Limiting assembly and graphite boat

Abstract

The utility model provides a limiting assembly and a graphite boat, and relates to the technical field of graphite boats, and the limiting assembly comprises a first insulating sleeve, a second insulating sleeve and a limiting part. The first insulating sleeve is provided with a first connecting part, and the first insulating sleeve is used for abutting against the first boat piece. The second insulating sleeve is provided with a second connecting part, the second insulating sleeve is used for abutting against the second boat piece, and the second connecting part and the first connecting part are connected and move relatively so as to be used for adjusting the distance between the first boat piece and the second boat piece. And the limiting piece is connected with the first insulating sleeve and the second insulating sleeve to limit the relative movement of the first connecting part and the second connecting part. According to the limiting assembly, the distance between the first boat piece and the second boat piece can be adjusted, the flexible production requirement is met, the first insulation sleeve and the second insulation sleeve are locked under the action of the limiting piece, and the distance is prevented from being changed after the first boat piece and the second boat piece are adjusted.

Description

Technical Field

[0001] This application relates to the technical field of graphite boats, and particularly to a limiting component and a graphite boat. Background Art

[0002] As a carrier for silicon wafers in the coating process production, the graphite boat is usually used in the coating process of solar cell wafers.

[0003] In the related art, the graphite boat is composed of multiple boat plates with a certain interval, and usually, the adjacent two boat plates are limited by an insulating sleeve to avoid conduction between the adjacent two boat plates and ensure that an electric field can be formed between the adjacent boat plates.

[0004] However, since the insulating sleeve has a fixed length, it is not easy to adjust the distance between the boat plates. Summary of the Utility Model

[0005] Based on this, this application provides a limiting component and a graphite boat to solve the problem that it is not easy to adjust the distance between the boat plates due to the fixed length of the insulating sleeve on the existing graphite boat.

[0006] In a first aspect, this application provides a limiting component, including a first insulating sleeve, a second insulating sleeve, and a limiting member;

[0007] A first connection portion is provided on the first insulating sleeve, and the first insulating sleeve is used to abut against the first boat plate;

[0008] A second connection portion is provided on the second insulating sleeve, and the second insulating sleeve is used to abut against the second boat plate. The second connection portion is connected to and relatively movable with the first connection portion to adjust the distance between the first boat plate and the second boat plate;

[0009] The limiting member connects the first insulating sleeve and the second insulating sleeve to limit the relative movement of the first connection portion and the second connection portion.

[0010] In a possible implementation, at least a part of the first insulating sleeve is inserted into the second insulating sleeve. The first connection portion is located on the outer sidewall of the first insulating sleeve, and the second connection portion is located on the inner sidewall of the second insulating sleeve.

[0011] In a possible implementation, the first connection portion is an external thread located on the outer sidewall of the first insulating sleeve, and the second connection portion is an internal thread located on the inner sidewall of the second insulating sleeve. The internal thread is connected to the external thread.

[0012] In a possible implementation, the limiting member is inserted into the second insulating sleeve and abuts against the first insulating sleeve.

[0013] In a possible implementation, an installation hole is provided on the second insulating sleeve, and the limiting member is inserted into the second insulating sleeve through the installation hole.

[0014] In a possible implementation, the limiting member and the mounting hole are connected by a threaded fit.

[0015] In a possible implementation, the inner side wall of the second insulating sleeve includes an internal thread and an annular groove section connected to the internal thread. The annular groove section faces the first insulating sleeve and forms an annular gap with the first insulating sleeve.

[0016] In a possible implementation, the depth of the annular gap along the moving direction of the first connecting portion or the second connecting portion is 0.2 mm to 1.3 mm.

[0017] In a second aspect, the present application also provides a graphite boat, including any one of the limiting components provided in the first aspect.

[0018] In a possible implementation, it further includes a plurality of first boat plates, a plurality of second boat plates, and an insulating fastening assembly;

[0019] The first boat plates and the second boat plates are arranged at intervals in sequence, and a limiting component is arranged between adjacent first boat plates and second boat plates;

[0020] The insulating fastening assembly is sequentially inserted on the first boat plate, the limiting component, and the second boat plate to connect each first boat plate, each limiting component, and each second boat plate.

[0021] The present application provides a limiting component and a graphite boat. The limiting component includes a first insulating sleeve, a second insulating sleeve, and a limiting member. By providing a first connecting portion on the first insulating sleeve, the first insulating sleeve is abutted against the first boat plate, and by providing a second connecting portion on the second insulating sleeve and abutting the second insulating sleeve against the second boat plate, under the blocking action of the first insulating sleeve and the second insulating sleeve, it is avoided that the first boat plate and the second boat plate are electrically connected to form an electric field. The second connecting portion is connected to and relatively moves with the first connecting portion to realize the adjustment of the distance between the first boat plate and the second boat plate to meet the flexible production requirements. The limiting member is provided to connect the first insulating sleeve and the second insulating sleeve to limit the relative movement of the first connecting portion and the second connecting portion, lock the first insulating sleeve and the second insulating sleeve, and avoid the change of the distance between the first boat plate and the second boat plate after adjustment. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0023] Figure 1 It is a schematic structural diagram of the limiting component provided by the embodiment of the present application;

[0024] Figure 2 is Figure 1 a cross-sectional view along the A-A section in

[0025] Figure 3 a schematic structural diagram of the graphite boat provided by the embodiment of the present application;

[0026] Figure 4 is Figure 3 a cross-sectional view along the B-B section in

[0027] Reference numerals:

[0028] 10: The first boat piece;

[0029] 20: The second boat piece;

[0030] 30: The insulating fastening assembly;

[0031] 40: The first conductive spacer;

[0032] 50: The first conductive fastening assembly;

[0033] 60: The second conductive spacer;

[0034] 70: The second conductive fastening assembly;

[0035] 100: The first insulating sleeve;

[0036] 110: The first connecting portion;

[0037] 200: The second insulating sleeve;

[0038] 210: The second connecting portion;

[0039] 220: The mounting hole;

[0040] 230: The annular groove section;

[0041] 300: The limiting member. Detailed implementation manners

[0042] Here, the exemplary embodiments will be described in detail, and the examples are shown in the drawings. When the following description refers to the drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements. The implementation manners described in the following exemplary embodiments do not represent all implementation manners consistent with the present application. On the contrary, they are merely examples of methods and apparatuses consistent with some aspects of the present application as detailed in the appended claims.

[0043] In the description and claims of this application and the above-mentioned drawings, terms such as "first", "second", "third", "fourth", etc. (if any) are used to distinguish similar objects and do not necessarily describe a specific order or sequence. It should be understood that the data used in this way can be interchanged under appropriate circumstances so that the embodiments of this application described here, for example, can be implemented in an order other than those illustrated or described here. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device that includes a series of steps or units does not necessarily have to be limited to those steps or units clearly listed, but may include other steps or units not clearly listed or inherent to these processes, methods, products or devices.

[0044] As described in the background art section, the length dimension of the ceramic sleeve commonly used for the graphite boat is fixed and cannot flexibly adjust the spacing between adjacent boat plates according to the needs of coating, which does not meet the flexible production requirements. In the related art, the disclosed combined ceramic sleeve has a complex structure and no locking and limiting structure. When it becomes loose and needs to be adjusted later, it will inevitably increase the maintenance cost.

[0045] In view of the above problems existing in the prior art, this application provides a limiting component and a graphite boat. The limiting component provided by this application includes a first insulating sleeve, a second insulating sleeve and a limiting member. By providing a first connecting portion on the first insulating sleeve, the first insulating sleeve is abutted against the first boat plate, and by providing a second connecting portion on the second insulating sleeve and abutting the second insulating sleeve against the second boat plate, under the blocking action of the first insulating sleeve and the second insulating sleeve, the first boat plate and the second boat plate are prevented from conducting to form an electric field. The second connecting portion is connected to and relatively moves with the first connecting portion to realize the adjustment of the spacing between the first boat plate and the second boat plate to meet the flexible production requirements. The limiting member is provided to connect the first insulating sleeve and the second insulating sleeve to limit the relative movement of the first connecting portion and the second connecting portion, lock the first insulating sleeve and the second insulating sleeve, and prevent the spacing between the first boat plate and the second boat plate from changing after adjustment.

[0046] The technical solution of this application will be described in detail below with specific embodiments. These specific embodiments can be combined with each other, and the same or similar concepts or processes may not be repeated in some embodiments.

[0047] In the first aspect, referring to Figures 1-4As shown in the figure, an embodiment of the present application provides a limiting component, which is applied to a graphite boat. The limiting component includes a first insulating sleeve 100, a second insulating sleeve 200, and a limiting member 300. A first connecting portion 110 is provided on the first insulating sleeve 100, and the first insulating sleeve 100 is used to abut against the first boat piece 10. A second connecting portion 210 is provided on the second insulating sleeve 200, and the second insulating sleeve 200 is used to abut against the second boat piece 20. The second connecting portion 210 is connected to and relatively moves with the first connecting portion 110 to adjust the distance between the first boat piece 10 and the second boat piece 20. The limiting member 300 connects the first insulating sleeve 100 and the second insulating sleeve 200 to limit the relative movement of the first connecting portion 110 and the second connecting portion 210.

[0048] In this embodiment, both the first insulating sleeve 100 and the second insulating sleeve 200 can be structures such as a rotating body or a cylinder, and the two can be made of insulating materials such as ceramics. The first connecting portion 110 and the second connecting portion 210 can be connected by means such as plugging, screwing, or sliding, as long as the relative movement can make the total length of the first insulating sleeve 100 and the second insulating sleeve 200 telescopically adjustable.

[0049] In this way, when the first boat piece 10 and the second boat piece 20 are arranged in parallel, the limiting component is placed between the first boat piece 10 and the second boat piece 20. One side of the first insulating sleeve 100 facing away from the second insulating sleeve 200 abuts against the first boat piece 10, and one side of the second insulating sleeve 200 facing away from the first insulating sleeve 100 abuts against the second boat piece 20. By the relative movement of the second connecting portion 210 and the first connecting portion 110, the distance between the first boat piece 10 and the second boat piece 20 can be adjusted to meet the flexible production requirements.

[0050] It should be noted that the distance between the limiting component acting on the first boat piece 10 and the second boat piece 20 should be between the maximum limit and the minimum limit distance during the coating production of the graphite boat. For example, the limiting component can meet the adjustment of the distance between the first boat piece 10 and the second boat piece 20 within the range of 8 mm to 12 mm, which can be determined according to actual needs.

[0051] The limiting member 300 is used to limit the relative movement of the first connecting portion 110 and the second connecting portion 210. It can be a screwing member, a clamping member, etc. The limiting member 300 is connected between the first insulating sleeve 100 and the second insulating sleeve 200. When it is necessary to adjust the distance between the first boat piece 10 and the second boat piece 20, the limitation of the limiting member 300 can be released for adjustment, and after the adjustment is completed, it can be locked by the limiting member 300.

[0052] Specifically, as Figure 3 、 Figure 4As shown, the first boat piece 10 and the second boat piece 20 are arranged in parallel, the limiting component is placed between the first boat piece 10 and the second boat piece 20, one side of the first insulating sleeve 100 abuts against the first boat piece 10, and one side of the second insulating sleeve 200 abuts against the second boat piece 20. After the relative movement of the second connecting portion 210 and the first connecting portion 110 adjusts the distance between the first boat piece 10 and the second boat piece 20 to a suitable distance, the first insulating sleeve 100 and the second insulating sleeve 200 are locked by the limiting member 300, and then the first boat piece 10, the second boat piece 20 and the limiting component are locked by the insulating fastening component, so as to be used for coating production.

[0053] It can be understood that the application of the limiting component in this embodiment can realize the adjustment of the distance between the first boat piece 10 and the second boat piece 20, meet the flexible production requirements, and can also lock the first insulating sleeve 100 and the second insulating sleeve 200 to prevent the distance between the first boat piece 10 and the second boat piece 20 from changing.

[0054] Therefore, the limiting component provided in the embodiment of the present application includes a first insulating sleeve 100, a second insulating sleeve 200 and a limiting member 300. By setting a first connecting portion 110 on the first insulating sleeve 100, the first insulating sleeve 100 is abutted against the first boat piece 10, and by setting a second connecting portion 210 on the second insulating sleeve 200 and abutting the second insulating sleeve 200 against the second boat piece 20, under the blocking action of the first insulating sleeve 100 and the second insulating sleeve 200, the first boat piece 10 and the second boat piece 20 are prevented from being electrically connected to form an electric field. The second connecting portion 210 is connected to the first connecting portion 110 and moves relatively to realize the adjustment of the distance between the first boat piece 10 and the second boat piece 20 to meet the flexible production requirements. The limiting member 300 is set to connect the first insulating sleeve 100 and the second insulating sleeve 200 to limit the relative movement of the first connecting portion 110 and the second connecting portion 210, lock the first insulating sleeve 100 and the second insulating sleeve 200, and prevent the distance between the first boat piece 10 and the second boat piece 20 from changing after adjustment.

[0055] In a possible design, at least a part of the first insulating sleeve 100 is inserted into the second insulating sleeve 200, the first connecting portion 110 is located on the outer side wall of the first insulating sleeve 100, and the second connecting portion 210 is located on the inner side wall of the second insulating sleeve 200.

[0056] Exemplarily, as Figure 2 shown, the first connecting portion 110 may be a plug, the second connecting portion 210 may be a jack matching the plug, the plug is inserted into the jack and can move relatively along the insertion direction. In this way, by adjusting the depth of the plug inserted into the jack, the total length of the first insulating sleeve 100 and the second insulating sleeve 200 is adjusted, so as to realize the adjustment of the distance between the first boat piece 10 and the second boat piece 20.

[0057] Of course, the second insulating sleeve 200 can also be partially inserted into the first insulating sleeve 100, which is not shown in the figure. The first connecting portion 110 is located on the inner side wall of the first insulating sleeve 100, and the second connecting portion 210 is located on the outer side wall of the second insulating sleeve 200. That is, the first connecting portion 110 is a jack, and the second connecting portion 210 is a plug matching the jack. The plug is inserted into the jack and can move relative to each other along the insertion direction.

[0058] In this way, the total length of the first insulating sleeve 100 and the second insulating sleeve 200 can also be adjusted by adjusting the depth of insertion of the plug into the jack, so as to realize the adjustment of the distance between the first boat blade 10 and the second boat blade 20. In this regard, no excessive restrictions are imposed in this embodiment.

[0059] Further, in this embodiment, the first connecting portion 110 is an external thread located on the outer side wall of the first insulating sleeve 100, and the second connecting portion 210 is an internal thread located on the inner side wall of the second insulating sleeve 200. The internal thread matches the external thread, and the internal thread is connected to the external thread.

[0060] In this way, as Figure 2 shown, by screwing the first insulating sleeve 100 or the second insulating sleeve 200, the relative rotation of the two can realize the adjustment of the total length of the first insulating sleeve 100 and the second insulating sleeve 200, with simple operation and convenient adjustment. The specific models of the internal thread and the external thread can be determined according to actual needs, and no specific limitations are imposed in this embodiment.

[0061] In order to facilitate the operation of the limiting member 300 to lock or unlock, in this embodiment, the limiting member 300 is inserted into the second insulating sleeve 200 and abuts against the first insulating sleeve 100.

[0062] In this way, by moving the limiting member 300 on the second insulating sleeve 200, the limiting member 300 abuts against the first insulating sleeve 100 to lock, or the limiting member 300 is separated from the first insulating sleeve 100 to unlock.

[0063] It should be noted that a limiting structure should be provided between the limiting member 300 and the second insulating sleeve 200 to at least ensure that the limiting member 300 switches between the locked position and the unlocked position. In addition, the limiting member 300 should also be made of an insulating material, such as ceramic, etc.

[0064] Exemplarily, in this embodiment, an installation hole 220 is provided on the second insulating sleeve 200, and the limiting member 300 is inserted into the second insulating sleeve 200 through the installation hole 220.

[0065] Specifically, as Figure 2 shown, the installation hole 220 is provided on the second insulating sleeve 200 along the radial direction, and the installation hole 220 communicates with the inner side wall of the second insulating sleeve 200. The limiting member 300 is inserted into the installation hole 220.

[0066] In some embodiments (not shown in the figures), a tight fit is adopted between the position-limiting member 300 and the mounting hole 220. The position-limiting member 300 is moved towards the first insulating sleeve 100 by a tool and abutted to be locked, or the position-limiting member 300 is moved away from the first insulating sleeve 100 by a tool to be unlocked.

[0067] In other embodiments, as Figure 2 shown, the position-limiting member 300 and the mounting hole 220 are connected by a threaded fit. In this way, when the position-limiting member 300 is screwed, the position-limiting member 300 can be abutted to the first insulating sleeve 100 to be locked, or the position-limiting member 300 can be disengaged from the first insulating sleeve 100 to be unlocked. The specific type of the thread between the two can be determined according to actual requirements and is not specifically limited in this embodiment.

[0068] Optionally, in this embodiment, the inner side wall of the second insulating sleeve 200 includes an internal thread and an annular groove section 230 connected to the internal thread. The annular groove section 230 faces the first insulating sleeve 100 and forms an annular gap with the first insulating sleeve 100.

[0069] Specifically, as Figure 2 shown, the annular groove section 230 is located at the end of the second insulating sleeve 200. Under the cutting action of the annular gap, when coating, the conductive material is not easily deposited at the annular gap, thereby avoiding the problem that arc ignition occurs between the first insulating sleeve 100 and the second insulating sleeve 200 and affecting the coating quality.

[0070] Wherein, in this embodiment, the depth D of the annular gap along the moving direction of the first connecting portion 110 or the second connecting portion 210 is 0.2 mm to 1.3 mm, and the gap between the inner side wall of the annular groove section 230 and the outer side wall of the first insulating sleeve 100 can be 0.2 mm to 1 mm.

[0071] With such a setting, as Figure 2 shown, it is ensured that the annular gap is not too large or too small, and good insulation between the first insulating sleeve 100 and the second insulating sleeve 200 can be ensured. Wherein, the moving direction of the first connecting portion 110 is the axial direction of the first insulating sleeve 100, and the moving direction of the second connecting portion 210 is the axial direction of the second insulating sleeve 200. For the depth D of the annular gap and the gap between the inner side wall of the annular groove section 230 and the outer side wall of the first insulating sleeve 100, they can be determined according to actual requirements and are not overly limited in this embodiment.

[0072] Second, referring to Figure 3 、 4 shown, the embodiment of the present application further provides a graphite boat, including the position-limiting assembly provided in any of the above embodiments.

[0073] Among them, the specific structure of the limiting component has been described in detail in the above embodiments, and will not be elaborated here one by one.

[0074] The graphite boat provided by the embodiment of the present application is configured with a limiting component, including a first insulating sleeve 100, a second insulating sleeve 200 and a limiting member 300. By providing a first connecting portion 110 on the first insulating sleeve 100, the first insulating sleeve 100 is abutted against the first boat piece 10. And by providing a second connecting portion 210 on the second insulating sleeve 200 and abutting the second insulating sleeve 200 against the second boat piece 20. Under the blocking action of the first insulating sleeve 100 and the second insulating sleeve 200, it is avoided that the first boat piece 10 and the second boat piece 20 are electrically connected to form an electric field. The second connecting portion 210 is connected to and relatively movable with the first connecting portion 110 to realize the adjustment of the distance between the first boat piece 10 and the second boat piece 20 to meet the flexible production requirements. The limiting member 300 is provided to connect the first insulating sleeve 100 and the second insulating sleeve 200 to limit the relative movement of the first connecting portion 110 and the second connecting portion 210, and lock the first insulating sleeve 100 and the second insulating sleeve 200 to prevent the distance between the first boat piece 10 and the second boat piece 20 from changing after adjustment.

[0075] Further, in this embodiment, it further includes a plurality of first boat pieces 10, a plurality of second boat pieces 20 and an insulating fastening assembly 30. The first boat pieces 10 and the second boat pieces 20 are arranged at intervals in sequence, and a limiting component is arranged between adjacent first boat pieces 10 and second boat pieces 20. The insulating fastening assembly 30 is sequentially inserted on the first boat pieces 10, the limiting component and the second boat pieces 20 to connect each first boat piece 10, each limiting component and each second boat piece 20.

[0076] Among them, the insulating fastening assembly 30 can be a bolt and nut assembly made of ceramic. For the specific models of the bolts and nuts, they can be determined according to actual needs and are not specifically limited in this embodiment.

[0077] Specifically, as Figure 3 shown, the first boat pieces 10 and the second boat pieces 20 are arranged at intervals and substantially parallel to each other. One side between the first boat pieces 10 and the second boat pieces 20 is spaced at a fixed distance by the limiting component. The insulating fastening assembly 30 is sequentially inserted on the first boat pieces 10, the limiting component and the second boat pieces 20, thereby locking one side of the first boat pieces 10 and the second boat pieces 20.

[0078] The other sides of adjacent first boat plates 10 are spaced by a first conductive spacer 40, and are locked by a first conductive fastening assembly 50 inserted through the first boat plate 10 and the first conductive spacer 40 in sequence. The other sides of adjacent second boat plates 20 are spaced by a second conductive spacer 60, and are locked by a second conductive fastening assembly 70 inserted through the second boat plate 20 and the second conductive spacer 60 in sequence. The first conductive fastening assembly 50 and the second conductive fastening assembly 70 are respectively used to connect the positive and negative electrodes of a power source.

[0079] Exemplarily, the insulating fastening assembly 30 may be an insulating bolt and nut assembly, and the number thereof is two. The first conductive fastening assembly 50 and the second conductive fastening assembly 70 may be conductive bolt and nut assemblies, and the number of each of them is one. One first conductive fastening assembly 50, one second conductive fastening assembly 70 and two insulating fastening assemblies 30 are respectively locked around the first boat plate 10 or the second boat plate 20. In this way, the fastening force distribution on each boat plate is more balanced.

[0080] Wherein, the first conductive spacer 40 and the second conductive spacer 60 may be rectangular conductive blocks, such as graphite blocks, etc., and mounting through holes are left inside them for the first conductive fastening assembly 50 and the second conductive fastening assembly 70 to pass through respectively.

[0081] Specifically, as Figure 3 shown, the first conductive fastening assembly 50 and the second conductive fastening assembly 70 are oppositely arranged on both sides of the graphite boat. The same side of each first boat plate 10 has a first mounting ear, and a first conductive spacer 40 is arranged between the first mounting ears, and the first conductive fastening assembly 50 tightly connects the first mounting ears. Correspondingly, the same side of each second boat plate 20 has a second mounting ear, and a second conductive spacer 60 is arranged between the second mounting ears, and the second conductive fastening assembly 70 tightly connects the second mounting ears.

[0082] It should be noted that since the limiting assembly is adjustable, the influence of the size error of each conductive spacer on the fastening of each boat plate can be reduced.

[0083] Those skilled in the art will readily conceive of other embodiments of the present application after considering the specification and practicing the application disclosed herein. The present application is intended to cover any variations, uses, or adaptations of the present application, which follow the general principles of the present application and include the common general knowledge or conventional technical means in the technical field not disclosed in the present application. The specification and examples are only regarded as exemplary, and the true scope and spirit of the present application are pointed out by the claims.

[0084] It should be understood that the present application is not limited to the exact structures described above and shown in the drawings, and various modifications and changes can be made without departing from its scope. The scope of the present application is only limited by the appended claims.

Claims

1. A limiting component, characterized in that, Comprising: A first insulating sleeve (100) provided with a first connecting portion (110) thereon, and the first insulating sleeve (100) is used for abutting against a first boat blade (10); A second insulating sleeve (200) provided with a second connecting portion (210) thereon, and the second insulating sleeve (200) is used for abutting against a second boat blade (20), and the second connecting portion (210) is connected to and relatively movable with respect to the first connecting portion (110) to adjust the distance between the first boat blade (10) and the second boat blade (20); A limiting member (300) connecting the first insulating sleeve (100) and the second insulating sleeve (200) to limit the relative movement of the first connecting portion (110) and the second connecting portion (210).

2. The limit component according to claim 1, characterized in that At least a part of the first insulating sleeve (100) is inserted into the second insulating sleeve (200), the first connecting portion (110) is located on the outer side wall of the first insulating sleeve (100), and the second connecting portion (210) is located on the inner side wall of the second insulating sleeve (200).

3. The limit component according to claim 2, characterized in that, The first connecting portion (110) is an external thread located on the outer side wall of the first insulating sleeve (100), the second connecting portion (210) is an internal thread located on the inner side wall of the second insulating sleeve (200), and the internal thread is connected to the external thread.

4. The limiting component according to claim 3, characterized in that, The limiting member (300) is inserted into the second insulating sleeve (200) and abuts against the first insulating sleeve (100).

5. The limiting component according to claim 4, characterized in that The second insulating sleeve (200) is provided with a mounting hole (220), and the limiting member (300) is inserted into the second insulating sleeve (200) through the mounting hole (220).

6. The limiting component according to claim 5, characterized in that The limiting member (300) and the mounting hole (220) are connected by screw thread fit.

7. The limiting component according to any one of claims 3 to 6, characterized in that, The inner side wall of the second insulating sleeve (200) includes the internal thread and an annular groove section (230) connected to the internal thread. The annular groove section (230) faces the first insulating sleeve (100) and forms an annular gap with the first insulating sleeve (100).

8. The limiting component according to claim 7, wherein The depth of the annular gap along the moving direction of the first connecting portion (110) or the second connecting portion (210) is 0.2 mm to 1.3 mm.

9. A graphite boat, characterized in that, Including the limiting component according to any one of claims 1 to 8.

10. The graphite boat according to claim 9, wherein, Further comprising a plurality of first boat blades (10), a plurality of second boat blades (20) and an insulating fastening component (30); The first boat blades (10) and the second boat blades (20) are arranged at intervals in sequence, and the limiting component is arranged between adjacent first boat blades (10) and second boat blades (20); The insulating fastening component (30) is sequentially inserted on the first boat blade (10), the limiting component and the second boat blade (20) to connect each of the first boat blades (10), each of the limiting components and each of the second boat blades (20).

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