Silane liquid filling and transporting device

Abstract

The utility model discloses a silane liquid filling and transporting device which comprises a silane storage tank, a main transporting pipe, a return pipe, a filling pipe, a tank car, a nitrogen replacement pipeline and a condensing system. The filling device has the advantages that a filling method disclosed by the utility model is simple to operate and easy to realize, the filling efficiency of the silane liquid is improved, and the production cost is reduced; the risk is reduced, the silane waste amount is reduced, the cold insulation effect is good, the condensation system is arranged on the tank car, it can be guaranteed that silane in a tank body of the tank car is in a liquid state all the time, and the gasification overpressure phenomenon is avoided; the pressure of the silane in the tank body of the transportation tank car is kept in a low-pressure state all the time, compared with high-pressure gaseous silane transportation, the safety is better, the single-time transportation amount can reach 21-23 tons, the liquid transportation amount is far larger than the gas transportation amount, and the transportation cost is reduced.

Description

Technical Field:

[0001] The utility model relates to the technical field of silane liquid transportation, in particular to a silane liquid filling and transportation device. Background Art:

[0002] As a gas source providing silicon components, silane gas can be used to manufacture materials such as high-purity polysilicon, single-crystalline silicon, and silicon-carbon anodes, and is widely used in industries such as integrated circuits, biomedicine, photovoltaic, display panels, semiconductors, microelectronics, and optoelectronics. Due to its high purity and the ability to achieve refined control, it has become an irreplaceable special gas required by the above industries. With the continuous development of the chemical industry and the rich downstream industries in the gas industry, the demand for silane gas has been increasing year by year.

[0003] Silane gas is a colorless, highly reactive and compressible gas at normal temperature and pressure. However, the unique spontaneous combustion and explosiveness of silane gas make it a highly dangerous gas, and there are significant safety risks during transportation. The existing filling and transportation technology is to vaporize and pressurize silane gas and fill it into steel cylinders or manifolded trailers for transportation. The transported silane is in a gaseous state, with high transportation costs, small transportation volume, and high pressure in the transportation containers, etc. Among them, the patent number 201711310529.3 discloses a filling system suitable for high-purity chlorosilane and its filling and discharging method. This filling system realizes the filling, discharging, and purging and replacement of high-purity chlorosilane by connecting the conventional nitrogen pipeline system and the tail gas pipeline system in parallel, connecting the first high-purity nitrogen pipeline system and the tail gas pipeline system in parallel, connecting the second high-purity nitrogen pipeline system and the unloading pipeline system in parallel, and connecting the loading pipeline system with both the tail gas pipeline system and the unloading pipeline system in parallel, solving the problems of material pollution, environmental pollution, equipment corrosion, etc. faced during the filling and unloading of high-purity materials, and achieving the technical effects of protecting the equipment of the filling system, preventing material pollution and environmental pollution; by setting up a PLC control system, the filling and discharging efficiency of the filling system is improved. The patent number 202120992722.5 discloses a filling system for precisely controlling the concentration ratio of silane mixed with nitrogen, including a nitrogen storage tank, a nitrogen delivery pipeline, a silane storage tank, a silane delivery pipeline, a filling cylinder, and a filling pipeline. The filling pipeline is connected to the filling cylinder, and one end of the filling pipeline is detachably connected to the filling cylinder. The nitrogen delivery pipeline connects the nitrogen storage tank and the filling pipeline, the silane delivery pipeline connects the silane storage tank and the filling pipeline. A delivery pump, a filter, and a fine filter are installed on both the nitrogen delivery pipeline and the silane delivery pipeline. A first flow meter and a first valve are provided on the nitrogen delivery pipeline, a second flow meter and a second valve are provided on the silane delivery pipeline, and a third flow meter and a third valve are provided on the filling pipeline; the technical content disclosed in the above patents is all gaseous filling, and there are the following problems: 1. The single filling volume is small, the transportation cost is high, and the filling efficiency is low, affecting the production efficiency; 2. Compressors are required for pressurization during filling, and the filling pressure is as high as 13 - 15 MPa. The leakage risk increases under high pressure. Once leaked, it may cause fires and explosions, posing a serious threat to the lives and property safety of personnel; 3. The overall filling system to the transportation system needs to involve high-precision compressors, vacuum pump systems, helium detection instruments, nitrogen replacement systems, precision control systems, waste gas emission and recovery systems, cylinders and torpedo vehicles. The equipment structure is complex, and the operation and maintenance costs are high.

[0004] However, when transporting silane liquid, although the single filling volume increases and the transportation cost is low, silane liquid has the characteristics of being highly flammable and explosive, which makes the safety and efficiency during its filling, storage and transportation become technical problems that the industry urgently needs to solve. In view of this, the present utility model discloses a silane liquid filling and transportation device and its filling method to improve the filling efficiency and ensure operation safety. Content of the utility model:

[0005] The first object of the present utility model is to provide a silane liquid filling and transportation device with a simple connection structure, better safety and reduced production cost.

[0006] The second object of the present utility model is to provide a method for filling silane liquid with reduced transportation cost, reduced danger and reduced silane waste.

[0007] The present utility model is implemented by the following technical solutions: The first object of this patent is to provide a silane liquid filling and transportation device, which includes a silane storage tank, a transportation main pipe, a reflux pipe, a filling pipe, a tank truck, a nitrogen replacement pipeline and a condensation system; the liquid outlet of the silane storage tank is communicated with the liquid inlet end of the transportation main pipe, the liquid outlet end of the transportation main pipe is respectively communicated with the liquid inlet ends of the reflux pipe and the filling pipe, the liquid outlet end of the reflux pipe is communicated with the inlet of the silane storage tank, the liquid outlet end of the filling pipe is communicated with the liquid inlet of the tank body of the tank truck, along the silane flow direction on the transportation main pipe, a liquid pump, a regulating valve, a first pressure sensor and the nitrogen replacement pipeline are sequentially arranged, the gas outlet end of the nitrogen replacement pipeline is communicated with the transportation main pipe, and a gas valve is arranged on the nitrogen replacement pipeline;

[0008] On the reflux pipe, a first cut-off valve, a nitrogen purity detector, a gas discharge pipe and a second cut-off valve are sequentially arranged according to the gas flow direction, the gas inlet end of the gas discharge pipe is communicated with the reflux pipe, and a first discharge valve is arranged on the gas discharge pipe;

[0009] A silane detector and a filling valve are sequentially arranged on the filling pipe;

[0010] The condensation system is arranged on the top of the tank truck, the gas outlet of the tank body is communicated with the heat medium inlet of the silane cooler of the condensation system, and the heat medium outlet of the silane cooler of the condensation system is communicated with the liquid inlet of the tank body;

[0011] The signal output ends of the first pressure sensor, the nitrogen purity detector and the silane detector are all signal-connected to the signal input end of the controller, and the signal output end of the controller is respectively signal-connected to the signal input ends of the liquid pump, the regulating valve, the gas valve, the first cut-off valve, the second cut-off valve, the first discharge valve and the filling valve.

[0012] Further, it further includes a second pressure sensor and a second discharge valve; a condenser is connected to the top of the silane storage tank, the second pressure sensor is provided on the silane storage tank, and the second discharge valve is provided at the gas outlet of the condenser; the signal output end of the second pressure sensor is connected to the signal input end of the controller through a signal connection, and the signal output end of the controller is connected to the signal input end of the second discharge valve through a signal connection.

[0013] Further, the condensation system includes a silane cooler, a compressor, an air cooler, and a freon storage tank; the cold medium outlet of the silane cooler is connected to the intake port of the compressor, the outlet of the compressor is connected to the intake port of the air cooler, the liquid outlet of the air cooler is connected to the liquid inlet of the freon storage tank, and the liquid outlet of the freon storage tank is connected to the cold medium inlet of the silane cooler.

[0014] Further, a throttle valve group is provided on the connecting pipeline between the freon storage tank and the silane cooler.

[0015] Further, the tank body includes an outer tank and an inner tank. The outer tank is sleeved and fixed outside the inner tank. Perlite is filled between the inner tank and the outer tank, and the space between the outer tank and the inner tank is evacuated.

[0016] The second object of this patent is to provide a method for filling silane liquid, which includes the following steps:

[0017] (1) Connect the pipelines: After the components in the tank of the tank truck are analyzed and qualified, the liquid outlet end of the filling pipe is hermetically connected to the liquid inlet of the tank of the tank truck.

[0018] (2) Replace gas impurities: The controller controls the gas valve, the first cut-off valve, and the first discharge valve to open, and nitrogen is introduced into the transportation main pipe, the filling pipe, and the return pipe for nitrogen replacement. Impurities such as air and moisture in the pipelines are discharged from the gas discharge pipe; the nitrogen purity detector continuously detects the nitrogen purity in the return pipe and transmits the signal to the controller. When the nitrogen purity reaches more than 99%, the controller controls the gas valve and the first discharge valve to close.

[0019] (3) Replace nitrogen: The controller controls the regulating valve and the second cut-off valve to open, and uses silane to replace the nitrogen in the transportation main pipe, the filling pipe, and the return pipe; the silane detector continuously detects the silane concentration in the filling pipe and transmits the signal to the controller. When the silane concentration reaches more than 99.9999%, the controller controls the first cut-off valve and the second cut-off valve to close.

[0020] (4) Filling silane liquid: The controller controls the filling valve to open and the liquid pump to start, and fills the tank body of the tanker with silane liquid. After the filling volume of silane liquid in the tank body of the tanker reaches the requirement, the controller controls the filling valve and the regulating valve to close, stops the liquid pump, and simultaneously controls the first cut-off valve and the second cut-off valve to close.

[0021] Further, in step (3): The controller controls the regulating valve to open to 30% within 5 minutes and fully open at 10 minutes. The valve opening process should be slow to prevent sudden large opening, which may cause the silane flow rate to be uncontrollable, impact on pipelines and valves, and over time, the valve sealing performance will decline, resulting in a risk of silane leakage.

[0022] Further, step (3) also includes the following steps: The mixture of silane and nitrogen displaced enters the condenser for condensation, and the condensed silane liquid falls into the silane storage tank; The second pressure sensor constantly detects the pressure in the silane storage tank and transmits the signal to the controller. When the detected pressure in the silane storage tank reaches more than 80% of its design pressure, the controller controls the second discharge valve to open to urgently discharge the uncondensed nitrogen; When the detected pressure in the silane storage tank is lower than 80% of its design pressure, the controller controls the second discharge valve to close.

[0023] Further, step (4) also includes the following steps: The first pressure sensor constantly detects the pressure in the main transportation pipeline and transmits the signal to the controller, and the controller controls the opening degree of the regulating valve to keep the pressure in the main transportation pipeline at 1.0 - 1.2 Mpa.

[0024] Further, step (4) also includes the following steps: Simultaneously start the condensation system above the tanker, that is, open the compressor, the air cooler, and the throttle valve group; The Freon gas is compressed by the compressor, cooled into Freon liquid through the air cooler and enters the Freon storage tank, and then the Freon liquid is decompressed and cooled to -48 - -52 °C through the throttle valve group, and then enters the silane cooler to exchange heat with the vaporized silane in the tank body of the tanker to liquefy the silane, and always keep the pressure in the tank body not higher than 0.7 MPa; Subsequently, during the transportation of the tanker, the condensation system always remains open.

[0025] Advantages of the present utility model:

[0026] 1. The filling method disclosed by the present utility model is simple in operation, easy to implement, improves the filling efficiency of silane liquid, and reduces the production cost; After the filling is completed, the pipeline is directly connected to the silane storage tank for pressure maintenance, and there is no need to drain all the silane in the pipeline; Compared with gaseous filling, each time replacement and leak detection are carried out, the danger is reduced, and the waste amount of silane is reduced.

[0027] 2. The tank body of the tank truck disclosed by the present utility model has double-layer vacuum insulation, with good insulation effect. And a condensation system is configured on the tank truck, which can ensure that the silane in the tank body of the tank truck is always in a liquid state and will not occur gasification overpressure phenomenon; thus, it can ensure that the pressure of the silane in the tank body of the transport tank truck always maintains a low pressure state, and compared with the transportation of high-pressure gaseous silane, the safety is better.

[0028] 3. The single transportation volume of the tank truck disclosed by the present utility model can reach 21 - 23 tons, and the liquid transportation volume is much larger than the gas transportation volume, reducing the transportation cost. BRIEF DESCRIPTION OF THE DRAWINGS:

[0029] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained according to these drawings.

[0030] Figure 1 It is a schematic diagram of the overall structure of the present utility model.

[0031] Figure 2 It is a schematic diagram of the structure of the tank body of the tank truck.

[0032] Silane storage tank 1, transportation main pipe 2, return pipe 3, filling pipe 4, tank truck 5, tank body 51, outer tank 511, inner tank 512, perlite 513, nitrogen replacement pipeline 6, condensation system 7, silane cooler 71, compressor 72, air cooler 73, freon storage tank 74, throttle valve group 75, second pressure sensor 8, second discharge valve 9, liquid pump 10, regulating valve 11, first pressure sensor 12, gas valve 13, first cut-off valve 14, nitrogen purity detector 15, gas discharge pipe 16, second cut-off valve 17, first discharge valve 18, silane detector 19, filling valve 20, condenser 21, controller 22. DETAILED DESCRIPTION OF THE EMBODIMENTS:

[0033] Embodiment 1: As Figure 1-2As shown in the figure, a silane liquid filling and transportation device includes a silane storage tank 1, a transportation main pipe 2, a reflux pipe 3, a filling pipe 4, a tank truck 5, a nitrogen replacement pipeline 6, a condensation system 7, a second pressure sensor 8, and a second discharge valve 9. The liquid outlet of the silane storage tank 1 is communicated with the liquid inlet end of the transportation main pipe 2. The liquid outlet end of the transportation main pipe 2 is respectively communicated with the liquid inlet ends of the reflux pipe 3 and the filling pipe 4. The liquid outlet end of the reflux pipe 3 is communicated with the inlet of the silane storage tank 1. The liquid outlet end of the filling pipe 4 is communicated with the liquid inlet of the tank body 51 of the tank truck 5. Along the silane flow direction on the transportation main pipe 2, a liquid pump 10, a regulating valve 11, a first pressure sensor 12, and a nitrogen replacement pipeline 6 are sequentially arranged. The liquid pump 10 is a magnetic pump, which is driven by the magnetic coupling principle to ensure no leakage and excellent sealing performance. The pump body material is required to be corrosion-resistant.

[0034] The gas outlet end of the nitrogen replacement pipeline 6 is communicated with the transportation main pipe 2, and a gas valve 13 is arranged on the nitrogen replacement pipeline 6. Along the gas flow direction on the reflux pipe 3, a first cut-off valve 14, a nitrogen purity detector 15, a gas discharge pipe 16, and a second cut-off valve 17 are sequentially arranged. The gas inlet end of the gas discharge pipe 16 is communicated with the reflux pipe 3, and a first discharge valve 18 is arranged on the gas discharge pipe 16. A silane detector 19 and a filling valve 20 are sequentially arranged on the filling pipe 4. A condensation system 7 is arranged on the top of the tank truck 5. The gas outlet of the tank body 51 is communicated with the hot medium inlet of the silane cooler 71 of the condensation system 7. The hot medium outlet of the silane cooler 71 of the condensation system 7 is communicated with the liquid inlet of the tank body 51, which can ensure that the silane in the tank body 51 of the tank truck 5 is always in a liquid state and there will be no gasification overpressure phenomenon. Furthermore, it can ensure that the pressure of the silane in the tank body 51 of the transportation tank truck 5 is always maintained at a low pressure state, and the safety is better compared with the transportation of high-pressure gaseous silane. A condenser 21 is communicated and arranged on the top of the silane storage tank 1. A second pressure sensor 8 is arranged on the silane storage tank 1, and a second discharge valve 9 is arranged at the gas outlet of the condenser 21.

[0035] The condensation system 7 includes a silane cooler 71, a compressor 72, an air cooler 73, and a freon storage tank 74. The cold medium outlet of the silane cooler 71 is communicated with the inlet of the compressor 72. The outlet of the compressor 72 is communicated with the inlet of the air cooler 73. The liquid outlet of the air cooler 73 is communicated with the inlet of the freon storage tank 74. The liquid outlet of the freon storage tank 74 is communicated with the cold medium inlet of the silane cooler 71. A throttle valve group 75 is arranged on the connecting pipeline between the freon storage tank 74 and the silane cooler 71.

[0036] The tank body 51 includes an outer tank 511 and an inner tank 512. The outer tank 511 is sleeved and fixed outside the inner tank 512. The material of the inner tank 512 is S31603, and the material of the outer tank 511 is Q345R. Perlite 513 is filled between the inner tank 512 and the outer tank 511, and the space between the outer tank 511 and the inner tank 512 is evacuated, ensuring good cold insulation effect.

[0037] The signal output ends of the first pressure sensor 12, the second pressure sensor 8, the nitrogen purity detector 15 and the silane detector 19 are all signal-connected to the signal input end of the controller 22, and the signal output end of the controller 22 is respectively signal-connected to the signal input ends of the liquid pump 10, the regulating valve 11, the gas valve 13, the first cut-off valve 14, the second cut-off valve 17, the first discharge valve 18, the second discharge valve 9 and the filling valve 20.

[0038] All pipelines of this device are made of 316L stainless steel pipes, with the grade of EP level, having extremely high corrosion resistance and can be used under harsh conditions to ensure the cleanliness of filling; all valves of this device are imported pneumatic diaphragm valves, with the material of 316L and the grade of EP level.

[0039] In the filling and transportation device of the present utility model, the cost of the filling equipment is about 4 million to 7 million, the cost of the tank truck 5 is about 0.5 million, and the price of the condensation system 7 is about 150,000 to 200,000.

[0040] The price of the existing silane gas filling equipment is between 20 million and 45 million, and the price of the torpedo car bundle is about 0.95 million. Obviously, the cost of using the silane liquid filling and transportation device of the present utility model is cheaper.

[0041] Example 2: A method for filling silane liquid, which includes the following steps:

[0042] (1) Connect the pipelines: After the components in the tank body 51 of the tank truck 5 are analyzed and qualified (i.e., nitrogen content: <0.05 PPM; oxygen content: <0.05 PPM; borane content: <0.2 PPM; phosphine content: <0.2 PPM), the liquid outlet end of the filling pipe 4 is hermetically connected to the liquid inlet of the tank body 51 of the tank truck 5.

[0043] (2) Displace gas impurities: The controller 22 controls the gas valve 13, the first cut-off valve 14 and the first discharge valve 18 to open, and nitrogen is introduced into the transportation main pipe 2, the filling pipe 4 and the return pipe 3 for nitrogen displacement, and impurities such as air and moisture in the pipelines are discharged from the gas discharge pipe 16; the nitrogen purity detector 15 continuously detects the nitrogen purity in the return pipe 3 and transmits the signal to the controller 22. When the nitrogen purity reaches more than 99%, the controller 22 controls the gas valve 13 and the first discharge valve 18 to close.

[0044] (3) Replace nitrogen: The controller 22 controls the regulating valve to open to 30% within 5 minutes and fully open at 10 minutes. The valve opening process should be slow to prevent sudden large opening, which may cause uncontrollable silane flow, impact on pipelines and valves, and over time, the valve sealing performance will decline, posing a risk of silane leakage. And control the second cut-off valve 17 to open, and use silane to replace the nitrogen in the transportation main pipe 2, filling pipe 4 and return pipe 3. The silane detector 19 continuously detects the silane concentration in the filling pipe 4 and transmits the signal to the controller 22. When the silane concentration reaches more than 99.9999%, the controller 22 controls the first cut-off valve 14 and the second cut-off valve 17 to close. The mixture of silane and nitrogen displaced enters the condenser 21 for condensation, and the condensed silane liquid falls into the silane storage tank 1. The second pressure sensor 8 continuously detects the pressure in the silane storage tank 1 and transmits the signal to the controller 22. When the detected pressure in the silane storage tank 1 reaches more than 80% of its design pressure, the controller 22 controls the second discharge valve 9 to open to urgently discharge the uncondensed nitrogen. When the detected pressure in the silane storage tank 1 is lower than 80% of its design pressure, the controller 22 controls the second discharge valve 9 to close.

[0045] (4) Fill silane liquid: The controller 22 controls the filling valve 20 to open and controls the liquid pump 10 to start to fill the silane liquid into the tank body 51 of the tank truck 5. After the filling amount of the silane liquid in the tank body 51 of the tank truck 5 reaches the requirement, control the filling valve 20 and the regulating valve 11 to close, and stop the liquid pump 10. At the same time, control the first cut-off valve 14 and the second cut-off valve 17 to close to keep the return pipe 3 always the same as the silane storage tank 1, preventing overpressure caused by the vaporization of the low-temperature silane liquid in the transportation main pipe 2, filling pipe 4 and return pipe 3. The first pressure sensor 12 continuously detects the pressure in the transportation main pipe 2 and transmits the signal to the controller 22. The controller 22 controls the opening degree of the regulating valve 11 to keep the pressure in the transportation main pipe 2 at 1.0 - 1.2 Mpa.

[0046] At the same time, start the condensation system 7 above the tank truck 5, that is, open the compressor 72, air cooler 73 and throttle valve group 75. The Freon gas is compressed by the compressor 72, cooled into Freon liquid by the air cooler 73 and enters the Freon storage tank 74, and then the Freon liquid is depressurized and cooled to -48 - -52 °C through the throttle valve group 75, and then enters the silane cooler 71 to exchange heat with the vaporized silane in the tank body 51 of the tank truck 5 to liquefy the silane, and always keep the pressure in the tank body 51 not higher than 0.7 MPa. During the subsequent transportation of the tank truck 5, the condensation system 7 always remains open to maintain the pressure stability in the tank body 51 of the tank truck 5.

[0047] The maximum filling quantity of silane gas during transportation is 4.2 tons of silane per vehicle. For the transportation of liquid silane, 21 - 23 tons can be filled per vehicle. The transportation volume of liquid silane is more than 5 times that of gaseous silane. Calculated based on a transportation cost of 5 - 10 yuan per kilometer and a transportation distance of 1000 kilometers, for transporting the same mass of silane, the transportation cost of gaseous silane is 25,000 - 50,000 yuan, while the transportation cost of liquid silane is 5,000 - 10,000 yuan. This greatly reduces the transportation cost of silane.

[0048] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the protection scope of the present invention.

Claims

1. A silane liquid filling and transportation device, characterized in that, It includes a silane storage tank, a transportation main pipe, a reflux pipe, a filling pipe, a tank truck, a nitrogen replacement pipeline, and a condensation system; the liquid outlet of the silane storage tank is communicated with the liquid inlet end of the transportation main pipe, the liquid outlet end of the transportation main pipe is respectively communicated with the liquid inlet ends of the reflux pipe and the filling pipe, the liquid outlet end of the reflux pipe is communicated with the inlet of the silane storage tank, the liquid outlet end of the filling pipe is communicated with the liquid inlet of the tank body of the tank truck, a liquid pump, a regulating valve, a first pressure sensor, and the nitrogen replacement pipeline are sequentially arranged on the transportation main pipe along the silane flow direction, the gas outlet end of the nitrogen replacement pipeline is communicated with the transportation main pipe, and a gas valve is arranged on the nitrogen replacement pipeline; A first cut-off valve, a nitrogen purity detector, a gas discharge pipe, and a second cut-off valve are sequentially arranged on the reflux pipe along the gas flow direction, the gas inlet end of the gas discharge pipe is communicated with the reflux pipe, and a first discharge valve is arranged on the gas discharge pipe; A silane detector and a filling valve are sequentially arranged on the filling pipe; The condensation system is arranged on the top of the tank truck, the gas outlet of the tank body is communicated with the hot medium inlet of the silane cooler of the condensation system, and the hot medium outlet of the silane cooler of the condensation system is communicated with the liquid inlet of the tank body; The signal output ends of the first pressure sensor, the nitrogen purity detector, and the silane detector are all signal-connected to the signal input end of the controller, and the signal output end of the controller is respectively signal-connected to the signal input ends of the liquid pump, the regulating valve, the gas valve, the first cut-off valve, the second cut-off valve, the first discharge valve, and the filling valve.

2. The silane liquid filling and transportation device according to claim 1, wherein It further includes a second pressure sensor and a second discharge valve; a condenser is communicated and arranged on the top of the silane storage tank, the second pressure sensor is arranged on the silane storage tank, and the second discharge valve is arranged at the gas outlet of the condenser; the signal output end of the second pressure sensor is signal-connected to the signal input end of the controller, and the signal output end of the controller is signal-connected to the signal input end of the second discharge valve.

3. The silane liquid filling and transportation device according to claim 1, characterized in that, The condensation system includes a silane cooler, a compressor, an air cooler, and a freon storage tank; the cold medium outlet of the silane cooler is communicated with the air inlet of the compressor, the air outlet of the compressor is communicated with the air inlet of the air cooler, the liquid outlet of the air cooler is communicated with the liquid inlet of the freon storage tank, and the liquid outlet of the freon storage tank is communicated with the cold medium inlet of the silane cooler.

4. The silane liquid filling and transportation device according to claim 3, characterized in that, A throttle valve group is arranged on the connecting pipeline between the freon storage tank and the silane cooler.

5. A silane liquid filling and transportation device according to claim 1, characterized in that, The tank body includes an outer tank and an inner tank, the outer tank is sleeved and fixed outside the inner tank, perlite is filled between the inner tank and the outer tank, and the space between the outer tank and the inner tank is evacuated.

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