Test accessory switching structure and system and wafer test device
By designing the test attachment switching structure, the rapid switching and automatic control of wafer test equipment is achieved, which solves the problems of high fixed asset costs and time-consuming replacement of accessories, improves the universality and testing efficiency of the equipment, and ensures a high cleanliness test environment.
Patent Information
- Application Number
- CN202422221917.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-10
- Publication Date
- 2025-07-22
- Estimated Expiration
- 2034-09-10
AI Technical Summary
When testing various special types of wafers, existing wafer testing equipment has problems such as high fixed asset costs and long time-consuming replacement of test accessories, resulting in low work efficiency and waste of labor and time costs.
A test attachment switching structure is designed, including switching components, fixed support components, connecting components, sliding components and slide rails. The slider enables rapid switching between test attachments and auxiliary accessories between different planes, and the auxiliary components are connected to the upper computer to achieve automatic control.
Real-time quick switching of test accessories and auxiliary accessories is realized, the versatility and utilization of wafer testing equipment is improved, the workflow is simplified, the pollution caused by manual operations is reduced, the testing environment is ensured with a higher cleanliness, and the stability and accuracy of the test are improved.
Smart Images
Figure CN223139657U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of wafer testing equipment, in particular to a test accessory switching structure, system and wafer testing device. Background Art
[0002] At present, wafer testing laboratories in research institutions generally involve the testing of many special types of wafers. These wafer tests are diverse, such as various types like MEMS (Micro-Electro-Mechanical System), optics, thermopiles, etc. These special types of wafers do not only require testing of partial resistance or electrical parameters like traditional wafers, but also need to be equipped with special test accessories for testing some dynamic parameters such as capacitance, resonant frequency, quality factor, light, magnetism, and special gases.
[0003] However, the wafer testing equipment on the market is mainly for mass production, and the compatibility of different types of wafer testing equipment is generally not high. Ordinary wafer testing equipment does not quite meet the testing requirements of wafer testing laboratories for various types of wafers. That is, general wafer testing equipment is dedicated to specific use. To meet the testing requirements of different products, it is necessary to increase the probe station equipment and configure other test platforms. However, this method requires a high fixed asset cost. Generally, expensive wafer testing equipment will not be separately configured to handle the testing of different types of wafers in engineering. Therefore, it also limits the testing of various characteristics of special types of wafers. At the same time, when using this method for wafer testing, engineers need to replace the required accessories according to different wafer types, which will take more time for the adjustment of test accessories, resulting in low work efficiency and wasting manpower and time costs.
[0004] Therefore, in the process of wafer testing, it is necessary to further shorten the testing time of various characteristics of various wafers and improve the devices related to the test accessories of the wafer testing equipment.
[0005] It should be noted that the above introduction of the technical background is only for the convenience of clearly and completely explaining the technical solution of the utility model and facilitating the understanding of those skilled in the art. It cannot be considered that the above technical solutions are well-known to those skilled in the art just because these solutions are described in the background art part of the utility model. Summary of the Utility Model
[0006] In view of the above-mentioned disadvantages of the prior art, the purpose of the utility model is to provide a test accessory switching structure, system and wafer testing device, which are used to solve the problems that the wafer testing equipment in the prior art requires a high fixed asset cost for testing various special types of wafers, and at the same time, it also takes more time for the adjustment of replacing test accessories, resulting in low work efficiency and wasting manpower and time costs.
[0007] To achieve the above and other related objectives, the present utility model provides a test accessory switching structure, a system, and a wafer testing device. The test accessory switching structure includes: a switching component, a fixed support component, a connecting component, a sliding component, and a first slide rail;
[0008] The switching component is placed above the fixed support component; the connecting component passes through the switching component and the upper surface of the fixed support component, connecting the switching component and the fixed support component;
[0009] The sliding components are provided on M outer side walls of the fixed support component, and one of the fixed support component's sides is designated as the test surface, while the remaining sides are auxiliary surfaces; where M is a natural number greater than or equal to 1;
[0010] The first slide rails are provided on N outer side walls of the switching component; each sliding component and each first slide rail are aligned in the same straight line; where N is a natural number greater than 1.
[0011] Optionally, the sliding component includes a second slide rail and X sliders; each slider is arranged on the second slide rail; and the second slide rail and the first slide rail are in a straight line; where X is a natural number greater than or equal to 1.
[0012] Optionally, the connecting component is arranged as a circular long rod.
[0013] Optionally, scales are provided on the test surface and each auxiliary surface.
[0014] Optionally, the height of the sliding component is equal to the height of the fixed support component.
[0015] Optionally, the test accessory switching structure further includes Y auxiliary components; two auxiliary components are provided on each side wall of the switching component and each side wall of the fixed support component, and each auxiliary component is arranged at the connection of the switching component and the fixed support component and is connected to the host computer that controls the switching of the switching component; where Y is a natural number greater than 1.
[0016] Optionally, each auxiliary component includes two height inserts and two proximity sensors; the two proximity sensors are correspondingly arranged on the lower surfaces of the two height inserts.
[0017] Optionally, at least one of the height inserts on each side wall has a protrusion.
[0018] The present utility model further provides a test accessory switching system, which at least includes: a test accessory, an auxiliary accessory, and the above test accessory switching structure; the test accessory is fixed on the sliding component of the test surface; the auxiliary accessory is fixed on the sliding component of the auxiliary surface.
[0019] The present utility model further provides a wafer testing device, and the wafer testing device at least includes the above-mentioned test accessory switching system.
[0020] As described above, the present utility model provides a test accessory switching structure, a system and a wafer testing device, having the following
[0021] Beneficial effects:
[0022] For the test accessory switching structure, system and wafer testing device of the present utility model, the test accessory switching structure includes a switching component, a fixed support component, a connecting component, a sliding component and a first slide rail. By setting the sliding component and the first slide rail, and the first slide rail and the second slide rail being on the same straight line, the test accessory and the auxiliary accessory are fixed on the slider, and the slider drives the test accessory and the auxiliary accessory to move between the test surface and the auxiliary surface of the fixed support component, so as to realize the real-time, fast and accurate switching of the test accessory and the auxiliary accessory, simplify the switching work process, improve the versatility of the wafer testing equipment in the laboratory, save space, and also improve the utilization rate of the testing equipment. At the same time, an auxiliary component is also set to be connected to the upper computer, and the upper computer controls the switching component to switch to the corresponding required plane according to the working state of the auxiliary component, simplifies the mechanical debugging, further improves the working efficiency, reduces the pollution caused by manual operation, ensures a higher cleanliness testing environment, and thus effectively improves the stability and accuracy of the performance testing of the wafer. Description of the Drawings
[0023] Figure 1 It shows a schematic structural diagram of the test accessory switching structure of the present utility model.
[0024] Figure 2 It shows an enlarged schematic structural diagram of the auxiliary component of the present utility model.
[0025] Figure 3 It shows a schematic structural diagram of a test accessory switching system of the present utility model.
[0026] Figure 4 It shows an enlarged schematic diagram of the test accessory of the present utility model arranged on the sliding component.
[0027] Figure 5 It shows a schematic structural diagram of the switching component being lifted during the switching process of the present utility model.
[0028] Description of Component Symbols
[0029] 1 Test accessory switching structure
[0030] 10 Switching component
[0031] 11 Fixed support component
[0032] 110 test surface
[0033] 111 auxiliary surface
[0034] H2 Height of the fixed support component
[0035] 12 Connecting component
[0036] 13 Sliding component
[0037] 130 Second slide rail
[0038] 131 Slide block
[0039] H1 Height of the sliding component
[0040] 14 First slide rail
[0041] 15 Auxiliary component
[0042] 150 Height insert block
[0043] 151 Proximity sensor
[0044] 2 Test accessory switching system
[0045] 20 Test accessory
[0046] 21 Auxiliary accessory Specific implementation manner
[0047] The following specific examples illustrate the implementation manners of the present utility model. Those skilled in the art can easily understand other advantages and effects of the present utility model from the content disclosed in this specification.
[0048] Please refer to Figures 1 to 5 . It should be noted that the structures, proportions, sizes, etc. shown in the drawings of this specification are only used to cooperate with the content disclosed in the specification for those skilled in the art to understand and read, and are not used to limit the implementation conditions of the present utility model. Therefore, they do not have any technical essence. Any change in the decoration of the structure, the proportional relationship, or the adjustment of the size that does not affect the effects that the present utility model can produce and the purposes that can be achieved should still fall within the scope covered by the technical content disclosed in the present utility model. At the same time, the terms such as "upper", "lower", "left", "right", "middle", and "one" cited in this specification are only for the convenience of clear narration and are not used to limit the implementation scope of the present utility model. The change or adjustment of their relative relationships should also be regarded as the scope that the present utility model can implement without substantial change in the technical content.
[0049] Such as Figure 1As shown in the figure, this embodiment provides a test accessory switching structure 1, including: a switching component 10, a fixed support component 11, a connecting component 12, a sliding component 13, and a first slide rail 14.
[0050] As Figure 1 shown in the figure, the switching component 10 is placed above the fixed support component 11, and the connecting component 12 passes through the switching component 10 and the upper surface of the fixed support component 11 to connect the switching component 10 and the fixed support component 11.
[0051] Specifically, in this embodiment, the switching component 10 is placed above the fixed support component 11, and the fixed support component 11 is fixed in place to provide stable support for the switching component 10. The connecting component 12 is set as a circular long rod that passes through the switching component 10 and the upper surface of the fixed support component 11 to connect the switching component 10 and the fixed support component 11. So that the switching component 10 can rotate around the circular long rod to switch different planes. In actual use, the shape of any connecting component that can connect the switching component and the fixed support component and facilitate the rotation of the switching component can be set arbitrarily according to needs, which will not be elaborated here one by one.
[0052] As Figure 1 shown in the figure, sliding components 13 are arranged on the M outer side walls of the fixed support component 11, and one of them is fixed as the test surface 110, and the rest are auxiliary surfaces 111; where M is a natural number greater than or equal to 1. First slide rails 14 are arranged on the N outer side walls of the switching component 10; each sliding component 13 and each first slide rail 14 are corresponding in the same straight line; where N is a natural number greater than 1.
[0053] Specifically, in this embodiment, the switching member 10 and the fixed support 11 are both polyhedrons. For example, the switching member 10 and the fixed support member 11 are set as rectangular parallelepipeds. The length and width of the rectangular parallelepiped switching member and the rectangular parallelepiped fixed support member are equal, and the heights can be equal or unequal, that is, both the rectangular parallelepiped switching member and the rectangular parallelepiped fixed support member have four outer side walls. In actual use, the shapes of the switching member and the fixed support member and the number of outer side walls can be set arbitrarily as needed, not limited to this embodiment. That is, the number of outer side walls of the fixed support member 11 and the switching member 10 can be the same or different, as long as it is ensured that the auxiliary attachment and the test attachment can be quickly switched through the sliding member 13 and the first slide rail 14. Among the four outer side walls of the rectangular parallelepiped fixed support member, one side is the test surface 110, and the other three sides are auxiliary surfaces 111. The auxiliary attachments are fixedly connected to the three auxiliary surfaces 111 through the sliding member 13, and the test attachment is fixedly connected to the test surface 110 through the sliding member 13. In actual use, the number of auxiliary surfaces is determined by the shape of the fixed support member, which will not be elaborated here one by one. The first slide rails 14 are provided on the four outer side walls of the rectangular parallelepiped switching member to ensure that the sliding member 13 and each first slide rail 14 are corresponding on the same straight line. The sliding member 13 includes a second slide rail 130 and X sliders 131; each slider 131 is provided on the second slide rail 130; and the second slide rail 130 and the first slide rail 14 are on the same straight line; where X is a natural number greater than or equal to 1. As an example, the sliding members 13 are respectively provided on the four outer side walls of the rectangular parallelepiped fixed support member, and one slider 131 is provided on each sliding member 13, that is, the sliders 131 are respectively provided on the second slide rail 130 of the test surface 110 of the rectangular parallelepiped fixed support member and the second slide rail 130 of the other three auxiliary surfaces 111. And it is ensured that the second slide rail 130 and the first slide rail 14 are on the same straight line, that is, the models of the first slide rail 14 and the second slide rail 130 are the same. In actual use, the models of the first slide rail and the second slide rail can be set arbitrarily as needed, which will not be elaborated here one by one. Among them, the height H1 of the sliding member 13 is equal to the height H2 of the fixed support member 11. In actual use, the height of the sliding member is correspondingly set according to the height of the fixed support member, which will not be elaborated here one by one. So that the slider 131 can quickly and stably move from the fixed support member 11 to the switching member 10. Furthermore, after the test of the test attachment is completed and the test attachment needs to be replaced, the tested test attachment can be switched to the auxiliary surface 111 through the switching member 10, and then another test attachment to be tested can be switched to the test surface 110 of the fixed support member 11 through the switching member 10 for testing, improving the utilization rate, further improving the work efficiency, increasing the versatility of the equipment, and saving space.Meanwhile, a scale 112 is provided on both the test surface 110 and each auxiliary surface 111, so as to facilitate the precise installation and debugging of the test attachment at the required test height position, and avoid the waste of time and labor costs caused by repeatedly checking whether the test attachment is at the required height position. In actual use, any device that can facilitate the precise installation of the test attachment at the required height position is applicable to the present utility model, and will not be elaborated one by one here.
[0054] As Figure 1 shown, the test attachment switching structure 1 further includes Y auxiliary components 15; two auxiliary components 15 are provided on each side wall of the switching component 10 and each side wall of the fixed support component 11, and each auxiliary component 15 is arranged at the connection of the switching component 10 and the fixed support component 11 and is connected to the host computer that controls the switching of the switching component 10; where Y is a natural number greater than 1.
[0055] Specifically, in this embodiment, when both the fixed support component 11 and the switching component 10 are cuboids, the number of auxiliary components 15 is 8. As Figure 2 shown, each auxiliary component 15 includes two height inserts 150 and two proximity sensors 151; each proximity sensor 151 is correspondingly arranged on the lower surface of each height insert 150. In actual use, the number of auxiliary components can be arbitrarily set according to the shapes of the fixed support component and the switching component, and will not be elaborated one by one here. The host computer controls the switching component 10 to switch the required auxiliary attachment to the corresponding test surface according to the working states of the four proximity sensors 151 on each side wall (i.e., six combination modes of 0101, 0110, 0111, 1010, 1011, 1111, where 1 means the proximity sensor 151 senses and the signal is high level, and the height insert 150 forms a protrusion downward; 0 means the proximity sensor 151 does not sense and the signal is low level, and the height of the height insert 150 does not change). Among them, one of the four height inserts 150 on each outer side wall must have a protrusion to prevent the entire test device from malfunctioning and resulting in all low potentials (i.e., anti-fooling). The automatic control of the switching of the switching component 10 is realized by the host computer, which simplifies the debugging operation of the manipulator, further improves the work efficiency, reduces the pollution caused by manual operation, ensures a higher cleanliness test environment, and thus effectively improves the stability and accuracy of the performance test of the wafer. In actual use, any structure of the auxiliary component that can control the switching plane of the switching component is applicable to the present utility model, and will not be elaborated one by one here.
[0056] As Figure 3As shown in the figure, the present utility model further provides a test accessory switching system 2, and the test accessory switching system 2 includes: a test accessory 20, an auxiliary accessory 21, and a test accessory switching structure 1; the test accessory 20 is fixed on a sliding member 13 of a test surface 110; the auxiliary accessory 21 is fixed on the sliding member 13 of an auxiliary surface 111.
[0057] Specifically, in this embodiment, as Figure 4 shown, the test accessory 20 is arranged on the sliding member 13 of the test surface 110, and the auxiliary accessory 21 is fixed on the sliding member 13 of the auxiliary surface 111. Among them, the test accessory and the auxiliary accessory include, but are not limited to, a collimator and test heads of different specifications. In actual use, any accessory capable of testing the performance of a wafer is applicable to the present utility model, and will not be elaborated here one by one. When it is necessary to use the auxiliary accessory 21 for testing, the auxiliary accessory 21 is rotated to the test surface 110 to become the required test accessory for testing by rotating the switching member 10 around the connecting member 12. During the whole testing process, the time for adjusting the test accessory required for testing is shortened, the work efficiency is improved, and it is also conducive to realizing automatic operation, reducing the pollution caused by manual manipulation, and providing a cleaner testing environment.
[0058] As another implementation form of the present utility model, the present utility model further provides a wafer testing device, and the wafer testing device at least includes the test accessory switching system 2. During the testing process, it is convenient to realize the switching of the test accessory 20 and the auxiliary accessory 21 between the test surface 110 and the auxiliary surface 111 through the test accessory switching system 2, further improving the efficiency of wafer testing.
[0059] As another implementation form of the present utility model, the specific operation steps for realizing the switching of the required test accessory through the above-mentioned wafer testing device are as follows:
[0060] S1. First, test the characteristics of the wafer to be tested through the test accessory 20 on the test surface 110;
[0061] S2. If it is also necessary to test other characteristics of the wafer to be tested, then move the test accessory 20 on the test surface 110 from the second slide rail 130 to the first slide rail 14 through the slider 131, and at the same time, also move the auxiliary accessory 21 on the auxiliary surface 111 required for testing other characteristics of the wafer from the second slide rail 130 to the first slide rail 14 through the slider 131. As Figure 5 shown, control the switching member 10 through the upper computer to raise the switching member 10. In actual use, the height at which the switching member is lifted can be set arbitrarily according to needs, and will not be elaborated here one by one. Then rotate the switching member 10 to rotate the test accessory 20 that has completed the test to the auxiliary surface 111, and rotate the auxiliary accessory 21 that needs to be tested to the test surface 110 for testing;
[0062] S3. Until all the characteristic tests of the wafer to be measured are completed. Replace with the next wafer for testing, and repeat steps S1 - S2.
[0063] In summary, the present utility model provides a test accessory switching structure, system and wafer testing device. The test accessory switching structure includes: a switching component, a fixed support component, a connecting component, a sliding component and a first slide rail; the switching component is placed above the fixed support component; the connecting component penetrates through the switching component and passes through the upper surface of the fixed support component to connect the switching component and the fixed support component; sliding components are provided on M outer side walls of the fixed support component, and one of the sides is fixed as the test surface, and the remaining sides are auxiliary surfaces; where M is a natural number greater than or equal to 1; first slide rails are provided on N outer side walls of the switching component; each sliding component and each first slide rail are corresponding and on the same straight line; where N is a natural number greater than 1. The present utility model fixes the test accessory and the auxiliary accessory on the sliders of different planes by setting the slide rails and sliders, and drives the test accessory and the auxiliary accessory to move between the test surface and the auxiliary surface of the fixed support component through the sliders, so as to realize the real-time, fast and accurate switching of the test accessory and the auxiliary accessory, simplify the switching work process, improve the versatility of the laboratory wafer testing equipment, save space, and also improve the utilization rate of the testing equipment; at the same time, an auxiliary component is also connected to the host computer, and the host computer controls the switching component to switch to the corresponding required plane according to the working state of the auxiliary component, simplifies the mechanical debugging operation, further improves the work efficiency, reduces the pollution caused by manual operation, provides a higher cleanliness test environment, and thus effectively improves the stability and accuracy of the performance test of the wafer. Therefore, the present utility model effectively overcomes various disadvantages in the prior art and has high industrial utilization value.
[0064] The above embodiments are only illustrative of the principles and effects of the present utility model, and are not used to limit the present utility model. Any person familiar with this technology can modify or change the above embodiments without departing from the spirit and scope of the present utility model. Therefore, all equivalent modifications or changes completed by those with ordinary knowledge in the technical field without departing from the spirit and technical idea disclosed by the present utility model should still be covered by the claims of the present utility model.
Claims
1. A test accessory switching structure, characterized in that, The test accessory switching structure includes: a switching component, a fixed support component, a connecting component, a sliding component, and a first slide rail; The switching component is placed above the fixed support component; the connecting component penetrates through the switching component and passes through the upper surface of the fixed support component to connect the switching component and the fixed support component; The sliding components are provided on M outer sidewalls of the fixed support component, and one of the fixed sidewalls is set as the test surface, and the remaining sidewalls are auxiliary surfaces; where M is a natural number greater than or equal to 1; The first slide rails are provided on N outer sidewalls of the switching component; each sliding component and each first slide rail are corresponding and in the same straight line; where N is a natural number greater than 1.
2. The test attachment switching structure according to claim 1, wherein: The sliding component includes a second slide rail and X sliders; each slider is provided on the second slide rail; and the second slide rail and the first slide rail are in a straight line; where X is a natural number greater than or equal to 1.
3. The test attachment switching structure according to claim 1, wherein: The connecting component is set as a circular long rod.
4. The test accessory switching structure according to claim 1, wherein: Scales are provided on the test surface and each auxiliary surface.
5. The test accessory switching structure according to claim 1, wherein: The height of the sliding component is equal to the height of the fixed support component.
6. The test accessory switching structure according to claim 1, wherein: The test accessory switching structure further includes Y auxiliary components; 2 auxiliary components are provided on each sidewall of the switching component and each sidewall of the fixed support component, and each auxiliary component is provided at the connection of the switching component and the fixed support component and is connected to the host computer that controls the switching of the switching component; where Y is a natural number greater than 1.
7. The test accessory switching structure according to claim 6, wherein: Each auxiliary component includes 2 height inserts and 2 proximity sensors; each proximity sensor is correspondingly provided on the lower surface of each height insert.
8. The test attachment switching structure according to claim 7, wherein: At least one of the height inserts on each sidewall has a protrusion.
9. A test accessory switching system, characterized in that, The test accessory switching system includes: a test accessory, an auxiliary accessory, and the test accessory switching structure according to any one of claims 1 to 8; the test accessory is fixed on the sliding component of the test surface; the auxiliary accessory is fixed on the sliding component of the auxiliary surface.
10. A wafer testing device, characterized in that, The wafer testing device at least includes the test accessory switching system according to claim 9.