Detection system

Abstract

The embodiment of the utility model relates to the technical field of optical detection, and provides a detection system comprising: a detection module comprising a first light source used for generating first incident light, the first incident light being linearly polarized light, the first incident light penetrating an object to be detected to form first transmission light; the second light source is used for generating second incident light, the second incident light is non-polarized light, and the second incident light penetrates through the object to be measured to form second transmission light; the detection assembly is used for detecting one or combination of the first transmission light and the second transmission light penetrating through the object to be detected; the light path adjusting assembly is used for switching the first incident light and the second incident light entering the detection assembly, so that the first transmission light and the second transmission light enter the detection assembly at different moments; or the light path adjusting assembly is used for enabling the first transmission light and the second transmission light to be respectively and simultaneously incident to different areas of the detection assembly. The detection system provided by the embodiment of the utility model is at least beneficial to improving the detection efficiency.

Description

Technical Field

[0001] The embodiments of the present application relate to the technical field of optical detection, and particularly to a detection system. Background Art

[0002] In the process of semiconductor manufacturing, in order to ensure the quality of semiconductor devices, defect detection needs to be carried out in each link of the semiconductor manufacturing process. For example, wafer defect detection is to detect whether there are defects such as grooves, particles, scratches, etc. and the defect positions in the wafer. Defect detection has a wide range of applications. The existence of defects on semiconductor materials may lead to the failure of the formed devices. Therefore, in the semiconductor manufacturing process, it is also necessary to perform defect detection on semiconductor materials to ensure the product qualification rate.

[0003] Currently, the commonly used defect detection methods mainly include two categories: electron beam detection and optical detection. Optical detection is a general term for methods that use the interaction between a light source and a chip to achieve detection. Optical detection methods have the characteristics of fast detection speed and no additional pollution, and are widely used in defect detection. Among them, the light scattering method is one of the most important optical detection methods. Its basic principle is to judge the presence or absence of defects and the defect size by scanning and detecting whether there is incident light and defect scattered light and the intensity of the defect scattered light.

[0004] Currently, semiconductor materials often have various types of defects. The defect detection of semiconductor materials often requires multiple detection modes to detect various types of defects. In this way, the defect detection of semiconductor materials is prone to missed detection problems, and during the detection process of semiconductor materials, multiple detection modes often need to be detected separately, resulting in low detection efficiency. Summary of the Utility Model

[0005] The embodiments of the present application provide a detection system, which is beneficial to improving the detection efficiency.

[0006] According to some embodiments of the present application, an embodiment of the present application provides a detection system, including: a detection module, including: a first light source for generating a first incident light, the first incident light being linearly polarized light, and the first incident light passing through the object to be measured to form a first transmitted light; a second light source for generating a second incident light, the second incident light being non-polarized light, and the second incident light passing through the object to be measured to form a second transmitted light; a detection component for detecting one or a combination of the first transmitted light and the second transmitted light passing through the object to be measured; an optical path adjustment component for switching the first incident light and the second incident light entering the detection component, so that the first transmitted light and the second transmitted light enter the detection component at different times; or, the optical path adjustment component is used to make the first transmitted light and the second transmitted light incident on different regions of the detection component simultaneously.

[0007] In some embodiments, the optical path adjustment assembly includes: a reflecting mirror and a controller connected to the reflecting mirror; the controller is configured to control the reflecting mirror to move to a preset position so that the second incident light is reflected by the reflecting mirror to the object to be measured to form second transmitted light; the controller is further configured to control the reflecting mirror to deviate from the preset position so that the first incident light is incident on the object to be measured to form first transmitted light; wherein, at the same moment, one of the first incident light and the second incident light is incident on the object to be measured.

[0008] In some embodiments, the optical path adjustment assembly further includes: a polarizer, the polarizer is fixed in the optical path of the first transmitted light, or the polarizer is connected to the controller, and the controller is further configured to control the movement of the polarizer so that the first transmitted light enters the detection assembly after passing through the polarizer, and the second transmitted light directly enters the detection assembly; the polarization direction of the polarizer is perpendicular to the polarization direction of the first incident light.

[0009] In some embodiments, the optical path adjustment assembly includes: a first semi-transparent semi-reflecting mirror, the first incident light and the second incident light are respectively incident on different positions of the first semi-transparent semi-reflecting mirror, the first incident light passes through the first semi-transparent semi-reflecting mirror and irradiates on the first position of the object to be measured, and the second incident light is reflected by the first semi-transparent semi-reflecting mirror and irradiates on the second position of the object to be measured, wherein, the first position is different from the second position.

[0010] In some embodiments, the optical path adjustment assembly further includes: a polarizer, the first transmitted light enters the detection assembly after passing through the polarizer, and the second transmitted light directly enters the detection assembly.

[0011] In some embodiments, the first transmitted light and the second transmitted light are incident on different regions of the same detection assembly; or, the detection assembly includes: a first detector, the first transmitted light is incident on the first detector, and the first detector is configured to detect the first transmitted light; a second detector, the second transmitted light is incident on the second detector, and the second detector is configured to detect the second transmitted light.

[0012] In some embodiments, the optical path adjustment assembly further includes: a second semi-transparent semi-reflecting mirror, the first transmitted light is incident on the second semi-transparent semi-reflecting mirror to undergo reflection and transmission, and the second transmitted light is incident on the second semi-transparent semi-reflecting mirror to undergo reflection and transmission; a first aperture stop, the first aperture stop is configured to block the second transmitted light transmitted through the second semi-transparent semi-reflecting mirror and allow the first transmitted light transmitted through the second semi-transparent semi-reflecting mirror to pass through, so that the first transmitted light is incident on the first detector; a second aperture stop, the second aperture stop is configured to block the first transmitted light reflected by the second semi-transparent semi-reflecting mirror and allow the second transmitted light reflected by the second semi-transparent semi-reflecting mirror to pass through, so that the second transmitted light is incident on the second detector.

[0013] In some embodiments, the optical path adjustment assembly further includes: a polarizer, and the first transmitted light passing through the first aperture is incident on the first detector after passing through the polarizer.

[0014] In some embodiments, the optical path adjustment assembly includes: a first dichroic mirror, the first incident light passes through the first dichroic mirror and irradiates on the first position of the object to be measured, and the second incident light is reflected by the first dichroic mirror and irradiates on the second position of the object to be measured, wherein the wavelength of the first incident light is different from that of the second incident light; the first position is the same as or different from the second position; a second dichroic mirror, the first transmitted light passes through the second dichroic mirror, and the second transmitted light is reflected by the second dichroic mirror; the detection assembly includes: a first detector, the first transmitted light transmitted through the second dichroic mirror is incident on the first detector, and the first detector is used to detect the first transmitted light; a second detector, the second transmitted light reflected by the second dichroic mirror is incident on the second detector, and the second detector is used to detect the second transmitted light.

[0015] In some embodiments, the optical path adjustment assembly further includes: a polarizer, and the first transmitted light transmitted through the second dichroic mirror is incident on the first detector after passing through the polarizer.

[0016] In some embodiments, it further includes: a driving assembly, configured to drive the object to be measured and the detection module to move relative to each other, so that multiple positions in the area to be measured are detected by the first transmitted light and the second transmitted light.

[0017] The technical solution provided by the embodiments of the present application has at least the following advantages:

[0018] In the detection system provided by the embodiment of the present application, a detection module is included. The first light source and the second light source in the detection module are respectively used to generate a first incident light and a second incident light. The first incident light is linearly polarized light, and the second incident light is unpolarized light. After the first incident light and the second incident light pass through the object to be detected, a first transmitted light and a second transmitted light are respectively formed. The detection component is used to detect one or a combination of the first transmitted light and the second transmitted light passing through the object to be detected. The detection component determines the defects on the object to be detected through the first transmitted light and the second transmitted light. Since there may be defects with polarization characteristics or defects with non-polarization characteristics on the object to be detected, defects with polarization characteristics can only be detected by polarized light, and defects with non-polarization characteristics can only be detected by unpolarized light. In the detection system in the embodiment of the present application, the optical path adjustment component is used to switch the first incident light and the second incident light entering the detection component, so that the first transmitted light and the second transmitted light enter the detection component at different times, or the optical path adjustment component is used to make the first transmitted light and the second transmitted light simultaneously incident on different regions of the detection component. In this way, the same detection system can be used to detect the defects with polarization characteristics and the defects with non-polarization characteristics of the object to be detected respectively, and it is not necessary to repeatedly turn on and off the first light source and the second light source, improving the detection efficiency of the detection system. In addition, some defects can be measured in multiple channels. By comparing the manifestation forms of different channels, more accurate defect classification can be achieved. Multiple detection modes can be carried out simultaneously to improve the detection efficiency and avoid the problem of missed detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] One or more embodiments are illustrated by way of example in the accompanying drawings, which do not constitute a limitation to the embodiments unless otherwise stated. The figures in the drawings do not constitute a scale limitation; in order to more clearly illustrate the technical solutions in the embodiments of the present application or in the prior art, the following will briefly introduce the drawings required to be used in the embodiments. Obviously, the following described drawings are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0020] Figures 1 to 6 It is a schematic structural diagram of various detection systems provided by the embodiment of the present application. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0021] As can be seen from the background art, it is easy to miss the detection of defects in semiconductor materials, and during the detection of semiconductor materials, multiple detection modes often need to be carried out separately, resulting in low detection efficiency.

[0022] The embodiment of the present application provides a detection system, which is beneficial to improving the detection efficiency.

[0023] In the description of the embodiments of the present application, technical terms such as "first", "second", etc. are only used to distinguish different objects, and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity, specific order or primary-secondary relationship of the indicated technical features. In the description of the embodiments of the present application, the meaning of "a plurality" is more than two, unless otherwise specifically limited.

[0024] Reference to "embodiment" herein means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the present application. The phrase appears in various places in the specification and does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment mutually exclusive with other embodiments. Those skilled in the art will explicitly and implicitly understand that the embodiments described herein can be combined with other embodiments.

[0025] In the description of the embodiments of the present application, technical terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. This is only for the convenience of describing the embodiments of the present application and simplifying the description, rather than indicating or implying that the indicated device or element must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be understood as a limitation on the embodiments of the present application.

[0026] In the description of the embodiments of the present application, when a certain component "includes" another component, unless otherwise stated, other components are not excluded, and other components may further be included.

[0027] The terms used in the description of the various embodiments herein are only for describing specific embodiments and are not intended to be limiting. As used in the description of the various embodiments and the appended claims, "component" is also intended to include the plural form, unless the context clearly indicates otherwise.

[0028] The embodiments of the present application will be described in detail below with reference to the accompanying drawings. However, those of ordinary skill in the art can understand that in the embodiments of the present application, many technical details are provided to help readers better understand the present application. However, even without these technical details and various changes and modifications based on the following embodiments, the technical solutions claimed in the present application can still be implemented.

[0029] Figures 1 to 6 It is a schematic structural diagram of various detection systems provided for the embodiments of the present application.

[0030] Reference Figures 1 to 6, the detection system provided by the embodiment of the present application has a detection module, and the detection module includes: a first light source 110, a second light source 120, a detection component 310, and an optical path adjustment component. The first light source 110 is used to generate a first incident light 111, and the first incident light 111 is linearly polarized light. The first incident light 111 passes through the object under test 400 to form a first transmitted light 112; the second light source 120 is used to generate a second incident light 121, and the second incident light 121 is unpolarized light. The second incident light 121 passes through the object under test 400 to form a second transmitted light 122; the detection component 310 is used to detect one or a combination of both of the first transmitted light 112 and the second transmitted light 122 that pass through the object under test 400; the optical path adjustment component is used to switch the first incident light 111 and the second incident light 121 entering the detection component 310, so that the first transmitted light 112 and the second transmitted light 122 enter the detection component 310 at different times; or, the optical path adjustment component is used to make the first transmitted light 112 and the second transmitted light 122 incident on different regions of the detection component simultaneously.

[0031] The detection system provided by the embodiment of the present application includes a detection module. The first light source 110 and the second light source 120 in the detection module are respectively used to generate a first incident light 111 and a second incident light 121. The first incident light 111 is linearly polarized light, and the second incident light 121 is unpolarized light. After the first incident light 111 and the second incident light 121 pass through the object under test 400, they respectively form a first transmitted light 112 and a second transmitted light 122. The detection component 310 is used to detect one or a combination of both of the first transmitted light 112 and the second transmitted light 122 that pass through the object under test 400. The detection component 310 judges the defects on the object under test 400 through the first transmitted light 112 and the second transmitted light 122. Since there may be defects with polarization characteristics or defects with non-polarization characteristics on the object under test 400, defects with polarization characteristics can only be detected by polarized light, and defects with non-polarization characteristics can only be detected by unpolarized light. In the detection system in the embodiment of the present application, the optical path adjustment component is used to switch the first incident light 111 and the second incident light 121 entering the detection component 310, so that the first transmitted light 112 and the second transmitted light 122 enter the detection component 310 at different times, or the optical path adjustment component is used to make the first transmitted light 112 and the second transmitted light 122 incident on different regions of the detection component 310 simultaneously. In this way, the same detection system can be used to detect the defects with polarization characteristics and the defects with non-polarization characteristics of the object under test 400 respectively, and it is not necessary to repeatedly turn on and off the first light source 110 and the second light source 120, which improves the detection efficiency of the detection system. In addition, some defects can be measured in multiple channels. By comparing the manifestation forms of different channels, more accurate defect classification can be achieved. Multiple detection modes can be carried out simultaneously to improve the detection efficiency and avoid the problem of missed detection.

[0032] Figure 1 andFigure 2 It is the optical path diagram of the first embodiment of the detection system of the present application. Among them, Figure 1 and Figure 2 are the schematic structural diagrams of the detection system in different states.

[0033] Refer to Figure 1 and Figure 2 , in this embodiment, the detection module includes: a first light source 110, a second light source 120, a detection component 310, and an optical path adjustment component. The optical path adjustment component is used to switch the first incident light 111 and the second incident light 121 entering the detection component 310, so that the first transmitted light 112 and the second transmitted light 122 enter the detection component 310 at different times.

[0034] Specifically, refer to Figure 1 and Figure 2 , the optical path adjustment component includes: a reflecting mirror 210 and a controller 240 connected to the reflecting mirror 210. Refer to Figure 1 , the controller 240 is used to control the reflecting mirror 210 to move to a preset position, so that the second incident light 121 is reflected by the reflecting mirror 210 to the object to be measured 400 to form the second transmitted light 122; refer to Figure 2 , the controller 240 is further used to control the reflecting mirror 210 to deviate from the preset position, so that the first incident light 111 is incident on the object to be measured 400 to form the first transmitted light 112; wherein, at the same moment, one of the first incident light 111 and the second incident light 121 is incident on the object to be measured 400.

[0035] Refer to Figure 1 , when the controller 240 controls the reflecting mirror 210 to move to the preset position, the reflecting mirror 210 blocks the first incident light 111 and emits the second incident light 121 at the same time. At this time, only the second incident light 121 can be incident on the object to be measured 400, and the corresponding detection component 310 only detects the second transmitted light 122; refer to Figure 2 , when the controller 240 controls the reflecting mirror 210 to deviate from the preset position, the reflecting mirror 210 cannot block the first incident light 111. At this time, only the first incident light 111 is incident on the object to be measured 400, and the corresponding detection component 310 only detects the first transmitted light 112. By controlling the moving position of the reflecting mirror 210 by the controller 240, the first incident light 111 and the second incident light 121 entering the detection component 310 are switched, so that the first transmitted light 112 and the second transmitted light 122 enter the detection component 310 at different times, thereby detecting the defects of the polarization characteristics and the non-polarization characteristics of the object to be measured 400 at different times.

[0036] In this embodiment, when the controller 240 controls the mirror 210 to move to a preset position, the first light source 110 may not be turned off; when the controller 240 controls the mirror 210 to deviate from the preset position, the second light source 120 may not be turned off. In this way, the detection efficiency can be improved, and the detection efficiency can be prevented from decreasing due to the on and off times of the first light source 110 and the second light source 120.

[0037] In other embodiments, when the controller 240 controls the mirror 210 to move to a preset position, the first light source 110 may be turned off; when the controller 240 controls the mirror 210 to deviate from the preset position, the second light source 120 may be turned off. In this way, the service life can be prevented from being damaged due to the long-term operation of the first light source 110 and the second light source 120.

[0038] Reference Figure 1 and Figure 2 In this embodiment, the optical path adjustment assembly further includes: a polarizer 500, the polarizer 500 is connected to the controller 240, and the controller 240 is further configured to control the movement of the polarizer 500, so that the first transmitted light 112 enters the detection assembly 310 after passing through the polarizer 500, and the second transmitted light 122 directly enters the detection assembly 310; the polarization direction of the polarizer 500 is perpendicular to the polarization direction of the first incident light 111.

[0039] In other embodiments, the polarizer 500 is fixed in the optical path of the first transmitted light 112.

[0040] In this embodiment, the first light source 110 includes: a light emitting source and a polarizer, and the polarizer is perpendicular to the polarization direction of the polarizer.

[0041] In this embodiment, the detection module further includes: a driving assembly (not shown in the figure), configured to drive the object to be measured to move relative to the detection module, so that multiple positions corresponding to the area to be measured of the object to be measured are detected by the first transmitted light and the second transmitted light.

[0042] In this embodiment, both the first light source 110 and the second light source 120 may be LED (Light Emitting Diode) light sources or laser light sources.

[0043] Figure 3 is the optical path diagram of the second embodiment of the detection system of the present application.

[0044] Reference Figure 3, in this embodiment, the detection module includes: a first light source 110, a second light source 120, a detection component 310, and an optical path adjustment component. The optical path adjustment component is configured to make the first transmitted light 112 and the second transmitted light 122 simultaneously incident on different regions of the detection component. For the same or corresponding parts as those in the above embodiment, reference may be made to the corresponding description in the foregoing embodiment, which will not be elaborated in detail hereinafter.

[0045] Specifically, referring to Figure 3 , the optical path adjustment component includes: a first semi-transmissive semi-reflective mirror 211. The first incident light 111 and the second incident light 121 are respectively incident on different positions of the first semi-transmissive semi-reflective mirror 211. The first incident light 111 passes through the first semi-transmissive semi-reflective mirror 211 and then irradiates on the first position of the object under test 400, and the second incident light 121 is reflected by the first semi-transmissive semi-reflective mirror 211 and then irradiates on the second position of the object under test 400, where the first position is different from the second position; the first transmitted light 112 and the second transmitted light 122 are incident on different regions of the same detection component 310. In this way, the optical path adjustment component is configured to make the first transmitted light 112 and the second transmitted light 122 simultaneously incident on different regions of the detection component 310, and the detection component 310 can simultaneously detect the defects of the polarization characteristics and the non-polarization characteristics of the object under test 400.

[0046] Referring to Figure 3 , in this embodiment, the optical path adjustment component further includes: a polarizer 500. The first transmitted light 112 passes through the polarizer 500 and then is incident on the detection component 310, and the second transmitted light 122 is directly incident on the detection component 310. The polarization direction of the polarizer 500 is perpendicular to the polarization direction of the first incident light 111.

[0047] Figure 4 is the optical path diagram of the third embodiment of the detection system of the present application.

[0048] Referring to Figure 4 , in this embodiment, the detection module includes: a first light source 110, a second light source 120, a detection component, and an optical path adjustment component. The detection component includes: a first detector 311 and a second detector 312. The optical path adjustment component is configured to make the first transmitted light 112 and the second transmitted light 122 simultaneously incident on different regions of the detection component. For the same or corresponding parts as those in the above embodiment, reference may be made to the corresponding description in the foregoing embodiment, which will not be elaborated in detail hereinafter.

[0049] Specifically, referring to Figure 4, the optical path adjustment component includes: a first semi-transparent and semi-reflective mirror 211, a second semi-transparent and semi-reflective mirror 212, a first aperture 701 and a second aperture 702; the detection component includes: a first detector 311 and a second detector 312. The first transmitted light 112 is incident on the first detector 311, and the first detector 311 is used to detect the first transmitted light 112; the second transmitted light 122 is incident on the second detector 312, and the second detector 312 is used to detect the second transmitted light 122. The first incident light 111 and the second incident light 121 are respectively incident on different positions of the first semi-transparent and semi-reflective mirror 211. The first incident light 111 passes through the first semi-transparent and semi-reflective mirror 211 and then irradiates on the first position of the object under test 400, and the second incident light 121 is reflected by the first semi-transparent and semi-reflective mirror 211 and then irradiates on the second position of the object under test 400, where the first position is different from the second position. The first transmitted light 112 is incident on the second semi-transparent and semi-reflective mirror 212 to undergo reflection and transmission, and the second transmitted light 122 is incident on the second semi-transparent and semi-reflective mirror 212 to undergo reflection and transmission. The first aperture 701 is used to block the second transmitted light 122 transmitted through the second semi-transparent and semi-reflective mirror 212 and allow the first transmitted light 112 transmitted through the second semi-transparent and semi-reflective mirror 212 to pass through, so that the first transmitted light 112 is incident on the first detector 311; the second aperture 702 is used to block the first transmitted light 112 reflected by the second semi-transparent and semi-reflective mirror 212 and allow the second transmitted light 122 reflected by the second semi-transparent and semi-reflective mirror 212 to pass through, so that the second transmitted light 122 is incident on the second detector 312. In this way, the optical path adjustment component is used to make the first transmitted light 112 and the second transmitted light 122 incident on different regions of the detection component at the same time, and are respectively detected by the first detector 311 and the second detector 312. The first detector 311 can be only used to detect defects in polarization characteristics, and the second detector 312 can be only used to detect defects in non-polarization characteristics.

[0050] Reference Figure 4 , in this embodiment, the optical path adjustment component further includes: a polarizer 500. The first transmitted light 112 passing through the first aperture 701 passes through the polarizer 500 and then is incident on the first detector 311, and the polarization direction of the polarizer 500 is perpendicular to the polarization direction of the first incident light 111.

[0051] Figure 5 This is the optical path diagram of the fourth embodiment of the detection system of the present application.

[0052] Reference Figure 5, in this embodiment, the detection module includes: a first light source 110, a second light source 120, a detection component, and an optical path adjustment component. The detection component includes: a first detector 311 and a second detector 312. The optical path adjustment component is configured to make the first transmitted light 112 and the second transmitted light 122 simultaneously incident on different regions of the detection component. For the same or corresponding parts as the above embodiments, reference may be made to the corresponding descriptions of the foregoing embodiments, which will not be elaborated in detail hereinafter.

[0053] Specifically, referring to Figure 5 , the optical path adjustment component includes: a first dichroic mirror 221 and a second dichroic mirror 222; the first incident light 111 passes through the first dichroic mirror 221 and irradiates on a first position of the object to be measured 400, and the second incident light 121 is reflected by the first dichroic mirror 221 and irradiates on a second position of the object to be measured 400. Wherein, the wavelength of the first incident light 111 is different from that of the second incident light 121, and the first position is the same as the second position. The first transmitted light 112 passes through the second dichroic mirror 222, and the second transmitted light 122 is reflected by the second dichroic mirror 222; the first transmitted light 112 transmitted through the second dichroic mirror 222 is incident on the first detector 311, and the first detector 311 is configured to detect the first transmitted light 112; the second transmitted light 122 reflected by the second dichroic mirror 222 is incident on the second detector 312, and the second detector 312 is configured to detect the second transmitted light 122. Thus, the optical path adjustment component is configured to make the first transmitted light 112 and the second transmitted light 122 simultaneously incident on different regions of the detection component, and are respectively detected by the first detector 311 and the second detector 312. The first detector 311 can be only used to detect defects in polarization characteristics, and the second detector 312 can be only used to detect defects in non-polarization characteristics.

[0054] Specifically, the first incident light 111 can be one of red light, blue light, or green light, and the second incident light 121 can be one of red light, blue light, or green light.

[0055] Referring to Figure 5 , the optical path adjustment component further includes: a polarizer 500. The first transmitted light 112 transmitted through the second dichroic mirror 222 is incident on the first detector 311 after passing through the polarizer 500, and the polarization direction of the polarizer 500 is perpendicular to the polarization direction of the first incident light 111.

[0056] Referring to Figure 6 , which is the optical path diagram of the fifth embodiment of the detection system of the present application.

[0057] Referring to Figure 6, in this embodiment, the detection module includes: a first light source 110, a second light source 120, a detection component, and an optical path adjustment component. The detection component includes: a first detector 311 and a second detector 312. The optical path adjustment component is configured to make the first transmitted light 112 and the second transmitted light 122 simultaneously incident on different regions of the detection component. For the same or corresponding parts as those in the above embodiments, reference may be made to the corresponding descriptions in the foregoing embodiments, which will not be elaborated in detail hereinafter.

[0058] Specifically, referring to Figure 6 , the optical path adjustment component includes: a first dichroic mirror 221 and a second dichroic mirror 222; the first incident light 111 passes through the first dichroic mirror 221 and irradiates on a first position of the object to be measured 400, and the second incident light 121 is reflected by the first dichroic mirror 221 and irradiates on a second position of the object to be measured 400. Among them, the wavelength of the first incident light 111 is different from that of the second incident light 121, and the first position is different from the second position. The first transmitted light 112 passes through the second dichroic mirror 222, and the second transmitted light 122 is reflected by the second dichroic mirror 222; the first transmitted light 112 transmitted through the second dichroic mirror 222 is incident on the first detector 311, and the first detector 311 is configured to detect the first transmitted light 112; the second transmitted light 122 reflected by the second dichroic mirror 222 is incident on the second detector 312, and the second detector 312 is configured to detect the second transmitted light 122. In this way, the optical path adjustment component is configured to make the first transmitted light 112 and the second transmitted light 122 simultaneously incident on different regions of the detection component, and are respectively detected by the first detector 311 and the second detector 312. The first detector 311 can be only used to detect defects in polarization characteristics, and the second detector 312 can be only used to detect defects in non-polarization characteristics.

[0059] Specifically, the first incident light 111 can be one of red light, blue light, or green light, and the second incident light 121 can be one of red light, blue light, or green light.

[0060] Referring to Figure 6 , in this embodiment, the optical path adjustment component further includes: a polarizer 500. The first transmitted light 112 transmitted through the second dichroic mirror 222 passes through the polarizer 500 and then enters the first detector 311. The polarization direction of the polarizer 500 is perpendicular to the polarization direction of the first incident light 111.

[0061] In the detection system provided by the embodiments of the present application, a detection module is included. The first light source 110 and the second light source 120 in the detection module are respectively used to generate a first incident light 111 and a second incident light 121. The first incident light 111 is linearly polarized light, and the second incident light 121 is unpolarized light. After the first incident light 111 and the second incident light 121 pass through the object to be measured 400, a first transmitted light 112 and a second transmitted light 122 are respectively formed. The detection component 310 is used to detect one or a combination of the first transmitted light 112 and the second transmitted light 122 passing through the object to be measured 400. The detection component 310 determines the defects on the object to be measured 400 based on the first transmitted light 112 and the second transmitted light 122. Since there may be defects with polarization characteristics or defects with non-polarization characteristics on the object to be measured 400, the defects with polarization characteristics can only be detected by polarized light, and the defects with non-polarization characteristics can only be detected by unpolarized light. In the detection system in the embodiments of the present application, the optical path adjustment component is used to switch the first incident light 111 and the second incident light 121 entering the detection component 310, so that the first transmitted light 112 and the second transmitted light 122 enter the detection component 310 at different times. Alternatively, the optical path adjustment component is used to make the first transmitted light 112 and the second transmitted light 122 simultaneously incident on different regions of the detection component 310. In this way, the same detection system can be used to detect the defects with polarization characteristics and the defects with non-polarization characteristics of the object to be measured 400 respectively, and it is not necessary to repeatedly turn on and off the first light source 110 and the second light source 120, thereby improving the detection efficiency of the detection system. In addition, some defects can be measured in multiple channels. By comparing the manifestation forms of different channels, more accurate defect classification can be achieved. Multiple detection modes can be carried out simultaneously to improve the detection efficiency and avoid the problem of missed detection at the same time.

[0062] Those of ordinary skill in the art can understand that the above embodiments are specific embodiments for implementing the present application. In actual applications, various changes can be made in form and details without departing from the spirit and scope of the present application. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present application. Therefore, the protection scope of the present application should be subject to the scope defined by the claims.

Claims

1. A detection system, characterized in that, Comprising: A detection module, comprising: A first light source for generating a first incident light, the first incident light being linearly polarized light, and the first incident light passing through the object to be measured to form a first transmitted light; A second light source for generating a second incident light, the second incident light being unpolarized light, and the second incident light passing through the object to be measured to form a second transmitted light; A detection component for detecting one or a combination of the first transmitted light and the second transmitted light passing through the object to be measured; An optical path adjustment component for switching the first incident light and the second incident light entering the detection component so that the first transmitted light and the second transmitted light enter the detection component at different times; or, the optical path adjustment component is used to make the first transmitted light and the second transmitted light simultaneously incident on different regions of the detection component.

2. The detection system according to claim 1, characterized in that The optical path adjustment component includes: A reflecting mirror and a controller connected to the reflecting mirror; The controller is used to control the reflecting mirror to move to a preset position so that the second incident light is reflected by the reflecting mirror to the object to be measured to form the second transmitted light; The controller is further used to control the reflecting mirror to deviate from the preset position so that the first incident light is incident on the object to be measured to form the first transmitted light; Wherein, at the same time, one of the first incident light and the second incident light is incident on the object to be measured.

3. The detection system according to claim 2, wherein The optical path adjustment component further includes: a polarizer fixed in the optical path of the first transmitted light, or, The polarizer is connected to the controller, and the controller is further used to control the movement of the polarizer so that the first transmitted light enters the detection component after passing through the polarizer, and the second transmitted light directly enters the detection component; the polarization direction of the polarizer is perpendicular to the polarization direction of the first incident light.

4. The detection system according to claim 1, wherein, The optical path adjustment component includes: A first semi-transparent and semi-reflective mirror, the first incident light and the second incident light are respectively incident on different positions of the first semi-transparent and semi-reflective mirror, the first incident light passes through the first semi-transparent and semi-reflective mirror and then irradiates on a first position of the object to be measured, and the second incident light is reflected by the first semi-transparent and semi-reflective mirror and then irradiates on a second position of the object to be measured, wherein the first position is different from the second position.

5. The detection system according to claim 4, characterized in that, The optical path adjustment component further includes: A polarizer, the first transmitted light passes through the polarizer and then is incident on the detection component, and the second transmitted light is directly incident on the detection component.

6. The detection system according to claim 4, characterized in that The first transmitted light and the second transmitted light are incident on different regions of the same detection component; Or, the detection component includes: A first detector, the first transmitted light is incident on the first detector, and the first detector is used to detect the first transmitted light; A second detector, the second transmitted light is incident on the second detector, and the second detector is used to detect the second transmitted light.

7. The detection system according to claim 6, wherein The optical path adjustment component further includes: A second semi-transmissive and semi-reflective mirror, the first transmitted light is incident on the second semi-transmissive and semi-reflective mirror to undergo reflection and transmission, and the second transmitted light is incident on the second semi-transmissive and semi-reflective mirror to undergo reflection and transmission; A first diaphragm, the first diaphragm is configured to block the second transmitted light transmitted through the second semi-transmissive and semi-reflective mirror and allow the first transmitted light transmitted through the second semi-transmissive and semi-reflective mirror to pass through, so that the first transmitted light is incident on the first detector; A second diaphragm, the second diaphragm is configured to block the first transmitted light reflected by the second semi-transmissive and semi-reflective mirror and allow the second transmitted light reflected by the second semi-transmissive and semi-reflective mirror to pass through, so that the second transmitted light is incident on the second detector.

8. The detection system according to claim 7, wherein The optical path adjustment assembly further includes: A polarizer, the first transmitted light passing through the first diaphragm is incident on the first detector after passing through the polarizer.

9. The detection system according to claim 1, wherein The optical path adjustment assembly includes: A first dichroic mirror, the first incident light passes through the first dichroic mirror and irradiates on a first position of the object to be measured, and the second incident light is reflected by the first dichroic mirror and irradiates on a second position of the object to be measured, wherein the wavelength of the first incident light is different from the wavelength of the second incident light; the first position and the second position are the same or different; A second dichroic mirror, the first transmitted light passes through the second dichroic mirror, and the second transmitted light is reflected by the second dichroic mirror; The detection assembly includes: A first detector, the first transmitted light transmitted through the second dichroic mirror is incident on the first detector, and the first detector is configured to detect the first transmitted light; A second detector, the second transmitted light reflected by the second dichroic mirror is incident on the second detector, and the second detector is configured to detect the second transmitted light.

10. The detection system according to claim 9, wherein The optical path adjustment assembly further includes: A polarizer, the first transmitted light transmitted through the second dichroic mirror is incident on the first detector after passing through the polarizer.

11. The detection system according to any one of claims 1 to 10, characterized in that, Further included is: A driving assembly, configured to drive the object to be measured and the detection module to move relative to each other, so that multiple positions corresponding to the area to be measured of the object to be measured are detected by the first transmitted light and the second transmitted light.

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