Winding type PTC heater
By wrapping the thermally conductive pipes outside the PTC heating core and setting a fixed seat, the existing heater volume limitation is solved, and the sufficient heating of nitrogen is achieved, meeting the high temperature requirements of the semiconductor chip process.
Patent Information
- Application Number
- CN202422369373.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-27
- Publication Date
- 2025-07-22
- Estimated Expiration
- 2034-09-27
AI Technical Summary
Due to the volume limitation of the existing PTC heaters of straight-through and U-shaped pipelines, the nitrogen heating time is insufficient, resulting in a low gas temperature after heating, which cannot meet the high-temperature heating requirements in the semiconductor chip manufacturing process.
The winding PTC heater design is adopted. By wrapping heat-conducting pipes outside the PTC heating core, and setting up a pipe fixing seat and cover to increase the contact area, extend the gas heating path, use aluminum materials to improve the thermal conductivity, and monitor the temperature by a thermocouple.
Full heating of nitrogen is achieved in a limited space, meeting the high-temperature heating requirements of nitrogen in the semiconductor chip process and improving heating efficiency.
Smart Images
Figure CN223142156U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to a heater, in particular to a winding type PTC heater for gas heating. Background Art
[0002] In the semiconductor chip manufacturing process, nitrogen gas with a flow rate of 5 - 40 mL / min and a high temperature of 180 - 220 °C is required as a protective gas. The process equipment has high precision, and a pipeline type PTC heater needs to be installed within a volume of 100 * 40 * 30 mm and meet the heating requirements. For existing straight pipeline and U-shaped pipeline PTC heaters, due to volume limitations, the heating path is short, and the nitrogen heating time is insufficient, resulting in a low temperature of the heated gas and unable to meet the requirements. Content of the Utility Model
[0003] The purpose of the utility model is to provide a winding type PTC heater, and the technical problem to be solved is to enable nitrogen gas to be fully heated within a limited space in the semiconductor chip manufacturing process.
[0004] To solve the above problems, the utility model is realized by adopting the following technical solutions: A winding type PTC heater includes a PTC heating core body, and a heat-conducting pipeline is wound around the PTC heating core body. The surface of the pipeline opposite to the PTC heating core body is attached to the heating surface of the PTC heating core body.
[0005] Further, a pipeline fixing seat for wrapping the pipe body of the pipeline on the heating surface is arranged on the heating surface of the PTC heating core body, and the pipeline fixing seat is attached to the heating surface of the PTC heating core body.
[0006] Further, the pipeline fixing seat includes a base, and a first groove adapted to the pipe body of the pipeline on the heating surface of the PTC heating core body is arranged on the base. The whole pipeline is wound on the bases of the two heating surfaces, and the pipe body of the pipeline is placed in the first groove, and the base is closely attached to the heating surface of the PTC heating core body.
[0007] Further, the pipeline fixing seat further includes a lid, and a second groove opposite to the position of the first groove is arranged on the lid. The lid covers the base so that the second groove is in contact with the pipe body of the pipeline at the corresponding position.
[0008] Further, a thermocouple for detecting the temperature of the pipeline fixing seat is arranged in the pipeline fixing seat.
[0009] Further, extension pipes are respectively arranged at both ends of the pipeline.
[0010] Further, a pipe joint is arranged on one of the extension pipes.
[0011] Further, an outer shell that integrally wraps two pipe fixing seats and the PTC heating core is provided outside the pipe fixing seat, and a heat insulation gap is provided between the outer shell and the pipe fixing seats and the exposed pipe body parts of the pipes.
[0012] Further, the pipe is an aluminum pipe, the extension pipe is a stainless steel pipe, and the pipe joint is made of stainless steel material.
[0013] Further, the pipe fixing seat is made of aluminum material.
[0014] Compared with the prior art, the present utility model sets a winding type pipe outside the PTC heating core, lengthens the contact surface between the pipe and the PTC heating core and the heating time of nitrogen passing through the pipe, so that the nitrogen is fully heated through the PTC heating core, meeting the nitrogen heating requirements in a limited space during the semiconductor chip manufacturing process. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figure 1 is a schematic diagram of the external structure of the present utility model.
[0016] Figure 2 is a schematic diagram of the internal structure of the present utility model Figure 1 .
[0017] Figure 3 is a schematic diagram of the pipe winding of the present utility model.
[0018] Figure 4 is a schematic diagram of the internal structure of the present utility model Figure 2 . DETAILED DESCRIPTION OF THE EMBODIMENTS
[0019] The present utility model will be further described in detail below with reference to the drawings and embodiments.
[0020] As Figures 2 to 4 shown, the present utility model discloses a winding type PTC heater, which includes a PTC heating core 3. A heat-conducting pipe 1 is wound outside the PTC heating core 3. The surface of the pipe 1 opposite to the PTC heating core 3 is attached to the heating surface of the PTC heating core 3, so as to conduct the heat emitted by the heating surface to the inside of the pipe body 1, thereby heating the liquid (such as nitrogen) inside the pipe body 1. By adopting a winding type pipe, the liquid inside the pipe 1 can be fully heated in a limited volume, and the path time of the gas passing through the heating body is increased.
[0021] As Figure 2 and Figure 3As shown in the figure, pipe fixing seats 2 are respectively provided on the two heating surfaces of the PTC heating core 3. The pipe fixing seats 2 wrap the pipe bodies of the pipe 1 located on the heating surfaces of the PTC heating core 3. The pipe fixing seat 2 includes a base 21. A first groove 22 adapted to the pipe body of the pipe 1 located on the heating sheet surface of the PTC heating core 3 is provided on the base 21. The pipe 1 is wound around the bases 21 of the two heating surfaces as a whole. The pipe body of the pipe 1 is placed in the first groove 22. The base 21 is in close contact with the heating surface of the PTC heating core 3 and is connected and fixed by means of pasting or welding. In the present utility model, the pipe fixing seat 3 is made of aluminum material to improve the heat conduction effect. The pipe body of the pipe 1 located in the first groove 22 is fixedly pasted or welded to the first groove 22, increasing the contact area with the pipe 1, thereby improving the heating effect.
[0022] Further, as Figure 2 combined Figure 3 shown in the figure, the pipe fixing seat 2 further includes a lid 23. A second groove 24 opposite to the position of the first groove 22 is provided on the lid 23. The lid 23 covers the base 21 so that the second groove 24 is in contact with the pipe body of the pipe 1 at the corresponding position. The second groove 24 is fixedly pasted or welded to the pipe body located therein to form an integral body. Further, heat is conducted from the base 21 to the lid 23 through the base 21, so that one end of the pipe body away from the heating surface of the PTC heating core 3 can also be heated, further improving the heating effect. By providing the pipe fixing seat 2, the pipe body located on the heating surface of the PTC heating core 3 is wrapped, so that heat can be conducted to the pipe body to achieve heating.
[0023] As Figure 3 shown in the figure, a thermocouple 4 for detecting the temperature of the pipe fixing seat 2 is provided in the pipe fixing seat 2 to monitor the temperature.
[0024] In order to achieve connection, extension pipes 5 are respectively provided at both ends of the pipe 1. A pipe joint 6 is provided on one of the extension pipes 4.
[0025] In the present utility model, the pipe 1 is an aluminum pipe, the extension pipe 5 is a stainless steel pipe, the pipe joint 6 is made of stainless steel material, the pipe 1 is welded to the extension pipe 5, and the pipe joint 6 is welded to the extension pipe 5.
[0026] As Figure 1 and Figure 2 shown in the figure, an outer shell 7 that wraps the two pipe fixing seats 2 and the PTC heating core 3 as a whole is provided outside the pipe fixing seat 2. The outer shell 7 is a sheet metal part. An insulating gap is provided between the outer shell 7 and the exposed pipe body parts of the pipe fixing seat 2 and the pipe 1 to play an insulating role. The extension pipe 5 passes through the outer shell 7 for connection.
[0027] The utility model designs the existing straight-through or U-shaped pipe type PTC heater as a pipe winding the PTC heating core, which increases the path time of gas passing through the heating body (PTC heating core). In the semiconductor chip manufacturing process, it is tested that after nitrogen is heated at a flow rate of 5-40 mL / min, the temperature requirement is met.
Claims
1. A wound PTC heater, comprising a PTC heating core (3), characterized in that: A heat-conducting pipe (1) is wound around the PTC heating core (3), and the surface of the pipe (1) opposite to the PTC heating core (3) is in contact with the heating surface of the PTC heating core (3).
2. The wound PTC heater according to claim 1, characterized in that: A pipe fixing seat (2) that wraps the pipe body of the pipe (1) on the heating surface is provided on the heating surface of the PTC heating core (3), and the pipe fixing seat (2) is in contact with the heating surface of the PTC heating core (3).
3. The wound PTC heater according to claim 2, characterized in that: The pipe fixing seat (2) includes a base (21). A first groove (22) adapted to the pipe body of the pipe (1) on the heating fin surface of the PTC heating core (3) is provided on the base (21). The pipe (1) is wound around the bases (21) of the two heating surfaces as a whole, and the pipe body of the pipe (1) is placed in the first groove (22), and the base (21) is in close contact with the heating surface of the PTC heating core (3).
4. The wound PTC heater according to claim 3, characterized in that: The pipe fixing seat (2) further includes a lid (23). A second groove (24) opposite to the position of the first groove (22) is provided on the lid (23). The lid (23) covers the base (21) so that the second groove (24) is in contact with the pipe body of the pipe (1) at the corresponding position.
5. The wound PTC heater according to any one of claims 2-4, characterized in that: A thermocouple (4) for detecting the temperature of the pipe fixing seat (2) is provided in the pipe fixing seat (2).
6. The wound PTC heater according to claim 5, wherein: Extension pipes (5) are respectively provided at both ends of the pipe (1).
7. The wound PTC heater according to claim 6, wherein: A pipe joint (6) is provided on one of the extension pipes (5).
8. The wound PTC heater according to claim 7, wherein: An outer shell (7) that wraps the two pipe fixing seats (2) and the PTC heating core (3) as a whole is provided outside the pipe fixing seat (2). An insulation gap is provided between the outer shell (7) and the exposed pipe body parts of the pipe fixing seat (2) and the pipe (1).
9. The wound PTC heater according to claim 7, wherein: The pipe (1) is an aluminum pipe, the extension pipe (5) is a stainless steel pipe, and the pipe joint (6) is made of stainless steel material.
10. The wound PTC heater according to claim 5, wherein: The pipe fixing seat (2) is made of aluminum material.