wall, and the wall surface defining the other side of the first groove is a fourth side wall. The first side wall is parallel and opposite to the third side wall, and the second side wall is parallel and opposite to the fourth side wall.

[0009] In some embodiments, the graphite boat support structure further includes an anti-rotation seat having a second hole, and the first supporting rod also passes through the second hole. The anti-rotation seat is adapted to be fixedly connected to the furnace body of the PECVD coating device;

[0010] Wherein, a second groove is provided on the outer periphery of one of the anti-rotation seat and the first supporting rod, and a second protrusion is provided on the outer periphery of the other. The second protrusion extends into the second groove to limit the relative rotation between the anti-rotation seat and the first supporting rod.

[0011] In some embodiments, the first supporting rod extends along the axial direction. The first supporting rod includes a first section and a second section connected to each other. The material of the first section has conductivity, and the material of the second section has insulation. In the direction perpendicular to the axial direction, the size of the second section is larger than that of the first section.

[0012] In some embodiments, the material of the first section is SiC, and the material of the second section is ceramic.

[0013] In some embodiments, the graphite boat support structure further includes a second electrode seat and a second supporting rod. The second electrode seat has a third hole. The second electrode seat is adapted to support the graphite boat and is electrically connected to the graphite boat. The second supporting rod passes through the third hole. A third groove is provided on the outer periphery of one of the second electrode seat and the second supporting rod, and a third protrusion is provided on the outer periphery of the other. The third protrusion extends into the third groove to limit the relative rotation between the second electrode seat and the second supporting rod;

[0014] Both the first supporting rod and the second supporting rod extend along the axial direction. In the transverse direction perpendicular to the axial direction, the first supporting rod and the second supporting rod are adapted to support both sides of the graphite boat respectively. The polarity of the charge carried by the first electrode seat is opposite to the polarity of the charge carried by the second electrode seat. In the axial direction, the first electrode seat and the second electrode seat are arranged staggeredly.

[0015] In some embodiments, the first supporting rod and the second supporting rod are arranged oppositely in the transverse direction perpendicular to the axial direction. The graphite boat support structure further includes a first electrode rod and a second electrode rod arranged oppositely in the transverse direction. The first electrode rod is electrically connected to the first electrode seat, and the second electrode rod is electrically connected to the second electrode seat.

[0016] In some embodiments, the first electrode seat has a fourth hole. The first electrode rod passes through the fourth hole. The axis of the fourth hole is located on the lower side of the axis of the first supporting rod. The second electrode rod includes a third section and a fourth section. The third section and the fourth section are arranged oppositely in the transverse direction. One end of the third section is connected to the second electrode seat, and the other end is connected to the fourth section. The axes of the third section and the fourth section are both located on one side of the axis of the second supporting rod in the transverse direction.

[0017] An embodiment of the second aspect of the present invention further provides a PECVD coating device, including the graphite boat support structure of any one of the above embodiments.

[0018] In some embodiments, the PECVD coating device further includes a furnace body, and the graphite boat support structure further includes a third supporting rod. The furnace body includes a furnace mouth portion and a furnace tail portion that are oppositely arranged. The furnace body defines a furnace cavity. The graphite boat support structure is configured to be inserted into the furnace cavity through the furnace mouth portion. One end of the first supporting rod is connected to the third supporting rod so that the first supporting rod and the third supporting rod are adapted to jointly support the graphite boat. The first supporting rod is connected to the furnace mouth portion, and the third supporting rod is connected to the furnace tail portion.

[0019] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0020] The graphite boat support structure of the present utility model includes a first electrode seat and a first supporting rod. A first groove is provided on the outer periphery of one of the first electrode seat and the first supporting rod, and a first protrusion is provided on the outer periphery of the other. The first protrusion extends into the first groove to limit the relative rotation between the first electrode seat and the first supporting rod. Compared with the related art where a connecting structure is provided between parallel supporting rods, the solution of the present utility model uses the mutually cooperating first groove and first protrusion to achieve the anti-rotation effect. While simplifying the anti-rotation structure, the connecting structure between the first supporting rod and other supporting rods can be omitted, thereby reducing the working difficulty of the graphite boat support structure during installation, disassembly, and maintenance. Therefore, the graphite boat support structure of the present utility model is convenient for installation, disassembly, and maintenance. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on the structures shown in these drawings without creative efforts.

[0022] Figure 1 A three-dimensional schematic diagram of the PECVD coating device provided in an embodiment of the present utility model; among them, the structure blocked by the furnace body is shown

[0023] Figure 2 is Figure 1 a partial enlarged schematic diagram at A in

[0024] Figure 3 A side view schematic diagram of the combination of the first electrode seat, the first supporting rod, and the first electrode rod provided in an embodiment of the present utility model;

[0025] Figure 4 A side view schematic diagram of the combination of the anti-rotation seat and the first supporting rod provided in an embodiment of the present utility model;

[0026] Figure 5It is a sectional view of a PECVD coating device provided in an embodiment of the present utility model;

[0027] Figure 6 It is Figure 5 a partial enlarged view of position B in

[0028] Explanation of the reference numerals in the attached drawings:

[0029] Graphite boat support structure 100;

[0030] First electrode seat 110; First hole 111; First trough 112; Third side wall 1121; Fourth side wall 1122; Fourth hole 113;

[0031] First support rod 120; First protrusion 121; First side wall 1211; Second side wall 1212; Second protrusion 122; First section 123; Second section 124;

[0032] Anti-rotation seat 130; Second hole 131; Second trough 132;

[0033] Second electrode seat 140; Third hole 141;

[0034] Second support rod 150;

[0035] First electrode rod 160;

[0036] Second electrode rod 170; Third section 171; Fourth section 172;

[0037] Third support rod 180;

[0038] Fourth support rod 190;

[0039] PECVD coating device 200;

[0040] Furnace body 210; Furnace mouth part 211; Furnace tail part 212; Furnace cavity 213;

[0041] Graphite boat 300;

[0042] Axis direction L;

[0043] Transverse direction X.

[0044] The realization, functional features and advantages of the purpose of the present utility model will be further described with reference to the embodiments and the attached drawings. Specific embodiments

[0045] The following will clearly and completely describe the technical solutions in the embodiments of the present utility model in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts belong to the scope of protection of the present utility model.

[0046] It should be noted that if there are directional indications (such as up, down, left, right, front, back,...) involved in the embodiments of the present utility model, the directional indications are only used to explain the relative positional relationship and movement conditions between components in a specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0047] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present utility model, the descriptions of "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of the features. In addition, if "and / or", "and / or", or "and / or" appear throughout the text, their meanings include three parallel scenarios. Taking "A and / or B" as an example, it includes Scenario A, or Scenario B, or the scenario where both A and B are satisfied. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of those of ordinary skill in the art to implement. When the combination of technical solutions results in contradictions or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection required by the present utility model.

[0048] As the competition in tube PECVD equipment becomes increasingly fierce, customers have higher and higher requirements for equipment performance, silicon wafer coating effect, yield, and process issues. In related technologies, the graphite boat introduces the electrode rod from the furnace mouth position, and the electrode rod is connected with an electrode seat. However, the state of the electrode seat on the support rod is not easy to fix, and it is prone to rotation, resulting in poor contact between the electrode seat and the graphite boat foot, thus affecting the silicon wafer coating effect. Moreover, because the electrode assembly is relatively close to the boat foot, it is very easy to occur the phenomena of arcing and high frequency between the front boat foot and the electrode, resulting in process failure. If the left and right adjacent electrode seats are connected together by an electrode connection block, although the self-rotation problem of the electrode seat is solved to a certain extent, there are problems such as complex assembly, high difficulty in later maintenance, and cumbersome procedures. More specifically, in related technologies, in order to reduce the rotation problem of the electrode seat, at least two electrode seats are often arranged in parallel, and the two electrode seats are respectively connected to two parallel support rods. The support rods respectively support both sides of the graphite boat, and a connection structure is connected between the two support rods to play a role in preventing rotation. However, this setting makes it necessary to control the two support rods (and the structures connected to them) simultaneously during installation and disassembly maintenance, or it is necessary to install or disassemble the connection structure in advance, resulting in a large workload and high difficulty.

[0049] In view of this, referring to Figures 1 - 6 , in the embodiments of the present invention, a graphite boat support structure 100 is provided, which includes a first electrode seat 110 and a first support rod 120. It should be noted that the PECVD (Plasma Enhanced Chemical Vapor Deposition) coating equipment is a device that uses plasma-enhanced chemical vapor deposition technology to prepare thin films. This device uses plasma-enhanced technology to achieve chemical vapor deposition at a relatively low temperature. Specifically, it excites the reaction gas to generate plasma by means of radio frequency or microwave. The active particles in the plasma have higher energy, which can promote the chemical reaction, so that the gaseous precursor undergoes a chemical reaction on the substrate surface and deposits to form a thin film. The graphite boat 300 in the PECVD equipment is a container for carrying the workpiece to be coated. Therefore, the graphite boat support structure 100 can firmly fix the graphite boat 300, ensure its stable position during the coating process, and prevent the coating quality from being affected due to movement or shaking. In addition, the graphite boat support structure 100 can also make the workpieces on the graphite boat 300 be evenly stressed and can play a certain heat transfer role.

[0050] Specifically, referring to Figures 1 - 3, the first electrode base 110 has a first hole 111. The first electrode base 110 is adapted to support the graphite boat 300 and is electrically connected to the graphite boat 300. It can be understood that the first electrode base 110 can be used to provide power for the graphite boat 300, enabling current to flow through the graphite boat 300. During the PECVD coating process, the electric field applied through the first electrode base 110 can excite the reaction gas to generate plasma, thereby promoting the deposition of the thin film. In addition, the first electrode base 110 can also be connected to the grounding system of the PECVD coating equipment 200 to ensure the safe operation of the entire system. At the same time, the first electrode base 110 can also be used to control the potential of the graphite boat 300 and adjust the characteristics of the plasma to achieve precise control of the coating process.

[0051] In practical applications, it is necessary to set the first electrode base 110 at an appropriate position according to the layout of the graphite boat 300. Therefore, referring to Figures 1 - 3, the first supporting rod 120 passes through the first hole 111. In order to fix the first electrode base 110, a first groove 112 is provided on the outer periphery of one of the first electrode base 110 and the first supporting rod 120, and a first protrusion 121 is provided on the outer periphery of the other. It can be understood that, in some embodiments, the first groove 112 is provided on the outer periphery of the first electrode base 110, and the first protrusion 121 is provided on the outer periphery of the first supporting rod 120; in other embodiments, the first protrusion 121 is provided on the outer periphery of the first electrode base 110, and the first groove 112 is provided on the outer periphery of the first supporting rod 120. For the convenience of description, the following will take the embodiment in which the first groove 112 is provided on the outer periphery of the first electrode base 110 and the first protrusion 121 is provided on the outer periphery of the first supporting rod 120 as an example. Different embodiments can be combined with different technical solutions. Thus, the first protrusion 121 extends into the first groove 112 to limit the relative rotation between the first electrode base 110 and the first supporting rod 120. With the above arrangement, the first protrusion 121 and the first groove 112 can form a mutually engaged relationship, thereby avoiding the relative rotation between the first electrode base 110 and the first supporting rod 120 due to reasons such as shaking during installation and operation, and increasing the stability of the graphite boat support structure 100. At the same time, since the graphite boat 300 is supported on the first electrode base 110, while avoiding the relative rotation between the first electrode base 110 and the first supporting rod 120, it can also avoid the relative rotation between the graphite boat 300 and the first electrode base 110, making the PECVD coating equipment 200 corresponding to the graphite boat support structure 100 work stably and have a good coating effect. Specifically, when the graphite boat 300 is supported by the first electrode base 110, the two are in surface contact under ideal conditions. When the two rotate relative to each other, the graphite boat 300 and the first electrode base 110 change from the original surface contact to a similar line-surface contact, and there is a gap in the contact surface. Under the action of a strong voltage, arcing is likely to occur, which will deteriorate the coating effect and even lead to the failure of the entire process.

[0052] Based on the above settings, combined with the actual PECVD coating equipment 200 settings and the corresponding processing procedures, since it is difficult to ensure that the center of gravity of the first electrode seat 110 is always on the axis of the first support rod 120, and the deformation of the first support rod 120 caused by the frequent picking and placing of the graphite boat 300 will also cause the deflection of the first electrode seat 110. Therefore, during the coating process of the graphite boat 300 and the process of picking and placing the boat before and after the process starts and ends, relative rotation may occur between the boat feet of the graphite boat 300 (i.e., the connection part between the graphite boat 300 and the first electrode seat 110) and the first electrode seat 110. It is difficult for the PECVD coating equipment 200 to detect and adjust this in real time. Therefore, it is necessary to consider avoiding the rotation phenomenon in the design. In the related art, the setting of a connection structure between parallel support rods is likely to increase the workload and difficulty during installation, disassembly, and maintenance. Especially for the furnace body 210 of the PECVD equipment, it often has an annular peripheral wall and surrounds to form a furnace cavity 213. On this basis, setting a connection structure between the support rods is even more likely to increase the difficulty of installation, disassembly, and maintenance.

[0053] According to the combination of the above embodiments, it can be seen that the graphite boat support structure 100 of the present invention includes a first electrode seat 110 and a first support rod 120. A first groove 112 is provided on the outer periphery of one of the first electrode seat 110 and the first support rod 120, and a first protrusion 121 is provided on the outer periphery of the other. The first protrusion 121 extends into the first groove 112 to limit the relative rotation between the first electrode seat 110 and the first support rod 120. Compared with the setting of a connection structure between parallel support rods in the related art, the solution of the present invention uses the mutually cooperating first groove 112 and first protrusion 121 to achieve the anti-rotation effect, so that while simplifying the anti-rotation structure, the connection structure between the first support rod 120 and other support rods can be omitted, thereby reducing the working difficulty during the installation, disassembly, and maintenance of the graphite boat support structure 100. Therefore, the graphite boat support structure 100 of the present invention is convenient for installation, disassembly, and maintenance.

[0054] For the specific settings of the first groove 112 and the first protrusion 121, refer to Figure 3, in some embodiments, the first support rod 120 extends along the axis direction L. Along the circumferential direction around the axis direction L, one end of the first protrusion 121 has a first side wall 1211 and the other end has a second side wall 1212. The wall surface defining one side of the first groove 112 is the third side wall 1121, and the wall surface defining the other side of the first groove 112 is the fourth side wall 1122. The first side wall 1211 is parallel and opposite to the third side wall 1121, and the second side wall 1212 is parallel and opposite to the fourth side wall 1122. It can be understood that the first side wall 1211 and the second side wall 1212 are respectively the two side wall surfaces of the first protrusion 121 along the circumferential direction, and the third side wall 1121 and the fourth side wall 1122 are respectively the two groove wall surfaces of the first groove 112 along the circumferential direction. Thus, the relative arrangement of the above two groups of wall surfaces enables the first side wall 1211 and the third side wall 1121 to form a butt-joint effect or the second side wall 1212 and the fourth side wall 1122 to form a butt-joint effect when the first support rod 120 or the first electrode base 110 rotates. And the parallel arrangement of the above two groups of wall surfaces makes the shapes of the two side wall surfaces of the first protrusion 121 and the first groove 112 along the circumferential direction match, so that the cooperation between the first protrusion 121 and the first groove 112 can have a better limiting and anti-rotation effect. In addition, in some embodiments, the first support rod 120 extends along the axis direction L. Based on this, along the direction perpendicular to the axis direction L, the cross-sections of the groove edge of the first groove 112 and the cross-section of the first protrusion 121 are both rectangular. It can be understood that in the case where the first groove 112 and the first protrusion 121 are not provided, the first electrode base 110 and the first support rod 120 are prone to relative rotation around the axis direction L. After the first groove 112 and the first protrusion 121 with rectangular cross-sections cooperate with each other, a better anti-rotation effect can be achieved. In addition, other structures with other shapes can also be provided. For example, in some other embodiments, on the premise that the first groove 112 and the first protrusion 121 can cooperate and abut against each other along the circumferential direction, along the direction perpendicular to the axis direction L, the cross-section of the groove edge of the first groove 112 and / or the cross-section of the first protrusion 121 can be in any suitable shape such as trapezoidal, triangular, semi-circular, etc.

[0055] The graphite boat support structure 100 is also fixedly connected to the furnace body 210 of the PECVD coating device 200 through other connection structures. For such connections, in order to further improve the anti-rotation effect of the graphite boat support structure 100, refer to Figure 1 , Figure 2 and Figure 4, in some embodiments, the graphite boat support structure 100 further includes an anti-rotation seat 130. The anti-rotation seat 130 has a second hole 131, and the first support rod 120 also passes through the second hole 131. The anti-rotation seat 130 is adapted to be fixedly connected to the furnace body 210 of the PECVD coating device 200 (which can be directly connected or indirectly connected). Among them, the furnace body 210 can also be called a reaction tube. The furnace body 210 can be used to accommodate the graphite boat support structure 100 and provide an environment for plasma discharge and gas reaction. It can be understood that in practical applications, according to the fixing requirements of the graphite boat support structure 100, the anti-rotation seat 130 is set at an appropriate position, and then the anti-rotation seat 130 is further fixedly connected to the furnace body 210. Since the first support rod 120 is indirectly fixedly connected to the furnace body 210 through the anti-rotation seat 130, relative rotation between the first support rod 120 and the anti-rotation seat 130 needs to be avoided. Thus, a second groove 132 is provided on the outer periphery of one of the anti-rotation seat 130 and the first support rod 120, and a second protrusion 122 is provided on the outer periphery of the other. The second protrusion 122 extends into the second groove 132 to limit the relative rotation between the anti-rotation seat 130 and the first support rod 120. From the above description, it can be seen that both the anti-rotation seat 130 and the first electrode seat 110 can play a connecting role and have a need for anti-rotation relative to the first support rod 120. The difference is that the anti-rotation seat 130 is used to connect and fix the furnace body 210, and the first electrode seat 110 is used to support the graphite boat 300. Therefore, the setting of the second groove 132 can refer to the setting of the first groove 112, and the setting of the second protrusion 122 can refer to the setting of the first protrusion 121, which will not be elaborated here, and the structural shape of the anti-rotation seat 130 can be the same as or similar to the structural shape of the first electrode seat 110. It should be noted that the fixed connection described in the present invention means a connection method that can fix the relative positions of the connected objects. Therefore, it can be either a non-detachable connection or a detachable connection. For example, in some embodiments, the anti-rotation seat 130 can be fixed on the furnace mouth support rod seat of the furnace body 210 by screws to limit the rotation of the first support rod 120, thereby restricting the rotation of the first electrode seat 110,

[0056] Combined with the actual PECVD coating process, after long-term coating, the conductivity of the first support rod 120 will also increase, posing a risk of conduction. Therefore, it is defined that the first support rod 120 extends along the axis direction L. Based on this setting, the first support rod 120 includes a first section 123 and a second section 124 that are connected to each other. The material of the first section 123 has conductivity, and the material of the second section 124 has insulation. The first section 123 can pass through the first hole 111 of the first electrode seat 110. In some embodiments, in the direction perpendicular to the axis direction L, the size of the second section 124 is larger than that of the first section 123. It can be understood that the above limitation means that the diameter sizes of the first section 123 and the second section 124 are different, so that a multi-section structure with a height difference can be formed in the vertical direction of supporting the graphite boat 300 to avoid the problem of conduction of the first support rod 120 due to long-term coating. To achieve a better anti-conduction effect, the number of the second sections 124 can be multiple, and the sizes of the second sections 124 in the direction perpendicular to the axis direction L can be different, that is, the second sections 124 can also have different diameter sizes. More specifically, in some embodiments, the material of the first section 123 is SiC, and the material of the second section 124 is ceramic. Through the above material setting, due to the good high-temperature stability and chemical stability of the SIC material, and its hardness is also prominent among non-metallic materials, the first electrode seat 110 can be correspondingly set to play a good supporting role. In addition, since the SIC material has conductivity, the graphite boat 300 and the first section 123 of the SIC material need to be separated by a high-temperature-resistant insulating material, so ceramic can be selected to play the role of carrying the graphite boat 300.

[0057] In addition, to adapt to the structure of the graphite boat 300 and according to the process requirements of PECVD coating, two sets of parallel support rods and two sets of electrode seat structures need to be set to jointly support and energize the graphite boat 300. Specifically, see Figures 5 - 6, in some embodiments, the graphite boat support structure 100 further includes a second electrode seat 140 and a second support rod 150. The second electrode seat 140 has a third hole 141. The second electrode seat 140 is adapted to support the graphite boat 300 and is electrically connected to the graphite boat 300. The second support rod 150 passes through the third hole 141. A third groove is provided on the outer periphery of one of the second electrode seat 140 and the second support rod 150, and a third protrusion is provided on the outer periphery of the other. The third protrusion extends into the third groove to limit the relative rotation between the second electrode seat 140 and the second support rod 150. Both the first support rod 120 and the second support rod 150 extend along the axial direction L. Along the transverse direction X perpendicular to the axial direction L, the first support rod 120 and the second support rod 150 are adapted to support both sides of the graphite boat 300 respectively. It can be understood that the second electrode seat 140 can also be used to provide electrical energy for the graphite boat 300 (the magnitudes or polarities of the charges carried by the first electrode seat 110 and the second electrode seat 140 can be the same or different). The second support rod 150 and the first support rod 120 are oppositely arranged and jointly play a supporting role. Therefore, the setting of the second electrode seat 140 can refer to the setting of the first electrode seat 110, and the setting of the second support rod 150 can refer to the setting of the first support rod 120. In addition, in some embodiments, the polarity of the charge carried by the first electrode seat 110 is opposite to the polarity of the charge carried by the second electrode seat 140. Along the axial direction L, the first electrode seat 110 and the second electrode seat 140 are staggered. It can be understood that the above limitation means that the first electrode seat 110 and the second electrode seat 140 are diagonally distributed. Adjacent boat plates of the graphite boat 300 carry positive and negative charges respectively, and along the axial direction L, the two boat feet at one end of the graphite boat 300 carry the same charge. It is necessary to pass currents with opposite polarities through the two boat feet at both ends of the graphite boat 300 through the first electrode seat 110 and the second electrode seat 140 respectively. Thus, in order to facilitate the connection of electricity to the first electrode seat 110 and the second electrode seat 140 respectively, staggering the first electrode seat 110 and the second electrode seat 140 can facilitate the access of positive and negative charges from the left and right sides of the furnace body 210 respectively, making the electricity connection operation more convenient.

[0058] In addition, in combination with the setting of the anti-rotation seat 130 in the above embodiments, refer to Figure 5 , in some embodiments, the number of anti-rotation seats 130 is at least two, and one of them is connected to the first support rod 120 and the other is connected to the second support rod 150. That is, the second support rod 150 also passes through the second hole 131 of the anti-rotation seat 130. A groove structure (the groove structure can refer to the setting of the second groove 132) is provided on the outer periphery of one of the anti-rotation seat 130 and the first support rod 120, and a protrusion structure (the protrusion structure can refer to the setting of the second protrusion 122) is provided on the outer periphery of the other. Thus, the anti-rotation seat 130 can play an anti-rotation role for both the first support rod 120 and the second support rod 150.

[0059] Based on the second electrode base 140 and the second support rod 150 defined in the above embodiments, further, in order to conduct current to the first electrode base 110 and the second electrode base 140 respectively, refer to Figure 5 , in some embodiments, the first support rod 120 and the second support rod 150 are oppositely arranged along the transverse direction X perpendicular to the axis direction L. Based on this, the graphite boat support structure 100 further includes a first electrode rod 160 and a second electrode rod 170 that are oppositely arranged along the transverse direction X. The first electrode rod 160 is connected to the first electrode base 110, and the second electrode rod 170 is connected to the second electrode base 140. The first electrode rod 160 is adapted to provide electrical energy for the first electrode base 110, and the second electrode rod 170 is adapted to provide electrical energy for the second electrode base 140. It can be understood that the functions of the first electrode rod 160 and the second electrode rod 170 are similar. In different embodiments, the polarity of the charge carried by the first electrode rod 160 may be opposite to or the same as the polarity of the charge carried by the second electrode rod 170, and the first electrode rod 160 and the second electrode rod 170 may have the same or similar structures.

[0060] More specifically, in order to improve the installation and operation convenience of the graphite boat support structure 100, or improve the stability and balance of the graphite boat support structure 100, or adapt to different process requirements, different structural settings can be adopted for the first electrode rod 160 and the second electrode rod 170. Specifically, refer to Figure 1 and Figure 5 、 Figure 6, in some embodiments, the length of the first electrode rod 160 may be greater than the length of the second electrode rod 170, that is, the first electrode rod 160 is a long electrode rod and the second electrode rod 170 is a short electrode rod. Based on this, the first electrode rod 160 and the second electrode rod 170 may have different connection forms. In some embodiments, the first electrode seat 110 has a fourth hole 113, the first electrode rod 160 passes through the fourth hole 113, and the axis of the fourth hole 113 is located below the axis of the first support rod 120. The second electrode rod 170 includes a third section 171 and a fourth section 172, the third section 171 and the fourth section 172 are arranged opposite to each other along the transverse direction X, one end of the third section 171 is connected to the second electrode seat 140 and the other end is connected to the fourth section 172, and the axes of the third section 171 and the fourth section 172 are both located on one side of the axis of the second support rod 150 along the transverse direction X. That is to say, according to the above settings, the first electrode rod 160 is connected to the lower side of the first support rod 120, both the third section 171 and the fourth section 172 of the second electrode rod 170 are connected to the side of the first support rod 120 along the transverse direction X, and the third section 171 and the fourth section 172 are arranged opposite to each other along the transverse direction X, which can further increase the distance between the fourth section 172 and the graphite boat 300. It can be understood that the above two types of connection settings are both to keep the first electrode rod 160 and the second electrode rod 170 away from the graphite boat 300. The connection point of the shorter second electrode rod 170 and the second electrode seat 140 is located below the leg of the graphite boat 300 on the side of the graphite boat 300 close to the furnace mouth. Therefore, only extending the connection position of the first electrode rod 160 connecting the first electrode seat 110 towards the furnace mouth can achieve the purpose of keeping away from the graphite boat 300; while the longer first electrode rod 160 can penetrate through the front boat of the entire graphite boat 300 (the part of the graphite boat 300 close to the furnace mouth), so it is not suitable to avoid the graphite boat 300 by extending the connection position of the first electrode rod 160 connecting the first electrode seat 110. Therefore, setting the connection position below the first electrode rod 160 can also keep away from the graphite boat 300.

[0061] See Figure 1 and Figure 5 , an embodiment of the second aspect of the present invention further provides a PECVD coating device 200, including the graphite boat support structure 100 of any of the above embodiments.

[0062] More specifically, see Figure 1 and Figure 5, in some embodiments, the PECVD coating apparatus 200 further includes a furnace body 210, and the graphite boat support structure 100 further includes a third support rod 180. The furnace body 210 includes a furnace mouth portion 211 and a furnace tail portion 212 disposed opposite to each other. The furnace body 210 defines a furnace cavity 213, and the graphite boat support structure 100 is configured to be inserted into the furnace cavity 213 through the furnace mouth portion 211. Among them, the setting of the furnace body 210 can refer to the foregoing description, and according to requirements, the furnace body 210 can have any suitable structural shape. The furnace mouth portion 211 is the part of the furnace body 210 for inserting and placing the graphite boat support structure 100. Therefore, the furnace mouth portion 211 can specifically be the part of the furnace body 210 with an opening on one side. Thus, one end of the first support rod 120 is connected to one end of the third support rod 180 so that the first support rod 120 and the third support rod 180 are adapted to jointly support the graphite boat 300. The first support rod 120 is connected to the furnace mouth portion 211, and the third support rod 180 is connected to the furnace tail portion 212. It can be understood that the above limitation means that the first support rod 120 can be used as the part connecting the furnace mouth portion 211. When the graphite boat 300 can be divided into a front boat close to the furnace mouth portion 211 and a rear boat close to the furnace tail portion 212, since the rear boat introduces the support rod structure and the electrode rod from the furnace tail for conducting electricity, it can ensure good contact between the graphite boat 300 and the electrode rod and stable conduction; while the front boat introduces the support rod structure and the electrode rod from the furnace mouth position. Therefore, the front boat part is more likely to rotate relative to the rear boat part. Compared with the integral support structure in the related art, the above setting enables the anti-rotation setting of the present invention (specifically, the cooperation between the first protrusion 121 and the first groove 112, and the cooperation between the second protrusion 122 and the second groove 132) to be optimized only for the front boat. The segmented support structure is easier to process, and the yield rate can be higher and the cost can be lower.

[0063] See Figure 1 and Figure 5 , in some embodiments, in combination with the setting of the second support rod 150 in the above embodiment, the second support rod 150 can be on the same side as the first support rod 120, that is, one end of the second support rod 150 can be connected to the furnace mouth portion 211, and the other end can be connected to a fourth support rod 190 similar to the function of the third support rod 180. The fourth support rod 190 is then connected to the furnace tail portion 212. Thus, the first support rod 120 and the third support rod 180 are connected end to end to form a support structure along one side of the transverse X, and the second support rod 150 and the fourth support rod 190 are connected end to end to form a support structure along the other side of the transverse X.

[0064] For other settings of the PECVD coating device 200, reference may be made to the related art and the relevant descriptions of the above embodiments. Benefiting from the improvements to the graphite boat support structure 100 in the above embodiments, the PECVD coating device 200 in the second aspect embodiments of the present utility model has the same technical effects as the graphite boat support structure 100 in the above embodiments. Details are not described herein again.

[0065] The above are only the preferred embodiments of the present utility model, and do not limit the patent scope of the present utility model accordingly. Any equivalent structural transformation made by using the content of the specification and drawings of the present utility model under the application concept of the present utility model, or any direct / indirect application in other related technical fields is included in the patent protection scope of the present utility model.

Claims

1. Graphite boat support structure, characterized in that, Comprising: A first electrode base having a first hole, the first electrode base being adapted to support a graphite boat and being electrically connected to the graphite boat; A first supporting rod passing through the first hole; Wherein, a first groove is provided on the outer periphery of one of the first electrode base and the first supporting rod, and a first protrusion is provided on the outer periphery of the other, and the first protrusion extends into the first groove to limit the relative rotation between the first electrode base and the first supporting rod.

2. The graphite boat support structure according to claim 1, wherein: The first supporting rod extends along the axial direction. Along the circumferential direction around the axial direction, one end of the first protrusion has a first side wall and the other end has a second side wall. The wall surface defining one side of the first groove is a third side wall, and the wall surface defining the other side of the first groove is a fourth side wall. The first side wall is parallel and opposite to the third side wall, and the second side wall is parallel and opposite to the fourth side wall.

3. The graphite boat support structure according to claim 1, wherein: The graphite boat support structure further includes an anti-rotation seat having a second hole, and the first supporting rod also passes through the second hole. The anti-rotation seat is adapted to be fixedly connected to the furnace body of the PECVD coating equipment; Wherein, a second groove is provided on the outer periphery of one of the anti-rotation seat and the first supporting rod, and a second protrusion is provided on the outer periphery of the other, and the second protrusion extends into the second groove to limit the relative rotation between the anti-rotation seat and the first supporting rod.

4. The graphite boat support structure according to claim 1, wherein: The first supporting rod extends along the axial direction. The first supporting rod includes a first section and a second section connected to each other. The material of the first section has conductivity, and the material of the second section has insulation. Along the direction perpendicular to the axial direction, the size of the second section is larger than the size of the first section.

5. The graphite boat support structure according to claim 4, wherein: The material of the first section is SiC, and the material of the second section is ceramic.

6. The graphite boat support structure according to claim 1, wherein: The graphite boat support structure further includes a second electrode base and a second supporting rod. The second electrode base has a third hole, the second electrode base is adapted to support a graphite boat and is electrically connected to the graphite boat. The second supporting rod passes through the third hole. A third groove is provided on the outer periphery of one of the second electrode base and the second supporting rod, and a third protrusion is provided on the outer periphery of the other, and the third protrusion extends into the third groove to limit the relative rotation between the second electrode base and the second supporting rod; Both the first supporting rod and the second supporting rod extend along the axial direction. Along the transverse direction perpendicular to the axial direction, the first supporting rod and the second supporting rod are adapted to respectively support both sides of the graphite boat. The polarity of the charge carried by the first electrode base is opposite to the polarity of the charge carried by the second electrode base. Along the axial direction, the first electrode base and the second electrode base are arranged in an alternating manner.

7. The graphite boat support structure according to claim 6, wherein: The first support rod and the second support rod are arranged transversely relative to each other in a direction perpendicular to the axis. The graphite boat support structure further includes a first electrode rod and a second electrode rod that are arranged transversely relative to each other. The first electrode rod is electrically connected to the first electrode seat, and the second electrode rod is electrically connected to the second electrode seat.

8. The graphite boat support structure according to claim 7, wherein the first electrode seat has a fourth hole, the first electrode rod passes through the fourth hole, the axis of the fourth hole is located below the axis of the first support rod. The second electrode rod includes a third section and a fourth section, the third section and the fourth section are arranged transversely relative to each other, one end of the third section is connected to the second electrode seat and the other end is connected to the fourth section, and the axes of the third section and the fourth section are both located on one side of the axis of the second support rod along the transverse direction.

9. A PECVD coating device, characterized in that, Comprising: the graphite boat support structure according to any one of claims 1-8.

10. The PECVD coating device according to claim 9, wherein the PECVD coating device further includes a furnace body. The graphite boat support structure further includes a third support rod. The furnace body includes a furnace mouth part and a furnace tail part that are arranged opposite to each other. The furnace body defines a furnace cavity. The graphite boat support structure is configured to be inserted into the furnace cavity through the furnace mouth part. The first support rod is connected to one end of the third support rod so that the first support rod and the third support rod are adapted to jointly support the graphite boat. The first support rod is connected to the furnace mouth part, and the third support rod is connected to the furnace tail part.

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