Charged particle beam measuring device

Abstract

The utility model provides a charged particle beam measuring device, which relates to the field of charged particle beam measuring equipment and comprises a shell, a measuring assembly is mounted at the top of the shell and comprises a measuring cylinder, a focusing cylinder, a particle detector, an electromagnetic coil, a control mainboard and a display, the particle detector and the electromagnetic coil are installed in an inner cavity of the measuring cylinder, the measuring assembly is used for measuring charged particle beams, a vacuum assembly is installed in an inner cavity of the shell, and the vacuum assembly comprises a vacuum pump, a communicating pipe and an electric valve; according to the utility model, by arranging the measuring assembly, the effect of measuring the charged particle beam is achieved, and by arranging the vacuum pump, the communicating pipe and the electric valve, the effect of providing a vacuum measuring environment is achieved, so that the situation of inaccurate measurement caused by collision between charged particles and air molecules under conventional air pressure can be prevented; and the accuracy and the stability of measurement are effectively improved.

Description

Technical Field

[0001] The utility model belongs to the field of charged particle beam measurement equipment, and specifically relates to a charged particle beam measurement device. Background Art

[0002] A charged particle beam refers to a flow composed of charged particles with a certain directionality. Such a beam usually moves under the action of electromagnetic fields, and its properties and behaviors are affected by charge, mass, and external electromagnetic fields. It is widely used in fields such as semiconductor manufacturing and medical treatment. A charged particle beam measurement device is used to capture and analyze various characteristics of the beam to ensure the quality, stability, and adaptability of the particle beam to meet the requirements of specific experiments. The measurement device is usually used in laboratories and accelerators;

[0003] According to the Chinese patent application number: 202223506853.1, a charged particle beam measurement device is disclosed, which includes a box body. One end face of the box body is a graphite baffle, and the other end face of the box body is a back plate; one or more reflection electrode measuring cups, a connecting plate, and a terminal detection measuring cup are sequentially arranged in the box body. The reflection electrode measuring cup is close to the graphite baffle, and the terminal detection measuring cup is close to the back plate; an insulating block is arranged in the groove on the connecting plate, and graphite is arranged in the insulating block;

[0004] The prior art effectively solves the problems of single function and inconvenient disassembly, installation, maintenance of charged particle beam measurement equipment, and has the advantages of simple structure, easy production, and easy disassembly. However, when this kind of charged particle beam measurement device is in use, charged particles will collide with air molecules under normal atmospheric pressure, and these collisions will change the orbit and energy of the particles, thereby affecting the accuracy and reliability of the measurement.

[0005] In summary, the utility model provides a charged particle beam measurement device to solve the above problems. Summary of the Utility Model

[0006] In order to solve the above technical problems, the utility model provides the following technical solutions:

[0007] A charged particle beam measurement device includes a housing. A measurement assembly is installed on the top of the housing. The measurement assembly includes a measurement cylinder, a focusing cylinder, a particle detector, an electromagnetic coil, a control main board, and a display. The particle detector and the electromagnetic coil are installed in the inner cavity of the measurement cylinder. The measurement assembly is used to measure the charged particle beam. A vacuum assembly is installed in the inner cavity of the housing. The vacuum assembly includes a vacuum pump, a connecting pipe, and an electric valve. Two ends of the connecting pipe are respectively communicated with the vacuum pump and the measurement cylinder. The vacuum pump is fixedly connected to the inner wall of the housing. The electric valve is installed on the surface of the connecting pipe. The vacuum assembly is used to provide a vacuum environment.

[0008] Furthermore, in the present utility model, the display is mounted on the surface of the housing, and the control main board is fixed to the upper end of the inner cavity of the housing.

[0009] Furthermore, in the present utility model, the focusing cylinder is located at the top of the measuring cylinder and is fixedly connected to the inner cavity of the measuring cylinder.

[0010] Furthermore, in the present utility model, the electromagnetic coil is fixed to the upper end of the inner cavity of the measuring cylinder, and the particle detector is mounted at the bottom of the inner cavity of the measuring cylinder.

[0011] Furthermore, in the present utility model, the output end of the particle detector is connected to the input end of the control main board, and the output end of the control main board is respectively connected to the input ends of the vacuum pump, the electric valve, and the display.

[0012] Furthermore, in the present utility model, the particle detector is a semiconductor detector, and the control main board uses an MCU chip controller.

[0013] Beneficial effects: The present utility model has the following beneficial effects:

[0014] By providing a measuring assembly, the present utility model can measure the charged particle beam. The measuring cylinder and the focusing cylinder are used to provide a measuring environment, and the particle detector, the electromagnetic coil, and the control main board are used to detect the charged particle beam, measure the charges, photons, and generated scintillation signals released when the charged particles pass through, so as to determine the position, energy, and type of the particles. By providing a vacuum pump, a connecting pipe, and an electric valve, a vacuum measuring environment can be provided, thereby preventing the charged particles from colliding with air molecules under normal pressure and causing inaccurate measurement, and effectively improving the accuracy and stability of the measurement. Description of the drawings

[0015] Figure 1 is the front view structural schematic diagram of the present utility model;

[0016] Figure 2 is the sectional view structural schematic diagram of the housing of the present utility model;

[0017] Figure 3 is the sectional view structural schematic diagram of the measuring cylinder of the present utility model;

[0018] Figure 4 is the system flow schematic diagram of the present utility model.

[0019] In the figure:

[0020] 1. Housing; 2. Measuring assembly; 201. Measuring cylinder; 202. Focusing cylinder; 203. Particle detector; 204. Electromagnetic coil; 205. Control main board; 206. Display; 3. Vacuum assembly; 301. Vacuum pump; 302. Connecting pipe; 303. Electric valve. Detailed implementation

[0021] To better understand the technical content of the present utility model, specific embodiments are hereby given and described in conjunction with the accompanying drawings as follows. In the present disclosure, aspects of the present utility model are described with reference to the drawings, and many illustrative embodiments are shown in the drawings. The embodiments of the present disclosure do not necessarily define all aspects of the present utility model. It should be understood that the various concepts and embodiments introduced above, as well as those described in more detail below, can be implemented in any of many ways, because the concepts and embodiments disclosed in the present utility model are not limited to any implementation manner. In addition, some aspects disclosed in the present utility model can be used alone, or in any suitable combination with other aspects disclosed in the present utility model.

[0022] Embodiment 1

[0023] As Figures 1-4 shown, this is the first embodiment of the present utility model. This embodiment provides a charged particle beam measurement device, which includes a housing 1. A measuring assembly 2 is installed on the top of the housing 1. The measuring assembly 2 includes a measuring cylinder 201, a focusing cylinder 202, a particle detector 203, an electromagnetic coil 204, a control main board 205 and a display 206. The particle detector 203 and the electromagnetic coil 204 are installed in the inner cavity of the measuring cylinder 201. The measuring assembly 2 is used to measure the charged particle beam. A vacuum assembly 3 is installed in the inner cavity of the housing 1. The vacuum assembly 3 includes a vacuum pump 301, a connecting pipe 302 and an electric valve 303. Both ends of the connecting pipe 302 are respectively connected to the vacuum pump 301 and the measuring cylinder 201. The vacuum pump 301 is fixedly connected to the inner wall of the housing 1. The electric valve 303 is installed on the surface of the connecting pipe 302. The vacuum assembly 3 is used to provide a vacuum environment.

[0024] As Figures 1-4As shown, the vacuum pump 301 evacuates the inner cavity of the measuring cylinder 201 through the connecting pipe 302, creating a vacuum environment in the inner cavity of the measuring cylinder 201. The charged particle beam enters the inner cavity of the measuring cylinder 201 through the focusing cylinder 202. After the electromagnetic coil 204 is energized, it generates a magnetic field for focusing the charged particle beam. By adjusting the current of the electromagnetic coil 204, the intensity of the magnetic field can be changed, so that the charged particle beam is focused into the required size and shape. The focused beam is easier to be accurately measured and analyzed. The particle detector 203 detects the charged particle beam under the focusing of the magnetic field, so as to measure and analyze the charged particle beam, and sends the measurement result to the control main board 205, and the control main board 205 is displayed through the display 206.

[0025] Embodiment 2

[0026] Referring to Figures 1-4 , this is the second embodiment of the present utility model, and this embodiment is based on the previous embodiment.

[0027] In this embodiment, the display 206 is installed on the surface of the housing 1, and the control main board 205 is fixed at the upper end of the inner cavity of the housing 1.

[0028] The focusing cylinder 202 is located at the top of the measuring cylinder 201 and is fixedly connected to the inner cavity of the measuring cylinder 201.

[0029] The electromagnetic coil 204 is fixed at the upper end of the inner cavity of the measuring cylinder 201, and the particle detector 203 is installed at the bottom of the inner cavity of the measuring cylinder 201.

[0030] The output end of the particle detector 203 is connected to the input end of the control main board 205, and the output end of the control main board 205 is respectively connected to the input ends of the vacuum pump 301, the electric valve 303 and the display 206.

[0031] The particle detector 203 selects a semiconductor detector, and the control main board 205 adopts an MCU chip controller.

[0032] As Figures 1-4 shown, the display 206 selects a touch screen, which can conveniently adjust the current value of the electromagnetic coil 204. The measuring component 2 and the vacuum component 3 are both powered by a power adapter. The model of the vacuum pump 301 can be KVP04. The housing 1 can provide support for the measuring component 2 and also provide a protection space for the vacuum component 3. The surface of the housing 1 is also provided with ventilation holes for discharging the air pumped by the vacuum pump 301 and ventilating and dissipating heat for the control main board 205 and the vacuum pump 301.

[0033] In use, the electric valve 303 is opened, and the vacuum pump 301 evacuates the inner cavity of the measuring cylinder 201 through the connecting pipe 302, creating a vacuum environment in the inner cavity of the measuring cylinder 201, thereby preventing charged particles from colliding with air molecules under normal atmospheric pressure and causing inaccurate measurements. The charged particle beam enters the inner cavity of the measuring cylinder 201 through the focusing cylinder 202. After the electromagnetic coil 204 is energized, a magnetic field is generated to focus the charged particle beam. By adjusting the current of the electromagnetic coil 204, the intensity of the magnetic field can be changed, so that the charged particle beam is focused into the desired size and shape. The focused beam is easier to be accurately measured and analyzed. The particle detector 203 detects the charged particle beam under the focusing of the magnetic field, so that the charged particle beam can be measured and analyzed, and the measurement results are sent to the control main board 205, and the control main board 205 is displayed through the display 206.

[0034] The standard parts used in this application document can all be purchased from the market, and can also be customized according to the description of the specification and the drawings. The specific connection methods of each part all adopt conventional means such as bolts, rivets, and welding that are mature in the prior art. The machinery, parts, and equipment all adopt conventional models in the prior art. The control method is automatically controlled by a controller, and the control circuit of the controller can be realized by simple programming by those skilled in the art, which belongs to the common knowledge in this field. And this application document is mainly used to protect mechanical devices, so the control method and circuit connection will not be explained in detail in this application document.

[0035] Although the present utility model has been disclosed above with a preferred embodiment, it is not intended to limit the present utility model. Those with ordinary knowledge in the technical field to which the present utility model belongs can make various changes and modifications without departing from the spirit and scope of the present utility model. Therefore, the protection scope of the present utility model shall be subject to that defined by the claims.

Claims

1. A charged particle beam measurement device, comprising a housing (1), characterized in that: A measurement component (2) is installed at the top of the housing (1). The measurement component (2) includes a measurement cylinder (201), a focusing cylinder (202), a particle detector (203), an electromagnetic coil (204), a control main board (205), and a display (206). The particle detector (203) and the electromagnetic coil (204) are installed in the inner cavity of the measurement cylinder (201). The measurement component (2) is used to measure a charged particle beam. A vacuum component (3) is installed in the inner cavity of the housing (1). The vacuum component (3) includes a vacuum pump (301), a connecting pipe (302), and an electric valve (303). The two ends of the connecting pipe (302) are respectively connected to the vacuum pump (301) and the measurement cylinder (201). The vacuum pump (301) is fixedly connected to the inner wall of the housing (1). The electric valve (303) is installed on the surface of the connecting pipe (302). The vacuum component (3) is used to provide a vacuum environment.

2. The charged particle beam measurement device according to claim 1, wherein: The display (206) is installed on the surface of the housing (1). The control main board (205) is fixed at the upper end of the inner cavity of the housing (1).

3. The charged particle beam measurement device according to claim 1, wherein: The focusing cylinder (202) is located at the top of the measurement cylinder (201) and is fixedly connected to the inner cavity of the measurement cylinder (201).

4. The charged particle beam measurement device according to claim 1, characterized in that: The electromagnetic coil (204) is fixed at the upper end of the inner cavity of the measurement cylinder (201). The particle detector (203) is installed at the bottom of the inner cavity of the measurement cylinder (201).

5. The charged particle beam measurement device according to claim 1, wherein: The output end of the particle detector (203) is connected to the input end of the control main board (205). The output end of the control main board (205) is respectively connected to the input ends of the vacuum pump (301), the electric valve (303), and the display (206).

6. The charged particle beam measurement device according to claim 1, wherein: The particle detector (203) is a semiconductor detector. The control main board (205) uses an MCU chip controller.

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