3D5S image inspection device of gravity type testing machine

Abstract

The utility model provides a 3D5S image inspection device of a gravity type testing machine, which relates to the technical field of semiconductor testing and comprises a supporting seat, the supporting seat is provided with a lifting driving assembly, the lifting driving assembly is provided with a rotary driving assembly, and the rotary driving assembly is provided with a plurality of suction nozzle assemblies. A 3D 5S image testing assembly is arranged below the suction nozzle assembly, a feeding rail assembly is arranged on one side of the rotary driving assembly, a discharging rail assembly is arranged on the other side of the rotary driving assembly, and the feeding rail assembly and the discharging rail assembly are both used in cooperation with the rotary driving assembly. The device has the beneficial effects that the rotary driving assembly drives the rotary disc to periodically rotate and lift, so that the suction nozzle assembly sucks the component from the feeding track assembly and rotates to the 3D5S image testing assembly for detection, and after detection is finished, the rotary disc drives the suction nozzle assembly to rotate to the discharging track assembly, so that the component enters the discharging track assembly for discharging, and therefore, the detection efficiency is improved. Therefore, the component detection efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor testing, in particular to a 3D5S image inspection device for a gravity testing machine. Background Art

[0002] In a turret testing machine, for the appearance inspection of components, most of them adopt the main disk 3D5S and the surface inspection method of the small auxiliary disk to complete the appearance inspection of six surfaces of the components. Among them, 3D5S uses a 3D prism reflection structure to completely present the four side surfaces and the bottom surface of the component, and can simultaneously inspect the defects of 5 surfaces of the component, such as breakage, deformation, pin deformation, pin shortage, etc. However, in a gravity testing machine, since the components slide in the track, the image inspection of the components in the track is limited, and only the surface of the component and the left and right two side surfaces on both sides of the track can be inspected. In addition, the front and back two side surfaces and the bottom surface of the component sliding manner cannot be inspected.

[0003] In the prior art, in the technical solution of the Chinese patent document (publication number: CN202083403U, patent name: product detection equipment), it is disclosed that "the horizontally arranged transfer platform includes: a feeding and picking mechanism for picking and placing chips, and the feeding and picking mechanism is connected to the lower end of the feeding track group mechanism; a discharging and picking mechanism for picking and placing chips, and the discharging and picking mechanism is connected to the upper end of the discharging track group mechanism; a horizontal reciprocating shuttle mechanism for carrying chips and moving back and forth between the feeding and picking mechanism, the testing mechanism, and the discharging and picking mechanism."

[0004] Combined with the description content of the patent document and the attached drawings, during detection, the feeding and picking mechanism transfers the chip to be tested to the reciprocating shuttle mechanism, and then the reciprocating shuttle mechanism transfers the chip to be tested to the testing mechanism. The testing mechanism will transfer the chip to be tested to the test operation area again, and after the test is completed, the tested chip will be transferred to the reciprocating shuttle mechanism again. This reciprocating translational movement detection is not fast enough, and the next chip transfer can only be carried out after the carrying platform is reset, and the detection efficiency is not high. Content of the Utility Model

[0005] The utility model overcomes the shortcomings in the prior art and provides a 3D5S image inspection device for a gravity testing machine, which rotates through a rotation driving component and drives the component to move, thereby improving the detection efficiency.

[0006] In order to solve the above technical problems, the utility model is realized through the following technical solutions:

[0007] A 3D5S image inspection device for a gravity testing machine, comprising a support base, the support base is provided with a lifting drive assembly, the lifting drive assembly is provided with a rotary drive assembly, the rotary drive assembly is distributed with a plurality of nozzle assemblies, a 3D5S image testing assembly is arranged below the nozzle assemblies, a feeding track assembly is arranged on one side of the rotary drive assembly, a discharging track assembly is arranged on the other side of the rotary drive assembly, and the feeding track assembly and the discharging track assembly are both used in cooperation with the rotary drive assembly.

[0008] Further, the rotary drive assembly includes a first motor, the motor shaft of the first motor is connected with a coupling, the coupling is connected with a ball spline sleeve, the ball spline sleeve is connected with a rotating shaft, the rotating shaft is rotatably connected with a bearing seat, a vacuum bearing cover is arranged below the bearing seat, the bottom end of the rotating shaft is connected with a turntable, a rotating metal plate is arranged above the turntable, a turntable spring is arranged between the turntable and the rotating metal plate, and a plastic rotating part is arranged between the vacuum bearing cover and the rotating metal plate.

[0009] Further, the lifting drive assembly includes a height adjustment plate, the lower end of the height adjustment plate is fixedly connected with the support base, a second motor is arranged on one side of the height adjustment plate, a linear slide rail mounting plate is arranged on the other side of the height adjustment plate, the second motor is connected with a follower fixing block, the follower fixing block is connected with a cam follower, a Z-direction slider is slidably connected to the linear slide rail mounting plate, one side of the Z-direction slider is fixedly connected with the bearing seat, and a vacant position is arranged on the other side of the Z-direction slider, and the cam follower is movably connected to the vacant position.

[0010] Further, first connectors are arranged on both sides of the linear slide rail mounting plate, second connectors are arranged on both sides of the Z-direction slider, and a tension spring is arranged between the first connectors and the second connectors.

[0011] Further, the nozzle assembly includes a nozzle rod, a nozzle spring is sleeved on the nozzle rod, a nozzle limit block is arranged at the upper end of the nozzle rod, and the nozzle limit block is arranged on the turntable.

[0012] Further, a plurality of air inlet joints are distributed on the vacuum bearing cover, a plurality of air outlet joints are distributed on the rotating metal plate, a plurality of ventilation holes are distributed on the plastic rotating part, and the air inlet joints, the ventilation holes, the air outlet joints and the nozzle rod are in air communication.

[0013] Further, the feeding track assembly includes a feeding track, a feeding cover plate is arranged above the feeding track, a feeding channel is formed between the feeding track and the feeding cover plate, and a stop block is arranged at the end of the feeding track.

[0014] Further, a jacking hole is arranged on the side of the stop block, a cylinder is arranged below the feeding track, the cylinder is connected with a jacking rod, and the jacking rod corresponds to the jacking hole.

[0015] Furthermore, the discharging track assembly includes a discharging track, a discharging cover plate is arranged above the discharging track, a discharging channel is formed between the discharging track and the discharging cover plate, and a blowing block is arranged at the top end of the discharging track.

[0016] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0017] The rotary driving assembly drives the turntable to rotate and lift periodically, so that the nozzle assembly sucks up the components from the feeding track assembly and moves them. When the nozzle assembly rotates the components from the feeding track assembly to the 3D5S image testing assembly for detection, the next adjacent nozzle assembly will move to the end of the feeding track assembly and suck up the next component from the feeding track assembly. After the detection, the turntable drives the nozzle assembly to rotate to the discharging track assembly, so that the components enter the discharging track assembly for discharging, and the next adjacent nozzle assembly will correspondingly rotate to the 3D5S image testing assembly for detection, thereby improving the detection efficiency of the components. Description of the Drawings

[0018] The drawings are used to provide a further understanding of the present utility model, and together with the embodiments of the present utility model, they are used to explain the present utility model, and do not constitute a limitation to the present utility model. In the drawings:

[0019] Figure 1 is the overall view of the 3D5S image inspection device according to the embodiment of the present utility model;

[0020] Figure 2 is the schematic diagram of the support base, the lifting driving assembly, the rotary driving assembly and the nozzle assembly according to the embodiment of the present utility model;

[0021] Figure 3 is the partial schematic diagram of the nozzle assembly and the rotary driving assembly according to the embodiment of the present utility model;

[0022] Figure 4 is the schematic diagram of the plastic rotating part according to the embodiment of the present utility model;

[0023] Figure 5 is the schematic diagram of the support base and the lifting driving assembly according to the embodiment of the present utility model;

[0024] Figure 6 is the partial schematic diagram of the lifting driving assembly according to the embodiment of the present utility model;

[0025] Figure 7 is the schematic diagram of the Z-direction slider according to the embodiment of the present utility model;

[0026] Figure 8 is the schematic diagram of the feeding track assembly according to the embodiment of the present utility model;

[0027] Figure 9Schematic diagram of the cylinder and ejector rod according to an embodiment of the present utility model;

[0028] Figure 10 Schematic diagram of the discharge track assembly according to an embodiment of the present utility model.

[0029] In the figure: 1 - support base, 2 - lifting drive assembly, 201 - height adjustment plate, 202 - second motor, 203 - linear slide rail mounting plate, 2031 - first connecting piece, 204 - follower fixing block, 205 - cam follower, 206 - Z-direction slider, 2061 - empty space, 2062 - second connecting piece, 207 - tension spring, 3 - rotation drive assembly, 301 - first motor, 302 - coupling, 303 - rotating shaft, 304 - bearing seat, 305 - vacuum bearing cover, 3051 - air inlet joint, 306 - turntable, 307 - rotating metal plate, 3071 - air outlet joint, 308 - turntable spring, 309 - plastic rotating part, 3091 - ventilation hole, 310 - ball spline sleeve, 4 - nozzle assembly, 401 - nozzle rod, 402 - nozzle spring, 403 - nozzle limit block, 5 - 3D5S image test assembly, 6 - feeding track assembly, 601 - feeding track, 6011 - jacking hole, 602 - feeding cover plate, 603 - material blocking block, 7 - discharge track assembly, 701 - discharge track, 702 - discharge cover plate, 703 - blowing block, 8 - cylinder, 9 - ejector rod. Detailed implementation manners

[0030] The preferred embodiments of the present utility model will be described below with reference to the accompanying drawings. It should be understood that the preferred embodiments described herein are only for the purpose of illustrating and explaining the present utility model, and are not used to limit the present utility model.

[0031] As Figures 1 to 2As shown in the figure, a 3D5S image inspection device for a gravity testing machine includes a support base 1. The support base 1 is provided with a lifting drive assembly 2. The lifting drive assembly 2 is provided with a rotary drive assembly 3. A number of suction nozzle assemblies 4 are distributed on the rotary drive assembly 3. A 3D5S image testing assembly 5 is arranged below the suction nozzle assembly 4. A feeding track assembly 6 is arranged on one side of the rotary drive assembly 3, and a discharging track assembly 7 is arranged on the other side of the rotary drive assembly 3. The feeding track assembly 6 and the discharging track assembly 7 are both used in conjunction with the rotary drive assembly 3. By driving the turntable to rotate periodically and lift through the rotary drive assembly, the suction nozzle assembly 4 picks up components from the feeding track assembly 6 and moves them. When the suction nozzle assembly 4 rotates the component from the feeding track assembly 6 to the 3D5S image testing assembly 5 for inspection, the next adjacent suction nozzle assembly 4 will move to the end of the feeding track assembly 6 and pick up the next component from the feeding track assembly 6. After the inspection, the turntable drives the suction nozzle assembly 4 to rotate to the discharging track assembly 7, enabling the component to enter the discharging track assembly 7 for discharging, while the next adjacent suction nozzle assembly 4 will correspondingly rotate to the 3D5S image testing assembly 5 for inspection, thereby improving the component inspection efficiency.

[0032] Specifically, as Figures 2 to 3 shown in the figure, the rotary drive assembly 3 includes a first motor 301. The motor shaft of the first motor 301 is connected to a coupling 302. The coupling 302 is connected to a ball spline sleeve 310. The ball spline sleeve 310 is connected to a rotating shaft 303. The rotating shaft 303 is rotatably connected to a bearing seat 304. A vacuum bearing cover 305 is arranged below the bearing seat 304. The bottom end of the rotating shaft 303 is connected to a turntable 306. A rotary metal plate 307 is arranged above the turntable 306. A turntable spring 308 is arranged between the turntable 306 and the rotary metal plate 307. A plastic rotating part 309 is arranged between the vacuum bearing cover 305 and the rotary metal plate 307. When the first motor 301 starts, it drives the coupling 302 to rotate. The coupling 302 drives the rotating shaft 303 to rotate. The rotating shaft 303 drives the vacuum bearing cover 305, the rotary metal plate 307, the plastic rotating part 309, and the turntable 306 to rotate synchronously. The turntable 306 drives the suction nozzle assembly 4 to rotate, so that the suction nozzle assembly 4 rotates and moves to the corresponding position while sucking up the component.

[0033] As Figures 3 to 4 shown in the figure, a number of air inlet joints 3051 are distributed on the vacuum bearing cover 305. A number of air outlet joints 3071 are distributed on the rotary metal plate 307. A number of ventilation holes 3091 are distributed on the plastic rotating part 309. The air inlet joints 3051, the ventilation holes 3091, the air outlet joints 3071, and the suction nozzle rod 401 are in gas communication. The air inlet joints 3051 are connected to external equipment. The suction force is transmitted from the external equipment to the air inlet joints 3051, and then enters the suction nozzle rod 401 through the ventilation holes 3091 and the air outlet joints 3071, so that the suction nozzle rod 401 can achieve the effect of sucking up the component.

[0034] The nozzle assembly 4 includes a nozzle rod 401, a nozzle spring 402 is sleeved on the nozzle rod 401, a nozzle limit block 403 is arranged at the upper end of the nozzle rod 401, the nozzle limit block 403 is arranged on the turntable 306. When the nozzle rod 401 contacts the component, a certain rigid impact force will be generated. At this time, the nozzle spring 402 will buffer and absorb part of the rigid impact force to avoid damage to the component and the nozzle rod 401 caused by the rigid impact force.

[0035] As Figures 5 to 7 shown, the lifting drive assembly 2 includes a height adjustment plate 201. The lower end of the height adjustment plate 201 is fixedly connected to the support base 1. A second motor 202 is arranged on one side of the height adjustment plate 201, and a linear slide rail mounting plate 203 is arranged on the other side of the height adjustment plate 201. The second motor 202 is connected with a follower fixing block 204, the follower fixing block 204 is connected with a cam follower 205. The linear slide rail mounting plate 203 is slidably connected with a Z-direction slider 206. One side of the Z-direction slider 206 is fixedly connected to the bearing seat 304, and a vacancy 2061 is arranged on the other side of the Z-direction slider 206. The cam follower 205 is movably connected in the vacancy 2061. First connectors 2031 are arranged on both sides of the linear slide rail mounting plate 203, and second connectors 2062 are arranged on both sides of the Z-direction slider 206. A tension spring 207 is arranged between the first connector 2031 and the second connector 2062. The tension spring 207 increases the elasticity when the Z-direction slider 206 slides on the linear slide rail mounting plate 203. When the second motor 202 starts, it will drive the follower fixing block 204 to rotate, and the follower fixing block 204 will drive the cam follower 205 to rotate. Since the cam follower 205 is not at the central position of the follower fixing block 204, when the cam follower 205 rotates and contacts the lower surface of the vacancy 2061, it will drive the Z-direction slider 206 to slide downward at the linear slide rail mounting plate 203. The Z-direction slider 206 drives the rotating shaft 303 to slide downward in the ball spline sleeve 310 through the bearing seat 304, so that the turntable 306 and the nozzle assembly 4 achieve the descending effect. When the cam follower 205 rotates and contacts the lower surface of the vacancy 2061, it will drive the Z-direction slider 206 to slide downward at the linear slide rail mounting plate 203. The Z-direction slider 206 drives the rotating shaft 303 to slide downward in the ball spline sleeve 310 through the bearing seat 304, so that the turntable 306 and the nozzle assembly 4 achieve the descending effect. When the cam follower 205 rotates and contacts the upper surface of the vacancy 2061, it will drive the Z-direction slider 206 to slide upward at the linear slide rail mounting plate 203. The Z-direction slider 206 drives the rotating shaft 303 to slide upward in the ball spline sleeve 310 through the bearing seat 304, so that the turntable 306 and the nozzle assembly 4 achieve the ascending effect.

[0036] As Figures 8 to 9As shown in the figure, the feeding track assembly 6 includes a feeding track 601. Above the feeding track 601, there is a feeding cover plate 602. A feeding channel is formed between the feeding track 601 and the feeding cover plate 602. At the end of the feeding track 601, there is a baffle block 603. The feeding track assembly 6 is inclined. Under the action of gravity, the components slide down from the feeding channel to the end of the feeding track 601, and the baffle block 603 prevents the components from falling off.

[0037] There is a jacking hole 6011 on the side of the baffle block 603. Below the feeding track 601, there is a cylinder 8. The cylinder 8 is connected with a jacking rod 9. The jacking rod 9 corresponds to the jacking hole 6011. A first opening is formed between the baffle block 603 and the feeding cover plate 602. The jacking hole 6011 is arranged on the first opening. The components that slide to the end of the feeding track 601 are located on the first opening. When the suction nozzle assembly 4 rotates to the upper part of the end of the feeding track 601, the cylinder 8 drives the jacking rod 9 to extend and pass through the jacking hole 6011, so as to jack up the components on the first opening, facilitating the suction of the components by the suction nozzle assembly 4.

[0038] As Figure 10 shown in the figure, the discharging track assembly 7 includes a discharging track 701. Above the discharging track 701, there is a discharging cover plate 702. A discharging channel is formed between the discharging track 701 and the discharging cover plate 702. At the top of the discharging track 701, there is a blowing block 703. A second opening is formed between the blowing block 703 and the discharging cover plate 702. When the suction nozzle assembly 4 rotates to the position of the discharging track assembly 7, the suction nozzle assembly 4 descends and places the components on the second opening. The blowing block 703 is connected with an external blowing device. The gas is blown out from the external device through the blowing block 703. The blowing direction is towards the components, and the components can be blown from the second opening into the discharging channel for discharging operation.

[0039] Working principle: When the components are in the feeding track 601 and slide to the end of the feeding track 601, the turntable 306 descends. Then, the cylinder 8 drives the jacking rod 9 to jack up the components, and the components are sucked by the suction nozzle rod 401 above it. The turntable 306 rises and then rotates a certain angle to transfer the components into the 3D5S image testing assembly 5 for five-sided appearance inspection of the components. After rotation and lifting, the components enter the top of the discharging channel, and then are blown out of the discharging track by the blowing block 703.

[0040] Finally, it should be noted that the above are only the preferred embodiments of the present utility model and are not used to limit the present utility model. Although the present utility model has been described in detail with reference to the embodiments, for those skilled in the art, they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some of the technical features. However, any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. 3D5S image inspection device for a gravity testing machine, characterized in that, It includes a support base (1), the support base (1) is provided with a lifting drive assembly (2), the lifting drive assembly (2) is provided with a rotation drive assembly (3), several nozzle assemblies (4) are distributed on the rotation drive assembly (3), a 3D5S image test assembly (5) is arranged below the nozzle assembly (4), a feeding track assembly (6) is arranged on one side of the rotation drive assembly (3), a discharging track assembly (7) is arranged on the other side of the rotation drive assembly (3), and the feeding track assembly (6) and the discharging track assembly (7) are both used in cooperation with the rotation drive assembly (3).

2. The 3D5S image inspection device of a gravity testing machine according to claim 1, characterized in that, The rotation drive assembly (3) includes a first motor (301), the motor shaft of the first motor (301) is connected with a coupling (302), the coupling (302) is connected with a ball spline sleeve (310), the ball spline sleeve (310) is connected with a rotating shaft (303), the rotating shaft (303) is rotatably connected with a bearing seat (304), a vacuum bearing cover (305) is arranged below the bearing seat (304), the bottom end of the rotating shaft (303) is connected with a turntable (306), a rotating metal plate (307) is arranged above the turntable (306), a turntable spring (308) is arranged between the turntable (306) and the rotating metal plate (307), and a plastic rotating part (309) is arranged between the vacuum bearing cover (305) and the rotating metal plate (307).

3. The 3D5S image inspection device of a gravity testing machine according to claim 2, characterized in that, The lifting drive assembly (2) includes a height adjustment plate (201), the lower end of the height adjustment plate (201) is fixedly connected with the support base (1), a second motor (202) is arranged on one side of the height adjustment plate (201), a linear slide rail mounting plate (203) is arranged on the other side of the height adjustment plate (201), the second motor (202) is connected with a follower fixing block (204), the follower fixing block (204) is connected with a cam follower (205), a Z-direction slider (206) is slidably connected to the linear slide rail mounting plate (203), one side of the Z-direction slider (206) is fixedly connected with the bearing seat (304), a vacant position (2061) is arranged on the other side of the Z-direction slider (206), and the cam follower (205) is movably connected to the vacant position (2061).

4. The 3D5S image inspection device of a gravity testing machine according to claim 3, wherein, First connectors (2031) are arranged on both sides of the linear slide rail mounting plate (203), second connectors (2062) are arranged on both sides of the Z-direction slider (206), and a tension spring (207) is arranged between the first connector (2031) and the second connector (2062).

5. The 3D5S image inspection device of a gravity type testing machine according to claim 3, characterized in that, The nozzle assembly (4) includes a nozzle rod (401), a nozzle spring (402) is sleeved on the nozzle rod (401), a nozzle limit block (403) is arranged at the upper end of the nozzle rod (401), and the nozzle limit block (403) is arranged on the turntable (306).

6. The 3D5S image inspection device of a gravity type testing machine according to claim 5, characterized in that, The vacuum bearing cover (305) is distributively provided with a plurality of air inlet joints (3051), the rotating metal plate (307) is distributively provided with a plurality of air outlet joints (3071), the plastic rotating part (309) is distributively provided with a plurality of ventilation holes (3091), and the air inlet joints (3051), the ventilation holes (3091), the air outlet joints (3071) and the suction nozzle rod (401) are in air communication.

7. The 3D5S image inspection device of a gravity testing machine according to claim 1, characterized in that, The feeding track assembly (6) includes a feeding track (601), a feeding cover plate (602) is arranged above the feeding track (601), a feeding channel is formed between the feeding track (601) and the feeding cover plate (602), and a material blocking block (603) is arranged at the end of the feeding track (601).

8. The 3D5S image inspection device of a gravity testing machine according to claim 7, characterized in that, A jacking hole (6011) is arranged on the side of the material blocking block (603), a cylinder (8) is arranged below the feeding track (601), the cylinder (8) is connected with a jacking rod (9), and the jacking rod (9) corresponds to the jacking hole (6011).

9. The 3D5S image inspection device of a gravity type testing machine according to claim 1, characterized in that, The discharging track assembly (7) includes a discharging track (701), a discharging cover plate (702) is arranged above the discharging track (701), a discharging channel is formed between the discharging track (701) and the discharging cover plate (702), and a blowing block (703) is arranged at the top end of the discharging track (701).

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